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Micromachines publishes Special Issues to create collections of papers on specific topics, with the aim of building a community of authors and readers to discuss the latest research and develop new ideas and research directions. Special Issues are led by Guest Editors, who are experts on the topic and all Special Issue submissions follow MDPI's standard editorial process. The journal’s Editor-in-Chief and/or designated Editorial Board Member will oversee Guest Editor appointments and Special Issue proposals, checking their content for relevance and ensuring the suitability of the material for the journal. The papers published in a Special Issue will be collected and displayed on a dedicated page of the journal’s website. Further information on MDPI's Special Issue policies and Guest Editor responsibilities can be found here. For any inquiries related to a Special Issue, please contact the Editorial Office.

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Development and Applications of Small-Scale Soft Robotics

edited by

Yunquan Li

Yang Yang

, Ren Tao and

Jen-Yuan (James) Chang

submission deadline 31 Aug 2025 | Viewed by 452 | Submission Open

Keywords: small-scale soft robotics; micro-scale soft robotics; soft actuators; soft robotics sensors; control systems for small-scale soft robotics; applications in extreme environments; integration of soft robotics

(This special issue belongs to the Section E：Engineering and Technology)

MEMS/NEMS Sensors and Actuators for Biomedical Applications

edited by Fahimullah Khan and

Muhammad Mubasher Saleem

submission deadline 31 Aug 2025 | Viewed by 381 | Submission Open

Keywords: MEMS/NEMS devices; BioMEMS; PiezoMEMS; micromachining techniques; sensors and actuators; microsystem applications; silicon MEMS

(This special issue belongs to the Section A：Physics)

Electrokinetically Driven Microdevices

edited by

Víctor Hugo Perez-Gonzalez

submission deadline 31 Aug 2025 | Viewed by 204 | Submission Open

Keywords: electrokinetics; dielectrophoresis; electrophoresis; electroosmosis; isotachophoresis; teí chophoresis; electrothermal flow; microfluidics; nanofluidics; electrokinetically driven microdevices; lab on a chip; point of care; diagnostics

(This special issue belongs to the Section C1: Micro/Nanoscale Electrokinetics)

Top-Down Micro- or Nanofabrication and Its Applications, 2nd Edition

edited by

Rafael Taboryski

submission deadline 31 Aug 2025 | Viewed by 135 | Submission Open

Keywords: new lithographical methods; dry etching; thin-film technology and characterization methods; atomic layer deposition; physical and chemical vapor deposition; surface properties and characterization; semiconductor crystal growth technologies; semiconductor/quantum/optical/bio/medical applications; non-traditional micro- and nanofabrication technology

(This special issue belongs to the Section E：Engineering and Technology)

Ultra-Precision Machining of Difficult-to-Machine Materials—Second Edition

edited by

Chen Li

submission deadline 31 Aug 2025 | Viewed by 130 | Submission Open

Keywords: ultra-precision machining; grinding; polishing; cutting; nanoscratch; material removal mechanism; difficult-to-machine material; brittle material

(This special issue belongs to the Section D：Materials and Processing)

The Novel Nanofabrication Method for Meta-Optics Devices

edited by Ruhao Pan and

Junjie Li

submission deadline 31 Aug 2025 | Viewed by 103 | Submission Open

Keywords: nanofabrication; high spatial controllability; metamaterials and metasurfaces; meta-optics devices; subwavelength resonators; light modulation; compact optical devices

(This special issue belongs to the Section A：Physics)

Advances in Plasmonic Sensing Devices

edited by Fahad Usman and Jeong-Eun Park

submission deadline 15 Sep 2025 | Viewed by 1092 | Submission Open

Keywords: plasmonic sensors; surface plasmon resonance (SPR); localized surface plasmon resonance (LSPR); surface-enhanced raman scattering (SERS); optical sensing devices; biomarker detection; biosensing applications; novel plasmonic/optical materials; sensor design and development; biomedical sensing; industrial applications; telecommunications sensing; environmental monitoring; plasmonic nanofiber sensors; plasmonic photothermal sensors; plasmonic metamaterial sensors; plasmonic waveguide sensors; plasmonic fluorescence sensors

(This special issue belongs to the Section A：Physics)

Recent Advances in Thin-Film Devices

edited by Sean Wu and

Tsung-Shine Ko

submission deadline 15 Sep 2025 | Viewed by 230 | Submission Open

Keywords: thin-film materials and devices; functional properties of thin films on devices; micro/nano-scaled microstructures of thin films; thin-film processes

(This special issue belongs to the Section D：Materials and Processing)

