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Micromachines, Volume 10, Issue 1

2019 January - 75 articles

Cover Story: Moore’s Law for silicon transistors is coming to an end. The use of liquid-metal electrodes on graphene is a viable solution to reduce the size, weight, and power of future electronics while also providing a platform for robust flexible electronics. The spray-on liquid-metal technique can be applied to increase the efficiency and yield of the fabrication of graphene-based electronics. View this paper
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Articles (75)

  • Article
  • Open Access
13 Citations
5,409 Views
9 Pages

High Performance Drain Engineered InGaN Heterostructure Tunnel Field Effect Transistor

  • Xiaoling Duan,
  • Jincheng Zhang,
  • Jiabo Chen,
  • Tao Zhang and ,
  • Jiaduo Zhu,
  • Zhiyu Lin and
  • Yue Hao
  • + 2 authors+ 0 author

21 January 2019

A drain engineered InGaN heterostructure tunnel field effect transistor (TFET) is proposed and investigated by Silvaco Atlas simulation. This structure uses an additional metal on the drain region to modulate the energy band near the drain/channel in...

(This article belongs to the Special Issue Miniaturized Transistors)
  • Article
  • Open Access
18 Citations
5,804 Views
11 Pages

A Novel Fabricating Process of Catalytic Gas Sensor Based on Droplet Generating Technology

  • Liqun Wu,
  • Ting Zhang,
  • Hongcheng Wang,
  • Chengxin Tang and
  • Linan Zhang

20 January 2019

Catalytic gas sensors are widely used for measuring concentrations of combustible gases to prevent explosive accidents in industrial and domestic environments. The typical structure of the sensitive element of the sensor consists of carrier and catal...

(This article belongs to the Special Issue MEMS/NEMS Sensors: Fabrication and Application)
  • Article
  • Open Access
86 Citations
8,741 Views
25 Pages

Multi-Response Optimization of Electrical Discharge Machining Using the Desirability Function

  • Rafał Świercz,
  • Dorota Oniszczuk-Świercz and
  • Tomasz Chmielewski

20 January 2019

Electrical discharge machining (EDM) is a modern technology that is widely used in the production of difficult to cut conductive materials. The basic problem of EDM is the stochastic nature of electrical discharges. The optimal selection of machining...

(This article belongs to the Special Issue Product/Process Fingerprint in Micro Manufacturing)
  • Article
  • Open Access
12 Citations
6,020 Views
20 Pages

20 January 2019

Due to the rapid progress in MEMS-based infrared emitters and sensors, strong demand exists for suitable plasmonic materials for such microdevices. We examine the possibility of achieving this goal by alloying other metals with the noble metals Au an...

(This article belongs to the Special Issue Infrared Nanophotonics: Materials, Devices, and Applications)
  • Article
  • Open Access
15 Citations
4,802 Views
10 Pages

Marine Polysaccharide-Collagen Coatings on Ti6Al4V Alloy Formed by Self-Assembly

  • Karl Norris,
  • Oksana I. Mishukova,
  • Agata Zykwinska,
  • Sylvia Colliec-Jouault and ,
  • Corinne Sinquin,
  • Andrei Koptioug,
  • Stéphane Cuenot,
  • Jemma G. Kerns,
  • Maria A. Surmeneva and
  • Timothy E.L. Douglas
  • + 6 authors+ 1 author

19 January 2019

Polysaccharides of marine origin are gaining interest as biomaterial components. Bacteria derived from deep-sea hydrothermal vents can produce sulfated exopolysaccharides (EPS), which can influence cell behavior. The use of such polysaccharides as co...

(This article belongs to the Special Issue Self-Assembly of Polymers)
  • Feature Paper
  • Article
  • Open Access
11 Citations
5,714 Views
10 Pages

Vibration Induced Transport of Enclosed Droplets

  • Hal R. Holmes and
  • Karl F. Böhringer

19 January 2019

The droplet response to vibrations has been well characterized on open substrates, but microfluidic applications for droplets on open systems are limited by rapid evaporation rates and prone to environmental contamination. However, the response of en...

(This article belongs to the Special Issue Microscale Surface Tension and Its Applications)
  • Article
  • Open Access
20 Citations
6,500 Views
11 Pages

19 January 2019

A novel miniaturized single-fed circularly-polarized (CP) microstrip patch antenna operating in the Industrial, Scientific, Medical (ISM) band of 2.40–2.48 GHz, is comprehensively proposed for implantable wireless communications. By employing r...

