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Micromachines, Volume 10, Issue 3

2019 March - 56 articles

Cover Story: Laser-ablated superhydrophobic surfaces have received tremendous attention due to their capabilities of providing interesting functions, such as self-cleaning and corrosion resistance. However, achieving precise control of the superhydrophobicity of the product is a particular challenge. This paper proposes the concepts of process and product fingerprints, as critical measurable characteristics, in determining the required surface topography and process parameters for the superhydrophobic surface. View this paper
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Articles (56)

  • Feature Paper
  • Communication
  • Open Access
11 Citations
4,583 Views
7 Pages

Automatic Morphology Control of Liquid Metal using a Combined Electrochemical and Feedback Control Approach

  • Ming Li,
  • Hisham Mohamed Cassim Mohamed Anver,
  • Yuxin Zhang,
  • Shi-Yang Tang and
  • Weihua Li

26 March 2019

Gallium-based liquid metal alloys have been attracting attention from both industry and academia as soft, deformable, reconfigurable and multifunctional materials in microfluidic, electronic and electromagnetic devices. Although various technologies...

  • Article
  • Open Access
11 Citations
4,904 Views
13 Pages

Design and Analysis of a Turning Dynamometer Embedded in Thin-Film Sensor

  • Yuntao Zhang,
  • Wenge Wu,
  • Yanwen Han,
  • Haijun Wen,
  • Yunping Cheng and
  • Lijuan Liu

26 March 2019

This paper proposes a high-strain sensitivity turning dynamometer that combines several thin-film resistor grids into three Wheatstone full-bridge circuits that can measure triaxial cutting forces. This dynamometer can replace different cutter heads...

  • Article
  • Open Access
10 Citations
4,680 Views
18 Pages

Electromechanical Modeling of a Piezoelectric Vibration Energy Harvesting Microdevice Based on Multilayer Resonator for Air Conditioning Vents at Office Buildings

  • Ernesto A. Elvira-Hernández,
  • Luis A. Uscanga-González,
  • Arxel de León,
  • Francisco López-Huerta and
  • Agustín L. Herrera-May

26 March 2019

Piezoelectric vibration energy harvesting (pVEH) microdevices can convert the mechanical vibrations to electrical voltages. In the future, these microdevices can provide an alternative to replace the electrochemical batteries, which cause contaminati...

  • Article
  • Open Access
11 Citations
4,223 Views
14 Pages

26 March 2019

A novel piezoelectric energy harvester with multi-resonant frequencies based on Li-doped ZnO (LZO) thin films is proposed in this paper, consisting of an elastic element with three (or more) different length cantilever beam arrays and a piezoelectric...

  • Article
  • Open Access
77 Citations
10,364 Views
22 Pages

Process Understanding of Plasma Electrolytic Polishing through Multiphysics Simulation and Inline Metrology

  • Igor Danilov,
  • Matthias Hackert-Oschätzchen,
  • Mike Zinecker,
  • Gunnar Meichsner,
  • Jan Edelmann and
  • Andreas Schubert

26 March 2019

Currently, the demand for surface treatment methods like plasma electrolytic polishing (PeP)—a special case of electrochemical machining—is increasing. This paper provides a literature review on the fundamental mechanisms of the plasma el...

  • Article
  • Open Access
17 Citations
4,989 Views
14 Pages

25 March 2019

Metastatic cancer cells are known to have a smaller cell stiffness than healthy cells because the small stiffness is beneficial for passing through the extracellular matrix when the cancer cells instigate a metastatic process. Here we developed a sim...

  • Article
  • Open Access
15 Citations
4,380 Views
10 Pages

Design and Fabrication of an Artificial Compound Eye for Multi-Spectral Imaging

  • Axiu Cao,
  • Hui Pang,
  • Man Zhang,
  • Lifang Shi,
  • Qiling Deng and
  • Song Hu

25 March 2019

The artificial compound eye (ACE) structure is a new type of miniaturized, lightweight and intelligent imaging system. This paper has proposed to design a multi-spectral ACE structure to enable the structure to achieve multi-spectral information on t...