Photonic and Optoelectronic Devices and Systems, Third Edition

edited by

Muhammad Ali Butt

submission deadline 20 Sep 2025 | 3 articles | Viewed by 3196 | Submission Open

Keywords: optical waveguide devices; photonic sensors; photodiodes; solar cells; lasers; optical switches; logic gates; light-emitting diodes; plasmonics; metamaterials; photonic crystals

(This special issue belongs to the Section A：Physics)

Design and Manufacture of Micro-Optical Lens, 2nd Edition

edited by

Lihua Li

and

W.B. Lee

submission deadline 25 Sep 2025 | 1 articles | Viewed by 799 | Submission Open

Keywords: micro-optics; micro-lens; polymer lens; glass lens; freeform design; miniaturization; control and automation; manufacturing technology; glass molding technology; precision machining; precision polishing; rapid prototyping; lithography

(This special issue belongs to the Section A：Physics)

Emerging Applications of Triboelectric Effects/Materials, 2nd Edition

edited by Zuankai Wang, Hao Wu and Wanghuai Xu

submission deadline 25 Sep 2025 | Viewed by 102 | Submission Open

Keywords: triboelectric effect; contact electrification; surface charges; energy harvesting; interfacial electric field; electrostatic surface sensing

(This special issue belongs to the Section A：Physics)

Advanced Packaging for Microsystem Applications, 3rd Edition

edited by

Wenchao Tian

and

Yongkun Wang

submission deadline 30 Sep 2025 | 5 articles | Viewed by 23791 | Submission Open

Keywords: advanced packaging technology; MEMS; reliability; NEMS; packaging materials; modeling and simulation; design and manufacturing process; microsystems

(This special issue belongs to the Section A：Physics)

MEMS Nano/Micro Fabrication, 2nd Edition

edited by Donghwi Lee

submission deadline 30 Sep 2025 | 6 articles | Viewed by 14454 | Submission Open

Keywords: nano/microfabrication; microelectromechanical systems (MEMS); sensor and actuator; surface wettability; single-phase heat transfer; two-phase heat transfer; device cooling

(This special issue belongs to the Section E：Engineering and Technology)

Microfluidics for Single Cell Detection and Cell Sorting

edited by

Zhen Cheng

and Jingjing Zhao

submission deadline 30 Sep 2025 | 3 articles | Viewed by 9527 | Submission Open

Keywords: microfluidics; lab-on-a-chip; microsystems; optofluidic; microfluidic flow cytometer; biosensor; actuator; single-cell detection; single-cell imaging; mass spectrometry; spectral analyzer; impedance cytometer; fluorescent-activated cell sorting; image-activated cell sorting; dielectrophoresis; acoustophoresis

(This special issue belongs to the Section B：Biology and Biomedicine)

Electrochemical Supercapacitors for Energy Harvesting and Storage

edited by

Ganesh T. Chavan

and

Sagar Mane

submission deadline 30 Sep 2025 | 4 articles | Viewed by 8941 | Submission Open

Keywords: electrochemical supercapacitors; metal oxides; metal sulfides; 2D nanomaterials; hybrid supercapacitors; battery-type supercapacitors

(This special issue belongs to the Section C：Chemistry)

RF Devices: Technology and Progress

edited by

Lifeng Wang

submission deadline 30 Sep 2025 | 3 articles | Viewed by 5927 | Submission Open

Keywords: RF MEMS; switch; filters; ase shifters; varactors; inductors; antenna; reconfigurable; tuneable

(This special issue belongs to the Section A：Physics)

Recent Advances in Lithography

edited by Sikun Li and Yayi Wei

submission deadline 30 Sep 2025 | 5 articles | Viewed by 5647 | Submission Open

Keywords: optical and EUV lithography; computational lithography; novel patterning technologies– semiconductors; MEMS; NEMS; MOEMS; metrology; inspection; and process control for microlithography; advances in patterning materials and processes

(This special issue belongs to the Section D：Materials and Processing)

Emerging Quantum Optical Devices and Their Applications

edited by Yu Zhou and Junfeng Wang

submission deadline 30 Sep 2025 | 3 articles | Viewed by 5162 | Submission Open

Keywords: quantum devices; quantum optics; quantum hardware and quantum chips

(This special issue belongs to the Section A：Physics)

Semiconductor and Energy Materials and Processing Technology

edited by

Sung Gyu Pyo

submission deadline 30 Sep 2025 | 2 articles | Viewed by 4336 | Submission Open

Keywords: semiconductor processing; etch process; interconnect technology; thin film processing; battery materials; process integration; image sensor; energy materials and processing