(This article belongs to the Special Issue Implantable Microdevices)
  • Article
  • Open Access
15 Citations
5,326 Views
14 Pages

Laser Treatments for Improving Electrical Conductivity and Piezoresistive Behavior of Polymer–Carbon Nanofiller Composites

  • Andrea Caradonna,
  • Claudio Badini,
  • Elisa Padovano,
  • Antonino Veca and ,
  • Enea De Meo and
  • Mario Pietroluongo
  • + 1 author+ 0 author

18 January 2019

The effect of carbon nanotubes, graphene-like platelets, and another carbonaceous fillers of natural origin on the electrical conductivity of polymeric materials was studied. With the aim of keeping the filler content and the material cost as low as...

(This article belongs to the Special Issue Carbon Based Electronic Devices)
  • Article
  • Open Access
7 Citations
4,142 Views
11 Pages

Fabrication of Adhesive Resistance Surface with Low Wettability on Ti6Al4V Alloys by Electro-Brush Plating

  • Xiaojuan Dong,
  • Jianbing Meng,
  • Haian Zhou,
  • Rufeng Xu and ,
  • Xue Bai and
  • Haiyun Zhang
  • + 1 author+ 0 author

18 January 2019

Anti-adhesive Ni coatings with low wettability were successfully fabricated on Ti6Al4V substrates via an electro-brush plating method, and subsequently modified with a fluoroalkylsilane (FAS) film. The surface morphology, chemical compositions, and w...

(This article belongs to the Special Issue Synthesis, Assembly and Functional Application of Nanomaterials in Microsystems)
  • Article
  • Open Access
52 Citations
6,755 Views
18 Pages

18 January 2019

Bi4Ti3O12 square plates were synthesized via a hydrothermal route, and their growth process was systematically investigated. Carbon quantum dots (CQDs) were prepared using glucose as the carbon source, which were then assembled on the surface of Bi4T...

(This article belongs to the Special Issue Nanostructures for Photocatalysis)
  • Article
  • Open Access
14 Citations
6,958 Views
13 Pages

18 January 2019

Many theoretical studies of bacterial locomotion adopt a simple model for the organism consisting of a spheroidal cell body and a single corkscrew-shaped flagellum that rotates to propel the body forward. Motivated by experimental observations of a g...

(This article belongs to the Special Issue Microswimmer)
  • Article
  • Open Access
52 Citations
11,971 Views
8 Pages

Scanning MEMS Mirror for High Definition and High Frame Rate Lissajous Patterns

  • Yeong-Hyeon Seo,
  • Kyungmin Hwang,
  • Hyunwoo Kim and
  • Ki-Hun Jeong

18 January 2019

Scanning MEMS (micro-electro-mechanical system) mirrors are attractive given their potential use in a diverse array of laser scanning display and imaging applications. Here we report on an electrostatic MEMS mirror for high definition and high frame...

(This article belongs to the Special Issue MEMS Technology for Biomedical Imaging Applications)
  • Article
  • Open Access
24 Citations
6,204 Views
14 Pages

Empirical Modeling of Zn/ZnO Nanoparticles Decorated/Conjugated with Fotolon (Chlorine e6) Based Photodynamic Therapy towards Liver Cancer Treatment

  • Seemab Iqbal,
  • Muhammad Fakhar-e-Alam,
  • M. Atif,
  • Nasar Ahmed and ,
  • Aqrab -ul-Ahmad,
  • N. Amin,
  • Raed ahmed Alghamdi,
  • Atif Hanif and
  • W. Aslam Farooq
  • + 4 authors+ 0 author

17 January 2019

The current study is based on Zn/ZnO nanoparticles photodynamic therapy (PDT) mediated effects on healthy liver cells and cancerous cells. The synthesis of Zn/ZnO nanoparticles was accomplished using chemical and hydrothermal methods. The characteriz...