  • Article
  • Open Access
47 Citations
7,347 Views
10 Pages

24 March 2019

Silver nanowires (AgNW) have excellent electrical conductivity, transparency, and flexing endurance, and are broadly used in flexible electrodes and flexible sensors. This study mixed the silver nanowires and polyimide (PI) polymer using an in situ s...

  • Article
  • Open Access
8 Citations
4,498 Views
16 Pages

23 March 2019

Following the fast development of microfluidics over the last decade, the need for methods for mixing two gases in flow at an overall flow rate ranging from 1 to 100 NmL·min−1 with programmable mixing ratios has been quickly increasing i...

  • Feature Paper
  • Article
  • Open Access
56 Citations
13,257 Views
10 Pages

22 March 2019

Fog harvesting of the Namib desert beetles has inspired many researchers to design artificial fog harvesting hybrid surfaces, which commonly involve flat hydrophilic patterns on hydrophobic surfaces. However, relatively less interest has been shown i...

  • Article
  • Open Access
10 Citations
5,609 Views
12 Pages

The Influence of AlN Intermediate Layer on the Structural and Chemical Properties of SiC Thin Films Produced by High-Power Impulse Magnetron Sputtering

  • Nierlly Galvão,
  • Marciel Guerino,
  • Tiago Campos,
  • Korneli Grigorov,
  • Mariana Fraga,
  • Bruno Rodrigues,
  • Rodrigo Pessoa,
  • Julien Camus,
  • Mohammed Djouadi and
  • Homero Maciel

22 March 2019

Many strategies have been developed for the synthesis of silicon carbide (SiC) thin films on silicon (Si) substrates by plasma-based deposition techniques, especially plasma enhanced chemical vapor deposition (PECVD) and magnetron sputtering, due to...

  • Feature Paper
  • Review
  • Open Access
26 Citations
7,749 Views
16 Pages

Development of the Troponin Detection System Based on the Nanostructure

  • Taek Lee,
  • Jae-Hyuk Ahn,
  • Jinha Choi,
  • Yeonju Lee,
  • Jin-Myung Kim,
  • Chulhwan Park,
  • Hongje Jang,
  • Tae-Hyung Kim and
  • Min-Ho Lee

22 March 2019

During the last 30 years, the World Health Organization (WHO) reported a gradual increase in the number of patients with cardiovascular disease (CVD), not only in developed but also in developing countries. In particular, acute myocardial infarction...

  • Article
  • Open Access
11 Citations
5,922 Views
11 Pages

An Automated and Miniaturized Rotating-Disk Device for Rapid Nucleic Acid Extraction

  • Rui Tong,
  • Lijuan Zhang,
  • Chuandeng Hu,
  • Xuee Chen,
  • Qi Song,
  • Kai Lou,
  • Xin Tang,
  • Yongsheng Chen,
  • Xiuqing Gong and
  • Weijia Wen
  • + 1 author

22 March 2019

The result of molecular diagnostic and detection greatly dependent on the quality and integrity of the isolated nucleic acid. In this work, we developed an automated miniaturized nucleic acid extraction device based on magnetic beads method, consisti...

  • Article
  • Open Access
26 Citations
8,513 Views
15 Pages

Deformation of a Red Blood Cell in a Narrow Rectangular Microchannel

  • Naoki Takeishi,
  • Hiroaki Ito,
  • Makoto Kaneko and
  • Shigeo Wada

21 March 2019

The deformability of a red blood cell (RBC) is one of the most important biological parameters affecting blood flow, both in large arteries and in the microcirculation, and hence it can be used to quantify the cell state. Despite numerous studies on...

  • Article
  • Open Access
13 Citations
5,368 Views
9 Pages

21 March 2019

Wirelessly powered medical microrobots are often driven or localized by magnetic resonance imaging coils, whose signal-to-noise ratio is easily affected by the power transmitter coils that supply the microrobot. A controlled single-sided wireless pow...

