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Micromachines publishes Special Issues to create collections of papers on specific topics, with the aim of building a community of authors and readers to discuss the latest research and develop new ideas and research directions. Special Issues are led by Guest Editors, who are experts on the topic and all Special Issue submissions follow MDPI's standard editorial process. The journal’s Editor-in-Chief and/or designated Editorial Board Member will oversee Guest Editor appointments and Special Issue proposals, checking their content for relevance and ensuring the suitability of the material for the journal. The papers published in a Special Issue will be collected and displayed on a dedicated page of the journal’s website. Further information on MDPI's Special Issue policies and Guest Editor responsibilities can be found here. For any inquiries related to a Special Issue, please contact the Editorial Office.

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MEMS/NEMS Devices and Applications, 3rd Edition

edited by

Ching-Liang Dai

and Zhi-Xuan Dai

submission deadline 31 Dec 2025 | 8 articles | Viewed by 14550 | Submission Open

Keywords: physical sensors; force sensors; magnetic sensors; optical sensors; microphones; flow sensors; thermal sensors; chemical sensors; biosensors; gas sensors; actuators; resonators/filters; switches/relays; energy harvesters; lens/mirrors

(This special issue belongs to the Section E：Engineering and Technology)

Nanoscale Lithography—Pressing Miniaturization towards Ever Smaller Sizes

edited by

Jayne C. Garno

submission deadline 31 Dec 2025 | 2 articles | Viewed by 13992 | Submission Open

Keywords: nanolithography; nanopatterning; Scanning Probe Microscopy (SPM); nanoscience; nanomaterials; organic films and polymers; nanofabrication

(This special issue belongs to the Section E：Engineering and Technology)

Laser Micro/Nano-Fabrication

edited by

Yixuan Feng

and

Man Zhao

submission deadline 31 Dec 2025 | 5 articles | Viewed by 9047 | Submission Open

Keywords: laser subtractive machining; laser additive machining; heat-affected zone; microstructure; tool life; surface finish; residual stress

(This special issue belongs to the Section D：Materials and Processing)

Magnetic Manipulation in Micromachines

edited by

Behrad Khamesee

submission deadline 31 Dec 2025 | 1 articles | Viewed by 8081 | Submission Open

Keywords: micromanipulation; electromagnetic devices; permanent magnets; microrobotics; electromagnetic actuators

(This special issue belongs to the Section B：Biology and Biomedicine)

Advances in Digital Manufacturing and Nano Fabrication

edited by

Jian Cheng

, Jianguo Zhang and

Qi Liu

submission deadline 31 Dec 2025 | 8 articles | Viewed by 7817 | Submission Open

Keywords: digital manufacturing; smart manufacturing; nano fabrication; ultra-precision/precision machining; digital twin; advanced manufacturing processes; additive manufacturing; subtractive manufacturing; nano-scale machining; artificial intelligence in manufacturing; sustainable manufacturing

(This special issue belongs to the Section D：Materials and Processing)

Metamaterials for Sensing Applications

edited by

Yuzhi Shi

and

Yi Yang

submission deadline 31 Dec 2025 | 4 articles | Viewed by 7356 | Submission Open

Keywords: metamaterials; lab on a chip; biological sensing using subwavelength structures; chemical sensing using subwavelength structures; physical sensing using subwavelength structures; optical manipulation using metamaterials; optofluidic device; light– matter interactions

(This special issue belongs to the Section A：Physics)

Micro-Energy Harvesting Technologies and Self-Powered Sensing Systems

edited by

Zhaozheng Wang

, Tianzhao Bu and

Jianhua Zeng

submission deadline 31 Dec 2025 | 5 articles | Viewed by 7253 | Submission Open

Keywords: micro-energy harvesting; self-powered sensing; functional materials; micro fabrication; wearable devices

(This special issue belongs to the Section E：Engineering and Technology)

Micro-/Nanofluidic and Lab-on-a-Chip Devices for Biomedical Applications, 3rd Edition

edited by

Senhorinha de Fátima Capela Fortunas Teixeira

Diana Pinho

and

Violeta Carvalho

submission deadline 31 Dec 2025 | 5 articles | Viewed by 6780 | Submission Open

Keywords: micro- and nanofluidics; lab-on-a-chip; biosensing; nanoparticles; drug delivery systems; 3D organ models; nanotechnology; numerical simulations

(This special issue belongs to the Section B：Biology and Biomedicine)