(This article belongs to the Special Issue Micro/Nano-system for Drug Delivery)
  • Article
  • Open Access
40 Citations
7,321 Views
15 Pages

Dextran as a Resorbable Coating Material for Flexible Neural Probes

  • Dries Kil,
  • Marta Bovet Carmona,
  • Frederik Ceyssens,
  • Marjolijn Deprez and ,
  • Luigi Brancato,
  • Bart Nuttin,
  • Detlef Balschun and
  • Robert Puers
  • + 3 authors+ 0 author

17 January 2019

In the quest for chronically reliable and bio-tolerable brain interfaces there has been a steady evolution towards the use of highly flexible, polymer-based electrode arrays. The reduced mechanical mismatch between implant and brain tissue has shown...

(This article belongs to the Special Issue Neural Microelectrodes: Design and Applications)
  • Review
  • Open Access
59 Citations
14,326 Views
19 Pages

Progress in the Field of Micro-Electrocorticography

  • Mehdi Shokoueinejad,
  • Dong-Wook Park,
  • Yei Hwan Jung,
  • Sarah K. Brodnick and ,
  • Joseph Novello,
  • Aaron Dingle,
  • Kyle I. Swanson,
  • Dong-Hyun Baek,
  • Aaron J. Suminski and
  • Justin Williams
  • + 7 authors+ 2 authors

17 January 2019

Since the 1940s electrocorticography (ECoG) devices and, more recently, in the last decade, micro-electrocorticography (µECoG) cortical electrode arrays were used for a wide set of experimental and clinical applications, such as epilepsy locali...

(This article belongs to the Special Issue Neural Microelectrodes: Design and Applications)
  • Article
  • Open Access
15 Citations
5,236 Views
11 Pages

Multiple Laser Stripe Scanning Profilometry Based on Microelectromechanical Systems Scanning Mirror Projection

  • Gailing Hu,
  • Xiang Zhou,
  • Guanliang Zhang,
  • Chunwei Zhang and ,
  • Dong Li and
  • Gangfeng Wang
  • + 1 author+ 0 author

16 January 2019

In traditional laser-based 3D measurement technology, the width of the laser stripe is uncontrollable and uneven. In addition, speckle noise in the image and the noise caused by mechanical movement may reduce the accuracy of the scanning results. Thi...

(This article belongs to the Special Issue Optical MEMS)
  • Article
  • Open Access
6 Citations
4,801 Views
10 Pages

16 January 2019

Microsystems with limited power supplies, such as electronic skin and smart fuzes, have a strong demand for self-powered pressure and impact sensors. In recent years, new self-powered mechanical sensors based on the piezoresistive characteristics of...

(This article belongs to the Special Issue Carbon Based Electronic Devices)
  • Article
  • Open Access
44 Citations
5,384 Views
7 Pages

A Compact Broadband Antenna with Dual-Resonance for Implantable Devices

  • Rongqiang Li,
  • Bo Li,
  • Guohong Du,
  • Xiaofeng Sun and
  • Haoran Sun

16 January 2019

A compact broadband implantable patch antenna is designed for the field of biotelemetry and experimentally demonstrated using the Medical Device Radiocommunications Service (MedRadio) band (401–406 MHz). The proposed antenna can obtain a broad...

(This article belongs to the Special Issue Implantable Microdevices)
  • Article
  • Open Access
12 Citations
7,553 Views
18 Pages

15 January 2019

The ability to focus biological particles into a designated position of a microchannel is vital for various biological applications. This paper reports particle focusing under vertical and inclined magnetic fields. We analyzed the effect of the angle...

(This article belongs to the Special Issue Micro- and Nanofluidics for Bionanoparticle Analysis)
  • Feature Paper
  • Article
  • Open Access
27 Citations
11,770 Views
14 Pages

Slot-Die Coating of Double Polymer Layers for the Fabrication of Organic Light Emitting Diodes

  • Amruth C,
  • Marco Colella,
  • Jonathan Griffin,
  • James Kingsley and ,
  • Nicholas Scarratt,
  • Beata Luszczynska and
  • Jacek Ulanski
  • + 2 authors+ 0 author

14 January 2019

This study presents the slot-die coating process of two layers of organic materials for the fabrication of organic light emitting diodes (OLEDs). Poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS), which is commonly used in OLEDs and...

