Beam Steering via Arrayed Micromachines

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: closed (30 April 2022) | Viewed by 56348

Special Issue Editors


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Guest Editor
Mechanical and Aerospace Engineering, University of California, Los Angeles, CA 90095, USA
Interests: architected metamaterials and surfaces; compliant mechanisms; MEMS; precision microsystems; microfabrication
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Guest Editor
Bright Silicon Technologies, San Francisco, CA 94133, USA
Interests: precision microsystem design; compliant mechanisms; MEMS/microfabrication; controls and dynamics
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

The ability to steer and control the phase of light using arrays of micromachines would enable numerous technologies that hold the promise to revolutionize the fields of optics, telecommunications, astronomy, biology, medicine and additive fabrication, among many others. If the light-steering elements (e.g., micromirrors) within such arrays could each be independently directed over larger ranges, at high speeds, and with high pointing precision, existing applications would be dramatically improved and entirely new capabilities would be enabled. Such light-steering capabilities would open the doors to a flood of optical innovations that have been hindered by the limitations of present technologies. Improvements in array (i) pitch, (ii) fill-factor, (iii) aperture, and (iv) control would lead to further optical breakthrough applications. Such applications could include high-speed LIDAR, solid-state laser communications for drone and satellite constellations, AR/VR displays, dynamic laser manufacturing, and new optical-tweezer-based additive fabrication systems that assemble large numbers of particles simultaneously.

This Special Issue collects research papers, technical notes, communications, and review articles that discuss the latest advancements and future perspectives in the field of beam steering array technologies. It is our hope to facilitate interdisciplinary collaboration in order to achieve progress for all involved. Contributions related to the design, characterization, microfabrication, control, and/or application of new micromirror arrays or other beam steering technologies are highly welcome.

We look forward to receiving your submissions.

Prof. Jonathan B. Hopkins
Dr. Robert M. Panas
Guest Editors

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Keywords

  • beam steering
  • micromirror arrays
  • light-steering devices
  • light-directing devices
  • MEMS
  • steerable mirrors
  • microfabrication
  • spatial light modulator
  • phase control
  • laser reflecting surfaces

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Related Special Issue

Published Papers (15 papers)

