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Micromachines 2016, 7(12), 216; doi:10.3390/mi7120216

Self-Aligned Interdigitated Transducers for Acoustofluidics

1
Pillar of Engineering Product Development, Singapore University of Technology and Design, Singapore 487372, Singapore
2
Queensland Micro and Nanotechnology Centre, Griffith University, Brisbane, QLD 4111, Australia
These authors contributed equally to this work.
*
Authors to whom correspondence should be addressed.
Academic Editor: Marc Desmulliez
Received: 6 November 2016 / Revised: 22 November 2016 / Accepted: 23 November 2016 / Published: 25 November 2016
(This article belongs to the Special Issue Surface Acoustic Wave Microfluidics)
View Full-Text   |   Download PDF [1804 KB, uploaded 25 November 2016]   |  

Abstract

The surface acoustic wave (SAW) is effective for the manipulation of fluids and particles at microscale. The current approach of integrating interdigitated transducers (IDTs) for SAW generation into microfluidic channels involves complex and laborious microfabrication steps. These steps often require full access to clean room facilities and hours to align the transducers to the precise location. This work presents an affordable and innovative method for fabricating SAW-based microfluidic devices without the need for clean room facilities and alignment. The IDTs and microfluidic channels are fabricated using the same process and thus are precisely self-aligned in accordance with the device design. With the use of the developed fabrication approach, a few types of different SAW-based microfluidic devices have been fabricated and demonstrated for particle separation and active droplet generation. View Full-Text
Keywords: surface acoustic wave; acoustofluidics; microfluidics; interdigitated transducers surface acoustic wave; acoustofluidics; microfluidics; interdigitated transducers
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Ma, Z.; Teo, A.J.T.; Tan, S.H.; Ai, Y.; Nguyen, N.-T. Self-Aligned Interdigitated Transducers for Acoustofluidics. Micromachines 2016, 7, 216.

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