In order to study the penetration mechanism of jacked piles in viscous soil foundation, the stress variation law of the pile–soil interface was obtained by installing silicon piezoresistive earth pressure and pore water pressure sensors, and fi...
The utility of micro-electro-mechanical sensors (MEMS) for application in air-coupled (contactless or noncontact) sensing to concrete nondestructive testing (NDT) is studied in this paper. The fundamental operation and characteristics of MEMS are fi...
The development of new sensing technologies, biomaterials, microelectronic devices, microfluidic systems and micro-electro-mechanical systems (MEMs) etc [...]
The convergence of Micro Electro Mechanical Systems (MEMS) and optics was, at the end of the last century, a fertile ground for a new breed of technological and scientific achievements. The weightlessness of light has been identified very early as a...
This paper introduces a chip-level oven-controlled system for improving the temperature stability of MEMS resonators wherein we designed the resonator and the micro-hotplate using MEMS technology, then bounding them in a package shell at the chip lev...
Methods to calculate fluid density and viscosity using a micro-cantilever and based on the resonance principle were put forward. Their measuring mechanisms were analyzed and the theoretical equations to calculate the density and viscosity were deduce...
The micro-electro-mechanical systems (MEMS)-based sensor technologies are considered to be the enabling factor for the future development of smart sensing applications, mainly due to their small size, low power consumption and relatively low cost. Th...
Effects of surface chemical modification with sodium silicate on the gas-sensingproperties of F-doped SnO2 gas sensor designed and fabricated employing micro-electromechanical system (MEMS) technology were investigated. Gas sensing properties of thes...
This work describes the fabrication and characterization of a Micro-Electro-Mechanical System (MEMS) sensor for gas sensing applications. The sensor is based on standard PolyMUMPs (Polysilicon Multi-Users MEMS Process) technology to control the tempe...
In this paper, we propose a new fingerprint sensing technology based on electrostatic imaging, which can greatly improve fingerprint sensing distance. This can solve the problem of the existing capacitive fingerprint identification device being easy...
Commonly encountered problems in the manipulation of objects with robotic hands are the contact force control and the setting of approaching motion. Microelectromechanical systems (MEMS) sensors on robots offer several solutions to these problems alo...
Tire pressure monitoring systems (TPMSs) are essential for maintaining driving safety by continuously monitoring critical tire parameters, such as pressure and temperature, in real time during vehicle operation. Among these parameters, tire pressure...
Micro-electro mechanical systems (MEMS)-based phase-only spatial light modulators (PLMs) have the potential to overcome the limited speed of liquid crystal on silicon (LCoS) spatial light modulators (SLMs) and operate at speeds faster than 10 kHz. Th...
A miniaturized Co-based amorphous wire GMI (Giant magneto-impedance) magnetic sensor was designed and fabricated in this paper. The Co-based amorphous wire was used as the sense element due to its high sensitivity to the magnetic field. A three-dimen...
Continuous monitoring of environmental and physiological parameters is essential for early diagnostics, real-time decision making, and intelligent system adaptation. Recent advancements in bio-microelectromechanical systems (BioMEMS) sensors have sig...
The rapid evolution of healthcare technology is being driven by advancements in Micro-Electro-Mechanical Systems (MEMS), BioMEMS (Biological MEMS), and the expanding concept of the Internet of Bodies (IoB). This review explores the convergence of the...
Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components, exhibit exquisite gravimetric sensitivities which have greatly advanced the bio/chemical sensor technologies in the past two decades....
In recent years, tunable metamaterials have attracted intensive research interest due to their outstanding characteristics, which are dependent on the geometrical dimensions rather than the material composition of the nanostructure. Among tuning appr...
The diffusion of micro electro-mechanical systems (MEMS) technology applied to navigation systems is rapidly increasing, but currently, there is a lack of knowledge about the reliability of this typology of devices, representing a serious limitation...
The need to achieve digital gas sensing technology, namely, a technology to sense and transmit gas-enabled digital media, has been recognized as highly challenging. This challenge has motivated the authors to focus on complementary metal oxide semico...
Over the last two decades, piezoelectric resonant sensors based on micro-electromechanical systems (MEMS) technologies have been extensively studied as such sensors offer several unique benefits, such as small form factor, high sensitivity, low noise...
Micro-Electro-Mechanical Systems (MEMS) acoustic transducers are highly sophisticated devices with high sensing performance, small size, and low power consumption. To be applied in an implantable medical device, they require a customized packaging so...
Electrostatic micro-electro-mechanical system (MEMS) is a special branch with a wide range of applications in sensing and actuating devices in MEMS. This paper provides a survey and analysis of the electrostatic force of importance in MEMS, its physi...
AUV (Autonomous Underwater Vehicle) coordinated formation can expand the detection range, improve detection efficiency, and complete complex tasks, which requires each AUV to have the ability to track and locate. A wake detector provides a new techni...
The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (M...
In recent years, Micro-Electro-Mechanical Systems (MEMS) technology has had an impressive impact in the field of acoustic transducers, allowing the development of smart, low-cost, and compact audio systems that are employed in a wide variety of highl...
