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Micromachines, Volume 7, Issue 12

2016 December - 25 articles

Cover Story: We present an affordable and innovative method for fabricating SAW-based microfluidic devices. Interdigitated Transducers (IDT) are self-aligned and fabricated without the need for clean room facilities. The IDTs and microfluidic channels are fabricated using the same lithographic process and thus are precisely aligned in accordance with the device design. Using this approach, we fabricated different types of SAW-based microfluidic devices and demonstrated the expediency of the concept for both particle separation and active droplet generation. View this paper.
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Articles (25)

  • Article
  • Open Access
11 Citations
6,159 Views
14 Pages

21 December 2016

One of the biggest challenges for tissue engineering is to efficiently provide oxygen and nutrients to cells on a three-dimensional (3D) engineered scaffold structure. Thus, achieving sufficient vascularization of the structure is a critical problem...

  • Article
  • Open Access
2 Citations
4,568 Views
10 Pages

20 December 2016

Squeeze-film damping and acceleration load are two major issues in the design of inertial micro-switches. In order to deeply and systematically study these two issues, this paper proposes a typical vertically-driven inertial micro-switch, wherein the...

  • Article
  • Open Access
19 Citations
6,756 Views
17 Pages

18 December 2016

Hydrocortisone (HC) nanocrystals intended for parenteral administration of HC were produced by anti-solvent crystallisation within coaxial assemblies of pulled borosilicate glass capillaries using either co-current flow of aqueous and organic phases...

  • Review
  • Open Access
23 Citations
7,722 Views
22 Pages

Microfabricated Physiological Models for In Vitro Drug Screening Applications

  • Giovanni Stefano Ugolini,
  • Daniela Cruz-Moreira,
  • Roberta Visone,
  • Alberto Redaelli and
  • Marco Rasponi

15 December 2016

Microfluidics and microfabrication have recently been established as promising tools for developing a new generation of in vitro cell culture microdevices. The reduced amounts of reagents employed within cell culture microdevices make them particular...

  • Feature Paper
  • Article
  • Open Access
17 Citations
8,880 Views
10 Pages

Investigation of Surface Pre-Treatment Methods for Wafer-Level Cu-Cu Thermo-Compression Bonding

  • Koki Tanaka,
  • Wei-Shan Wang,
  • Mario Baum,
  • Joerg Froemel,
  • Hideki Hirano,
  • Shuji Tanaka,
  • Maik Wiemer and
  • Thomas Otto

15 December 2016

To increase the yield of the wafer-level Cu-Cu thermo-compression bonding method, certain surface pre-treatment methods for Cu are studied which can be exposed to the atmosphere before bonding. To inhibit re-oxidation under atmospheric conditions, th...

  • Article
  • Open Access
13 Citations
6,561 Views
13 Pages

Electrokinetic Phenomena in Pencil Lead-Based Microfluidics

  • Yashar Bashirzadeh,
  • Venkat Maruthamuthu and
  • Shizhi Qian

15 December 2016

Fabrication of microchannels and associated electrodes to generate electrokinetic phenomena often involves costly materials and considerable effort. In this study, we used graphite pencil-leads as low cost, disposable 3D electrodes to investigate var...

  • Article
  • Open Access
8 Citations
5,590 Views
9 Pages

14 December 2016

A novel multi-source energy harvester based on solar and radioisotope energy sources is designed and simulated in this work. We established the calculation formulas for the short-circuit current and open-circuit voltage, and then studied and analyzed...

  • Article
  • Open Access
25 Citations
15,941 Views
14 Pages

14 December 2016

This paper reports a versatile and irreversible bonding method for poly(dimethylsiloxane) (PDMS) and SU-8. The method is based on epoxide opening and dehydration reactions between surface-modified PDMS and SU-8. A PDMS replica is first activated via...