(This special issue belongs to the Section D：Materials and Processing)

Microfluidic Nanoparticle Synthesis

edited by

Jing Jin

and Bo Liu

submission deadline 30 Sep 2025 | 3 articles | Viewed by 4220 | Submission Open

Keywords: microfluidics; lab-on-a-chip; miniaturized reactors; nanoparticles; nanocomposites; hybrid nanostructures or nanocomposites; nanomaterial synthesis; biosensing; environmental monitoring

(This special issue belongs to the Section B3: Nanoparticles in Biomedicine)

Nanomaterials for Micro/Nano Devices, 2nd Edition

edited by

Amir Hussain Idrisi

submission deadline 30 Sep 2025 | 3 articles | Viewed by 3655 | Submission Open

Keywords: nanomaterials; nanocomposites; nanoelectronics; micro/nano devices; synthesis and characterization; integration and performance; energy harvesting; sensing and actuation; biomedicine

(This special issue belongs to the Section D：Materials and Processing)

Manufacturing and Application of Advanced Thin-Film-Based Device

edited by

Guo-Hua Feng

submission deadline 30 Sep 2025 | 2 articles | Viewed by 2669 | Submission Open

Keywords: film manufacturing; film characterization; functionalized film; thin-film device; advance device application; micromachining process

(This special issue belongs to the Section A：Physics)

Silicon Photonics–CMOS Integration and Device Applications

edited by

Sung Min Park

submission deadline 30 Sep 2025 | 2 articles | Viewed by 2475 | Submission Open

Keywords: silicon photonics; CMOS photonic integrated circuits; high-performance transceivers; on-device interconnects; AI accelerators; neuromorphic computing; quantum computing; LiDAR sensors

(This special issue belongs to the Section E：Engineering and Technology)

Nanomaterial/Composite-Based Electrochemical (Bio)Sensing Microsystem

edited by

Sadia Ameen

submission deadline 30 Sep 2025 | 1 articles | Viewed by 2222 | Submission Open

Keywords: electrochemical sensor; nanomaterials; biomaterials; electrodes; electrical devices; composites; photoelectrochemical systems

(This special issue belongs to the Section B：Biology and Biomedicine)

Optical and Laser Material Processing, 2nd Edition

edited by

Yuankun Lin

and Yuzhe Xiao

submission deadline 30 Sep 2025 | 4 articles | Viewed by 2170 | Submission Open

Keywords: material-based micro/nanostructures and devices; optical and laser material processing; optical- and laser-based nano/micro-fabrication; two-dimensional and bulk material processing

(This special issue belongs to the Section D：Materials and Processing)

Wearable Electronics: Advances in Design, Materials, Fabrication, and Applications

edited by

Cheng-Hsin Chuang

and

Ashok Chhetry

submission deadline 30 Sep 2025 | 1 articles | Viewed by 1874 | Submission Open

Keywords: physical and physiological sensors; electrochemical biosensors; smart materials; composite materials; biocompatible materials; smart textiles; micro- and nanofabrication; additive manufacturing; flexible printed circuits; medical diagnostic; human– computer interface; wireless monitoring

(This special issue belongs to the Section A：Physics)

Revolutionary Advances in 2D and 1D Material Based Electronics

edited by Xiyuan Feng and Yunlei Zhong

submission deadline 30 Sep 2025 | 2 articles | Viewed by 1767 | Submission Open

Keywords: nanoelectronics; 2D Materials; 1D Materials; material synthesis and characterization; device architecture; transistors; sensors; energy storage; fundamental physics; electronic components

(This special issue belongs to the Section A：Physics)

Microforming Technology and Its Applications

edited by Jenn-Terng Gau

submission deadline 30 Sep 2025 | 1 articles | Viewed by 1659 | Submission Open

Keywords: microforming; size effect; micro formability; microchannels; microtool and die design; microfabrication; springback; modeling and simulations; micro tribology; strain rate

(This special issue belongs to the Section D：Materials and Processing)

Reliability Issues in Advanced Transistor Nodes, Second Edition

edited by Stanislav Tyaginov

submission deadline 30 Sep 2025 | 1 articles | Viewed by 1512 | Submission Open

Keywords: reliability issues; hot-carrier degradation; self-heating; bias temperature instability; time dependent dielectric breakdown; defects; characterization of reliability issues; modeling of reliability issues; novel transistor architectures; finFET; NWFET; NSFET; FSFET; CFET

(This special issue belongs to the Section E：Engineering and Technology)

