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Sensors 2017, 17(11), 2663; https://doi.org/10.3390/s17112663

System Modeling of a MEMS Vibratory Gyroscope and Integration to Circuit Simulation

Department of Mechanical Engineering, Pohang University of Science and Technology, 77 Cheongam-Ro, Nam-Gu, Pohang 37673, Korea
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Received: 25 September 2017 / Revised: 31 October 2017 / Accepted: 16 November 2017 / Published: 18 November 2017
(This article belongs to the Special Issue Inertial Sensors for Positioning and Navigation)
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Abstract

Recently, consumer applications have dramatically created the demand for low-cost and compact gyroscopes. Therefore, on the basis of microelectromechanical systems (MEMS) technology, many gyroscopes have been developed and successfully commercialized. A MEMS gyroscope consists of a MEMS device and an electrical circuit for self-oscillation and angular-rate detection. Since the MEMS device and circuit are interactively related, the entire system should be analyzed together to design or test the gyroscope. In this study, a MEMS vibratory gyroscope is analyzed based on the system dynamic modeling; thus, it can be mathematically expressed and integrated into a circuit simulator. A behavioral simulation of the entire system was conducted to prove the self-oscillation and angular-rate detection and to determine the circuit parameters to be optimized. From the simulation, the operating characteristic according to the vacuum pressure and scale factor was obtained, which indicated similar trends compared with those of the experimental results. The simulation method presented in this paper can be generalized to a wide range of MEMS devices. View Full-Text
Keywords: MEMS; gyroscope; simulation; COMSOL; SPICE MEMS; gyroscope; simulation; COMSOL; SPICE
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Kwon, H.J.; Seok, S.; Lim, G. System Modeling of a MEMS Vibratory Gyroscope and Integration to Circuit Simulation. Sensors 2017, 17, 2663.

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