  • Article
  • Open Access
10 Citations
5,173 Views
11 Pages

20 March 2019

The formation of serrated chips is an important feature during machining of difficult-to-cut materials, such as titanium alloy, nickel based alloy, and some steels. In this study, Ti6Al4V alloys with equiaxial and acicular martensitic microstructures...

  • Article
  • Open Access
26 Citations
4,003 Views
21 Pages

Novel WiFi/MEMS Integrated Indoor Navigation System Based on Two-Stage EKF

  • Yi Cui,
  • Yongbo Zhang,
  • Yuliang Huang,
  • Zhihua Wang and
  • Huimin Fu

20 March 2019

Indoor navigation has been developing rapidly over the last few years. However, it still faces a number of challenges and practical issues. This paper proposes a novel WiFi/MEMS integration structure for indoor navigation. The two-stage structure use...

  • Article
  • Open Access
30 Citations
5,487 Views
13 Pages

19 March 2019

This study established a microfluidic chip for the capture of A549 human lung circulating tumor cells via the aptamer-conjugated self-assembled monolayer (SAM) of gold nanoparticles (AuNPs) in the channel. AuNPs are among the most attractive nanomate...

  • Article
  • Open Access
7 Citations
5,144 Views
27 Pages

19 March 2019

Through combining P-type iterative learning (IL) control, model-free adaptive (MFA) control and sliding mode (SM) control, a robust model-free adaptive iterative learning (MFA-IL) control approach is presented for the active vibration control of piez...

  • Article
  • Open Access
29 Citations
6,444 Views
9 Pages

18 March 2019

A simple deep-ultraviolet (UV) absorption spectrophotometer based on ultraviolet light-emitting diode (UV LED) was developed for the detection of air-borne toluene with a good sensitivity. A fiber-coupled deep UV-LED was employed as a light source, a...

  • Article
  • Open Access
81 Citations
7,764 Views
11 Pages

Tunable Graphene-based Plasmonic Perfect Metamaterial Absorber in the THz Region

  • Zao Yi,
  • Jiajia Chen,
  • Chunlian Cen,
  • Xifang Chen,
  • Zigang Zhou,
  • Yongjian Tang,
  • Xin Ye,
  • Shuyuan Xiao,
  • Wei Luo and
  • Pinghui Wu

18 March 2019

The optical performance of a periodically tunable plasma perfect metamaterial absorber based on a square-square-circle array we propose in the terahertz region is analyzed in this work by the finite difference time domain (FDTD) method. We not only d...

  • Article
  • Open Access
6 Citations
5,220 Views
14 Pages

15 March 2019

Many researchers have fabricated micro and nanofluidic devices incorporating optical, chemical, and electrical detection systems with the aim of achieving on-chip analysis of macromolecules. The present study demonstrates a label-free detection of DN...

  • Article
  • Open Access
25 Citations
5,440 Views
13 Pages

Cavitating Flow through a Micro-Orifice

  • Zhi-jiang Jin,
  • Zhi-xin Gao,
  • Xiao-juan Li and
  • Jin-yuan Qian

15 March 2019

Microfluidic systems have witnessed rapid development in recent years. As one of the most common structures, the micro-orifice is always included inside microfluidic systems. Hydrodynamic cavitation in the micro-orifice has been experimentally discov...

  • Article
  • Open Access
3 Citations
4,821 Views
16 Pages

15 March 2019

Forceps are essential tools for digital nerve manipulation during digital nerve repair surgery. However, surgeons have to operate forceps with extreme caution to prevent detrimental post-operative complications caused by over-gripping force. Their in...

  • Article
  • Open Access
62 Citations
10,558 Views
11 Pages

15 March 2019

Fabrication of microfluidic devices by soft lithography is by far the most popular approach due to simplicity and low cost. In this approach PDMS (polydimethylsiloxane) is cast on a photoresist master to generate replicas that are then sealed against...

