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Development of a Transmission Line Model for the Thickness Prediction of Thin Films via the Infrared Interference Method

Department of Electrical & Computer Engineering, Aristotle University of Thessaloniki, GR-54124 Thessaloniki, Greece
Art Diagnosis Center, Ormylia Foundation, GR-63071 Ormylia, Greece
Department of Informatics & Telecommunication Engineering, University of Western Macedonia, GR-50131 Kozani, Greece
Author to whom correspondence should be addressed.
This paper is an extended version of our paper published in Proceedings of the 7th International Conference on Modern Circuits and Systems Technologies (MOCAST2018) on Electronics and Communications, Thessaloniki, Greece, 7–9 May 2018.
Technologies 2018, 6(4), 122;
Received: 1 November 2018 / Revised: 15 December 2018 / Accepted: 18 December 2018 / Published: 19 December 2018
(This article belongs to the Special Issue Modern Circuits and Systems Technologies on Electronics)
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An efficient transmission line model in the micrometric order is presented in this paper, to determine the thickness of thin dielectric films deposited on highly-doped substrates. In particular, the estimation of the thickness is based on multiple reflections of an incident infrared electromagnetic wave generating interference on the sensor. To this objective, the periodicity of the local maxima and minima, including the phase shift and wavelength dependence of the reflection at the layer-substrate interface, leads in the extraction of the required thickness. Moreover, a theoretical transmission line circuit is designed, in order to model the multiple interferences scenario, and an iterative method is developed to converge towards the correct coating thickness. The featured theoretical transmission line model is validated, via a direct comparison with Certified Reference Materials, to indicate its overall accuracy and reliability level. Finally, the proposed method is utilized to calculate the thickness of coated metallic samples. View Full-Text
Keywords: transmission line; near-infrared; interference method; thickness measurement transmission line; near-infrared; interference method; thickness measurement

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Mpilitos, C.; Amanatiadis, S.; Apostolidis, G.; Zygiridis, T.; Kantartzis, N.; Karagiannis, G. Development of a Transmission Line Model for the Thickness Prediction of Thin Films via the Infrared Interference Method. Technologies 2018, 6, 122.

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