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Micromachines publishes Special Issues to create collections of papers on specific topics, with the aim of building a community of authors and readers to discuss the latest research and develop new ideas and research directions. Special Issues are led by Guest Editors, who are experts on the topic and all Special Issue submissions follow MDPI's standard editorial process. The journal’s Editor-in-Chief and/or designated Editorial Board Member will oversee Guest Editor appointments and Special Issue proposals, checking their content for relevance and ensuring the suitability of the material for the journal. The papers published in a Special Issue will be collected and displayed on a dedicated page of the journal’s website. Further information on MDPI's Special Issue policies and Guest Editor responsibilities can be found here. For any inquiries related to a Special Issue, please contact the Editorial Office.

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Functional Materials and Microdevices, 2nd Edition

edited by Zhenhua Wu, Erzhen Mu, Hongjing Shang and Ming Li

submission deadline 31 Mar 2026 | 8 articles | Viewed by 19616 | Submission Open

Keywords: functional materials and characterizations; energy conversion and transport; nano-micro device; device modeling and simulation; sensors and actuators; 3D printing and MEMS technologies; machine learning and algorithm

(This special issue belongs to the Section D：Materials and Processing)

Research Progress of Advanced SiC Semiconductors

edited by

Xingfang Liu

submission deadline 31 Mar 2026 | 4 articles | Viewed by 17779 | Submission Open

Keywords: 3C-SiC; 4H-SiC; bulk growth; epitaxial growth; oxidation; film characteristics; FET device; power device

(This special issue belongs to the Section D1: Semiconductor Devices)

Emerging Packaging and Interconnection Technology, Second Edition

edited by

Zhuo Chen

submission deadline 31 Mar 2026 | 4 articles | Viewed by 15457 | Submission Open

Keywords: advanced packaging; micro/nano-structure; MEMS packaging; high-density interconnection; modeling and simulation; heterogeneous integration; surface and interface engineering; manufacturing tooling; additive/subtractive packaging manufacturing

(This special issue belongs to the Section D：Materials and Processing)

Emerging Micro Manufacturing Technologies and Applications, 3rd Edition

edited by

Nikolaos Tapoglou

submission deadline 31 Mar 2026 | 9 articles | Viewed by 11217 | Submission Open

Keywords: machining; micromachining; emerging technologies; simulation; 3D printing; microcutting; microgears

(This special issue belongs to the Section D：Materials and Processing)

Micro/Nano Manufacturing of Electronic Devices

edited by Qianqian Chen, Haoyue Li and

Guo Liu

submission deadline 31 Mar 2026 | 5 articles | Viewed by 9647 | Submission Open

Keywords: micromachining of vacuum electronic devices; interface engineering of sensors; microelectronics assembly; micro/nano-scale processes; micro-joining; laser micromachining; emerging microfabrication technologies; micro/nanostructures for surface and interface engineering; reliability assessment

(This special issue belongs to the Section D：Materials and Processing)

Micro-Nano Photonics: From Design and Fabrication to Application

edited by

Jin-Kun Guo

Tianzi Shen

and

Chaoping Chen

submission deadline 31 Mar 2026 | 3 articles | Viewed by 6540 | Submission Open

Keywords: micro/nanophotonics; laser micro/nanomachining; optical design; liquid crystals; metasurfaces; fabrication techniques; displays; integrated imaging; adaptive optics; liquid lenses

(This special issue belongs to the Section A1: Optical MEMS and Photonic Microsystems)

Flexible and Biodegradable Electronics and Novel Semiconductor Devices

edited by Chen Liu

submission deadline 31 Mar 2026 | 4 articles | Viewed by 6380 | Submission Open

Keywords: flexible electronics; biodegradable electronics; stretchable materials; printed electronics; bioelectronics; electronic waste; transistors; nanoscale devices; soft robotics; flexible encapsulation; wide-bandgap semiconductors; field effect transistors

(This special issue belongs to the Section A：Physics)

Advanced Graphene Nanomaterials: Synthesis, Characterization and Application

edited by

Michal Strankowski

submission deadline 31 Mar 2026 | 2 articles | Viewed by 5760 | Submission Open

Keywords: nanoparticles; ; graphene derivatives; ; nanomaterials; ; self-healing; ; shape memory; ; microfabrication; ; microsystems

(This special issue belongs to the Section D：Materials and Processing)