(This article belongs to the Special Issue Printed Flexible and Stretchable Electronics)
  • Article
  • Open Access
23 Citations
6,565 Views
9 Pages

Spray-On Liquid-Metal Electrodes for Graphene Field-Effect Transistors

  • Jordan L. Melcher,
  • Kareem S. Elassy,
  • Richard C. Ordonez,
  • Cody Hayashi and ,
  • Aaron T. Ohta and
  • David Garmire
  • + 1 author+ 0 author

14 January 2019

Advancements in flexible circuit interconnects are critical for widespread adoption of flexible electronics. Non-toxic liquid-metals offer a viable solution for flexible electrodes due to deformability and low bulk resistivity. However, fabrication p...

(This article belongs to the Special Issue Carbon Based Electronic Devices)
  • Communication
  • Open Access
12 Citations
6,514 Views
11 Pages

Bacterial Concentration Detection using a PCB-based Contactless Conductivity Sensor

  • Xiao-Yan Zhang,
  • Zhe-Yu Li,
  • Yu Zhang,
  • Xiao-Qian Zang and ,
  • Kosei Ueno,
  • Hiroaki Misawa and
  • Kai Sun
  • + 2 authors+ 0 author

14 January 2019

Capacitively coupled contactless conductivity detection (C4D) is an improved approach to avoid the problems of labor-intensive, time-consuming and insufficient accuracy of plate count as well as the high-cost apparatus of flow cytometry (FCM) in bact...

(This article belongs to the Special Issue Microfluidics for Cells and Other Organisms)
  • Feature Paper
  • Review
  • Open Access
88 Citations
17,041 Views
19 Pages

State of the Art and Perspectives on Silicon Photonic Switches

  • Xin Tu,
  • Chaolong Song,
  • Tianye Huang,
  • Zhenmin Chen and
  • Hongyan Fu

13 January 2019

In the last decade, silicon photonic switches are increasingly believed to be potential candidates for replacing the electrical switches in the applications of telecommunication networks, data center and high-throughput computing, due to their low po...

(This article belongs to the Section D: Materials and Processing)
  • Article
  • Open Access
34 Citations
9,278 Views
19 Pages

13 January 2019

We present a numerical and experimental study of acoustophoretic manipulation in a microfluidic channel using dual-wavelength standing surface acoustic waves (SSAWs) to transport microparticles into different outlets. The SSAW fields were excited by...

  • Article
  • Open Access
33 Citations
8,105 Views
15 Pages

12 January 2019

This paper presents the design, simulation and mechanical characterization of a newly proposed complementary metal-oxide semiconductor (CMOS)/micro-electromechanical system (MEMS) accelerometer. The monolithic CMOS/MEMS accelerometer was fabricated u...

(This article belongs to the Special Issue MEMS/NEMS Sensors: Fabrication and Application)
  • Article
  • Open Access
29 Citations
7,874 Views
14 Pages

Hybrid 3D Shape Measurement Using the MEMS Scanning Micromirror

  • Tao Yang,
  • Guanliang Zhang,
  • Huanhuan Li and
  • Xiang Zhou

11 January 2019

A surface with large reflection variations represents one of the biggest challenges for optical 3D shape measurement. In this work, we propose an alternative hybrid 3D shape measurement approach, which combines the high accuracy of fringe projection...

(This article belongs to the Special Issue Optical MEMS)
  • Review
  • Open Access
137 Citations
24,040 Views
21 Pages

Recent Developments of Acoustic Energy Harvesting: A Review

  • Ming Yuan,
  • Ziping Cao,
  • Jun Luo and
  • Xiujian Chou

11 January 2019

Acoustic energy is a type of environmental energy source that can be scavenged and converted into electrical energy for small-scale power applications. In general, incident sound power density is low and structural design for acoustic energy harvesti...

(This article belongs to the Section A: Physics)
  • Review
  • Open Access
26 Citations
6,932 Views
19 Pages

Liquid Crystals-Enabled AC Electrokinetics

  • Chenhui Peng and
  • Oleg D. Lavrentovich

10 January 2019

Phenomena of electrically driven fluid flows, known as electro-osmosis, and particle transport in a liquid electrolyte, known as electrophoresis, collectively form a subject of electrokinetics. Electrokinetics shows a great potential in microscopic m...

(This article belongs to the Special Issue AC Electrokinetics in Microfluidic Devices)
  • Communication
  • Open Access
10 Citations
4,725 Views
8 Pages

Investigating the Potential of Commercial-Grade Carbon Black-Filled TPU for the 3D Printing of Compressive Sensors

  • Claudio Manganiello,
  • David Naso,
  • Francesco Cupertino,
  • Orazio Fiume and
  • Gianluca Percoco

10 January 2019

The present research aims to exploit commercially available materials and machines to fabricate multilayer, topologically designed transducers, which can be embedded into mechanical devices, such as soft or rigid grippers. Preliminary tests on the po...

