This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrate...
This paper is an overview of current gyroscopes and their roles based on their applications. The considered gyroscopes include mechanical gyroscopes and optical gyroscopes at macro- and micro-scale. Particularly, gyroscope technologies commercially a...
Inertial measurement units (IMUs) are typically classified as per the performance of the gyroscopes within each system. Consequently, it is critical for a system to have a low bias instability to have better performance. Nonetheless, there is no IMU...
This paper reports a novel four degree-of-freedom (DOF) MEMS vibratory gyroscope. A MEMS gyroscope array is then presented using the novel gyroscope unit. In the design of the proposed 4-DOF MEMS vibratory gyroscope, the elements of the drive-mode ar...
In this paper, an integrated MEMS gyroscope array method composed of two levels of optimal filtering was designed to improve the accuracy of gyroscopes. In the firstlevel filtering, several identical gyroscopes were combined through Kalman filtering...
This paper reports a dual-butterfly structure gyroscope based on the traditional butterfly structure. This novel structure is composed of two butterfly structures, each of which contains a main vibrational beam, four proof masses, and a coupling mech...
In view of the large output noise and low precision of the Micro-electro-mechanical Systems (MEMS) gyroscope, the virtual gyroscope technology was used to fuse the data of the MEMS gyroscope to improve its output precision. Random error model in the...
In this paper we present recent work on the design, fabrication by silicon micromachining, and packaging of a new gyroscope for stabilizing the autopilot of rotating aircraft. It operates based on oscillation of the silicon pendulum between two torsi...
The hemispherical resonator gyroscope is a gyroscope based on the principle of Coriolis vibration, widely used in inertial measurement systems of spacecraft. This article decomposes the gyroscope into two parts: the resonator shell and the gyroscope...
In this study, a graphene beam was selected as a sensing element and used to form a graphene resonant gyroscope structure with direct frequency output and ultrahigh sensitivity. The structure of the graphene resonator gyroscope was simulated using th...
Micro electro mechanical system (MEMS) gyroscopes and magnetometers are usually integrated into a sensor module or chip and widely used in a variety of applications. In existing integrated gyroscope and magnetometer calibration methods, rotation in a...
Spin rate of a high-speed spinning-rotor gyroscope will make a significant impact on angular rate sensor performances such as the scale factor, resolution, measurement range, and bias stability. This paper presents the spin rate effects on performanc...
This paper presents a new type of three-axis gyroscope. The gyroscope comprises two independent parts, which are nested to further reduce the structure volume. The capacitive drive was adopted. The motion equation, capacitance design, and spring desi...
This paper presents the development of an analytical model of an internal vibrating ring gyroscope in a Microelectromechanical System (MEMS). The internal ring structure consists of eight semicircular beams that are attached to the externally placed...
As a MEMS gyroscope is susceptible to environmental interference, its performance is degraded due to random noise. Accurate and rapid analysis of random noise of MEMS gyroscope is of great significance to improve the gyroscope’s performance. A...
A micromachined gyroscope in which a high-speed spinning rotor is suspended electrostatically in a vacuum cavity usually functions as a dual-axis angular rate sensor. An inherent coupling error between the two sensing axes exists owing to the angular...
In this paper, a tuning fork gyroscope with a polygon-shaped vibration beam is proposed. The vibration structure of the gyroscope consists of a polygon-shaped vibration beam, two supporting beams, and four vibration masts. The spindle azimuth of the...
In this paper, a detailed analysis of the influence of phase noise on the micro-electro-mechanical system (MEMS) disk resonator gyroscope (DRG) is presented. Firstly, a new time-varying phase noise model for the gyroscope is established, which explai...
In this paper, the characterization of a whispering gallery mode (WGM) resonator applied in a novel micro-opto-electro-mechanical system (MOEMS) gyroscope was investigated. The WGM optical transmission coupling model was analyzed and compared by adju...
The silicon micromechanical gyroscope, which will be introduced in this paper, represents a novel MEMS gyroscope concept. It is used for the damping of a single-channel control system of rotating aircraft. It differs from common MEMS gyroscopes in t...
This article presents a comparison between a classical PID controller and a fractional-order PID (FOPID) controller for a gyroscope with Cardan suspension (3 DOF). A gyroscope dynamics model accounting for gyroscopic couplings and viscous damping is...
In this work, a novel mechanical amplification structure for a MEMS vibratory gyroscope is proposed with the aim of improving their sensitivity. The scheme is implemented using a system of micromachined V-shaped springs as a deflection amplifying mec...
As an important inertial sensor, the gyroscope is mainly used to measure angular velocity in inertial space. However, due to the influence of semiconductor thermal noise and electromagnetic interference, the output of the gyroscope has a certain rand...
This paper presents the design and optimization of a novel MEMS tuning fork gyroscope microstructure. In order to improve the mechanical sensitivity of the gyroscope, much research has been carried out in areas such as mode matching, improving the qu...
MEMS gyroscopes are one of the core components of inertial navigation systems. The maintenance of high reliability is critical for ensuring the stable operation of the gyroscope. Considering the production cost of gyroscopes and the inconvenience of...