Thin Film Microelectronic Devices and Circuits, 2nd Edition

edited by Chengyuan Dong

submission deadline 31 Mar 2026 | 4 articles | Viewed by 3779 | Submission Open

Keywords: thin film electronic devices; thin film transistors; thin film solar cells; thin film sensors; thin film memory; stability; flexibility; thin film circuits; pixel circuits; active matrix addressing; systems on glass; CMOS technology; semiconductor displays; intelligent sensors; semiconductor memory

(This special issue belongs to the Section D1: Semiconductor Devices)

Integrated Optical, Electrochemical, and Electrical Biomicrofluidics

edited by Lihua Wang,

Shilun Feng

and Xiuli Gao

submission deadline 31 Mar 2026 | 1 articles | Viewed by 3496 | Submission Open

(This special issue belongs to the Section B：Biology and Biomedicine)

Recent Advancements in Microwave and Optoelectronics Devices

edited by

Alexandre Jean René Serres

submission deadline 31 Mar 2026 | 2 articles | Viewed by 3343 | Submission Open

Keywords: microwave devices; optoelectronic systems; antenna design and applications

(This special issue belongs to the Section A：Physics)

Recent Advances in Nanoindentation Techniques

edited by Pengyue Zhao and

Costas Charitidis

submission deadline 31 Mar 2026 | 3 articles | Viewed by 3099 | Submission Open

Keywords: nanoindentation; mechanical properties; nanostructured materials; deformation mechanisms; multiscale simulations; edge effects; material anisotropy; computational materials science

(This special issue belongs to the Section D：Materials and Processing)

Recent Advances in 3D Printed Electronics

edited by

Sung Hyun Park

submission deadline 31 Mar 2026 | 1 articles | Viewed by 2798 | Submission Open

Keywords: 3D printing system; functional material ink; multi-material 3D printing; electronics on freeform surfaces; 3D printed circuit; 3D printed sensor; 3D printed optoelectronic device

(This special issue belongs to the Section D1: Semiconductor Devices)

Emerging Devices and Technologies in BioMEMS for Biomarker Detection

edited by

Jianwei Zhong

Minhui Liang

and

Ye Ai

submission deadline 31 Mar 2026 | 2 articles | Viewed by 2211 | Submission Open

Keywords: micro/nanodevices; nanomaterials; device miniaturization; circulating biomarkers detection; assay technologies lab-on-chip; wearable electronics; point-of-care testing devices; AI-assisted processing

(This special issue belongs to the Section B1: Biosensors)

Surface and Bulk Acoustic Wave Devices, 2nd Edition

edited by

Jinkai Chen

Shurong Dong

and

Hao Jin

submission deadline 31 Mar 2026 | 2 articles | Viewed by 1845 | Submission Open

Keywords: acoustic wave sensors; piezoelectric materials; signal processing; fabrication techniques; material innovations; device optimization; theoretical modeling

(This special issue belongs to the Section A：Physics)

Advances and Applications of Optical Metasurfaces and Metalens

edited by Saurabh Srivastava

submission deadline 31 Mar 2026 | 1 articles | Viewed by 857 | Submission Open

Keywords: meta-optics; metasurface; deep-UV; refractive index; tunability; phase-change

(This special issue belongs to the Section A1: Optical MEMS and Photonic Microsystems)

The New Era of Surface Microfluidics: Advances and Applications

edited by

Navid Kashaninejad

submission deadline 31 Mar 2026 | 1 articles | Viewed by 783 | Submission Open

Keywords: surface microfluidics; capillary-driven flow; digital microfluidics; wettability engineering; biosensing and spectroscopy; closed-channel microfluidics; electrowetting and magnetowetting; microfabrication and surface modification; lab-on-a-chip technologies; optofluidics and microfluidic sensing

(This special issue belongs to the Section B：Biology and Biomedicine)

Research Progress on Advanced Additive Manufacturing Technologies

edited by

Mohammad Faisal Ahmed

submission deadline 31 Mar 2026 | 1 articles | Viewed by 720 | Submission Open

Keywords: additive manufacturing; advanced manufacturing; 3D printing; 4D printing; design and modelling; functional materials; smart materials; composites; cellular materials; shape memory

(This special issue belongs to the Section D3: 3D Printing and Additive Manufacturing)

Functional Materials for Energy and Electronic Applications

edited by

Minkyu Kim

submission deadline 31 Mar 2026 | 1 articles | Viewed by 720 | Submission Open

Keywords: functional polymers; functional composites; energy; electronics; hydrogen productions

(This special issue belongs to the Section C：Chemistry)

