- Article
Development of a Transmission Line Model for the Thickness Prediction of Thin Films via the Infrared Interference Method
- Christos Mpilitos,
- Stamatios Amanatiadis,
- Georgios Apostolidis,
- Theodoros Zygiridis,
- Nikolaos Kantartzis and
- Georgios Karagiannis
An efficient transmission line model in the micrometric order is presented in this paper, to determine the thickness of thin dielectric films deposited on highly-doped substrates. In particular, the estimation of the thickness is based on multiple re...

