Micromachines, Volume 16, Issue 4

The ending of Moore’s Law calls for innovations in integrated circuit (IC) technologies and chip designs. Heterogeneous integration (HI) emerges as a pathway towards smart future chips for more Moore time and for beyond-Moore time, featuring sy...

The Finite Difference Time-Domain (FDTD) method is a powerful tool for electromagnetic field analysis. In this work, we develop a variation of the algorithm to accurately calculate antenna, microwave circuit, and target scattering problems. To improv...

In this paper, a bidirectional micro-device based on multi-electrothermal co-actuation is proposed for a fuze safety system, combining the advantages of the simple structure, small size, low input voltage, large output, and absence of electromagnetic...

Flexible pressure sensors face the dual challenges of weak signal extraction and environmental noise suppression in wearable electronics and human-machine interfaces. This research proposes an intelligent pressure sensor utilizing chitosan/carbon nan...

Posture detection is essential for capsule robots to be manipulated in a relatively closed gastrointestinal (GI) tract and to fulfill some medical operations. In this paper, a posture detection technique for a magnetic-actuated dual-hemisphere capsul...

This study presents a 3D DC electric field meter (EFM) that uses three identical 1D MEMS chips. The shielding electrodes and sensing electrodes of the MEMS chips employ a combination of rigid frames and short strip-type beams to improve vibrational s...

Sorting particles or cells of specific sizes in complex systems has long been a focus of many researchers. Acoustic surface waves, which generate acoustic radiation forces on particles or cells and, thus, influence their motion, are commonly used for...

As microelectronic devices become more prevalent daily, miniaturization is emerging as a key trend, particularly in optical systems. Optical systems with volume scanning and imaging capabilities heavily rely on focus control. The traditional focus tu...

In the process of micro-EDM, tool electrode wear is inevitable, especially for complex three-dimensional cavities or microgroove structures. Tool electrode wear accumulates during machining, which will finally affect machining accuracy and machining...

This study investigates the impact of etching trimming parameters on the multiple harmonics of the mass distribution in hemispherical resonators and proposes a novel 1st harmonic trimming scheme. As mass balancing technology advances, the extension o...

As the most promising new reflective display technology, electrowetting displays (EWDs) have the advantages of a simple structure, fast response, high contrast, and rich colors. However, due to the hysteresis effect, the grayscales of EWDs cannot be...

The workspace of the compliant parallel mechanism (CPM) is generally limited due to the small deformation range of flexible hinges, which are usually at the micro/nano scale. This paper takes the 2-DOFs n-4R compliant parallel pointing mechanism (n-4...

Flexible pressure sensors have great potential for wearable applications such as human health monitoring and human–computer interaction, which require different trade-offs between the sensitivity and operating range. However, preparing washable...

The reflectance (R) of linear and circular micro-gratings on c-plane sapphire Al₂O₃ ablated by a femtosecond (fs) laser were spectrally characterised for thermal emission $\propto (1-R)$ in the mid-to-far infrared (IR) spectral range. An IR camera...

To prevent back wall damage in cavity workpieces during laser drilling, it is crucial to monitor hole penetration status in real time. This study proposes a laser drilling penetration monitoring method based on acoustic principles. First, the acousti...

With the advantages of simple structure, low power consumption, no electromagnetic interference, and fast response, piezoelectric pumps (PPs) have been widely used in the fields of chip cooling, biomedical applications, chemical applications, and fue...

This study introduces an enhancement-mode AlGaN/GaN metal-insulator-semiconductor high-electron-mobility transistor (MIS-HEMT) featuring a self-aligned p-GaN gate structure, fabricated using a gate-first process. The key innovation of this work lies...

Frequent outbreaks of respiratory infectious diseases, driven by diverse pathogens, have long posed significant threats to public health, economic productivity, and societal stability. Respiratory infectious diseases are highly contagious, characteri...

In recent years, implantable medical devices (IMDs) have introduced groundbreaking solutions for managing various health conditions. However, traditional implanted batteries necessitate periodic surgical replacement and tend to be relatively bulky, p...

Investigating the molecular and genetic characteristics of circulating tumor cells (CTCs) presents a promising approach for personalizing treatment in patients with malignant neoplasms, given the limitations of traditional biopsy and histopathology....

Piezoelectric actuators (PEAs) are widely used in high-precision applications but suffer from nonlinear hysteresis effects that degrade positioning accuracy. To address this challenge, this study presents a backstepping controller with an Artificial...

Flexible pressure sensors have garnered significant attention due to their wide range of applications in human motion monitoring and smart wearable devices. However, the fabrication of pressure sensors that offer both high sensitivity and a wide dete...

With the rapid development of micro-machining technology, the feature size of object parts becomes smaller whilst the roundness tolerance must be critically verified at sub-micrometers or nanometers. Therefore, establishing a method is critically imp...

The demand for reliable and cost-effective CO₂ gas sensors is escalating due to their extensive applications in various sectors such as food packaging, indoor air quality assessment, and real-time monitoring of anthropogenic CO₂ emissions to mitigate...