  • Article
  • Open Access
26 Citations
6,602 Views
11 Pages

14 December 2016

Bubble-propelled catalytic micromotors have recently been attracting much attention. A bubble-propulsion mechanism has the advantage of producing a stronger force and higher speed than other mechanisms for catalytic micromotors, but the nature of the...

  • Article
  • Open Access
10 Citations
10,888 Views
10 Pages

Fabrication of SiNx Thin Film of Micro Dielectric Barrier Discharge Reactor for Maskless Nanoscale Etching

  • Qiang Li,
  • Jie Liu,
  • Yichuan Dai,
  • Wushu Xiang,
  • Man Zhang,
  • Hai Wang and
  • Li Wen

14 December 2016

The prevention of glow-to-arc transition exhibited by micro dielectric barrier discharge (MDBD), as well as its long lifetime, has generated much excitement across a variety of applications. Silicon nitride (SiNx) is often used as a dielectric barrie...

  • Article
  • Open Access
13 Citations
7,004 Views
9 Pages

The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid

  • Da Chen,
  • Wenwen Ren,
  • Shuren Song,
  • Jingjing Wang,
  • Weihui Liu and
  • Peng Wang

14 December 2016

A high Q factor film bulk acoustic resonator operating in thickness shear mode excited by a lateral field is described in this paper. The influence of electrode parameters on the resonator performance is studied by the finite element method. The resu...

  • Article
  • Open Access
9 Citations
5,693 Views
9 Pages

12 December 2016

In this paper, we report the numerical calculations for a thermo-optical model and the temperature sensitivity of a fiber Bragg grating (FBG) sensor. The thermally-induced behaviors of a FBG sensor in the gas nitriding process were analyzed for tempe...

  • Article
  • Open Access
10 Citations
5,755 Views
10 Pages

11 December 2016

This paper presents a fabrication method of capacitive micromachined ultrasonic transducers (CMUTs) by wafer direct bonding, which utilizes both the wet chemical and O2plasma activation processes to decrease the bonding temperature to 400 °C. Two key...

  • Review
  • Open Access
316 Citations
20,729 Views
11 Pages

10 December 2016

Using polymer materials to fabricate microfluidic devices provides simple, cost effective, and disposal advantages for both lab-on-a-chip (LOC) devices and micro total analysis systems (μTAS). Polydimethylsiloxane (PDMS) elastomer and thermoplastics...

  • Feature Paper
  • Article
  • Open Access
2 Citations
6,667 Views
7 Pages

Free-Standing GaMnAs Nanomachined Sheets for van der Pauw Magnetotransport Measurements

  • Jae-Hyun Lee,
  • Seondo Park,
  • Chanuk Yang,
  • Hyung Kook Choi,
  • Myung Rae Cho,
  • Sung Un Cho and
  • Yun Daniel Park

9 December 2016

We report on the realization of free-standing GaMnAs epilayer sheets using nanomachining techniques. By optimizing the growth conditions of the sacrificial Al0.75Ga0.25As layer, free-standing metallic GaMnAs (with ~6% Mn) microsheets (with TC ~85 K)...

  • Article
  • Open Access
22 Citations
7,186 Views
13 Pages

9 December 2016

We used inclined lithography to fabricate a pneumatic microvalve for tall microchannels such as those used to convey large cells. The pneumatic microvalve consists of three layers. The upper layer is the actual liquid microchannel, which has a parall...

  • Communication
  • Open Access
3 Citations
8,122 Views
9 Pages

Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching

  • Sasha Hoshian,
  • Cristina Gaspar,
  • Teemu Vasara,
  • Farzin Jahangiri,
  • Ville Jokinen and
  • Sami Franssila

8 December 2016

We introduce a non-lithographical and vacuum-free method to pattern silicon. The method combines inkjet printing and metal assisted chemical etching (MaCE); we call this method “INKMAC”. A commercial silver ink is printed on top of a silicon surface...