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Research

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16 pages, 5029 KiB  
Article
Real-Time CGH Generation by CUDA-OpenGL Interoperability for Adaptive Beam Steering with a MEMS Phase SLM
by Chin-I Tang, Xianyue Deng and Yuzuru Takashima
Micromachines 2022, 13(9), 1527; https://doi.org/10.3390/mi13091527 - 15 Sep 2022
Cited by 2 | Viewed by 2147
Abstract
Real-time, simultaneous, and adaptive beam steering into multiple regions of interest replaces conventional raster scanning with a less time-consuming and flexible beam steering framework, where only regions of interest are scanned by a laser beam. CUDA-OpenGL interoperability with a computationally time-efficient computer-generated hologram [...] Read more.
Real-time, simultaneous, and adaptive beam steering into multiple regions of interest replaces conventional raster scanning with a less time-consuming and flexible beam steering framework, where only regions of interest are scanned by a laser beam. CUDA-OpenGL interoperability with a computationally time-efficient computer-generated hologram (CGH) calculation algorithm enables such beam steering by employing a MEMS-based phase light modulator (PLM) and a Texas Instruments Phase Light Modulator (TI-PLM). The real-time CGH generation and display algorithm is incorporated into the beam steering system with variable power and scan resolution, which are adaptively controlled by camera-based object recognition. With a mid-range laptop GPU and the current version of the MEMS-PLM, the demonstrated scanning speed can exceed 1000 points/s (number of beams > 5) and potentially exceeds 4000 points/s with state-of-the-art GPUs. Full article
(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)
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15 pages, 6706 KiB  
Article
All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror
by Eunmo Kang, Heejoo Choi, Brandon Hellman, Joshua Rodriguez, Braden Smith, Xianyue Deng, Parker Liu, Ted Liang-Tai Lee, Eric Evans, Yifan Hong, Jiafan Guan, Chuan Luo and Yuzuru Takashima
Micromachines 2022, 13(9), 1444; https://doi.org/10.3390/mi13091444 - 1 Sep 2022
Cited by 5 | Viewed by 5245
Abstract
In a lidar system, replacing moving components with solid-state devices is highly anticipated to make a reliable and compact lidar system, provided that a substantially large beam area with a large angular extent as well as high angular resolution is assured for the [...] Read more.
In a lidar system, replacing moving components with solid-state devices is highly anticipated to make a reliable and compact lidar system, provided that a substantially large beam area with a large angular extent as well as high angular resolution is assured for the lidar transmitter and receiver. A new quasi-solid-state lidar optical architecture employs a transmitter with a two-dimensional MEMS mirror for fine beam steering at a fraction of the degree of the angular resolution and is combined with a digital micromirror device for wide FOV scanning over 37 degree while sustaining a large aperture area of 140 mm squared. In the receiver, a second digital micromirror device is synchronized to the transmitter DMD, which enables a large FOV receiver. An angular resolution of 0.57°(H) by 0.23° (V) was achieved with 0.588 fps for scanning 1344 points within the field of view. Full article
(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)
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10 pages, 4746 KiB  
Article
Optical Enhancement of Diffraction Efficiency of Texas Instruments Phase Light Modulator for Beam Steering in Near Infrared
by Jiafan Guan, Zhipeng Dong, Xianyue Deng and Yuzuru Takashima
Micromachines 2022, 13(9), 1393; https://doi.org/10.3390/mi13091393 - 26 Aug 2022
Viewed by 1939
Abstract
Phase light modulator (PLM) by MEMS mirror array operating in a piston-mode motion enables a high-speed diffractive beam steering in a random-access and flexible manner that makes a lidar system more intelligent and adaptive. Diffraction efficiency is determined by the range of the [...] Read more.
Phase light modulator (PLM) by MEMS mirror array operating in a piston-mode motion enables a high-speed diffractive beam steering in a random-access and flexible manner that makes a lidar system more intelligent and adaptive. Diffraction efficiency is determined by the range of the piston motion of the MEMS array; consequently, a larger range of the piston motion is required for beam steering in infrared, such as for lidar. We demonstrated how the range of the piston motion is optically enhanced by a factor of two with a light-recycling optics based on Talbot self-imaging. The proposed optical architecture extends the usable range of the wavelength so that a MEMS-PLM designed for visible wavelength is applicable for a high-efficiency beam steering at an infrared wavelength of 1550 nm with an improved diffraction efficiency of 30%. Full article
(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)
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10 pages, 4938 KiB  
Article
Diffraction Efficiency of MEMS Phase Light Modulator, TI-PLM, for Quasi-Continuous and Multi-Point Beam Steering
by Xianyue Deng, Chin-I Tang, Chuan Luo and Yuzuru Takashima
Micromachines 2022, 13(6), 966; https://doi.org/10.3390/mi13060966 - 18 Jun 2022
Cited by 6 | Viewed by 3702
Abstract
The recent development of the Micro Electromechanical System (MEMS) Phase Light Modulator (PLM) enables fast laser beam steering for lidar applications by displaying a Computer-Generated Hologram (CGH) without employing an iterative CGH calculation algorithm. We discuss the application of MEMS PLM (Texas Instruments [...] Read more.
