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Micromachines
Special Issues
Surface and Bulk Acoustic Wave Devices
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Surface and Bulk Acoustic Wave Devices

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".

Deadline for manuscript submissions: 30 June 2025 | Viewed by 5688

Special Issue Editors

Dr. Jinkai Chen

E-Mail Website
Guest Editor
Ministry of Education Key Laboratory of RF Circuits and Systems, College of Electronics & Information Hangzhou Dianzi University, Hangzhou 310000, China
Interests: piezoelectric; triboelectric; wireless sensing
Special Issues, Collections and Topics in MDPI journals
Prof. Dr. Shurong Dong

E-Mail Website
Guest Editor
College of Information Science & Electronic Engineering, Zhejiang University, Hangzhou 310027, China
Interests: resonators; SAW; FBAR; wearable/implantable electronics
Special Issues, Collections and Topics in MDPI journals
Dr. Hao Jin

E-Mail Website
Guest Editor
College of Information Science & Electronic Engineering, Zhejiang University, Hangzhou 310027, China
Interests: silicon-based micro/nanofabrication; electrokinetic-based separation and enrichment methods; biomicrofluidics; biosensors and lab-on-a-chip systems for biomedical applications
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

Surface Acoustic Wave (SAW) and Bulk Acoustic Wave (BAW) devices are pivotal in various applications across telecommunications, consumer electronics, and sensor systems. These devices capitalize on acoustic waves to provide solutions for signal processing, sensing, and actuation at microscale levels. In this Special Issue, we aim to showcase cutting-edge research that highlights the development, optimization, and application of SAW and BAW devices. Contributions may cover a range of topics including, but not limited to, novel fabrication techniques, material innovations, theoretical modeling, and application-driven studies of these devices in new and existing fields. We invite researchers and practitioners to share their insights and findings that contribute to pushing the boundaries of what is possible with acoustic wave technology.

Dr. Jinkai Chen
Prof. Dr. Shurong Dong
Dr. Hao Jin
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2100 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • acoustic wave sensors
  • piezoelectric materials
  • signal processing
  • fabrication techniques
  • material innovations
  • device optimization
  • theoretical modeling

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Published Papers (5 papers)