Microfluidic Systems for Sustainable Energy

edited by

Yan Hom Li

submission deadline 31 Mar 2026 | 2 articles | Viewed by 646 | Submission Open

Keywords: microfluidics for sustainable energy; renewable energy microtechnologies; microfluidic energy harvesting and conversion; microfluidic energy storage; hydrogen and fuel cell microfluidics; thermal management in energy devices; micro-nano interfaces for energy; environmental and circular energy applications

(This special issue belongs to the Section C：Chemistry)

Advanced Ferroelectric and Memristive Devices: Fundamentals and Applications

edited by

Rongrong Cao

submission deadline 31 Mar 2026 | 1 articles | Viewed by 353 | Submission Open

Keywords: ferroelectric devices; ferroelectric random access memory (FeRAM); ferroelectric tunnel junction (FTJ); ferroelectric transistor (FeFET); ferroelectric diode; polarizations; domain walls; neuromorphic computing; computing in memory; logic in memory; piezoelectric sensors; applications of ferroelectric devices

(This special issue belongs to the Section D1: Semiconductor Devices)

Diamond Micro-Machining and Its Applications

edited by

Chunlei He

submission deadline 31 Mar 2026 | Viewed by 310 | Submission Open

Keywords: diamond micro-machining; single-point diamond turning; high-precision devices

(This special issue belongs to the Section E：Engineering and Technology)

Laser Fabrication and Applications of Micro- and Nano-Robots

edited by

Bing Han

submission deadline 31 Mar 2026 | Viewed by 268 | Submission Open

Keywords: micro-/nano-robots; laser fabrication; micro system; actuators

(This special issue belongs to the Section E：Engineering and Technology)

Nonlinear Vibration Isolation and Energy Harvesting Devices

edited by

Hesheng Han

Tao Yang

and

Geng Chen

submission deadline 31 Mar 2026 | Viewed by 242 | Submission Open

Keywords: energy harvesting; vibration isolation; nonlinear dynamics; self-powered systems; smart structure and system

(This special issue belongs to the Section A：Physics)

Prospect of RF MEMS Devices and Applications

edited by Maher Bakri-Kassem

submission deadline 31 Mar 2026 | Viewed by 224 | Submission Open

Keywords: RF MEMS devices; tunable filters; reconfigurable antennas; MEMS switches (ohmic and capacitive); CMOS-MEMS integration; millimeter-wave systems; 5G/6G communication technologies; wafer-level packaging; multiphysics modeling and simulation; reliability in harsh environments

(This special issue belongs to the Section A：Physics)

Advances in 3D Printing for Micro- and Nanoscale Biomedical Applications

edited by

Dennis Douroumis

and

Huifeng Du

submission deadline 31 Mar 2026 | Viewed by 215 | Submission Open

Keywords: 3D printing; microscale medical devices; drug delivery systems; lab on a chip; biocompatible materials; diagnostics; artificial intelligence; sensors and electronics

(This special issue belongs to the Section D3: 3D Printing and Additive Manufacturing)

Recent Advances in SAW Resonators, Second Edition

edited by

Fabio Di Pietrantonio

submission deadline 31 Mar 2026 | Viewed by 150 | Submission Open

Keywords: SAW resonators; SAW physical sensors; SAW chemical sensors; SAW based e-noses; SAW biosensors; passive wireless SAW sensors; flexible SAW devices

(This special issue belongs to the Section A：Physics)

Additive Manufacturing for Medical Applications, 2nd Edition

edited by

Lawrence Kulinsky

and

Snehan Peshin

submission deadline 31 Mar 2026 | Viewed by 138 | Submission Open

Keywords: additive manufacturing; 3D printing; stereolithography; fused deposition modeling; selective laser sintering; selective laser melting; direct laser melting; tissue engineering; medical implants; lab-on-chip devices; medical models

(This special issue belongs to the Section D3: 3D Printing and Additive Manufacturing)

Microfluidic Chips: Definition, Functions and Applications

edited by

Kai Zhao

submission deadline 31 Mar 2026 | Viewed by 119 | Submission Open

Keywords: manipulation and separation; microfluidics; micro-/nanofabrication; target manipulation

(This special issue belongs to the Section B：Biology and Biomedicine)

Nanoscale Photovoltaics Devices and Materials

edited by

Zhihao Xu

submission deadline 31 Mar 2026 | Viewed by 109 | Submission Open

Keywords: nanoscale; photovoltaics; perovskite; silicon-based solar cell

(This special issue belongs to the Section D：Materials and Processing)