AI-Driven Design and Optimization of Microsystems

edited by

Yan Liu

submission deadline 30 Sep 2025 | 1 articles | Viewed by 1222 | Submission Open

Keywords: AI-driven design; AI-driven optimization; microsensors; microactuators; microenergy; microfluidics

(This special issue belongs to the Section E：Engineering and Technology)

Advanced Photonic Biosensors: From Materials Research to Applications

edited by

Kezheng Li

and

Lisa M. Miller

submission deadline 30 Sep 2025 | 1 articles | Viewed by 804 | Submission Open

Keywords: sensors; biosensors; biomedical sensors; environment sensors; biomarker detection; enzyme-based biosensors; microstructure sensors; metasurface sensors; optic sensors; smart sensors; portable sensors; artificial intelligent/machine learning

(This special issue belongs to the Section B1: Biosensors)

Fluorescent Nanomaterial Probes and Their Biological and Chemical Sensors Applications

edited by

Santhana Krishna Kumar Alagarsamy

submission deadline 30 Sep 2025 | Viewed by 583 | Submission Open

Keywords: fluorescent probe; nanomaterials; biological sensor; chemical sensor; carbon dots; nanoclusters; semiconductor nanomaterials; graphene quantum dots; quantum dots; sensor kit; paper-based sensor

(This special issue belongs to the Section B：Biology and Biomedicine)

Advances in Piezoelectric Sensors

edited by Dinko Oletić

submission deadline 30 Sep 2025 | 1 articles | Viewed by 581 | Submission Open

Keywords: piezoelectric sensors; MEMS; PMUT; FBAR; materials; modelling; sensor interfaces; low-power design; embedded sensors; signal processing; acoustic event detection; ultrasonic imaging; photoacoustics; NDT; acoustic emisssion testing

(This special issue belongs to the Section A：Physics)

Research Progress in Energy Harvesters and Self-Powered Sensors

edited by

Yaoguang Shi

and

Weiqiang Zhang

submission deadline 30 Sep 2025 | Viewed by 257 | Submission Open

Keywords: thermoelectric; triboelectric; photovoltaic; piezoelectric; energy harvester; self-powered sensors

(This special issue belongs to the Section A：Physics)

Advances in Low-Dimensional Materials: Synthesis, Characterization and Device Application, 2nd Edition

edited by Tianyi Zhang and Xiaotian Zhang

submission deadline 30 Sep 2025 | Viewed by 190 | Submission Open

Keywords: low-dimensional materials: quantum dots; nanowires; nanotubes; 2D materials; graphene; transition metal dichalcogenides; boron nitride; MXenes; perovskite; physical and structural characterization: atomic-scale characterization; electron microscopy; spectroscopy; X-ray diffraction; raman spectroscopy; scanning tunneling microscopy (STM); atomic force microscopy (AFM); device applications: field-effect transistors (FETs); sensors; memristors; nonvolatile memories; energy conversion devices; flexible electronics; optoelectronics; photodetectors; energy storage

(This special issue belongs to the Section D：Materials and Processing)

Advances in Micro-Supercapacitors and Micro Energy Storage

edited by

Pei-Hsin (Christine) Young

submission deadline 30 Sep 2025 | Viewed by 162 | Submission Open

Keywords: micro-supercapacitors; micro energy storage; electrode materials; cycle stability; miniaturized electronic devices

(This special issue belongs to the Section C：Chemistry)

Advanced Soft Robotics with Miniaturized and Flexible Designs

edited by

Miriam Filippi

submission deadline 30 Sep 2025 | Viewed by 131 | Submission Open

Keywords: soft robotics; small-scale robotics; micro-robotics; soft materials; medical robots

(This special issue belongs to the Section A：Physics)

Magnetically Driven Microfluidics

edited by

Yan Hom Li

submission deadline 30 Sep 2025 | Viewed by 86 | Submission Open

Keywords: magnetically driven microfluidics; sustainable energy systems; energy harvesting and conversion; microfluidic energy storage; ferrofluid applications; hydrogen economy and microfluidics; magnetically enhanced electrochemical systems; thermal management in energy devices; renewable energy microtechnologies; magnetofluidics for energy distribution

(This special issue belongs to the Section C：Chemistry)

Microphysiological Systems for Cancer Research

edited by

María Virumbrales-Muñoz

submission deadline 15 Oct 2025 | Viewed by 269 | Submission Open

Keywords: MPS; microfluidics; tissue engineering; cancer; organoid; migration; mechanism; interactions; organ-on-a-chip

(This special issue belongs to the Section B：Biology and Biomedicine)