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Research

12 pages, 1418 KiB  
Communication
Bulk Acoustic Wave Resonance Characteristics of PMN-PT Orthorhombic Crystal Plates Excited by Lateral Electric Fields
by Boyue Su, Yujie Zhang, Feng Yu, Pengfei Kang, Tingfeng Ma, Peng Li, Zhenghua Qian, Iren Kuznetsova and Vladimir Kolesov
Micromachines 2025, 16(5), 600; https://doi.org/10.3390/mi16050600 - 21 May 2025
Abstract
For relaxor ferroelectric single crystal (1 − x)Pb(Mg1/3Nb2/3)O3 − xPbTiO3 (PMN-PT), through reasonable component regulation and electric field polarization, an orthogonal mm2 point group structure can be obtained, which has high piezoelectric constants and is, therefore, [...] Read more.
For relaxor ferroelectric single crystal (1 − x)Pb(Mg1/3Nb2/3)O3 − xPbTiO3 (PMN-PT), through reasonable component regulation and electric field polarization, an orthogonal mm2 point group structure can be obtained, which has high piezoelectric constants and is, therefore, a desired substrate material for lateral-field-excited (LFE) bulk acoustic wave (BAW) devices. In this work, acoustic wave resonance characteristics of (zxt) 45° PMN-PT BAW devices with LFE are investigated. Firstly, Mindlin first-order plate theory is used to obtain vibration governing equations of orthorhombic crystals excited by a lateral electric field. By analyzing the electrically forced vibrations of the finite plate, the basic vibration characteristics, such as motional capacitance, resonant frequency, and mode shape are obtained, and influences of different electrode parameters on resonance characteristics of the device are investigated. In addition, the effects of the structure parameters on the mass sensitivity of the devices are analyzed and further verified by FEM simulations. The model presented in this study can be conveniently used to optimize the structural parameters of LFE bulk acoustic wave devices based on orthorhombic crystals, which is crucial to obtain good resonance characteristics. The results provide an important basis for the design of LFE bulk acoustic wave resonators and sensors by using PMN-PT orthorhombic crystals. Full article
(This article belongs to the Special Issue Surface and Bulk Acoustic Wave Devices)
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12 pages, 3094 KiB  
Article
High-Pulse-Repetition-Rate Eye-Safe Raman Laser with Acousto-Optic Q-Switched Device
by Yu-Hsin Hsu, Song-Qing Lin, Dai-Jun Liu, Hsing-Chih Liang and Yung-Fu Chen
Micromachines 2025, 16(2), 222; https://doi.org/10.3390/mi16020222 - 16 Feb 2025
Viewed by 615
Abstract
The acousto-optic Q-switch is exploited to develop a high-repetition-rate eye-safe Raman laser at 1526 nm. The Nd:YVO4 and KGW crystals are employed as the fundamental laser and Stokes Raman gain materials, respectively. The influence of the gate-open time on the performance is [...] Read more.
The acousto-optic Q-switch is exploited to develop a high-repetition-rate eye-safe Raman laser at 1526 nm. The Nd:YVO4 and KGW crystals are employed as the fundamental laser and Stokes Raman gain materials, respectively. The influence of the gate-open time on the performance is systematically explored for the repetition rate between 80 and 150 kHz. The separate configuration is used to construct the resonant cavities for the fundamental and Stokes waves to achieve a pulse width that is as short as possible. Under the optimal alignment, the average output power can exceed 5.0 W at a pump power of 30 W for a repetition rate within 100–150 kHz with a gate-open time of 0.5 μs. In addition, the output peak power can be greater than 10 kW for a pulse repetition rate between 80 and 120 kHz. The optical-to-optical conversion efficiency is up to 16.7%, which is better than that obtained by the Nd:YVO4/YVO4 system. Full article
(This article belongs to the Special Issue Surface and Bulk Acoustic Wave Devices)
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15 pages, 3594 KiB  
Article
Numerical Design and Optimization of High Performance Langasite and Hetero-Acoustic Layer-Based Surface Acoustic Wave Device
by Minglong Deng, Jinkai Chen, Jikai Zhang, Weilun Xie, Hao Jin, Weipeng Xuan, Shurong Dong and Jikui Luo
Micromachines 2025, 16(2), 166; https://doi.org/10.3390/mi16020166 - 30 Jan 2025
Viewed by 739
Abstract
La3Ga5SiO14 (langasite, LGS)-based surface acoustic wave (SAW) devices are widely used for industrial health monitoring in harsh high-temperature environments. However, a conventional LGS-based SAW structure has a low quality factor (Q) due to its spurious resonant peaks. A [...] Read more.