  • Article
  • Open Access
8 Citations
3,785 Views
7 Pages

Effect of Etching Depth on Threshold Characteristics of GaSb-Based Middle Infrared Photonic-Crystal Surface-Emitting Lasers

  • Zong-Lin Li,
  • Shen-Chieh Lin,
  • Gray Lin,
  • Hui-Wen Cheng,
  • Kien-Wen Sun and
  • Chien-Ping Lee

14 March 2019

We study the effect of etching depth on the threshold characteristics of GaSb-based middle infrared (Mid-IR) photonic-crystal surface-emitting lasers (PCSELs) with different lattice periods. The below-threshold emission spectra are measured to identi...

  • Article
  • Open Access
5 Citations
6,119 Views
11 Pages

Wire Electrodes Embedded in Artificial Conduit for Long-term Monitoring of the Peripheral Nerve Signal

  • Woohyun Jung,
  • Sunyoung Jung,
  • Ockchul Kim,
  • HyungDal Park,
  • Wonsuk Choi,
  • Donghee Son,
  • Seok Chung and
  • Jinseok Kim

13 March 2019

Massive efforts to develop neural interfaces have been made for controlling prosthetic limbs according to the will of the patient, with the ultimate goal being long-term implantation. One of the major struggles is that the electrode’s performan...

  • Feature Paper
  • Article
  • Open Access
3 Citations
5,619 Views
22 Pages

Technological Platform for Vertical Multi-Wafer Integration of Microscanners and Micro-Optical Components

  • Sylwester Bargiel,
  • Maciej Baranski,
  • Maik Wiemer,
  • Jörg Frömel,
  • Wei-Shan Wang and
  • Christophe Gorecki

13 March 2019

We describe an original integration technological platform for the miniaturization of micromachined on-chip optical microscopes, such as the laser scanning confocal microscope. The platform employs the multi-wafer vertical integration approach, combi...

  • Article
  • Open Access
60 Citations
8,080 Views
20 Pages

Design, Fabrication and Experiment of Double U-Beam MEMS Vibration Ring Gyroscope

  • Huiliang Cao,
  • Yu Liu,
  • Zhiwei Kou,
  • Yingjie Zhang,
  • Xingling Shao,
  • Jinyang Gao,
  • Kun Huang,
  • Yunbo Shi,
  • Jun Tang and
  • Jun Liu
  • + 1 author

13 March 2019

This study presents a new microelectromechanical system, a vibration ring gyroscope with a double U-beam (DUVRG), which was designed using a combination of mathematical analysis and the finite element method. First, a ring vibration resonator with ei...

  • Article
  • Open Access
27 Citations
6,036 Views
13 Pages

Sub-ppb Level Detection of BTEX Gaseous Mixtures with a Compact Prototype GC Equipped with a Preconcentration Unit

  • Irene Lara-lbeas,
  • Alberto Rodríguez-Cuevas,
  • Christina Andrikopoulou,
  • Vincent Person,
  • Lucien Baldas,
  • Stéphane Colin and
  • Stéphane Le Calvé

13 March 2019

In this work, a compact gas chromatograph prototype for near real-time benzene, toluene, ethylbenzene and xylenes (BTEX) detection at sub-ppb levels has been developed. The system is composed of an aluminium preconcentrator (PC) filled with Basolite...

  • Article
  • Open Access
14 Citations
5,077 Views
16 Pages

Study of TiAlN PVD Coating on Stamping Dies Used in Tinplate Food Package Production

  • Liliana Fernandes,
  • Francisco J. G. Silva and
  • Ricardo Alexandre

12 March 2019

The food industry is increasingly demanding in terms of the quality and appearance of its product packages. The present study focuses on identifying the main wear mechanisms developed during the stamping process of these packages. During the stamping...

  • Article
  • Open Access
56 Citations
6,123 Views
12 Pages

12 March 2019

Hysteresis behaviors exist in piezoelectric ceramics actuators (PCAs), which degrade the positioning accuracy badly. The classical Bouc–Wen (CB–W) model is mainly used for describing rate-independent hysteresis behaviors. However, it cann...

