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Sensors 2018, 18(4), 1047; https://doi.org/10.3390/s18041047

A Monolithic Electrochemical Micro Seismic Sensor Capable of Monitoring Three-Dimensional Vibrations

1
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, 100190 Beijing, China
2
School of Electronic, Electrical and Communication Engineering, Chinese Academy of Sciences, 100190 Beijing, China
*
Author to whom correspondence should be addressed.
Received: 5 March 2018 / Revised: 26 March 2018 / Accepted: 28 March 2018 / Published: 31 March 2018
(This article belongs to the Section Physical Sensors)
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Abstract

A monolithic electrochemical micro seismic sensor capable of monitoring three-axial vibrations was proposed in this paper. The proposed micro sensor mainly consisted of four sensing units interconnected within flow channels and by interpreting the voltage outputs of the sensing units, vibrations with arbitrary directions can be quantified. The proposed seismic sensors are fabricated based on MEMS technologies and characterized, which produced sensitivities along x, y, and z axes as 2473.2 ± 184.5 V/(m/s), 2261.7 ± 119.6 V/(m/s), and 3480.7 ± 417.2 V/(m/s) at 30 Hz. In addition, the vibrations in x-y, x-z, and y-z planes were applied to the developed seismic sensors, leading to comparable monitoring results after decoupling calculations with the input velocities. Furthermore, the results have shown its feasibilities for seismic data recording. View Full-Text
Keywords: monolithic electrochemical seismic sensor; three-dimensional vibrations monitoring; decoupling mechanism monolithic electrochemical seismic sensor; three-dimensional vibrations monitoring; decoupling mechanism
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Chen, L.; Sun, Z.; Li, G.; Chen, D.; Wang, J.; Chen, J. A Monolithic Electrochemical Micro Seismic Sensor Capable of Monitoring Three-Dimensional Vibrations. Sensors 2018, 18, 1047.

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