Micromachines, Volume 16, Issue 4

The ending of Moore’s Law calls for innovations in integrated circuit (IC) technologies and chip designs. Heterogeneous integration (HI) emerges as a pathway towards smart future chips for more Moore time and for beyond-Moore time, featuring sy...

The Finite Difference Time-Domain (FDTD) method is a powerful tool for electromagnetic field analysis. In this work, we develop a variation of the algorithm to accurately calculate antenna, microwave circuit, and target scattering problems. To improv...

In this paper, a bidirectional micro-device based on multi-electrothermal co-actuation is proposed for a fuze safety system, combining the advantages of the simple structure, small size, low input voltage, large output, and absence of electromagnetic...

Flexible pressure sensors face the dual challenges of weak signal extraction and environmental noise suppression in wearable electronics and human-machine interfaces. This research proposes an intelligent pressure sensor utilizing chitosan/carbon nan...

Posture detection is essential for capsule robots to be manipulated in a relatively closed gastrointestinal (GI) tract and to fulfill some medical operations. In this paper, a posture detection technique for a magnetic-actuated dual-hemisphere capsul...

This study presents a 3D DC electric field meter (EFM) that uses three identical 1D MEMS chips. The shielding electrodes and sensing electrodes of the MEMS chips employ a combination of rigid frames and short strip-type beams to improve vibrational s...

Sorting particles or cells of specific sizes in complex systems has long been a focus of many researchers. Acoustic surface waves, which generate acoustic radiation forces on particles or cells and, thus, influence their motion, are commonly used for...

As microelectronic devices become more prevalent daily, miniaturization is emerging as a key trend, particularly in optical systems. Optical systems with volume scanning and imaging capabilities heavily rely on focus control. The traditional focus tu...

In the process of micro-EDM, tool electrode wear is inevitable, especially for complex three-dimensional cavities or microgroove structures. Tool electrode wear accumulates during machining, which will finally affect machining accuracy and machining...

This study investigates the impact of etching trimming parameters on the multiple harmonics of the mass distribution in hemispherical resonators and proposes a novel 1st harmonic trimming scheme. As mass balancing technology advances, the extension o...