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A Novel Fabricating Process of Catalytic Gas Sensor Based on Droplet Generating Technology

School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China
School of Media and Design, Hangzhou Dianzi University, Hangzhou 310018, China
Author to whom correspondence should be addressed.
Micromachines 2019, 10(1), 71;
Received: 25 November 2018 / Revised: 25 December 2018 / Accepted: 15 January 2019 / Published: 20 January 2019
(This article belongs to the Special Issue MEMS/NEMS Sensors: Fabrication and Application)
PDF [6833 KB, uploaded 20 January 2019]


Catalytic gas sensors are widely used for measuring concentrations of combustible gases to prevent explosive accidents in industrial and domestic environments. The typical structure of the sensitive element of the sensor consists of carrier and catalyst materials, which are in and around a platinum coil. However, the size of the platinum coil is micron-grade and typically has a cylindrical shape. It is extremely difficult to control the amount of carrier and catalyst materials and to fulfill the inner cavity of the coil, which adds to the irreproducibility and uncertainty of the sensor performance. To solve this problem, this paper presents a new method which uses a drop-on-demand droplet generator to add the carrier and catalytic materials into the platinum coil and fabricate the micropellistor. The materials in this article include finely dispersed Al2O3 suspension and platinum palladium (Pd-Pt) catalyst. The size of the micropellistor with carrier material can be controlled by the number of the suspension droplets, while the amount of Pd-Pt catalyst can be controlled by the number of catalyst droplets. A bridge circuit is used to obtain the output signal of the gas sensors. The original signals of the micropellistor at 140 mV and 80 mV remain after aging treatment. The sensitivity and power consumption of the pellistor are 32 mV/% CH4 and 120 mW, respectively. View Full-Text
Keywords: gas sensor; micropellistor; microdroplet; pulse inertia force; methane gas sensor; micropellistor; microdroplet; pulse inertia force; methane

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Wu, L.; Zhang, T.; Wang, H.; Tang, C.; Zhang, L. A Novel Fabricating Process of Catalytic Gas Sensor Based on Droplet Generating Technology. Micromachines 2019, 10, 71.

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