A monolithic electrochemical micro seismic sensor capable of monitoring three-axial vibrations was proposed in this paper. The proposed micro sensor mainly consisted of four sensing units interconnected within flow channels and by interpreting the vo...
In this paper, a Micro-Electro-Mechanical Systems (MEMS) calorimetric sensor with its measurement electronics is designed, fabricated, and tested. The idea is to apply a configurable voltage to the sensitive resistor and measure the current flowing t...
With the development of Internet of Things (IoT) and edge computing technology, gas sensor arrays based on Micro-Electro-Mechanical System (MEMS) fabrication technique have broad application prospects in intelligent integrated systems, portable devic...
A wireless flexible air velocity microsensor was developed by using micro-electro-mechanical systems (MEMS) technology. Polyimide (PI) material was selected for the waterproof and oilproof requirements of the cold air duct environment of heating, ven...
The development of tiny, low-cost, low-power and multifunctional sensor nodes equipped with sensing, data processing, and communicating components, have been made possible by the recent advances in micro-electro-mechanical systems (MEMS) technology....
Microbolometers and photon detectors are two main technologies to address the needs in Infrared Sensing applications. While the microbolometers in both complementary metal-oxide semiconductor (CMOS) and Micro-Electro-Mechanical Systems (MEMS) technol...
The reset noise sampling feedforward (RNSF) technique is proposed in this paper to reduce the noise floor of the readout circuit for micro-electromechanically systems (MEMS) capacitive accelerometer. Because of the technology-imposed size restriction...
Current CMOS-micro-electro-mechanical systems (MEMS) fabrication technologies permit cardiological implantable devices with sensing capabilities, such as the iStents, to be developed in such a way that MEMS sensors can be monolithically integrated to...
In recent years, light detection and ranging (LiDAR) technology has gained huge popularity in various applications such as navigation, robotics, remote sensing, and advanced driving assistance systems (ADAS). This popularity is mainly due to the impr...
Molecular-electronic transducers (MET) have a high conversion coefficient and low power consumption, and do not require precision mechanical components thus allowing the construction of cost- and power-efficient seismic accelerometers. Whereas the in...
Chip-scale devices harnessing the interaction between hot atomic ensembles and light are pushing the boundaries of precision measurement techniques into unprecedented territory. These advancements enable the realization of super-sensitive, miniaturiz...
The substrate plays a key role in chemoresistive gas sensors. It acts as mechanical support for the sensing material, hosts the heating element and, also, aids the sensing material in signal transduction. In recent years, a significant improvement in...
A bio-inspired absolute pressure sensor network has been developed. Absolute pressure sensors, distributed on multiple silicon islands, are connected as a network by stretchable polyimide wires. This sensor network, made on a 4’’ wafer, has 77 nodes...
This study proposes a wireless remote weather monitoring system based on Micro-Electro-Mechanical Systems (MEMS) and wireless sensor network (WSN) technologies comprising sensors for the measurement of temperature, humidity, pressure, wind speed and...
Recently, there has been increased interest in adopting novel sensing technologies for continuously monitoring structural systems. In this respect, micro-electrical mechanical system (MEMS) sensors are widely used in several applications, including s...
The vanadium redox flow battery (VRFB) system is an emerging energy storage technology with many advantages, such as high efficiency, long life, and high safety. However, during the power-generation process, if local high temperature is generated, th...
Recent years have witnessed tremendous advances in the design and applications of wirelessly networked and embedded sensors. Wireless sensor nodes are typically low-cost, low-power, small devices equipped with limited sensing, data processing and wir...
Spectrally selective detection is of crucial importance for diverse modern spectroscopic applications such as multi-wavelength pyrometry, non-dispersive infrared gas sensing, biomedical analysis, flame detection, and thermal imaging. This paper repor...
In this paper, we report a novel aluminum nitride (AlN) thin-film piezoelectric resonant accelerometer. Different from the ordinary MEMS (micro-electro-mechanical systems) resonant accelerometers, the entire structure of the accelerometer, including...
This article presents design and testing of a microfluidic platform for immunoassay. The method is based on sandwiched ELISA, whereby the primary antibody is immobilized on nitrocelluose and, subsequently, magnetic beads are used as a label to detect...
In this paper, a highly integrated amorphous wire Giant magneto-impedance (GMI) magnetic sensor using micro electron mechanical system (MEMS) technology is designed, which is equipped with a signal conditioning circuit and uses a data acquisition car...
This paper proposes a high-temperature optical fiber Fabry–Perot pressure sensor based on the micro-electro-mechanical system (MEMS). The sensing structure of the sensor is composed of Pyrex glass wafer and silicon wafer manufactured by mass micromac...
The main purpose of this study is to carry out the immediate micro-monitoring of the roll-to-roll (R2R) process of polarizing films. Therefore, a self-made flexible three-in-one (temperature, humidity, and flow) microsensor is developed. The temperat...
Lofting is an essential part of construction projects and the high quality of lofting is the basis of efficient construction. However, the most common method of lofting currently which uses the total station in a multi-person cooperative way consumes...
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