In this work, the mechanical design and the experimental validation of a micro-electromechanical frequency-modulated (FM) pitch gyroscope are presented. The proposed device is fabricated through the ThELMA © surface micromachining process of STMicroe...
High-precision disk resonator gyroscope has a high quality factor in order to improve the performance of the gyroscope, as the high quality factor can lead to a long starting time. In this paper, a control system of the driving loop of the disk MEMS...
The motion of a rigid body (a gyroscope) is one of the key issues in classical mechanics. It remains a significant challenge, as evidenced by its extensive practical implementations in various scientific disciplines and engineering operations. It is...
The Micro-Electro-Mechanical System (MEMS) gyroscope has been widely used in various fields, but the output of the MEMS gyroscope has strong nonlinearity, especially in the range of tiny angular velocity. This paper proposes an adaptive Fourier serie...
This paper presents the design and simulation of a single-chip integrated MEMS accelerometer gyroscope by integrating a Coriolis vibratory ring gyroscope and a differential resonant accelerometer into one single-chip structure, measuring both the acc...
Recently, consumer applications have dramatically created the demand for low-cost and compact gyroscopes. Therefore, on the basis of microelectromechanical systems (MEMS) technology, many gyroscopes have been developed and successfully commercialized...
Thermo-vacuum stability of the aerospace gyroscopes is one of the crucial issues in the harsh and remote environment of space. This paper reports a bias drift compensation algorithm for the MEMS (microelectromechanical systems) gyroscope with atmosph...
Reducing the dimensions of optical gyroscopes is a crucial task and resonant fiber optic gyroscopes are promising candidates for its solution. The paper presents a prototype of a miniature resonant interferometric gyroscope of a strategic accuracy cl...
Microelectromechanical system (MEMS) inertial sensors are integral components in a variety of smart electronic devices, most notably MEMS vibrating gyroscopes, which are rotational inertial sensors. The applications of MEMS vibrating gyroscopes range...
A new robust multi-degree of freedom (multi-DOF) MEMS gyroscope is presented in this paper. The designed gyroscope has its bandwidth and amplification factor of the sense mode adjusted more easily than the previous reported multi-DOF MEMS gyroscopes....
The symmetric MEMS gyroscope is a typical representative of inertial navigation sensors in recent years. It is different from the traditional mechanical rotor gyroscope in that it structurally discards the high-speed rotor and other moving parts to e...
In this paper, the characterization and analysis of a silicon micromachined Quad Mass Gyroscope (QMG) in the rate mode of operation are presented. We report on trade-offs between full-scale, linearity, and noise characteristics of QMGs with different...
Gyroscopes have been proposed as sensors for ambulatory gait analysis and functional electrical stimulation systems. These applications often require detection of the initial contact (IC) of the foot with the floor and/or final contact or foot off (F...
Optimizing the bias modulation of a fiber-optic gyroscope is crucial to improving its precision. In this study, we propose and demonstrate the use of multiple harmonics of sinusoidal modulation as an intermediate alternative to the widely used modula...
This paper presents the design and implementation of a dual-mass MEMS gyroscope with high shock resistance by improving the in-phase frequency of the gyroscope and by using a two-stage elastic stopper mechanism and proposes a Simulink shock model of...
Vibrational environments can cause drift or changes in Micro-Electro-Mechanical System (MEMS) gyroscope rotor parameters, potentially impacting their performance. To improve the effective use of MEMS gyroscopes, this study introduced a method for eva...
A novel design of piezoelectric aluminum nitride (AlN)-Si composite cantilever gyroscope is proposed in this paper. The cantilever is stimulated to oscillate in plane by two inverse voltages which are applied on the two paralleled drive electrodes, r...
This paper presents an adaptive control algorithm for realizing a vibratory angle measuring gyroscope so that rotation angle can be directly measured without integration of angular rate, thus eliminating the accumulation of numerical integration erro...
This paper reports on the design and fabrication of a z-axis tuning fork gyroscope which has a freestanding architecture. In order to improve the performance of the tuning fork gyroscope by eliminating the influence of the squeeze-film air damping, t...
To avoid the oscillation of four unequal masses seen in previous triaxial linear gyroscopes, a modified silicon triaxial gyroscope with a rotary wheel is presented in this paper. To maintain a large sensitivity and suppress the coupling of different...
A variety of gyroscopes have been extensively studied due to their capability of precision detection of rotation rates and extensive applications in navigation, guidance and motion control. In this work, a new Hybrid Gyroscope (HG) which combines the...
The inclination effect caused by fabrication errors on the periodic response of a symmetric MEMS gyroscope is investigated. The dynamic equation is established considering the inclination effect on support stiffness and electrostatic forces. The peri...
Micro-gyroscopes based on the Coriolis principle are widely employed in inertial navigation, motion control, and vibration analysis applications. Conventional micro-gyroscopes often exhibit limitations, including elevated noise levels and suboptimal...
We propose a novel liquid jet gyroscope based on electrochemical transducers, which uses electrolyte as the jet medium, and two electrochemical transducers placed symmetrically as the velocity measuring unit. The gyroscope includes a fluid pump to ge...
With the development of handheld video capturing devices, video stabilization becomes increasingly important. The gyroscope-based video stabilization methods perform promising ability, since they can return more reliable three-dimensional (3D) camera...
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