MEMS Gas Sensors and Electronic Nose

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "B:Biology and Biomedicine".

Deadline for manuscript submissions: 31 August 2026 | Viewed by 1701

Special Issue Editors


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Guest Editor
Zhejiang Provincial Engineering Research Center of Energy Optoelectronic Materials and Devices, Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
Interests: gas sensors; electronic nose; flexible electronics; MEMS-based intelligent sensing materials and devices

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Guest Editor
School of Biomedical Engineering, Dalian University of Technology, Dalian 116024, China
Interests: electronic nose system; gas sensors; integrated microsensor technology; heat transfer in micro/nano electronic systems

Special Issue Information

Dear Colleagues,

Gas sensors play a critical role in environmental monitoring, industrial safety, and medical diagnostics, with emerging applications in smart cities and wearable devices. Recent breakthroughs in nanomaterials, MEMS fabrication, and AI-driven signal processing have significantly enhanced gas sensor performance, enabling unprecedented sensitivity, selectivity, and miniaturization. However, challenges such as long-term stability, cross-sensitivity, and cost-effective mass production remain unresolved.

This Special Issue aims to showcase cutting-edge advancements in MEMS gas sensors and electronic nose technologies, spanning four key thematic areas:

  1. MEMS Semiconductor Gas Sensors: Materials and processes, sensing mechanisms, device fabrication, packaging solutions, working modes, and performance breakthroughs.
  2. MEMS Optical Gas Sensors: Materials and processes, sensing mechanisms, device fabrication, packaging solutions, working modes, and performance breakthroughs.
  3. Other MEMS Gas Sensors: Materials and processes, sensing mechanisms, device fabrication, packaging solutions, working modes, and performance breakthroughs.
  4. Smart Algorithms: Qualitative and quantitative identification of multi-component gases, gas fingerprint recognition, compensation methods for sensor drift, temperature modulation algorithm, lightweight calibration technology, etc.
  5. Electronic Nose Applications: Food industry, environmental monitoring, medical diagnostics, product quality monitoring, etc.

Dr. Wenfeng Shen
Dr. Jun Yu
Guest Editors

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Keywords

  • MEMS semiconductor gas sensors
  • MEMS optical gas sensors
  • electronic nose and its applications

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Published Papers (1 paper)

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Research

17 pages, 3422 KB  
Article
MOF-Derived Co3O4 Dodecahedrons with Abundant Active Co3+ for CH4 Gas Sensing at Room Temperature
by Xueqi Wang, Yu Hong, Guohui Wu, Yujie Hou, Shengnan Zhao, Binbin Dong, Jianchun Fan and Jun Yu
Micromachines 2026, 17(2), 247; https://doi.org/10.3390/mi17020247 - 13 Feb 2026
Cited by 1 | Viewed by 1363
Abstract
Gas sensors based on metal oxide semiconductors (MOS) have attracted significant attention in monitoring of methane emission and leakage monitoring due to their high sensitivity, fast response time, simple structure and low cost. However, the high power consumption caused by long-term high-temperature operation [...] Read more.
Gas sensors based on metal oxide semiconductors (MOS) have attracted significant attention in monitoring of methane emission and leakage monitoring due to their high sensitivity, fast response time, simple structure and low cost. However, the high power consumption caused by long-term high-temperature operation of MOS sensors restricts their application in mobile and portable devices. In this study, MOF-derived Co3O4 dodecahedrons for low-concentration methane detection at room temperature was prepared using Zeolitic Imidazolate Framework-67 (ZIF-67) as a template and with various calcination temperatures. Among them, the Co3O4-350 calcined at 350 °C exhibited the optimal CH4 sensing performance at room temperature, with a response of Rg/Ra = 1.53 to 2000 ppm CH4. This enhanced gas sensing performance is attributed to the highest Co3+ proportions and the largest specific surface area in Co3O4-350 nanomaterials, which provided more active sites for gas adsorption and reaction. To address the challenge of slow response speed and irrecoverability during CH4 detection at room temperature, the Co3O4 nanomaterials were printed onto a micro-heater plate (MHP) to form a MEMS gas sensor. By introducing a pulse heating mode to the MEMS sensor, the response and recovery time were significantly reduced to 26 s and 21 s, respectively. This enhancement improves both the efficiency and reliability of the MEMS gas sensor for early-stage detection of CH4 leaks in various industrial applications. Full article
(This article belongs to the Special Issue MEMS Gas Sensors and Electronic Nose)
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