The Fabrication of Micro and Nano Bio-Detection Chips, Sensors and Smart Detectors

edited by

Jinping Luo

and

Yang Wang

submission deadline 31 Dec 2025 | 2 articles | Viewed by 6059 | Submission Open

Keywords: bio-detection techniques; micro/nano sensors; materials sciences; novel fabrication techniques; biomarker detection; interdisciplinary research; environmental monitoring; food safety

(This special issue belongs to the Section B：Biology and Biomedicine)

Ultra-Precision Surface Abrasive Micro-Machining: Advances and Applications

edited by Fengjun Chen and Jianguo Zhang

submission deadline 31 Dec 2025 | 9 articles | Viewed by 5896 | Submission Open

Keywords: abrasive; polishing; finishing; grinding

(This special issue belongs to the Section E：Engineering and Technology)

Artificial Intelligence for Micro Inertial Sensors

edited by

Xudong Zou

and Chong Li

submission deadline 31 Dec 2025 | 3 articles | Viewed by 5172 | Submission Open

Keywords: MEMS sensors; inertial sensors; machine learning; artificial intelligence

(This special issue belongs to the Section A：Physics)

Novel Surface and Bulk Acoustic Wave Devices, Second Edition

edited by Wei Luo, Chengjie Zuo,

Wen Wang

and Jian Zhou

submission deadline 31 Dec 2025 | 1 articles | Viewed by 4817 | Submission Open

Keywords: surface acoustic waves; bulk acoustic waves; RF filters (Hybrid; SAW; BAW); acoustic wave sensors; RF-MEMS

(This special issue belongs to the Section A：Physics)

Celebration of 60th Anniversary of Moore's Law: The Significant Milestone in Micromachines

edited by

Sabina Merlo

Huikai Xie

and

Nam-Trung Nguyen

submission deadline 31 Dec 2025 | 2 articles | Viewed by 4731 | Submission Open

Keywords: basic structures of MEMS ; applications of MEMS ; processes of MEMS; bio-MEMS and related fields ; integrated circuits; integrated photonic circuits; semiconductor devices; 2D semiconductor materials; complementary metal– oxide– semiconductor (CMOS); metal– oxide– semiconductor field-effect transistor (MOSFET); nanotransistor; photodetectors; quantum devices; finFETs

Microwave Passive Components, 3rd Edition

edited by

and

submission deadline 31 Dec 2025 | 5 articles | Viewed by 4253 | Submission Open

Keywords: theory; modeling; fabrication; measurement and applications; microwave-; millimeter- and terahertz-wave passive component/devices applied in communication; radar and other systems; passive component/devices in antennas; filters; biosensors; vacuum electronic devices; pulse compressor; particle accelerator; etc.; other work related to microwave devices

(This special issue belongs to the Section E：Engineering and Technology)

Thin Film Photovoltaic and Photonic Based Materials and Devices

edited by

Hugo Aguas

submission deadline 31 Dec 2025 | 3 articles | Viewed by 3664 | Submission Open

Keywords: solar cells; photovoltaics; thin films; photonics

(This special issue belongs to the Section D：Materials and Processing)

Advances in Flexible and Wearable Electronics: Devices and Systems

edited by

Eun Gyo Jeong

submission deadline 31 Dec 2025 | 2 articles | Viewed by 3606 | Submission Open

Keywords: flexible electronics; wearable devices; stretchable sensors; printed and hybrid electronics; low-power circuits and system integration; wireless communication for wearables; energy harvesting and self-powered systems; smart materials and nanostructures; biomedical applications

(This special issue belongs to the Section A：Physics)

Flexible Intelligent Sensors: Design, Fabrication and Applications

edited by

Hongcheng Xu

submission deadline 31 Dec 2025 | 2 articles | Viewed by 3462 | Submission Open

Keywords: functional sensing materials; novel sensing mechanisms; AI algorithms for sensors; flexible intelligent/integrated sensor; advanced sensing designs; architectures; devices; and instruments; hybrid or nano/micro fabrication; flexible electronics; advanced application

(This special issue belongs to the Section A：Physics)

Organic Electronic-Based Devices for Biomedical Applications

edited by

Yongmin Jeon

submission deadline 31 Dec 2025 | 1 articles | Viewed by 3402 | Submission Open

Keywords: 2D materials; organic/inorganic electronics; implantable/attachable/wearable devices; flexible/stretchable/transparent electronics; wearable sensors; optogenetics; wearable electroceuticals; OLED/QLED/OPD/PSC; electrode/encapsulation