Smart Micro/Nano Sensing Systems: From Flexible Devices to Autonomous IoT Nodes

edited by Terry Tao Ye

submission deadline 31 Mar 2026 | Viewed by 86 | Submission Open

Keywords: micro/nano sensing systems; flexible electronics; flexible sensors; wearable devices; eTextile devices; passive sensing; battery-less sensing; in-sensor computing

(This special issue belongs to the Section A：Physics)

Advances in Piezoelectric Sensors

edited by Dinko Oletić

submission deadline 15 Apr 2026 | 1 articles | Viewed by 2737 | Submission Open

Keywords: piezoelectric sensors; MEMS; PMUT; FBAR; materials; modelling; sensor interfaces; low-power design; embedded sensors; signal processing; acoustic event detection; ultrasonic imaging; photoacoustics; NDT; acoustic emisssion testing

(This special issue belongs to the Section A：Physics)

Nanostructured Materials for Energy Storage and Conversion Applications

edited by Jasneet Kaur

submission deadline 15 Apr 2026 | Viewed by 92 | Submission Open

Keywords: nanomaterials; 2D materials; graphene; supercapacitors; batteries; fuel cells; ion conduction; electrocatalysis; electrolyte; electrode; energy storage and conversions

(This special issue belongs to the Section D：Materials and Processing)

Energy Conversion Materials/Devices and Their Applications, 2nd Edition

edited by

Bin Liu

, Lei Liu and Yaling Wang

submission deadline 20 Apr 2026 | 3 articles | Viewed by 759 | Submission Open

Keywords: photovoltaics; fuel cells; supercapacitors; batteries; luminescent solar concentrators; light-emitting diodes; optoelectronic materials; thermoelectric materials; luminescent materials; hydrogen energy materials; photocatalytic materials; photothermal materials; electrochromic materials and devices

(This special issue belongs to the Section C：Chemistry)

Smart Optical Probes: Analysis, Detection and Imaging

edited by

Guofen Song

submission deadline 20 Apr 2026 | Viewed by 111 | Submission Open

Keywords: smart fluorescent probes; quantum dots; photoluminescence materials; optical switchable materials; surface enhanced Raman scattering analysis; bio/chemical or environmental analysis; multi-target cascade detection; multi-mode imaging; in vivo imaging; optical nanorobot

(This special issue belongs to the Section A1: Optical MEMS and Photonic Microsystems)

Advanced Thin-Films: Design, Fabrication and Applications, Third Edition

edited by

Sagar Mane

and Jae Cheol Shin

submission deadline 25 Apr 2026 | 3 articles | Viewed by 2274 | Submission Open

Keywords: thin films; nanoscience and nanotechnology; electrochemical devices; sensors; micro/nanostructures; semiconductors; energy harvesting and storage; ferroelectric/piezoelectric nanogenerators

(This special issue belongs to the Section D：Materials and Processing)

Advanced Interconnect and Packaging, 3rd Edition

edited by

Wensheng Zhao

and Dawei Wang

submission deadline 30 Apr 2026 | 6 articles | Viewed by 19810 | Submission Open

Keywords: interconnect on-chip interconnect; through-silicon via (TSV); transmission line; advanced packaging; 3D integrated circuits and microsystems; antenna in packaging (AiP); integrated passive device (IPD)

(This special issue belongs to the Section E：Engineering and Technology)

Recent Advances in MEMS Mirrors

edited by

Dayong Qiao

and Binbin Wang

submission deadline 30 Apr 2026 | 5 articles | Viewed by 12820 | Submission Open

Keywords: MEMS mirrors: modelling; control; fabrication and other; MEMS mirror arrays: deformable mirror; digital mirror device; phase light modulator; optical cross connect (OXC) and other; MEMS mirror applications: optical communications; optical imaging; spectrometers; optical display; laser printing and other

(This special issue belongs to the Section A1: Optical MEMS and Photonic Microsystems)

Ultra-Precision Surface Abrasive Micro-Machining: Advances and Applications

edited by Fengjun Chen and Jianguo Zhang

submission deadline 30 Apr 2026 | 10 articles | Viewed by 9111 | Submission Open

Keywords: abrasive; polishing; finishing; grinding

(This special issue belongs to the Section E：Engineering and Technology)

Bioelectronics and Its Limitless Possibilities

edited by

Tianyu Yang

submission deadline 30 Apr 2026 | 4 articles | Viewed by 6570 | Submission Open

Keywords: bio-integrated electronics; biomaterials; electrochemistry; implantable and wearable devices; diagnostics; human– machine interface

