Semiconducting materials require stringent design specifications that make their fabrication more difficult and prone to flaws that are costly and damaging to their computing and electrical properties. Area-selective atomic layer deposition is a proc...
Within the materials deposition techniques, Spatial Atomic Layer Deposition (SALD) is gaining momentum since it is a high throughput and low-cost alternative to conventional atomic layer deposition (ALD). SALD relies on a physical separation (rather...
Area-selective atomic layer deposition (ASALD) as a bottom-up nanopatterning technique has gained recognition for its ability to address misalignment issues in semiconductor manufacturing. This in silico study investigates process operation condition...
Manganese oxide (MnOx) shows great potential in the areas of nano-electronics, magnetic devices and so on. Since the characteristics of precise thickness control at the atomic level and self-align lateral patterning, area-selective deposition (ASD) o...
Delayed atomic layer deposition (ALD) of ZnO, i.e., area selective (AS)-ALD, was successfully achieved on silicon wafers (Si\SiO2) terminated with tris(dimethylamino)methylsilane (TDMAMS). This resist molecule was deposited in a home-built, near-atmo...
In recent years, atomic layer deposition (ALD) is widely used for surface modification of materials to improve the catalytic performance for removing pollutants, e.g., CO, hydrocarbons, heavy metal ions, and organic pollutants, and much progress has...
Supported nanoparticles are commonly applied in heterogeneous catalysis. The catalytic performance of these solid catalysts is, for a given support, dependent on the nanoparticle size, shape, and composition, thus necessitating synthesis techniques t...
Patterning of thin films with lithography techniques for making semiconductor devices has been facing increasing difficulties with feature sizes shrinking to the sub-10 nm range, and alternatives have been actively sought from area-selective thin fil...
Area selective deposition (ASD) is a promising IC fabrication technique to address misalignment issues arising in a top–down litho-etch patterning approach. ASD can enable resist tone inversion and bottom–up metallization, such as via pre...
Poly (methyl methacrylate) (PMMA) is a thermoplastic synthetic polymer, which displays superior characteristics such as transparency, good tensile strength, and processability. Its performance can be improved by surface engineering via the use of fun...
Modern-day chip manufacturing requires precision in placing chip materials on complex and patterned structures. Area-selective atomic layer deposition (AS-ALD) is a self-aligned manufacturing technique with high precision and control, which offers co...
Area-selective atomic layer deposition (AS-ALD) is a technique utilized for the fabrication of patterned thin films in the semiconductor industry due to its capability to produce uniform and conformal structures with control over thickness at the ato...
We applied time-domain Brillouin scattering (TDBS) for the characterization of porogen-based organosilicate glass (OGS) films deposited by spin-on-glass technology and cured under different conditions. Although the chemical composition and porosity m...
The atomic layer deposition (ALD) synthesis process is being heavily researched for its conformality, high aspect ratio with thickness control, selective area deposition versatility, and variety of low-temperature oxide, nitride, and transition metal...
Nanocomposites composed of Cu and Mo were investigated by means of molecular dynamics (MD) simulations to study the incoherent interface between Cu and Mo. In order to select an appropriate potential capable of accurately describing the Cu-Mo system,...
Titanium dioxide thin films are durable, chemically stable, have a high refractive index and good electro/photochemical proprieties. Consequently, they are widely used as anti-reflective layers in optical devices and large area glazing products, die...
Bi2O3 nanocone films functionalized with an overlayer of TiO2 were deposited by d.c. reactive magnetron sputtering. The aforementioned nanocone structures were formed via a vapour-liquid-solid (VLS) growth, starting from a catalytic bismuth seed laye...
Cyclic olefin copolymer (COC) is a novel type of thermoplastic polymer gaining the attention of the scientific community in electronic, optoelectronic, biomedicine and packaging applications. Despite the benefits in the use of COC such as undoubted o...
Copper oxide thin films have been successfully synthesized through a metal–organic chemical vapor deposition (MOCVD) approach starting from the copper bis(2,2,6,6-tetramethyl-3,5-heptanedionate), Cu(tmhd)2, complex. Operative conditions of fabr...