(This special issue belongs to the Section B：Biology and Biomedicine)

Recent Advance in Piezoelectric Actuators and Motors, 3rd Edition

edited by

Liang Wang

and

Dalius Mažeika

submission deadline 31 Dec 2025 | 2 articles | Viewed by 3134 | Submission Open

Keywords: piezoelectric actuator; ultrasonic motor; piezoelectric transducer; piezoelectric mirror; arrays energy harvesting; vibration control; piezoelectric actuator and motor modeling; piezoelectric actuator and motor applications: aerospace; weapons; optical instruments; biomedical equipments

(This special issue belongs to the Section A：Physics)

Gas Sensors: From Fundamental Research to Applications, 2nd Edition

edited by Pengfei Cheng

submission deadline 31 Dec 2025 | 1 articles | Viewed by 3101 | Submission Open

Keywords: gas sensors; MEMS sensor arrays; gas sensors device applications; electronic nose system; micro- and nano-preparation; micro-control; semiconductor crystal structure

(This special issue belongs to the Section C：Chemistry)

Microrheology with Optical Tweezers

edited by

Manlio Tassieri

submission deadline 31 Dec 2025 | 1 articles | Viewed by 3044 | Submission Open

Keywords: optical tweezers; rheology; microrheology; metrology; biophysics; biomedical engineering

(This special issue belongs to the Section B：Biology and Biomedicine)

Integrated Optical Sensors in Microfluidic Systems

edited by

Sándor Valkai

and Krisztina Nagy

submission deadline 31 Dec 2025 | 1 articles | Viewed by 2747 | Submission Open

Keywords: integrated optical devices; label-free detection; optical biosensors; electrooptical sensors; microfluidics; microfabrication

(This special issue belongs to the Section B：Biology and Biomedicine)

Nanogenerators: Design, Fabrication and Applications

edited by Junqing Zhao and

Xiaojing Mu

submission deadline 31 Dec 2025 | 1 articles | Viewed by 2515 | Submission Open

Keywords: nanogenerator; micro- and nano-manufacturing; nanotechnology; energy harvesting; nanoelectronics

(This special issue belongs to the Section A：Physics)

Technological Advances in Polymer Microfabrication: Design and Processing Innovations, 2nd Edition

edited by

Davide Masato

and

Peng Gao

submission deadline 31 Dec 2025 | 1 articles | Viewed by 2471 | Submission Open

Keywords: micro- and nano-fabrication; polymer processing; micro injection molding; additive manufacturing; advanced manufacturing.

(This special issue belongs to the Section D：Materials and Processing)

Recent Developments in Electrical Discharge Machining Technology

edited by

Muhammad Pervej Jahan

submission deadline 31 Dec 2025 | 2 articles | Viewed by 2377 | Submission Open

Keywords: micro-EDM; nano-EDM; hybrid EDM; parameter optimization; analytical modeling; process simulation; tool wear; difficult-to-cut material

(This special issue belongs to the Section D：Materials and Processing)

Advanced Flexible Electronic Devices for Biomedical Application

edited by

Yueying Yang

and

Junyeob Yeo

submission deadline 31 Dec 2025 | 1 articles | Viewed by 2321 | Submission Open

Keywords: flexible or stretchable electronics; wearable sensors; implantable devices; smart prosthetics; bioelectronics; flexible electronic materials; advanced fabrication techniques; bio-integrated systems

(This special issue belongs to the Section B：Biology and Biomedicine)

Advancing Energy Storage Techniques: Chemistry, Materials and Devices

edited by Yingmeng Zhang and Lingna Sun

submission deadline 31 Dec 2025 | 2 articles | Viewed by 2258 | Submission Open

Keywords: energy storage and conversion devices; advanced materials; novel electrode design; cell engineering design; energy storage chemistry; energy storage mechanism; machine learning; multidisciplinary approaches

(This special issue belongs to the Section E：Engineering and Technology)

Advances in Nanophotonics: Physics, Materials, and Applications

edited by

Yi-Yu Cai

submission deadline 31 Dec 2025 | 1 articles | Viewed by 2220 | Submission Open

Keywords: plasmonics; metamaterials; nanophotonics; self-assembly; single-particle spectroscopy

(This special issue belongs to the Section A：Physics)

Thin Film Deposition and Characterization in Micro- and Nano-Technology

edited by

Chih-Hao Lee

submission deadline 31 Dec 2025 | 2 articles | Viewed by 2063 | Submission Open

Keywords: thin film deposition; thin film characterization; nanoprobe; nanotechnology