(This article belongs to the Section D: Materials and Processing)
  • Article
  • Open Access
11 Citations
8,058 Views
16 Pages

9 January 2019

Round window (RW) stimulation is a new application of middle ear implants for treating hearing loss, especially for those with middle ear disease. However, most reports on it are based on the use of the floating mass transducer (FMT), which was not o...

(This article belongs to the Special Issue Implantable Microdevices)
  • Article
  • Open Access
5 Citations
4,608 Views
13 Pages

Microfluidic Device for Screening for Target Cell-Specific Binding Molecules by Using Adherent Cells

  • Maho Kaminaga,
  • Tadashi Ishida,
  • Tetsuya Kadonosono,
  • Shinae Kizaka-Kondoh and
  • Toru Omata

9 January 2019

This paper proposes a microfluidic device for screening molecules such as aptamers, antibodies, proteins, etc. for target cell-specific binding molecules. The discovery of cancer cell-specific binding molecules was the goal of this study. Its functio...

(This article belongs to the Special Issue Microfluidics for Cells and Other Organisms)
  • Article
  • Open Access
28 Citations
6,022 Views
9 Pages

Silver Nanowire Ink for Flexible Circuit on Textiles

  • Dexi Du,
  • Xing Yang,
  • Yonglan Yang,
  • Yuzhen Zhao and
  • Yuehui Wang

9 January 2019

Low cost electronics implemented in textiles could pave the way to a fully new generation of smart products in the fields of healthcare, sport, fashion, and safety. Although many methods have found their way into the market, many problems still need...

  • Article
  • Open Access
6 Citations
4,144 Views
18 Pages

9 January 2019

Self-adaptive vibration energy harvesting systems vary their resonance frequency automatically to better exploit changing environmental conditions. The energy required for the adjustment is taken from the energy storage of the harvester module. The e...

(This article belongs to the Section A: Physics)
  • Article
  • Open Access
7 Citations
6,250 Views
8 Pages

Tunable Fiber Laser with High Tuning Resolution in C-band Based on Echelle Grating and DMD Chip

  • Jinliang Li,
  • Xiao Chen,
  • Dezheng Dai,
  • Yunshu Gao and ,
  • Min Lv and
  • Genxiang Chen
  • + 1 author+ 0 author

8 January 2019

The tunable fiber laser with high tuning resolution in the C-band is proposed and demonstrated based on a digital micromirror device (DMD) chip and an echelle grating. The laser employs a DMD as a programmable wavelength filter and an echelle grating...

(This article belongs to the Special Issue Optical MEMS)
  • Article
  • Open Access
23 Citations
9,792 Views
15 Pages

8 January 2019

We developed an implantable electrocardiogram (ECG) monitoring system and demonstrated its performance through an in vivo test. In the system, the implantable device senses not only the ECG signal of the animal but also the voltage level of the secon...

(This article belongs to the Special Issue Implantable Microdevices)
  • Article
  • Open Access
27 Citations
4,943 Views
10 Pages

Demonstration of Fin-Tunnel Field-Effect Transistor with Elevated Drain

  • Jang Hyun Kim,
  • Hyun Woo Kim,
  • Garam Kim,
  • Sangwan Kim and
  • Byung-Gook Park

7 January 2019

In this paper, a novel tunnel field-effect transistor (TFET) has been demonstrated. The proposed TFET features a SiGe channel, a fin structure and an elevated drain to improve its electrical performance. As a result, it shows high-level ON-state curr...

(This article belongs to the Special Issue Extremely-Low-Power Devices and Their Applications)
  • Feature Paper
  • Article
  • Open Access
16 Citations
4,826 Views
12 Pages

7 January 2019

Novel biomarkers and lower limits of detection enable improved diagnostics. In this paper we analyze the influence of flow on the lower limit of electrochemical detection on a microfluidic Compact Disc (CD). Implementing wireless transfer of data red...