Transparent conductive oxide (TCO) layers, to be implemented in photo-anodes for dye-sensitized solar cells (DSCs), were prepared by co-deposition of ZnO and Al using pulsed-direct current (DC)-magnetron reactive sputtering processes. The films were...
This paper presents the results of an investigation of direct laser writing on a titanium film with an antireflection capping silicon coating. Bi-layer films were deposited on fused silica substrates using an e-beam evaporation system. Modeling predi...
This study developed a transparent NO2 gas sensor with enhanced sensing performance and high optical transmittance. Al-doped ZnO thin films were deposited by atomic layer deposition, which was chosen for its capability to precisely control surface ch...
Based on the 2019 report of the European Environment Agency on Air Quality in Europe nitrogen oxides (NOx) were identified as the most harmful air pollutants in terms of damage to ecosystems. Moreover, in Europe, NO2 is pinpointed as one of the most...
This article presents, for the first time, a comparative analysis of the emission characteristics of large-area field-effect cathodes (LAFE) based on carbon nanotubes (CNTs) of various morphologies according to key parameters using a unique computeri...
Double-shell ZnO/Al2O3 submicron hollow fibers were successfully fabricated through a combined electrospinning and atomic layer deposition (ALD) approach. Polyvinyl alcohol (PVA) fibers were first produced by electrospinning and subsequently coated w...
Wrinkles are observed commonly in CVD (chemical vapor deposition)-grown graphene on Cu and hydrogen etching is of significant interest to understand the growth details, as well as a practical tool for fabricating functional graphene nanostructures. H...
The article presents the chemical composition of vermiculite ores from the Kulantau deposits and the atomic structure of vermiculite during dehydration, in 1-, 2- and 3-layer hydrated states. It has been shown that vermiculites from deposits in the T...
Molybdenum disulfide (MoS2) was grown on a laser-processed periodic-hole sapphire substrate through chemical vapor deposition. The main purpose was to investigate the mechanism of MoS2 growth in substrate with a periodic structure. By controlling the...
Photocatalysis is proven to be the most efficient and environmentally friendly method for the degradation of organic pollutants in water purification. To meet the requirement of large-scale water treatment, there are two important points: One is the...
Lithium nickelate (LiNiO2) and materials based on it are attractive positive electrode materials for lithium-ion batteries, owing to their large capacity. In this paper, the results of atomic layer deposition (ALD) of lithium–nickel–silic...
Bilayer graphene is a contender of interest for functional electronic applications because of its variable band gap due to interlayer interactions. Graphene growth on Cu is self-limiting, thus despite the fact that chemical vapor deposition (CVD) has...
Two-dimensional transition metal dichalcogenides have attracted considerable attention in electrocatalytic hydrogen evolution due to their unique layered structures and tunable electronic properties. However, prior research has predominantly focused...
Selective area epitaxy (SAE) is widely used in photonic integrated circuits, but there is little information on the use of this technique for the growth of heterostructures in ultra-wide windows. Samples of heterostructures with InGaAs quantum wells...
Ion-flow-stimulated roughening transition is a phenomenon that may prove useful in the hierarchical structuring of nanostructures. In this work, we have investigated theoretically and experimentally the surface texturing of single-crystal and multi-c...
The rapid detection of hazardous bacteria is important for healthcare situations, where such identification can lead to substantial gains for patient treatment and recovery and a reduced usage of broad-spectrum antibiotics. Potential biosensors must...
Supercapacitors (SCs) have attracted attention as an important energy source for various applications owing to their high power outputs and outstanding energy densities. The electrochemical performance of an SC device is predominantly determined by e...
The mode of operation of titania-supported vanadia (VOx) catalysts for NOx abatement using ammonia selective catalytic reduction (NH3-SCR) is still vigorously debated. We introduce a new high surface area VOx/TiO2/SBA-15 model catalyst system based o...
The electrocatalytic reduction of CO2 into useful fuels, exploiting rationally designed, inexpensive, active, and selective catalysts, produced through easy, quick, and scalable routes, represents a promising approach to face today’s climate challeng...
High-entropy amorphous alloys designed based on the concept of multi-principal components have the comprehensive advantages of high passivation element content and amorphous structure, and are considered as one of the promising alternative protective...