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Open AccessArticle

Analysis of the Performance Variation Mechanism of MEMS Suspended Inductors under Mechanical Shock

School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China
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Micromachines 2019, 10(10), 686; https://doi.org/10.3390/mi10100686
Received: 14 August 2019 / Revised: 3 October 2019 / Accepted: 7 October 2019 / Published: 11 October 2019
Micro-electromechanical system (MEMS) suspended inductors have been widely studied in recent decades because of their excellent radio frequency performance. However, the deformation of the inductor coil and the performance variation usually occur to the MEMS suspended inductors when the inductors are under mechanical shock. Few studies have been carried out on the performance variation of MEMS suspended inductors under shock. In this study, the mechanism of the performance variation of MEMS suspended inductors under mechanical shock is analyzed by combining theoretical analysis and experiments. A theoretical analysis based on the lumped-element equivalent model is presented and shock tests are carried out. The shock tests show that the main reason of the MEMS suspended inductor performance variation after mechanical shock is the variation of the substrate parasitic effect, which is caused by the variation of the suspension height of the inductor after shock. The test results agree with the theoretical analysis.
Keywords: MEMS suspended inductor; mechanical shock; MEMS reliability MEMS suspended inductor; mechanical shock; MEMS reliability
MDPI and ACS Style

Li, Y.; Xu, L.; Li, J. Analysis of the Performance Variation Mechanism of MEMS Suspended Inductors under Mechanical Shock. Micromachines 2019, 10, 686.

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