Advanced Microfluidics Technology for Disease Diagnosis and Treatment

edited by

Yuan Gao

submission deadline 15 Oct 2025 | Viewed by 84 | Submission Open

Keywords: microfluidics; biomedical research; organ on a chip; acoustic microfluidics; advanced sensing techniques; micro/nanofabrication; artificial intelligence in microfluidics; disease diagnosis; personalized medicine

(This special issue belongs to the Section B：Biology and Biomedicine)

Photonic Integration Technology and Semiconductor Laser Array Chip Technology

edited by

Yunshan Zhang

submission deadline 15 Oct 2025 | Viewed by 73 | Submission Open

Keywords: photonic integration; monolithic integration; heterogeneous integration; semiconductor laser arrays

(This special issue belongs to the Section D1: Semiconductor Devices)

Nano FIS 2025—Integrated Functional Nano Systems

edited by

Anton Köck

submission deadline 24 Oct 2025 | Viewed by 122 | Submission Open

Keywords: advanced functional materials ; nanodevices & nanosystems ; nanoanalytics; modelling & reliability ; system integration technologies and manufacturing processes

Micro- and Nanosensors: Fabrication, Applications and Performance Enhancements, Third Edition

edited by Joanna Smajdor

submission deadline 25 Oct 2025 | 1 articles | Viewed by 745 | Submission Open

Keywords: MEMS sensors; fiber optic sensors; resonant pressure sensor; electrochemical sensors; bioelectrochemical sensors; electrode modifiers; wearable sensors; plasmonic sensors; metasurface sensors; photonic crystal-based sensors

(This special issue belongs to the Section E：Engineering and Technology)

Multifunctional Transistors: Outlooks and Challenges

edited by Zhiyong Zhang and Lin Xu

submission deadline 30 Oct 2025 | 3 articles | Viewed by 4315 | Submission Open

Keywords: multifunctional device; nanoelectronics; optoelectronics; spintronics; biomedical devices; sensors; logic devices; neuromorphic computing; memory devices; semiconductor innovation

(This special issue belongs to the Section D1: Semiconductor Devices)

Laser Additive Manufacturing: Design, Materials, Processes and Applications, 3rd Edition

edited by Xu Song,

Jie Yin

and

Yang Liu

submission deadline 30 Oct 2025 | 2 articles | Viewed by 2144 | Submission Open

Keywords: additive manufacturing; 3D printing; laser powder bed fusion; laser-directed energy deposition; laser advanced manufacturing; design and modeling; materials; processes; characterization; mechanical and functional properties; applications

(This special issue belongs to the Section D3: 3D Printing and Additive Manufacturing)

Low-Dimensional Nano-Scaled Materials: From Principles to Device Application

edited by

Sake Wang

and

Nguyen Tuan Hung

submission deadline 30 Oct 2025 | Viewed by 410 | Submission Open

Keywords: nano-scaled materials; quantum dot; nanowire; nanotube; two-dimensional materials; graphene; transition metal dichalcogenides; fabrication; devices

(This special issue belongs to the Section D：Materials and Processing)

Functional Thin Films in Semiconductor Devices and Various Sensing Technologies

edited by Hyeonghun Kim

submission deadline 30 Oct 2025 | Viewed by 180 | Submission Open

Keywords: CVD (chemical vapor deposition); ALD (atomic layer deposition); sensors; photodetectors; gas sensors; biosensors; pressure sensors

(This special issue belongs to the Section D：Materials and Processing)

Advances in Nanophotonics-Based Nanomaterials and Emerging Applications

edited by

Yuan-Fong Chou Chau

Roshan Thotagamuge

and Sy-Hann Chen

submission deadline 30 Oct 2025 | Viewed by 108 | Submission Open

Keywords: nanophotonics-based nanomaterials; nanophotonic phenomena and applications; biophotonics; quantum photonics; photonic crystals

(This special issue belongs to the Section A：Physics)

RF and Power Electronic Devices and Applications

edited by Yuqi Wei and

Hao Lu

submission deadline 31 Oct 2025 | 11 articles | Viewed by 11562 | Submission Open

Keywords: gallium nitride HEMT; power electronics; RF and mmWave device; power converter

(This special issue belongs to the Section D：Materials and Processing)

Magnetic and Spin Devices, 3rd Edition

edited by

Viktor Sverdlov

submission deadline 31 Oct 2025 | 4 articles | Viewed by 8655 | Submission Open

Keywords: digital spintronics; spin-transfer torque (STT); spin-orbit torque (SOT); magnetoresistive random access memory (MRAM); in-memory computing; magnetic sensors; energy harvesting magnetic devices; artificial intelligence of things

(This special issue belongs to the Section D：Materials and Processing)

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