The recent development of the Micro Electromechanical System (MEMS) Phase Light Modulator (PLM) enables fast laser beam steering for lidar applications by displaying a Computer-Generated Hologram (CGH) without employing an iterative CGH calculation algorithm. We discuss the application of MEMS PLM (Texas Instruments PLM) for quasi-continuous laser beam steering by deterministically calculated CGHs. The effect on the diffraction efficiency of PLM non-equally spaced phase levels was quantified. We also address the CGH calculation algorithm and an experimental demonstration that steered and scanned the beam into multiple regions of interest points, enabling beam steering for lidar without sequential raster scanning. Full article
(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)
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13 pages, 2818 KiB  
Article
Robust Adaptive Beamforming Algorithm for Sparse Subarray Antenna Array Based on Hierarchical Weighting
by Jian Yang, Xinxin Liu, Yuwei Tu and Weixing Li
Micromachines 2022, 13(6), 859; https://doi.org/10.3390/mi13060859 - 30 May 2022
Cited by 3 | Viewed by 2203
Abstract
Sparse antenna arrays based on subarrays have more and more broad application prospects for the limitation of array space, real-time algorithm and hardware costs. Aiming at the beamforming technology of sparse antenna arrays based on subarrays, this paper proposes a robust adaptive beamforming [...] Read more.
Sparse antenna arrays based on subarrays have more and more broad application prospects for the limitation of array space, real-time algorithm and hardware costs. Aiming at the beamforming technology of sparse antenna arrays based on subarrays, this paper proposes a robust adaptive beamforming algorithm based on hierarchical weighting. The algorithm performs conventional beamforming to calculate the weights of each element in the subarray, then the synthetic signals output by each subarray are used as sparse array metadata. The Interference-plus-Noise Covariance Matrix (INCM) is reconstructed by integration in two-dimensional space, and a convex optimization model of a multi-constraint array containing the signal pointing error was established to estimate the real guide vector. Finally, using the reconstructed INCM and the estimation of the guide vector, we obtain a weighted vector between the subarrays and output signal for the whole array. The simulation results show that the proposed algorithm has better Signal-to-Interference-and-Noise Ratio (SINR) and robustness compared with other algorithms for sparse subarray antenna array beamforming. Full article
(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)
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12 pages, 3726 KiB  
Article
Optimization of Optical Phase Profile in Beam Deflector with Advanced Simulation Method for High Diffraction Efficiency
by Andrey Manko, Young Kim, Aleksander Morozov, Serguei Palto, Kanghee Won and Hong-Seok Lee
Micromachines 2022, 13(5), 802; https://doi.org/10.3390/mi13050802 - 21 May 2022
Cited by 1 | Viewed by 2240
Abstract
Controlling the phase of light with a high efficiency and precision is essential for applications in imaging, tunable devices, and optical systems. Spatial light modulators (SLMs) based on liquid crystals (LCs) have been regarded as one of the best choices for the generation [...] Read more.
Controlling the phase of light with a high efficiency and precision is essential for applications in imaging, tunable devices, and optical systems. Spatial light modulators (SLMs) based on liquid crystals (LCs) have been regarded as one of the best choices for the generation of phase profiles for the steering of light. The upper glass substrate has an unpatterned electrode for a common electrode, while the lower glass substrate has one-dimensional micro-patterned electrodes for controlling the single pixel level by the applied voltages. By applying different voltages to each electrode to create a sawtooth-shaped phase profile, the collimated input beam is deflected to the desired angle. To maximize the diffraction efficiency (DE) values, an advanced simulation method has been developed to find the optimized phase profile through the analysis of LC director distributions. The resulting diffraction patterns are investigated both computationally and experimentally, with a good agreement between the results obtained. Finally, the beam deflector (BD) system with an advanced driving algorithm has a high 1st order DE, about 60%, 37%, and 7.5% at 1°, 2.5°, and a maximum steering angle of 7.5°, respectively. The LC director distributions in relation to various diffraction angles are simulated and an experimental success in realizing enhanced DE for the beam steering device is presented. Full article
(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)
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16 pages, 4678 KiB  
Article
Analysis of Optical Diffraction Profiles Created by Phase-Modulating MEMS Micromirror Arrays
by Tarek Mohammad, Siyuan He and Ridha Ben Mrad
Micromachines 2021, 12(8), 891; https://doi.org/10.3390/mi12080891 - 28 Jul 2021
Cited by 3 | Viewed by 2678
Abstract
This paper presents modeling and analysis of light diffraction and light-intensity modulation performed by an optical phased array (OPA) system based on metal-coated silicon micromirrors. The models can be used in the design process of a microelectromechanical system (MEMS)-based OPA device to predict [...] Read more.