(This article belongs to the Section B: Biology and Biomedicine)
  • Article
  • Open Access
15 Citations
7,046 Views
10 Pages

Design and Characterization of Semi-Floating-Gate Synaptic Transistor

  • Yongbeom Cho,
  • Jae Yoon Lee,
  • Eunseon Yu,
  • Jae-Hee Han and ,
  • Myung-Hyun Baek,
  • Seongjae Cho and
  • Byung-Gook Park
  • + 2 authors+ 0 author

7 January 2019

In this work, a study on a semi-floating-gate synaptic transistor (SFGST) is performed to verify its feasibility in the more energy-efficient hardware-driven neuromorphic system. To realize short- and long-term potentiation (STP/LTP) in the SFGST, a...

(This article belongs to the Special Issue Miniaturized Transistors)
  • Article
  • Open Access
17 Citations
5,111 Views
16 Pages

7 January 2019

A squirmer model achieves propulsion by generating surface squirming velocities. This model has been used to analyze the movement of micro-swimmers, such as microorganisms and Janus particles. Although squirmer motion has been widely investigated, mo...

(This article belongs to the Special Issue Microswimmer)
  • Article
  • Open Access
13 Citations
3,606 Views
14 Pages

7 January 2019

Soft nanochannels are defined as nanochannels with a polyelectrolyte layer (PEL) on the rigid walls. In the present study, the thermal transport properties of the fluids through slit soft nanochannels are investigated under the combined influences of...

  • Article
  • Open Access
4 Citations
3,757 Views
10 Pages

Non-Invasive Quantification of the Growth of Cancer Cell Colonies by a Portable Optical Coherence Tomography

  • Meng-Tsan Tsai,
  • Bo-Huei Huang,
  • Chun-Chih Yeh,
  • Kin Fong Lei and
  • Ngan-Ming Tsang

7 January 2019

Investigation of tumor development is essential in cancer research. In the laboratory, living cell culture is a standard bio-technology for studying cellular response under tested conditions to predict in vivo cellular response. In particular, the co...

  • Article
  • Open Access
20 Citations
5,689 Views
12 Pages

Lab on a Chip for the Colorimetric Determination of Nitrite in Processed Meat Products in the Jordanian Market

  • Mohammad F. Khanfar,
  • Nour J. Abu Eisheh,
  • Loiy Al-Ghussain and
  • Ala’aldeen T. Al-Halhouli

7 January 2019

Nitrite and Nitrate have been used extensively as additives in various meat products to enhance flavor, color, and to preserve the meat from the bacterial growth. High concentrations of nitrite can threat human health since several studies in the lit...

  • Article
  • Open Access
7 Citations
4,781 Views
10 Pages

Silver Nanowires from Sonication-Induced Scission

  • Yuehui Wang,
  • Xing Yang and
  • Dexi Du

4 January 2019

Silver nanowires (AgNWs) have great potential to be used in the flexible electronics industry for their applications in flexible, transparent conductors due to high conductivity and light reflectivity. Those applications always involve size which str...

  • Article
  • Open Access
26 Citations
4,254 Views
11 Pages

3 January 2019

Fabrication of the injection nozzle micro-hole on the aero engine is a difficult problem in today’s manufacturing industry. In addition to the size requirements, the nozzle micro-hole also requires no burr, no taper and no heat-affected zone. T...

(This article belongs to the Section D: Materials and Processing)
  • Article
  • Open Access
18 Citations
5,114 Views
12 Pages

Handheld Inkjet Printing Paper Chip Based Smart Tetracycline Detector

  • Jiahao Li,
  • Xin Wang,
  • Yanke Shan,
  • Huachuan Huang and ,
  • Dan Jian,
  • Liang Xue,
  • Shouyu Wang and
  • Fei Liu
  • + 3 authors+ 0 author

1 January 2019

Tetracycline is widely used as medicine for disease treatments and additives in animal feeding. Unfortunately, the abuse of tetracycline inevitably causes tetracycline residue in animal-origin foods. Though classical methods can detect tetracycline i...

(This article belongs to the Section A: Physics)
  • Review
  • Open Access
37 Citations
11,053 Views
20 Pages

31 December 2018

This paper is a review that surveys work on the fabrication of miniature alkali vapor cells for miniature and chip-scale atomic clocks. Technology on microelectromechanical systems (MEMS) cells from the literature is described in detail. Special atte...

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Micromachines - ISSN 2072-666X