Micromachines, Volume 7, Issue 12 (December 2016) – 25 articles
Cover Story (view full-size image): We present an affordable and innovative method for fabricating SAW-based microfluidic devices. Interdigitated Transducers (IDT) are self-aligned and fabricated without the need for clean room facilities. The IDTs and microfluidic channels are fabricated using the same lithographic process and thus are precisely aligned in accordance with the device design. Using this approach, we fabricated different types of SAW-based microfluidic devices and demonstrated the expediency of the concept for both particle separation and active droplet generation. View this paper.
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