MEMS and NEMS Sensors: Innovations, Applications, and Future Directions in Micro/Nano Technologies
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".
Deadline for manuscript submissions: 31 December 2025 | Viewed by 21
Special Issue Editors
Interests: MEMS/NEMS design and application; flexible devices
Interests: memristor; 2D materials fabrication and device; in situ TEM
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
MEMS and NEMS sensors have revolutionized sensing technologies by enabling unprecedented precision, miniaturization, and integration capabilities across industries. These micro- and nano-scale systems are pivotal in driving advancements in healthcare, environmental monitoring, industrial automation, and smart infrastructure. As the demand for smaller, smarter, and more energy-efficient devices grows, MEMS/NEMS sensors face challenges in scaling down to nano dimensions, optimizing performance, and overcoming material and fabrication limitations.
This Special Issue seeks to highlight cutting-edge research addressing these challenges and showcasing breakthroughs in sensor design, fabrication, and applications. Contributions may explore novel materials, innovative fabrication techniques (e.g., nanolithography and 3D printing), or interdisciplinary solutions for integrating sensors with emerging technologies like AI, IoT, and wearable systems. Applications in biomedical diagnostics, environmental sensing, and industrial safety are of particular interest, as are studies on reliability, durability, and energy harvesting in NEMS.
By fostering collaboration among researchers, engineers, and industry leaders, this Special Issue aims to catalyze progress in MEMS/NEMS sensor technology, paving the way for next-generation smart systems and sustainable solutions. We invite submissions that advance both the science and practical deployment of these transformative technologies.
We look forward to receiving your submissions!
Prof. Dr. Meng Nie
Prof. Dr. Kuibo Yin
Guest Editors
Manuscript Submission Information
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Keywords
- MEMS/nano sensors
- micro/nano nanotechnology
- sensor technology
- material innovations
- wearable devices
- nanoelectronics
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