In the new energy electric drive system, the thermal stability of IGBT, a core power device, significantly impacts the system’s overall performance. Accurate IGBT temperature measurement is crucial, but traditional methods face limitations in I...

Micro-milling is increasingly recognized as a crucial technique for machining intricate and miniature 3D aerospace components, particularly those fabricated from difficult-to-cut Ti-6Al-4V alloys. However, its practical applications are hindered by s...

End-tidal breath gases originate deep within the lungs, and their composition is an especially accurate reflection of the body’s metabolism and health status. Therefore, accurate collection of end-tidal breath gases is crucial to enhance electr...

Waterborne pathogens seriously threaten human life and can cause diarrhea, gastrointestinal disorders, and more serious systemic infections. These pathogens are usually caused by contaminated water sources that contain disease-causing microorganisms,...

Flexible piezoresistive pressure sensors have great potential in wearable electronics due to their simple structure, low cost, and ease of fabrication. Porous polymer materials, with their highly deformable internal pores, effectively expand the sens...

This study proposes a cyber–physical framework for the integration of a heterogeneous swarm of robots, sensors, microrobots, and AR for structural health monitoring and confined space inspection based on the application’s unique challenge...

This paper focuses on inertial switches, which are vital in multiple fields. A theoretical analysis model based on the spring-mass model was proposed, aiming to acquire the mechanical performance of the inertial switch under different loading conditi...

Aluminum–copper alloy (AlCu) is commonly utilized as interconnect material in low-power devices. However, as the size of electronic devices continues to decrease and current density increases, electromigration (EM) has emerged as a significant...

Free ion impurities in liquid crystals significantly impact the dynamic electro-optic performance of liquid crystal displays, leading to slow switching times, short-term flickering, and long-term image sticking. These ionic contaminants originate fro...

Flexible actuators hold significant promise for applications in intelligent robotics, wearable devices, and biomimetic systems. However, conventional actuators face challenges such as high driving voltages, inadequate deformation control, and limited...

In this work, we report on the fabrication of a novel Organic Double-Layer Supercapacitor (ODLSC) using recycled palm as the substrate and electrodes based on halogenated indium and copper phthalocyanines. The electrodes were characterized using Refl...

An innovative design of a hydrophone based on a piezoelectric composite film of $AlN/S{c}_{0.2}A{l}_{0.8}N$ is presented. By designing a non-uniform composite sensitive layer, the dielectric loss and defect density are significantly reduced, while the high-volta...

Dielectrophoresis at the nanoscale has gained significant attention in recent years as a low-cost, rapid, efficient, and label-free technique. This method holds great promise for various interdisciplinary applications related to micro- and nanoscienc...

The performance of the Si MOSFET is suppressed when the channel loses its control through the gate. This paper introduces a new and novel high-channel conducting orthogonally oriented selective buried triple gate vertical power MOSFET technology to s...

This study establishes a bidirectional kinematic analysis framework for single-sided chemical mechanical polishing systems through innovative coordinate transformation synergies (rotational and translational). To address three critical gaps in existi...

Since the discovery of the unique auditory system of the Ormia ochracea fly, researchers have designed various directional acoustic sensors inspired by its principles. However, most of these sensors operate only within a single- or dual-frequency ban...

In order to better understand the damage phenomenon and failure mechanism of planar lightwave circuit (PLC) optical splitters under force cycling, this paper established an online test experimental platform to study their optical and mechanical perfo...

The high-repetition-rate dual-microcomb interferometry, characterized by its high precision, rapid measurement speed, and ease of integration, shows significant promise in applications such as precision spectroscopy and high-speed precision ranging....

In this study, we propose an optimized shield gate trench 4H-SiC structure with effective gate oxide protection. The proposed device has a split trench with a P+ shield region, and the P+ shield is grounded by the middle deep trench. Our simulation r...

This paper proposes a detailed design study of resonating high-frequency notch filters driven by RF MEMS switches and their optimization for dual-band operation in the X-Band. Microstrip configurations will be considered for single and dual-band appl...

Material jetting, as a critical additive manufacturing technology, relies on precise control of the driving waveform to achieve high-quality droplet formation. During the droplet ejection process, pressure fluctuation at the nozzle outlet plays a sig...

Nickel–phosphorus (NiP) alloys have been widely used in many engineering fields such as aerospace, automotive, and optics; however, it is difficult to study the material removal mechanism and microscopic size changes in the polishing process of...

As integrated electronic microsystems advance, their internal components demonstrate increasing miniaturization, higher-density integration, and, consequently, significantly enhanced performance. This paper presents an on-chip transformer balun. The...

This study employed low-pressure chemical vapor deposition (LPCVD) SiN_x as both the gate dielectric layer and surface passivation layer, systematically investigating the effects of different growth conditions on the dielectric layer quality, two-dime...

To investigate the energy transfer mechanisms during the micro-explosive initiator-driven flyer process and to guide the performance evaluation of micro-sized charges and the structural design of micro-initiators, a combined approach of numerical sim...

In this work, we present a graphene-based photodetector operating at a wavelength of 1310 nm. The device leverages the SPARK effect, which has previously been investigated only at 1550 nm. It features a hybrid waveguide structure comprising hydrogena...