- Article
Influence of Lithography Process Parameters on Continuous Surface Diffractive Optical Elements for Laser Beam Shaping
- Wenjing Liu,
- Axiu Cao,
- Junbo Liu,
- Hui Pang,
- Qiling Deng,
- Jian Wang and
- Song Hu
To address the demand for laser beam-shaping techniques, we developed a one-step exposure process based on moving-mask lithography for the fabrication of a continuous-surface diffractive optical element (DOE) for laser beam shaping. The fabrication p...

