Novel Micromechanical Resonators, Filters, and MEMS/NEMS Transducers

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: 30 July 2026 | Viewed by 34

Special Issue Editors


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Guest Editor
Department of Electrical Engineering, University of South Florida, 4202 East Fowler Avenue, Tampa, FL 33620, USA
Interests: advanced manufacturing; MEMS/NEMS transducers; nanomaterials and nanotechnology; microfluidics and biosensors; RF/microwave electronics
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Guest Editor
Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48824-1226, USA
Interests: harvesters; micrometer- and nanometer-sized sensors and actuators (or transducers); characterization of smart multifunctional materials and their integration into microsystems; RF/BioMEMS; micromachined transducers; wireless sensors;functional nanomaterials

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Guest Editor
Electrical Engineering & Computer Science, Case Western Reserve University, Cleveland, OH 44106, USA
Interests: solid-state devices; nanoelectromechanical system (NEMS); quantum engineering; nanotechnology; transducers; high-precision measurement and instruments; advanced materials
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Guest Editor
Electrical Engineering, Molinaroli College of Engineering and Computing, University of South Carolina, Columbia, SC 29208, USA
Interests: MEMS-based RF components and systems; on-chip tunable RF components and systems; reconfigurable components with the integration of ferroelectric and ferromagnetic thin films
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Special Issue Information

Dear Colleagues,

This Special Issue aims to highlight cutting-edge advancements in novel micromechanical resonators, filters, and MEMS/NEMS transducers, focusing on state-of-the-art design, fabrication methods, and innovative applications. The rapidly evolving field of MEMS/NEMS technology has notably enhanced capabilities in telecommunications, sensing, and biomedical fields, thereby necessitating ongoing improvements in resonator precision, filter selectivity, and transducer effectiveness.

We warmly welcome original research papers, comprehensive reviews, and brief communications covering novel device architectures, innovative material applications, advanced micro- and nano-fabrication technologies, and practical deployments in various fields. Areas of interest specifically include the following topics: piezoelectric resonators; electrostatic resonators; MEMS-based radiofrequency filters; high-sensitivity NEMS transducers; resilient resonators for challenging operational conditions; advanced integration methodologies; and novel characterization techniques. Submissions addressing both theoretical modeling and empirical findings on resonance phenomena, energy dissipation, methods for enhancing quality factors, and multi-physics interactions in MEMS/NEMS devices are particularly encouraged.

This Special Issue serves as a valuable forum for researchers and industry experts to exchange groundbreaking insights, thereby promoting interdisciplinary cooperation and further advancing MEMS/NEMS innovations.

We look forward to your contribtuions.

Prof. Dr. Jing Wang
Prof. Dr. Nelson Sepúlveda
Prof. Dr. Philip Feng
Prof. Dr. Guoan Wang
Guest Editors

Manuscript Submission Information

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Keywords

  • RF MEMS
  • micromechanical resonators
  • filters
  • oscillators
  • resonant sensors
  • MEMS resonator readout circuits

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Published Papers

This special issue is now open for submission.
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