  • Article
  • Open Access
21 Citations
7,951 Views
14 Pages

Temporal Transition of Mechanical Characteristics of HUVEC/MSC Spheroids Using a Microfluidic Chip with Force Sensor Probes

  • Keitaro Ito,
  • Shinya Sakuma,
  • Masaki Kimura,
  • Takanori Takebe,
  • Makoto Kaneko and
  • Fumihito Arai

5 December 2016

In this paper, we focus on the mechanical characterization of co-cultured spheroids of human umbilical vein endothelial cells (HUVECs) and mesenchymal stem cells (MSC) (HUVEC/MSC spheroids). HUVEC/MSC spheroids aggregate during culture, thereby decre...

  • Article
  • Open Access
3 Citations
5,701 Views
8 Pages

5 December 2016

To improve the jetting performance of liquid metals, an electromagnetic micro-jetting (EMJ) valve that realizes drop-on-demand (DOD) jetting while not involving any valve core or moving parts was designed. The influence of the lead angle of the nozzl...

  • Article
  • Open Access
27 Citations
8,969 Views
12 Pages

The Effect of Moment of Inertia on the Liquids in Centrifugal Microfluidics

  • Esmail Pishbin,
  • Manouchehr Eghbal,
  • Sepideh Fakhari,
  • Amin Kazemzadeh and
  • Mehdi Navidbakhsh

2 December 2016

The flow of liquids in centrifugal microfluidics is unidirectional and dominated by centrifugal and Coriolis forces (i.e., effective only at T-junctions). Developing mechanisms and discovering efficient techniques to propel liquids in any direction o...

  • Article
  • Open Access
57 Citations
6,695 Views
8 Pages

An Enhanced Electroosmotic Micromixer with an Efficient Asymmetric Lateral Structure

  • Teng Zhou,
  • Hanlin Wang,
  • Liuyong Shi,
  • Zhenyu Liu and
  • Sang Woo Joo

1 December 2016

Homogeneous and rapid mixing in microfluidic devices is difficult to accomplish, owing to the low Reynolds number associated with most flows in microfluidic channels. Here, an efficient electroosmotic micromixer based on a carefully designed lateral...

  • Article
  • Open Access
38 Citations
9,092 Views
9 Pages

A Resonant Piezoelectric Diaphragm Pump Transferring Gas with Compact Structure

  • Jiantao Wang,
  • Yong Liu,
  • Yanhu Shen,
  • Song Chen and
  • Zhigang Yang

1 December 2016

In order to improve the output capacity of a piezoelectric pump when transferring gas, this paper presents a compact resonant piezoelectric diaphragm pump (hereinafter referred to as the piezoelectric diaphragm pump), which is driven by a rectangular...

  • Feature Paper
  • Review
  • Open Access
193 Citations
28,995 Views
24 Pages

30 November 2016

This article presents an overview on typical properties, technologies, and applications of liquid metal based flexible printed electronics. The core manufacturing material—room-temperature liquid metal, currently mainly represented by gallium and its...

  • Article
  • Open Access
16 Citations
6,285 Views
17 Pages

Numerical Model of Streaming DEP for Stem Cell Sorting

  • Rucha Natu and
  • Rodrigo Martinez-Duarte

30 November 2016

Neural stem cells are of special interest due to their potential in neurogenesis to treat spinal cord injuries and other nervous disorders. Flow cytometry, a common technique used for cell sorting, is limited due to the lack of antigens and labels th...

  • Feature Paper
  • Communication
  • Open Access
35 Citations
9,143 Views
8 Pages

Self-Aligned Interdigitated Transducers for Acoustofluidics

  • Zhichao Ma,
  • Adrian J. T. Teo,
  • Say Hwa Tan,
  • Ye Ai and
  • Nam-Trung Nguyen

25 November 2016

The surface acoustic wave (SAW) is effective for the manipulation of fluids and particles at microscale. The current approach of integrating interdigitated transducers (IDTs) for SAW generation into microfluidic channels involves complex and laboriou...

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Micromachines - ISSN 2072-666X