- Article
Real-Time Spectroscopic Ellipsometry for Flux Calibrations in Multi-Source Co-Evaporation of Thin Films: Application to Rate Variations in CuInSe2 Deposition
- Dhurba R. Sapkota,
- Balaji Ramanujam,
- Puja Pradhan,
- Mohammed A. Razooqi Alaani,
- Ambalanath Shan,
- Michael J. Heben,
- Sylvain Marsillac,
- Nikolas J. Podraza and
- Robert W. Collins
Flux calibrations in multi-source thermal co-evaporation of thin films have been developed based on real-time spectroscopic ellipsometry (RTSE) measurements. This methodology has been applied to fabricate CuInSe2 (CIS) thin film photovoltaic (PV) abs...