(This special issue belongs to the Section D：Materials and Processing)

Photodetectors and Their Applications

edited by Jinfeng Han

submission deadline 31 Dec 2025 | 2 articles | Viewed by 2046 | Submission Open

Keywords: photodetectors; flexible devices; materials; applications

(This special issue belongs to the Section A：Physics)

Droplet Microfluidic-Based Systems: Fundamentals, Applications, and Future Directions

edited by Wei Guo and Yage Zhang

submission deadline 31 Dec 2025 | 2 articles | Viewed by 1769 | Submission Open

Keywords: microfluidics; droplet manipulations; high-throughput screening; microfabrications; biochemical assays; directed evolution

(This special issue belongs to the Section B：Biology and Biomedicine)

Microreactors for Chemical Applications

edited by

Yangcheng Lu

submission deadline 31 Dec 2025 | 1 articles | Viewed by 1763 | Submission Open

Keywords: microreactor; chemical synthesis; chemical analysis; reaction; chemical process; process intensification; separation; chemical technology; chemical materials

(This special issue belongs to the Section C：Chemistry)

Soft Sensors and Soft Circuits: Design, Implementation and Applications

edited by

Lei Jing

and Tomohito Sekine

submission deadline 31 Dec 2025 | 1 articles | Viewed by 1616 | Submission Open

Keywords: e-textiles; e-skin; soft robotics; wearable sensors; flexible and stretchable electronics; human– machine interfaces; conductive polymers; self-healing sensors; hydrogel-based sensors; skin-mountable devices

(This special issue belongs to the Section A：Physics)

Ultrafast Laser Micro- and Nanoprocessing, 3rd Edition

edited by

Xin Zhao

submission deadline 31 Dec 2025 | 1 articles | Viewed by 1517 | Submission Open

Keywords: ultrafast lasers; materials processing; nano- and microscale; laser– matter interaction; laser ablation; laser machining; surface texturing; two/multi-photon polymerization/reduction; beam/pulse shaping; numerical modeling

(This special issue belongs to the Section D：Materials and Processing)

Innovations in 3D Printing Technologies: From Microfabrication to Functional Applications

edited by

Panagiotis Kyratsis

submission deadline 31 Dec 2025 | 1 articles | Viewed by 1506 | Submission Open

Keywords: 3D printing technologies; additive manufacturing; artificial intelligence (AI) in 3D printing; sustainability in 3D printing; multi-material printing

(This special issue belongs to the Section D3: 3D Printing and Additive Manufacturing)

Magnetic Materials for Spintronics Devices

edited by

Tomasz Blachowicz

and

Andrea Ehrmann

submission deadline 31 Dec 2025 | 1 articles | Viewed by 1440 | Submission Open

Keywords: GMR; TMR; spin valve; spin-FET; spin-MOSFET; DMI; skyrmions; hopfions; spin polarization; domain walls

(This special issue belongs to the Section D：Materials and Processing)

Small-Scale Mechanical Behaviors in Advanced Engineering Materials

edited by

Ting Tsui

and Nitya Nand Gosvami

submission deadline 31 Dec 2025 | 1 articles | Viewed by 1430 | Submission Open

Keywords: small-scale mechanical properties; nano-tribology and wear; nanoindentation and contact mechanics; chemical mechanical polish (CMP); mechanical wear in biomedical implant materials; biological cell adhesion on surfaces

(This special issue belongs to the Section D：Materials and Processing)

Flexible and Wearable Devices for Health Monitoring and Energy Harvesting

edited by

Rafael Gonzalez-Landaeta

and

Amanda Carrillo Castillo

submission deadline 31 Dec 2025 | 1 articles | Viewed by 1348 | Submission Open

Keywords: wearables; devices for healthcare; energy harvesting; sensors; flexible electronics; supercapacitors; harvesters; self-powered electronics

(This special issue belongs to the Section A：Physics)

Laser Shock Peening and Allied Processes to Improve Materials Strength

edited by Jan Brajer and

Pathak Sunil

submission deadline 31 Dec 2025 | 1 articles | Viewed by 1267 | Submission Open

Keywords: laser shock peening; ultrasonic nanocrystal surface modification; residual stresses; plastic deformation; fatigue life; microstructure

(This special issue belongs to the Section E：Engineering and Technology)

