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Open AccessReview

The Development of Micromachined Gyroscope Structure and Circuitry Technology

Key Laboratory for Micro-inertial Instruments and Advanced Navigation Technology of the Education Ministry, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
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Sensors 2014, 14(1), 1394-1473; https://doi.org/10.3390/s140101394
Received: 27 October 2013 / Revised: 28 November 2013 / Accepted: 11 December 2013 / Published: 14 January 2014
(This article belongs to the Section Physical Sensors)
This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail. View Full-Text
Keywords: micromachined/micro gyroscopes; gyroscope structure; gyroscope circuitry; Coriolis effect; Sagnac effect; gyroscope review micromachined/micro gyroscopes; gyroscope structure; gyroscope circuitry; Coriolis effect; Sagnac effect; gyroscope review
MDPI and ACS Style

Xia, D.; Yu, C.; Kong, L. The Development of Micromachined Gyroscope Structure and Circuitry Technology. Sensors 2014, 14, 1394-1473.

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