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A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".

Deadline for manuscript submissions: 31 August 2026 | Viewed by 6572

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Special Issue Editor

Prof. Dr. Zhidong Zhang

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Guest Editor

School of Instrument and Electronics, North University of China, Taiyuan 030051, China
Interests: micro/nano optical devices; optical sensing; plasmonic resonance; metasurfaces

Special Issue Information

Dear Colleagues,

This Special Issue on “Micro/Nano Optical Devices and Sensing Technology” addresses a cutting-edge and rapidly evolving area at the intersection of optics, materials science, and nanotechnology.

Sensing technology within this field exploits the sensitivity of micro/nano optical devices to detect various physical, chemical, and biological parameters. In addition, micro/nano optical devices are used in optical communication systems to increase data transmission rates and reduce energy consumption. They enable the integration of multiple optical functions on a single chip, leading to more compact and cost-effective optical communication modules. The fabrication of micro/nano optical devices often requires advanced techniques such as electron beam lithography, focused ion beam milling, and self-assembly methods, which allow for the precise control of device structures and properties at the nanoscale.

In conclusion, micro/nano optical devices and sensing technology hold great promise for revolutionizing various fields, from healthcare and environmental protection to information technology, by providing highly sensitive, compact, and efficient optical solutions through the manipulation of light at the micro- and nanoscales.

Prof. Dr. Zhidong Zhang
Guest Editor

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Keywords

micro/nano optical devices
optical sensing
photonic crystals
plasmonic resonance
metasurfaces
micro/nano fabrication

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Published Papers (6 papers)

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Research

23 pages, 3588 KB

Open AccessArticle

Laser-Tracker-Based Robot Pose Measurement Using PSD Spot Sensing and Multi-Sensor Fusion with Simulation Validation

by Suli Wang, Jing Yang and Xiaodan Sang

Micromachines 2026, 17(3), 290; https://doi.org/10.3390/mi17030290 - 26 Feb 2026

Viewed by 706

Abstract

Accurate measurement of robotic pose is indispensable for large-scale precision manufacturing and robotic calibration, particularly because traditional robotic kinematic models often fall short owing to environmental disturbances and structural uncertainties. Laser tracker systems offer high-precision, large-volume measurement capabilities and are therefore appealing as external references for robot pose estimation; however, their practical efficacy is heavily reliant on optical tracking stability, sensor noise levels, and system robustness. This paper introduces a laser tracker-based framework for measuring robot pose, which integrates PSD-based optical spot sensing, multi-sensor fusion, and simulation-based system analysis. A prototype PSD sensing subsystem has been developed utilizing analog signal conditioning, high-speed A/D sampling, and FPGA-based centroid computation. Bench experiments validate the linearity, geometric sensitivity, and robustness of the PSD sensing chain under controlled spot translations and various ambient illumination conditions. Results demonstrate that the PSD response is nearly linear within a ±0.9 mm spot displacement and that the implementation of an interference optical filter significantly enhances measurement repeatability under background light. At the system level, a comprehensive simulation framework is established wherein PSD measurements are fused with inertial and encoder data via an extended Kalman filter. The simulations explore the effects of process noise tuning, time synchronization, systematic error sources, and control strategies on pose estimation accuracy. Ranging-related effects and error-compensation mechanisms are analyzed within the context of modeling and simulation, providing insights into the interferometric ranging principle underlying the complete laser tracker system. The validation of the prototype alongside simulation results demonstrates that PSD-based optical tracking, combined with multi-sensor fusion and layered error compensation, can effectively improve robustness and positional accuracy. The proposed framework offers valuable guidance for the development and phased validation of laser tracker-oriented robot pose measurement systems in complex industrial environments. Full article

(This article belongs to the Special Issue Micro/Nano Optical Devices and Sensing Technology)