This paper presents modeling and analysis of light diffraction and light-intensity modulation performed by an optical phased array (OPA) system based on metal-coated silicon micromirrors. The models can be used in the design process of a microelectromechanical system (MEMS)-based OPA device to predict its optical performance in terms of its field of view, response, angular resolution, and long-range transmission. Numerical results are derived using an extended model for the 1st-order diffracted light intensity modulation due to phase shift. The estimations of the optical characteristics are utilized in the designs of an OPA system capable of active phase modulation and an OPA system capable of array pitch tuning. Both designs are realized using the Multi-User MEMS Processes (PolyMUMPs) in which polysilicon is used as structural material for the MEMS-actuated mirrors. The experiments are performed to evaluate the optical performance of the prototypes. The tests show that the individually actuated micromirrors, which act as phase shifters, can transmit the most optical power along the 1st-order diffracted beam by actively changing their out-of-plane positions. In addition, the 1st-order diffracted beam with high optical intensity can be steered for distance measurement. Full article
(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)
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11 pages, 766 KiB  
Article
Beam Formation and Vernier Steering Off of a Rough Surface
by Eric K. Nagamine, Kenneth W. Burgi and Samuel D. Butler
Micromachines 2021, 12(8), 871; https://doi.org/10.3390/mi12080871 - 24 Jul 2021
Viewed by 1602
Abstract
Wavefront shaping can refocus light after it reflects from an optically rough surface. One proposed use case of this effect is in indirect imaging; if any rough surface could be turned into an illumination source, objects out of the direct line of sight [...] Read more.
Wavefront shaping can refocus light after it reflects from an optically rough surface. One proposed use case of this effect is in indirect imaging; if any rough surface could be turned into an illumination source, objects out of the direct line of sight could be illuminated. In this paper, we demonstrate the superior performance of a genetic algorithm compared to other iterative feedback-based wavefront shaping algorithms in achieving reflective inverse diffusion for a focal plane system. Next, the ability to control the pointing direction of the refocused beam with high precision over a narrow angular range is demonstrated, though the challenge of increasing the overall scanning range of the refocused beam remains. The method of beam steering demonstrated in this paper could act as a vernier adjustment to a coarse adjustment offered by another method. Full article
(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)
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15 pages, 14808 KiB  
Article
Analog Spatial Light Modulators Based on Micromirror Arrays
by Ulrike Dauderstädt, Peter Dürr, Andreas Gehner, Michael Wagner and Harald Schenk
Micromachines 2021, 12(5), 483; https://doi.org/10.3390/mi12050483 - 23 Apr 2021
Cited by 4 | Viewed by 3409
Abstract
The Fraunhofer Institute for Photonic Microsystems (IPMS) has been developing and manufacturing micromirror arrays for more than 20 years. While originally focusing on applications related to microlithography and therefore mainly for light in the deep ultraviolet range, the range of applications has been [...] Read more.
The Fraunhofer Institute for Photonic Microsystems (IPMS) has been developing and manufacturing micromirror arrays for more than 20 years. While originally focusing on applications related to microlithography and therefore mainly for light in the deep ultraviolet range, the range of applications has been expanded since, including applications in the visible and near-infrared range. This paper gives an overview of the devices and their designs, fabrication, and characterization. Full article
(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)
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18 pages, 12976 KiB  
Article
Design, Simulation, Fabrication, and Characterization of an Electrothermal Tip-Tilt-Piston Large Angle Micromirror for High Fill Factor Segmented Optical Arrays
by David Torres, LaVern Starman, Harris Hall, Juan Pastrana and Sarah Dooley
Micromachines 2021, 12(4), 419; https://doi.org/10.3390/mi12040419 - 12 Apr 2021
Cited by 8 | Viewed by 3117
Abstract
Micro-electromechanical system (MEMS) micromirrors have been in development for many years, but the ability to steer beams to angles larger than 20° remains a challenging endeavor. This paper details a MEMS micromirror device capable of achieving large motion for both tip/tilt angles and [...] Read more.
Micro-electromechanical system (MEMS) micromirrors have been in development for many years, but the ability to steer beams to angles larger than 20° remains a challenging endeavor. This paper details a MEMS micromirror device capable of achieving large motion for both tip/tilt angles and piston motion. The device consists of an electrothermal actuation assembly fabricated from a carefully patterned multilayer thin-film stack (SiO2/Al/SiO2) that is epoxy bonded to a 1 mm2 Au coated micromirror fabricated from an SOI wafer. The actuation assembly consists of four identical actuators, each comprised of a series of beams that use the inherent residual stresses and coefficient of thermal expansion (CTE) mismatches of the selected thin films to enable the large, upward, out-of-plane deflections necessary for large-angle beamsteering. Finite element simulations were performed (COMSOL v5.5) to capture initial elevations and tip/tilt motion displacements and achieved <10% variance in comparison to the experiment. The measured performance metrics of the micromirror include tip/tilt angles of ±23°, piston motion of 127 µm at sub-resonance, and dynamics characterization with observed resonant frequencies at ~145 Hz and ~226 Hz, for tip/tilt and piston motion, respectively. This unique single element design can readily be scaled into a full segmented micromirror array exhibiting an optical fill-factor >85%, making it suitable for optical phased array beam control applications. Full article
(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)
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15 pages, 3779 KiB  