  • Article
  • Open Access
16 Citations
5,251 Views
20 Pages

Dynamic Modeling of the Multiring Disk Resonator Gyroscope

  • Qingsong Li,
  • Dingbang Xiao,
  • Xin Zhou,
  • Zhanqiang Hou,
  • Ming Zhuo,
  • Yi Xu and
  • Xuezhong Wu

10 March 2019

The multiring disk resonator gyroscope (DRG) has been a candidate for high performance gyroscopes, however nowadays the finite element method (FEM) is the main method for its analysis due to its complex structure. In this paper we propose a new metho...

  • Article
  • Open Access
13 Citations
5,557 Views
16 Pages

A Microfluidic Split-Flow Technology for Product Characterization in Continuous Low-Volume Nanoparticle Synthesis

  • Holger Bolze,
  • Peer Erfle,
  • Juliane Riewe,
  • Heike Bunjes,
  • Andreas Dietzel and
  • Thomas P. Burg

9 March 2019

A key aspect of microfluidic processes is their ability to perform chemical reactions in small volumes under continuous flow. However, a continuous process requires stable reagent flow over a prolonged period. This can be challenging in microfluidic...

  • Article
  • Open Access
23 Citations
5,813 Views
15 Pages

9 March 2019

Smartphone-based technologies for medical imaging purposes are limited, especially when it involves the measurement of physiological information of the tissues. Herein, a smartphone-based near-infrared (NIR) imaging device was developed to measure ph...

  • Article
  • Open Access
36 Citations
3,404 Views
22 Pages

Impact of the TiO2 Nanosolution Concentration on Heat Transfer Enhancement of the Twin Impingement Jet of a Heated Aluminum Plate

  • Mahir Faris Abdullah,
  • Rozli Zulkifli,
  • Zambri Harun,
  • Shahrir Abdullah,
  • Wan Aizon Wan Ghopa,
  • Asmaa Soheil Najm and
  • Noor Humam Sulaiman

7 March 2019

Here, the researchers carried out an experimental analysis of the effect of the TiO2 nanosolution concentration on the heat transfer of the twin jet impingement on an aluminum plate surface. We used three different heat transfer enhancement processes...

  • Article
  • Open Access
18 Citations
4,682 Views
15 Pages

Product and Process Fingerprint for Nanosecond Pulsed Laser Ablated Superhydrophobic Surface

  • Yukui Cai,
  • Xichun Luo,
  • Zhanqiang Liu,
  • Yi Qin,
  • Wenlong Chang and
  • Yazhou Sun

7 March 2019

Superhydrophobic surfaces have attracted extensive attention over the last few decades. It is mainly due to their capabilities of providing several interesting functions, such as self-cleaning, corrosion resistance, anti-icing and drag reduction. Nan...

  • Article
  • Open Access
15 Citations
4,361 Views
16 Pages

7 March 2019

The mixing process of two pressure driven steady-state rarefied gas streams flowing between two parallel plates was investigated via DSMC (Direct Simulation Monte Carlo) for different combinations of gases. The distance from the inlet, where the asso...

  • Article
  • Open Access
19 Citations
4,293 Views
11 Pages

Hydrophobicity Influence on Swimming Performance of Magnetically Driven Miniature Helical Swimmers

  • Chengwei Ye,
  • Jia Liu,
  • Xinyu Wu,
  • Ben Wang,
  • Li Zhang,
  • Yuanyi Zheng and
  • Tiantian Xu

6 March 2019

Helical microswimmers have been involved in a wide variety of applications, ranging from in vivo tasks such as targeted drug delivery to in vitro tasks such as transporting micro objects. Over the past decades, a number of studies have been establish...

  • Article
  • Open Access
25 Citations
6,585 Views
10 Pages

2 March 2019

The generation of concentration gradients is an essential part of a wide range of laboratory settings. However, the task usually requires tedious and repetitive steps and it is difficult to generate concentration gradients at once. Here, we present a...