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12 pages, 1418 KB

Open AccessArticle

Experimental Verification of Model-Based Wavefront Sensorless Adaptive Optics System for Large Aberrations

by Huizhen Yang, Yongqiang Miao, Peng Chen, Zhiguang Zhang and Zhaojun Yan

Micromachines 2026, 17(1), 58; https://doi.org/10.3390/mi17010058 - 31 Dec 2025

Viewed by 674

Abstract

To address the limitations of conventional wavefront sensorless adaptive optics (AO) systems regarding iteration efficiency and convergence speed, this study conducts an experimental validation of a model-based wavefront sensorless AO approach. A physical experimental platform was established, which consisted of a light source, a Shack–Hartmann wavefront sensor, a deformable mirror (DM), and an imaging detector. Wavefront aberrations under different turbulence levels were employed as correction objects to evaluate the performance of the model-based wavefront sensorless AO system. For comparative analysis, experimental results obtained by using the classical stochastic parallel gradient descent (SPGD) control algorithm are also presented. Under identical software and hardware conditions, the experimental results show that as the turbulence level increases, the SPGD-based wavefront sensorless AO system requires a larger number of iterations and exhibits a slower convergence. In contrast, the model-based wavefront sensorless AO system demonstrates improved applicability and robustness in correcting large aberrations under strong turbulence levels, maintaining an almost constant convergence speed and achieving better correction performance. These findings offer theoretical insights and technical support for the real-time correction potential of large wavefront aberrations. Full article

(This article belongs to the Special Issue Micro/Nano Optical Devices and Sensing Technology)

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17 pages, 5847 KB

Open AccessArticle

A Dynamic Compensation Method Based on Pulse Width for Laser Ranging and Distance Determination in Precision-Guided Aircraft

by Jinghao Li, Zhipeng Li, Yuheng He, Kuizheng Li and Hejuan Chen

Micromachines 2025, 16(12), 1409; https://doi.org/10.3390/mi16121409 - 15 Dec 2025

Cited by 1 | Viewed by 1659

Abstract

This paper proposes a dynamic compensation method for laser ranging based on pulse width for the miniaturization and high-precision requirements of the initiation device in precision-guided aircraft. The study aims to improve the measurement accuracy of the laser ranging unit in the initiation device system and ensure the accuracy and reliability of its fixed-distance initiation decision. The variation in echo pulse width is analyzed by studying laser echo characteristics. The pulse width and the detection distance exhibit an approximately linear negative correlation within the middle range of the applicable distance range. A dynamic compensation method is proposed based on a dual-correction approach using a static lookup table and dynamic compensation. This method establishes the mapping relationship between pulse width and distance deviation, and achieves distance correction by adding distance deviation compensation to the basic value from the static lookup table. The dynamic compensation system integrated with calibration and correction is designed and implemented, and the feasibility of the dynamic compensation method is verified by testing. The relative error between the calculated correction distance and the actual distance is small, and the average relative error is about 1.33%. The proposed method provides key technical support for the establishment of miniaturized and intelligent initiation devices. Full article

(This article belongs to the Special Issue Micro/Nano Optical Devices and Sensing Technology)

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21 pages, 3185 KB

Open AccessArticle

BPEI-Based N-Doped Carbon Dots with Sensitive and Selective Cu²⁺ Ion-Sensing Ability

by Sahin Demirci, Jorge H. Torres and Nurettin Sahiner

Micromachines 2025, 16(11), 1275; https://doi.org/10.3390/mi16111275 - 13 Nov 2025

Viewed by 1071

Abstract

In this research, we examined the potential sensor characteristics of branched polyethyleneimine (BPEI)-derived carbon dots (CDs) synthesized using BPEI as a nitrogen source and citric acid (CA) as a carbon source, specifically for the recognition of various metal ions. Among the BPEI CDs produced with different amounts of BPEI to CA BPEI:CA ratios of 0.5:1, 1:1, and 2:1 w/w, named as BPEI^0.5 CD, BPEI¹ CD, and BPEI² CD, respectively. The BPEI^0.5 CD, which contains the least BPEI, exhibited the highest fluorescence intensity: 50,300 a.u. in a 0.6 mg/mL solution were recorded as λ_em: 420 nm at λ_ex: 360 nm and 600 V PMT voltage with 5 nm of slit width for both excitation and emission. We investigated the fluorescence variations in BPEI CD-based CDs in 2 mL solutions containing Cd²⁺, Co²⁺, Cu²⁺, Ni²⁺, and Pb²⁺ metal ions at various concentrations. Amongst these metal ions, the most pronounced sensitivity was noted for Cu²⁺ ions with a limit of detection (LOD) value of 0.39 ppm. For BPEI CDs created with BPEI:CA ratios of 0.5:1, 1:1, and 2:1 w/w, the sensitivity to Cu²⁺ ions increased with a higher BPEI ratio, with a LOD value of 0.30 ppm recorded for BPEI² CDs. Moreover, Cu²⁺ ion solutions were prepared from various salts, including chloride, acetate, nitrate, and sulfate; aside from some fluorescence variation observed for BPEI^0.5 CDs, no significant difference in BPEI CD fluorescence change was observed with the use of the various salt solutions of Cu²⁺ ion. In quenching experiments conducted on mixtures of Cd²⁺, Co²⁺, Cu²⁺, Ni²⁺, and Pb²⁺ metal ions with Cu²⁺, it was noted that BPEI CDs displayed selectivity for Cu²⁺ ions. Furthermore, the structures of BPEI CDs have been effectively utilized in real water samples, such as tap water and seawater, demonstrating a quenching capability of over 65% in the presence of 50 ppm Cu²⁺ ions. Full article

