- Article
Modeling of Poly(methylmethacrylate) Viscous Thin Films by Spin-Coating
- Navid Chapman,
- Mingyu Chapman and
- William B. Euler
A predictive film thickness model based on an accepted equation of state is applied to the spin-coating of sub-micron poly(methylmethacrylate) viscous thin films from toluene. Concentration effects on density and dynamic viscosity of the spin-coating...