Article
A Novel Hexagonal Beam Steering Electrowetting Device for Solar Energy Concentration
by Iftekhar Khan, Stefania Castelletto and Gary Rosengarten
Micromachines 2020, 11(11), 1016; https://doi.org/10.3390/mi11111016 - 19 Nov 2020
Cited by 5 | Viewed by 2805
Abstract
Traditional tracking devices for solar energy applications have several disadvantages, such as bulky mechanical structure, large wind loads, and ease of misalignment. This study aims to design a flat, thin, and adaptive beam steering device to eliminate these drawbacks. A proof of concept [...] Read more.
Traditional tracking devices for solar energy applications have several disadvantages, such as bulky mechanical structure, large wind loads, and ease of misalignment. This study aims to design a flat, thin, and adaptive beam steering device to eliminate these drawbacks. A proof of concept device was fabricated to demonstrate this design. The novelty of the proof of concept device is the hexagonal structure of the electrowetting cell design. The hexagonal cell was dosed with two immiscible liquids with different refractive indices. The hypothesis of this design is that by deforming the liquid shape with the application of voltage, light can be steered and concentrated for solar energy applications. A maximum contact angle change of 44° was observed with the application of 26 V to one of the electrodes of the hexagonal cell. The device demonstrated a 4.5° change of laser beam path with only a 0.2 refractive index difference of the liquids. The 3D simulation model developed in this study shows that a tilted and flat interface can be achieved using higher dielectric constant dielectric materials. The device can facilitate the planer steering and concentration of sunlight for rooftop applications without moving mechanical parts. Full article
(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)
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25 pages, 7834 KiB  
Article
Full-Azimuth Beam Steering MIMO Antenna Arranged in a Daisy Chain Array Structure
by Kazuhiro Honda, Taiki Fukushima and Koichi Ogawa
Micromachines 2020, 11(9), 871; https://doi.org/10.3390/mi11090871 - 19 Sep 2020
Cited by 16 | Viewed by 5852
Abstract
This paper presents a multiple-input, multiple-output (MIMO) antenna system with the ability to perform full-azimuth beam steering, and with the aim of realizing greater than 20 Gbps vehicular communications. The MIMO antenna described in this paper comprises 64 elements arranged in a daisy [...] Read more.
This paper presents a multiple-input, multiple-output (MIMO) antenna system with the ability to perform full-azimuth beam steering, and with the aim of realizing greater than 20 Gbps vehicular communications. The MIMO antenna described in this paper comprises 64 elements arranged in a daisy chain array structure, where 32 subarrays are formed by pairing elements in each subarray; the antenna yields 32 independent subchannels for MIMO transmission, and covers all communication targets regardless of their position relative to the array. Analytical results reveal that the proposed antenna system can provide a channel capacity of more than 200 bits/s/Hz at a signal-to-noise power ratio (SNR) of 30 dB over the whole azimuth, which is equivalent to 20 Gbps for a bandwidth of 100 MHz. This remarkably high channel capacity is shown to be due to two significant factors; the improved directivity created by the optimum in-phase excitation and the low correlation between the subarrays due to the orthogonal alignment of the array with respect to the incident waves. Over-the-air (OTA) experiments confirm the increase in channel capacity; the proposed antenna can maintain a constant transmission rate over all azimuth angles. Full article
(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)
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12 pages, 4037 KiB  
Article
Fabrication of Random Microlens Array for Laser Beam Homogenization with High Efficiency
by Li Xue, Yingfei Pang, Wenjing Liu, Liwei Liu, Hui Pang, Axiu Cao, Lifang Shi, Yongqi Fu and Qiling Deng
Micromachines 2020, 11(3), 338; https://doi.org/10.3390/mi11030338 - 24 Mar 2020
Cited by 22 | Viewed by 5770
Abstract
The miniaturized and integrated microlens array (MLA) can effectively achieve the beam homogenization, compactness and miniaturization of laser systems. When the high-coherence laser beam is homogenized by means of using the MLA, interference fringes will occur in the homogenized light spot due to [...] Read more.
The miniaturized and integrated microlens array (MLA) can effectively achieve the beam homogenization, compactness and miniaturization of laser systems. When the high-coherence laser beam is homogenized by means of using the MLA, interference fringes will occur in the homogenized light spot due to the periodicity of the MLA, which seriously affects the uniformity of the homogenized light spot. To solve this problem, a novel random microlens array (rMLA) structure was proposed for the purpose of achieving beam homogenization. The coherence in the homogenization process is suppressed by means of breaking the periodicity of the MLA. The homogenized light spot with a high energy utilization is then obtained accordingly. In the fabrication process, a clever method of combining chemical etching with lithography technology is performed to fabricate a honeycomb rMLA and a rectangular rMLA. The experimental results show that the energy utilization rate of the two types of the rMLAs is about 90%, and the uniformity of the homogenized light spots generated by the honeycomb rMLA and the rectangular rMLA are more than 80% and 85%, respectively. Meanwhile, fully cost-effective fabrication is possible to be realized. Full article
(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)
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Review