(This article belongs to the Special Issue Micro/Nano Optical Devices and Sensing Technology)

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14 pages, 2407 KB

Open AccessArticle

LiDAR-Based Safety Envelope Detection with Accelerometer and DTW for Intrusion Localization in Roller Coasters

by Huajie Wang, Zhao Zhao, Yifeng Sun and Weikei Song

Micromachines 2025, 16(9), 1062; https://doi.org/10.3390/mi16091062 - 19 Sep 2025

Viewed by 1186

Abstract

Autonomous vehicles, submersible robotic systems and drones, and other human-carrying equipment consistently adhere to a safety perimeter, ensuring collision-free navigation amidst surrounding objects. In contrast, roller coaster vehicles, despite being constrained to a predetermined track, necessitate frequent safety distance detection owing to the variability introduced by trees and decorative installations. Passengers’ limbs may protrude beyond vehicle boundaries, posing a collision hazard. The motion range of limbs, influenced by vehicle-specific conditions, mismatches standardized safety volumes (cylindrical, cubic, and rectangular) designed for mobile entities. The roller coaster industry’s current practice involves a moving safety frame, which visually inspects for collisions to assess safety distances, which is cumbersome and prone to oversight in intricate settings. Therefore, this study introduces a novel safety envelope detector (SE-detector). It creates a customer-defined virtual safety envelope around the roller coaster vehicle and measures the safety distance based on LiDAR (Light Detection and Ranging) to detect the intrusions of obstacles. Meanwhile, this SE-detector also innovatively integrated an accelerometer to synchronously measure the acceleration of the vehicle. The measured acceleration will be aligned with simulated sequences by dynamic time warping (DTW) algorithms to pinpoint intrusion location. Additionally, a wide-angle camera is also deployed to enhance perception of the surrounding environment. The SE-detector developed in this study has the capability to record inspection results. It is expected to enhance the inspection capabilities of the safety envelope for roller coasters, thereby improving the efficiency of safety distance inspection. Full article

(This article belongs to the Special Issue Micro/Nano Optical Devices and Sensing Technology)

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12 pages, 1086 KB

Open AccessArticle

Research on High-Precision Measurement Technology of the Extinction Ratio Based on the Transparent Element Mueller Matrix

by Ruiqi Xu, Mingpeng Hu, Xuedong Cao and Jiahui Ren

Micromachines 2025, 16(7), 781; https://doi.org/10.3390/mi16070781 - 30 Jun 2025

Viewed by 839

Abstract

With the widespread application of optical technology in numerous fields, the polarization performance of transmissive optical components has become increasingly crucial. The extinction ratio, an important indicator for evaluating their polarization characteristics, holds great significance for its precise detection. Aiming at the measurement of the extinction ratio of a transparent component, this study proposes a measurement method for solving the extinction ratio based on measuring the Mueller matrix of the transparent component. The purpose is to analyze the worst position of the extinction ratio of the transmissive component. The extinction ratio of the sample is obtained according to the phase retardation derived from the Stokes vector of the incident light and the Mueller matrix of the optical component, and a theoretical analysis and simulation of this method are carried out. The simulation results verify the feasibility of the theoretical derivation of this method. To further verify the accuracy of the measurement method, experimental verification is conducted. A standard transparent sample with a phase retardation of 13 nm is selected for actual measurement. The data of independent experiments on the transparent sample under different powers are analyzed, and the extinction ratio of the transparent sample is further obtained. When using this method, the relative error is less than 2%, indicating good accuracy. Full article

(This article belongs to the Special Issue Micro/Nano Optical Devices and Sensing Technology)

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