Integrated RF MEMS and Applications

Dear Colleagues,

RF MEMS are conventional MEMS devices that are specifically designed and optimized to operate at radio frequencies. While they rely on similar microfabrication and mechanical principles as traditional MEMS, RF MEMS are engineered to handle RF signals where electromagnetic effects dominate. For example, low insertion loss, high isolation, impedance matching, parasitic capacitance and inductance, and RF-compatible packaging to ensure reliable high-performance operation. These devices control or manipulate RF signals using moving micro-scale components such as RF switches for signal on/off control, tunable capacitors and inductors, filters, resonators, phase shifters, and antennas. RF MEMS have found wide applications in mobile and wireless communication systems, radar and defense platforms, satellite and space systems, as well as emerging 5G/6G reconfigurable RF front ends and IoT and sensing systems.

Dr. Azeemuddin Syed
Guest Editor

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