(This special issue belongs to the Section B：Biology and Biomedicine)

Manufacturing and Application of Advanced Thin-Film-Based Device

edited by

Guo-Hua Feng

submission deadline 30 Apr 2026 | 4 articles | Viewed by 5639 | Submission Open

Keywords: film manufacturing; film characterization; functionalized film; thin-film device; advance device application; micromachining process

(This special issue belongs to the Section A：Physics)

Advancing Energy Storage Techniques: Chemistry, Materials and Devices

edited by Yingmeng Zhang and Lingna Sun

submission deadline 30 Apr 2026 | 3 articles | Viewed by 4216 | Submission Open

Keywords: energy storage and conversion devices; advanced materials; novel electrode design; cell engineering design; energy storage chemistry; energy storage mechanism; machine learning; multidisciplinary approaches

(This special issue belongs to the Section E：Engineering and Technology)

Advanced Nano-Semiconductor Devices: Design, Modeling and Next-Generation AI Applications

edited by

Bin Wang

submission deadline 30 Apr 2026 | 3 articles | Viewed by 3244 | Submission Open

Keywords: nano-semiconductor devices; modeling and simulation; reliability design; novel concepts for device structure design; quantum effects and quantum devices; IoT and AI applications

(This special issue belongs to the Section D1: Semiconductor Devices)

Microfabrication and Nanotechnology in Manufacturing Systems

edited by

Marcin Adamiak

Marek Placzek

and

Dumitru Nedelcu

submission deadline 30 Apr 2026 | 2 articles | Viewed by 2727 | Submission Open

Keywords: micro/nanotechnologies; materials; manufacturing; industrial applications

(This special issue belongs to the Section E：Engineering and Technology)

Micromachined Devices for Microwave Signal Processing

edited by

Romolo Marcelli

and Emanuela Proietti

submission deadline 30 Apr 2026 | 1 articles | Viewed by 2419 | Submission Open

Keywords: micromachining; RF MEMS; etching techniques; membrane-supported devices; integrated coupled structures; AlScN high-frequency resonators; filters; and delay lines

(This special issue belongs to the Section E：Engineering and Technology)

Low-Dimensional Nano-Scaled Materials: From Principles to Device Application

edited by

Sake Wang

and

Nguyen Tuan Hung

submission deadline 30 Apr 2026 | 1 articles | Viewed by 1984 | Submission Open

Keywords: nano-scaled materials; quantum dot; nanowire; nanotube; two-dimensional materials; graphene; transition metal dichalcogenides; fabrication; devices

(This special issue belongs to the Section D：Materials and Processing)

Insulated Gate Bipolar Transistor (IGBT) Modules, 2nd Edition

edited by

Peisheng Liu

submission deadline 30 Apr 2026 | 3 articles | Viewed by 1679 | Submission Open

Keywords: IGBT module; integrated circuit rackaging; power devices; reliability analysis

(This special issue belongs to the Section A：Physics)

Ultra-Precision Machining of Difficult-to-Machine Materials—Second Edition

edited by

Chen Li

submission deadline 30 Apr 2026 | 1 articles | Viewed by 1321 | Submission Open

Keywords: ultra-precision machining; grinding; polishing; cutting; nanoscratch; material removal mechanism; difficult-to-machine material; brittle material

(This special issue belongs to the Section D：Materials and Processing)

Piezoelectric Micro-/Nano Systems: Global Breakthroughs and Future Prospects

edited by Yunlai Shi

submission deadline 30 Apr 2026 | 1 articles | Viewed by 1008 | Submission Open

Keywords: piezoelectric actuator; piezoelectric motor; piezoelectric pump; piezoelectric transducer; piezoelectric energy harvesting; piezoelectric stacks; piezoelectric jets; unimorph; bimorph; amplified piezoelectric actuator; inchworm actuator; inertial actuator; ultrasonic actuator; ultrasonic motor; ultrasonic consolidation

(This special issue belongs to the Section A：Physics)

High-Sensitivity Fiber-Optic Sensors: From Design to Applications

edited by Tao Geng and

Feng Peng

submission deadline 30 Apr 2026 | 1 articles | Viewed by 1002 | Submission Open

Keywords: optical fiber sensing; optical glass waveguide; fibre-optical sensors and applications; sensor demodulation; biochemical sensor; chemical sensor; micro-structured fiber; micro– nano lasers

(This special issue belongs to the Section A：Physics)

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