3D Integration: Trends, Challenges and Opportunities

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E:Engineering and Technology".

Deadline for manuscript submissions: closed (30 April 2025) | Viewed by 1549

Special Issue Editors


E-Mail Website
Guest Editor
School of Electronic and Computer Engineering, Peking University Shenzhen Graduate School, Shenzhen 518055, China
Interests: micro/nano fabrication; MEMS (micro-electromechanical systems) sensors; TSV; three-dimensional integration
Special Issues, Collections and Topics in MDPI journals

E-Mail Website
Guest Editor
System Packaging and Integration Research Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
Interests: 3D integration; hybrid bonding; antenna-in-package; power module
Special Issues, Collections and Topics in MDPI journals

E-Mail Website
Guest Editor
Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361005, China
Interests: 3D (three-dimensional) integration; TSV (through-silicon via) three-dimensional integration manufacturing techniques; wafer-bonding technology; embedded microfluidic cooling technology; PMUT (piezoelectric micromachined ultrasonic transduce) and its applications
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

As chip fabrication processes continue to diminish in size and approach the physical limits, relying on reducing transistor gate dimensions to achieve optimal chip performance and complex chip structures presents substantial challenges. Shifting towards new chip design architectures, 3D chip stacking has become a popular technical path. The rapid development of 3D integration technology, incorporating new materials and fabrication processes, is being extensively applied in various areas of chip integration and packaging manufacturing. This aims to enhance chip functionalities and achieve miniaturization in system integration while reducing costs.

In view of the latest advancements in this field, we announce this Special Issue, titled “3D Integration: Trends, Challenges and Opportunities”. Therefore, we invite the submission of papers in the fields of integrated circuit manufacturing, electronic engineering, communication technology, advanced packaging technology, and 3D integration application technology. We welcome the submission of papers related to all aspects of 3D integration technology, including, but not limited to, the following:

  • TSV three-dimensional integration manufacturing technology;
  • Manufacturability and reliability modeling and simulation technology;
  • Efficient thermal management technology;
  • Embedded microchannel technology;
  • Integrated circuit design;
  • New methods in electronic packaging and interconnect technology;
  • New materials and processes in microelectronics manufacturing;
  • System-level packaging technology;
  • Application of nanotechnology and quantum computing in 3D integration;
  • Novel sensor manufacturing and packaging technology;
  • Micro electromechanical

Through these in-depth analyses and discussions, we aim to provide new insights and directions for the innovation and development of 3D integration technology.

Prof. Dr. Yufeng Jin
Dr. Qidong Wang
Dr. Shenglin Ma
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2100 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • 3D integration
  • advanced packaging
  • TSV
  • microchannels
  • DFM
  • DFR
  • integrated circuit design
  • reliability
  • manufacturability
  • sensors

Benefits of Publishing in a Special Issue

  • Ease of navigation: Grouping papers by topic helps scholars navigate broad scope journals more efficiently.
  • Greater discoverability: Special Issues support the reach and impact of scientific research. Articles in Special Issues are more discoverable and cited more frequently.
  • Expansion of research network: Special Issues facilitate connections among authors, fostering scientific collaborations.
  • External promotion: Articles in Special Issues are often promoted through the journal's social media, increasing their visibility.
  • e-Book format: Special Issues with more than 10 articles can be published as dedicated e-books, ensuring wide and rapid dissemination.

Further information on MDPI's Special Issue policies can be found here.

Published Papers (1 paper)

Order results
Result details
Select all
Export citation of selected articles as:

Research

14 pages, 5008 KiB  
Article
The Effect of BEOL Design Factors on the Thermal Reliability of Flip-Chip Chip-Scale Packaging
by Dejian Li, Bofu Li, Shunfeng Han, Dameng Li, Baobin Yang, Baoliang Gong, Zhangzhang Zhang, Chang Yu and Pei Chen
Micromachines 2025, 16(2), 121; https://doi.org/10.3390/mi16020121 - 22 Jan 2025
Viewed by 960
Abstract
With the development of high-density integrated chips, low-k dielectric materials are used in the back end of line (BEOL) to reduce signal delay. However, due to the application of fine-pitch packages with high-hardness copper pillars, BEOL is susceptible to chip package interaction (CPI), [...] Read more.
With the development of high-density integrated chips, low-k dielectric materials are used in the back end of line (BEOL) to reduce signal delay. However, due to the application of fine-pitch packages with high-hardness copper pillars, BEOL is susceptible to chip package interaction (CPI), which leads to reliability issues such as the delamination of interlayer dielectric (ILD) layers. In order to improve package reliability, the effect of CPI at multi-scale needs to be explored in terms of package integration. In this paper, the stress of BEOL in the flip-chip chip-scale packaging (FCCSP) model during thermal cycling is investigated by using the finite-element-based sub-model approach. A three-dimensional (3D) multi-level finite element model is established based on the FCCSP. The wiring layers were treated by the equivalent homogenization method to ensure high prediction accuracy. The stress distribution of the BEOL around the critical bump was analyzed. The cracking risk of the interface layer of the BEOL was assessed by pre-cracking at a dangerous location. In addition, the effects of the epoxy molding compound (EMC) thickness, polyimide (PI) opening, and coefficient of thermal expansion (CTE) of the underfill on cracking were investigated. The simulation results show that the first principal stress of BEOL is higher at high-temperature moments than at low-temperature moments, and mainly concentrated near the PI opening. Compared with the oxide layer, the low-k layer has a higher risk of cracking. A smaller EMC thickness, lower CTE of the underfill, and larger PI opening help to reduce the risk of cracking in the BEOL. Full article
(This article belongs to the Special Issue 3D Integration: Trends, Challenges and Opportunities)
Show Figures

Figure 1

Back to TopTop