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Open AccessArticle

Stability Study of an Electrothermally-Actuated MEMS Mirror with Al/SiO2 Bimorphs

1
School of Optoelectronic Engineering, Xi’an Technological University, Xi’an 710021, China
2
Wuxi WiO Technologies Co., Ltd., Wuxi 214000, China
3
Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA
*
Author to whom correspondence should be addressed.
Micromachines 2019, 10(10), 693; https://doi.org/10.3390/mi10100693
Received: 4 September 2019 / Revised: 7 October 2019 / Accepted: 8 October 2019 / Published: 12 October 2019
(This article belongs to the Special Issue Optical MEMS, Volume II)
Electrothermal actuation is one of the main actuation mechanisms and has been employed to make scanning microelectromechanical systems (MEMS) mirrors with large scan range, high fill factor, and low driving voltage, but there exist long-term drifting issues in electrothermal bimorph actuators whose causes are not well understood. In this paper, the stability of an Al / SiO 2 bimorph electrothermal MEMS mirror operated in both static and dynamic scan mode has been studied. Particularly, the angular drifts of the MEMS mirror plate were measured over 90 h at different temperatures in the range of 50 150 °C. The experiments show that the temporal drift of the mirror plate orientation largely depends on the temperature of the electrothermal bimorph actuators. Interestingly, it is found that the angular drift changes from falling to rising as the temperature increases. An optimal operating temperature between 75 °C to 100 °C for the MEMS mirror is identified. At this temperature, the MEMS mirror exhibited stable scanning with an angular drift of less than 0.0001 °/h. View Full-Text
Keywords: electrothermal actuation; electrothermal MEMS mirror; electrothermal bimorph; stability; temporal drift electrothermal actuation; electrothermal MEMS mirror; electrothermal bimorph; stability; temporal drift
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MDPI and ACS Style

Wang, P.; Liu, Y.; Wang, D.; Liu, H.; Liu, W.; Xie, H. Stability Study of an Electrothermally-Actuated MEMS Mirror with Al/SiO2 Bimorphs. Micromachines 2019, 10, 693.

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