- Article
 
Influence of Lithography Process Parameters on Continuous Surface Diffractive Optical Elements for Laser Beam Shaping
- Wenjing Liu,
 - Axiu Cao,
 - Junbo Liu,
 - Hui Pang,
 - Qiling Deng,
 - Jian Wang and
 - Song Hu
 
To address the demand for laser beam-shaping techniques, we developed a one-step exposure process based on moving-mask lithography for the fabrication of a continuous-surface diffractive optical element (DOE) for laser beam shaping. The fabrication p...