Micro/Nano Optical Devices and Sensing Technology

edited by

Zhidong Zhang

submission deadline 31 Dec 2025 | 2 articles | Viewed by 1094 | Submission Open

Keywords: micro/nano optical devices; optical sensing; photonic crystals; plasmonic resonance; metasurfaces; micro/nano fabrication

(This special issue belongs to the Section A：Physics)

Metasurface-Based Devices and Systems

edited by

Giuseppe Brunetti

and

Muhammad Ali Butt

submission deadline 31 Dec 2025 | 1 articles | Viewed by 1066 | Submission Open

Keywords: dielectric metasurface; imaging; sensing; communications technologies; beamforming; beamsteering; dielectric antenna

(This special issue belongs to the Section A：Physics)

CMOS-MEMS Fabrication Technologies and Devices, 2nd Edition

edited by

Liangxing Hu

submission deadline 31 Dec 2025 | 1 articles | Viewed by 945 | Submission Open

Keywords: CMOS-MEMS fabrication technologies; CMOS; MEMS; CMOS-MEMS integration; 3D integration

(This special issue belongs to the Section A：Physics)

Current Research Progress in Microwave Metamaterials and Metadevices

edited by

Linda Shao

and

Xiaoguang Zhao

submission deadline 31 Dec 2025 | 1 articles | Viewed by 822 | Submission Open

Keywords: theory and modeling of metamaterials/metasurfaces; electromagnetic metamaterials/metasurfaces; reconfigurable metamaterials/metasurfaces; novel effects in microwave metadevices

(This special issue belongs to the Section D：Materials and Processing)

Feature Papers of Micromachines in Additive Manufacturing 2025

edited by Reza Teimouri

submission deadline 31 Dec 2025 | 1 articles | Viewed by 717 | Submission Open

Keywords: novel applications of additive manufacturing; selective laser melting; hybrid additive manufacturing; laser powder bed fusion; laser-based additive manufacturing; metallic additive manufacturing; 3D printing

(This special issue belongs to the Section D3: 3D Printing and Additive Manufacturing)

Recent Advancements in Microwave and Optoelectronics Devices

edited by

Alexandre Jean René Serres

submission deadline 31 Dec 2025 | 1 articles | Viewed by 643 | Submission Open

Keywords: microwave devices; optoelectronic systems; antenna design and applications

(This special issue belongs to the Section A：Physics)

Potentials of 2D Materials for Emerging Electronic Devices

edited by

Ghulam Dastgeer

submission deadline 31 Dec 2025 | Viewed by 611 | Submission Open

Keywords: 2D materials; sensing devices; field-effect transistors (FETs); gas sensors; biosensors; transition metal dichalcogenides (TMDs); graphene; optical sensors; flexible electronics; Internet of Things (IoT); wearable sensors; surface functionalization; nanodevices; neuromorphic sensing; artificial intelligence integration

(This special issue belongs to the Section D：Materials and Processing)

MEMS and NEMS Sensors: Innovations, Applications, and Future Directions in Micro/Nano Technologies

edited by Meng Nie and

Kuibo Yin

submission deadline 31 Dec 2025 | 1 articles | Viewed by 611 | Submission Open

Keywords: MEMS/nano sensors; micro/nano nanotechnology; sensor technology; material innovations; wearable devices; nanoelectronics

(This special issue belongs to the Section A：Physics)

Magnetorheological Materials and Application Systems, Second Edition

edited by

Seung-Bok Choi

and

Miao Yu

submission deadline 31 Dec 2025 | 1 articles | Viewed by 586 | Submission Open

Keywords: magnetorheological materials; temperature effect; thermal conductivity; heat transfer

(This special issue belongs to the Section E：Engineering and Technology)

Recent Advances in Field-Effect Transistors: Materials, Devices, and Emerging Applications

edited by Xiao Yu

submission deadline 31 Dec 2025 | 1 articles | Viewed by 489 | Submission Open

Keywords: field-effect transistors; CMOS scaling; novel channel materials; ferroelectric FETs; steep-slope devices; nanosheet FETs; device modeling; gate stack engineering; 2D materials; emerging logic devices

(This special issue belongs to the Section D1: Semiconductor Devices)

Selected Papers from the 26th EuroSimE Conference

edited by

Jiajie Fan

and Willem Van Driel

submission deadline 31 Dec 2025 | Viewed by 385 | Submission Open

Keywords: MEMS/NEMS; microelectronics microsystems reliability; simulation and modeling

(This special issue belongs to the Section A：Physics)

Displaying special issue 51-100 on page 2 of 8.

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