La3Ga5SiO14 (langasite, LGS)-based surface acoustic wave (SAW) devices are widely used for industrial health monitoring in harsh high-temperature environments. However, a conventional LGS-based SAW structure has a low quality factor (Q) due to its spurious resonant peaks. A hetero-acoustic layer (HAL)-based structure can effectively enhance the Q factor and the figure of merit (FOM) of SAWs due to its better energy confinement of SAWs. In this work, a HAL-based structure is proposed to achieve a high FOM and high-temperature resistance at the same time. Based on the finite element method (FEM) and coupling-of-model (COM) combined simulation, a systematic numerical investigation was conducted to find the optimal materials and structural parameters considering the viability of an actual fabricating process. After optimizing the layer number, an intermediate-layer material choice and structural parameters, Pt/(0°, 138.5°, 27°) LGS/YX-LGS/SiC HAL structure were chosen. The proposed structure achieves a Q factor and FOM improvement of more than 5 and 2.6 times higher than those of conventional SAW structures, which is important for the development of high temperature SAW sensors. These findings pave a viable method for improving the Q factor and FOM of LGS-based SAW and can provide material and device structural design guidance for fabrication and high-temperature applications in the future. Full article
(This article belongs to the Special Issue Surface and Bulk Acoustic Wave Devices)
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11 pages, 3673 KiB  
Article
High Q GaN/SiC-Based SAW Resonators for Humidity Sensor Applications
by Dan Vasilache, Claudia Nastase, George Boldeiu, Monica Nedelcu, Catalin Parvulescu, Adrian Dinescu and Alexandru Muller
Micromachines 2025, 16(2), 150; https://doi.org/10.3390/mi16020150 - 28 Jan 2025
Viewed by 2751
Abstract
This paper presents the simulation and experimental results for high-frequency surface acoustic wave (SAW) sensors for humidity detection. The SAW structures with a wavelength of 680 nm are fabricated on GaN/SiC and presented two resonance frequencies: ~6.66 GHz for the Rayleigh propagation mode [...] Read more.
This paper presents the simulation and experimental results for high-frequency surface acoustic wave (SAW) sensors for humidity detection. The SAW structures with a wavelength of 680 nm are fabricated on GaN/SiC and presented two resonance frequencies: ~6.66 GHz for the Rayleigh propagation mode and ~8 GHz for the Sezawa mode. A SiO2 thin layer (~50 nm thick) was employed for the functionalization of the SAW. Relative humidity characterization was performed in the range of 20–90%. The SAW sensors achieved high values of humidity sensitivity for both adsorption and desorption. The Sezawa mode showed about 2.5 times higher humidity sensitivity than the Rayleigh mode: 17.2 KHz/%RH versus 6.17 KHz/%RH for adsorption and 8.88 KHz/%RH versus 3.79 KHz/%RH for desorption. Full article
(This article belongs to the Special Issue Surface and Bulk Acoustic Wave Devices)
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12 pages, 3482 KiB  
Article
Driving Rotational Circulation in a Microfluidic Chamber Using Dual Focused Surface-Acoustic-Wave Beams
by Jin-Chen Hsu and Kai-Li Liao
Micromachines 2025, 16(2), 140; https://doi.org/10.3390/mi16020140 - 25 Jan 2025
Viewed by 984
Abstract
In this paper, enhanced rotational circulation in a circular microfluidic chamber driven by dual focused surface-acoustic-wave (SAW) beams is presented. To characterize the resonant frequency and focusing effect, we simulate the focused SAW field excited by an arc-shaped interdigital transducer patterned on a [...] Read more.
In this paper, enhanced rotational circulation in a circular microfluidic chamber driven by dual focused surface-acoustic-wave (SAW) beams is presented. To characterize the resonant frequency and focusing effect, we simulate the focused SAW field excited by an arc-shaped interdigital transducer patterned on a 128°Y-cut lithium-niobate (LiNbO3) substrate using a finite element method. A full three-dimensional perturbation model of the combined system of the microfluidic chamber and the SAW device is conducted to obtain the acoustic pressure and acoustic streaming fields, which show rotational acoustic pressure and encircling streaming resulted in the chamber. Accordingly, the SAW acoustofluidic system is realized using microfabrication techniques and applied to perform acoustophoresis experiments on submicron particles suspending in the microfluidic chamber. The result verifies the rotational circulation motion of the streaming flow, which is attributed to enhanced angular momentum flux injection and Eckart streaming effect through the dual focused SAW beams. Our results should be of importance in driving particle circulation and enhancing mass transfer in chamber embedded microfluidic channels, which may have promising applications in accelerating bioparticle or cell reactions and fusion, enhancing biochemical and electrochemical sensing, and efficient microfluidic mixing. Full article
(This article belongs to the Special Issue Surface and Bulk Acoustic Wave Devices)
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