Jump to: Research

15 pages, 3057 KiB  
Review
All-Solid-State Beam Steering via Integrated Optical Phased Array Technology
by Shi Zhao, Jingye Chen and Yaocheng Shi
Micromachines 2022, 13(6), 894; https://doi.org/10.3390/mi13060894 - 3 Jun 2022
Cited by 24 | Viewed by 6046
Abstract
Light detection and ranging (LiDAR), combining traditional radar technology with modern laser technology, has much potential for applications in navigation, mapping, and so on. Benefiting from the superior performance, an all-solid-state beam steering realized by integrated optical phased array (OPA) is one of [...] Read more.
Light detection and ranging (LiDAR), combining traditional radar technology with modern laser technology, has much potential for applications in navigation, mapping, and so on. Benefiting from the superior performance, an all-solid-state beam steering realized by integrated optical phased array (OPA) is one of the key components in the LiDAR system. In this review, we first introduce the basic principle of OPA for beam steering. Then, we briefly review the detailed advances of different solutions such as micro-electromechanical system OPA, liquid crystal OPA, and metasurface OPA, where our main focus was on the recent progress of OPA in photonic integrated chips. Finally, we summarize the different solutions and discuss the challenges and perspectives of all-solid-state beam steering for LiDAR. Full article
(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)
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29 pages, 5721 KiB  
Review
Liquid Crystal Devices for Beam Steering Applications
by Rowan Morris, Cliff Jones and Mamatha Nagaraj
Micromachines 2021, 12(3), 247; https://doi.org/10.3390/mi12030247 - 28 Feb 2021
Cited by 30 | Viewed by 5814
Abstract
Liquid crystals are valuable materials for applications in beam steering devices. In this paper, an overview of the use of liquid crystals in the field of adaptive optics specifically for beam steering and lensing devices is presented. The paper introduces the properties of [...] Read more.
Liquid crystals are valuable materials for applications in beam steering devices. In this paper, an overview of the use of liquid crystals in the field of adaptive optics specifically for beam steering and lensing devices is presented. The paper introduces the properties of liquid crystals that have made them useful in this field followed by a more detailed discussion of specific liquid crystal devices that act as switchable optical components of refractive and diffractive types. The relative advantages and disadvantages of the different devices and techniques are summarised. Full article
(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)
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