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Sensors 2015, 15(1), 365-381;

A Low-Noise DC Seismic Accelerometer Based on a Combination of MET/MEMS Sensors

Center for Molecular Electronics, Moscow Institute of Physics and Technology, Moscow 117303, Russia
R-sensors LLC, Dolgoprudny, Moscow Region 141700, Russia
NordLab LLC, Dolgoprudny, Moscow Region 141700, Russia
Author to whom correspondence should be addressed.
Received: 19 October 2014 / Accepted: 10 December 2014 / Published: 26 December 2014
(This article belongs to the Collection Modeling, Testing and Reliability Issues in MEMS Engineering)
Full-Text   |   PDF [5828 KB, uploaded 26 December 2014]


Molecular-electronic transducers (MET) have a high conversion coefficient and low power consumption, and do not require precision mechanical components thus allowing the construction of cost- and power-efficient seismic accelerometers. Whereas the instrumental resolution of a MET accelerometer within the 0.1–100 Hz frequency range surpasses that of the best Micro-Electro Mechanical Systems (MEMS) and even some force-balanced accelerometers, the fundamental inability to register gravity or, in other words, zero frequency acceleration, significantly constrains the further spread of MET-based accelerometers. Ways of obviating this inherent zero frequency insensitivity within MET technology have so far, not been found. This article explores a possible approach to the construction of a hybrid seismic accelerometer combining the superb performance of a MET sensor in the middle and high frequency range with a conventional on chip MEMS accelerometer covering the lower frequencies and gravity. Though the frequency separation of a signal is widely used in various applications, the opposite task, i.e., the combining of two signals with different bandwidths is less common. Based on theoretical research and the analysis of actual sensors’ performance, the authors determined optimal parameters for building a hybrid sensor. Description and results for implementation of the hybrid sensor are given in the Experimental section of the article. Completing a MET sensor with a cost-effective MEMS permitted the construction of a low noise DC accelerometer preserving the noise performance of a MET sensing element. The work presented herein may prove useful in designing other combined sensors based on different technologies. View Full-Text
Keywords: accelerometer; molecular-electronic transducer; combined sensor accelerometer; molecular-electronic transducer; combined sensor
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Neeshpapa, A.; Antonov, A.; Agafonov, V. A Low-Noise DC Seismic Accelerometer Based on a Combination of MET/MEMS Sensors. Sensors 2015, 15, 365-381.

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