- Article
Resolution Enhancement in Extreme Ultraviolet Ptychography Using a Refined Illumination Probe and Small-Etendue Source
- Seungchan Moon,
- Junho Hong,
- Taeho Lee and
- Jinho Ahn
Extreme ultraviolet (EUV) ptychography is a promising actinic mask metrology technique capable of providing aberration-free images with subwavelength resolution. However, its performance is fundamentally constrained by the strong absorption of EUV li...