  • Article
  • Open Access
9 Citations
5,068 Views
13 Pages

Charged Satellite Drop Avoidance in Electrohydrodynamic Dripping

  • Lei Guo,
  • Yongqing Duan,
  • Weiwei Deng,
  • Yin Guan,
  • YongAn Huang and
  • Zhouping Yin

1 March 2019

The quality of electrohydrodynamic jet (e-jet) printing is crucially influenced by the satellite drop formed when the primary drop detaches from the meniscus. If the satellite drop falls onto the substrate, the patterns on the substrate will be conta...

  • Article
  • Open Access
2 Citations
4,389 Views
12 Pages

Patterning Perfluorinated Surface with Graphene Oxide and the Microarray Applications

  • Liang Wu,
  • Baishu Liu,
  • Meiling Zhu,
  • Dameng Guo,
  • Han Wu,
  • Liming Bian and
  • Bo Zheng

1 March 2019

A method was developed to pattern the surface of perfluorinated materials with graphene oxide thin film, and various biological applications of the patterned perfluorinated surface were illustrated. Perfluorinated surfaces such as Teflon, Cytop, and...

  • Article
  • Open Access
30 Citations
4,131 Views
18 Pages

28 February 2019

Microelectromechanical systems (MEMS) have established themselves within various fields dominated by high-precision micromanipulation, with the most distinguished sectors being the microassembly, micromanufacturing and biomedical ones. This paper pre...

  • Article
  • Open Access
20 Citations
5,975 Views
11 Pages

A Bubble-Free Microfluidic Device for Easy-to-Operate Immobilization, Culturing and Monitoring of Zebrafish Embryos

  • Zhen Zhu,
  • Yangye Geng,
  • Zhangyi Yuan,
  • Siqi Ren,
  • Meijing Liu,
  • Zhaozheng Meng and
  • Dejing Pan

28 February 2019

The development of miniaturized devices for studying zebrafish embryos has been limited due to complicated fabrication and operation processes. Here, we reported on a microfluidic device that enabled the capture and culture of zebrafish embryos and r...

  • Article
  • Open Access
30 Citations
5,913 Views
12 Pages

A Piezoelectric Resonance Pump Based on a Flexible Support

  • Jiantao Wang,
  • Xiaolong Zhao,
  • Xiafei Chen and
  • Haoren Yang

28 February 2019

Small volume changes are important factors that restrict the improvement of the performance of a piezoelectric diaphragm pump. In order to increase the volume change of the pump chamber, a square piezoelectric vibrator with a flexible support is prop...

  • Feature Paper
  • Article
  • Open Access
34 Citations
6,353 Views
11 Pages

Three-Dimensional Printed Piezoelectric Array for Improving Acoustic Field and Spatial Resolution in Medical Ultrasonic Imaging

  • Zeyu Chen,
  • Xuejun Qian,
  • Xuan Song,
  • Qiangguo Jiang,
  • Rongji Huang,
  • Yang Yang,
  • Runze Li,
  • Kirk Shung,
  • Yong Chen and
  • Qifa Zhou

28 February 2019

Piezoelectric arrays are widely used in non-destructive detecting, medical imaging and therapy. However, limited by traditional manufacturing methods, the array’s element is usually designed in simple geometry such as a cube or rectangle, restricting...

  • Article
  • Open Access
14 Citations
4,124 Views
18 Pages

28 February 2019

In this paper, a combined numerical and experimental approach for the estimation of the average friction factor along adiabatic microchannels with compressible gas flows is presented. Pressure-drop experiments are performed for a rectangular microcha...

  • Article
  • Open Access
6 Citations
5,194 Views
10 Pages

Programmable Spectral Filter in C-Band Based on Digital Micromirror Device

  • Yunshu Gao,
  • Xiao Chen,
  • Genxiang Chen,
  • Zhongwei Tan,
  • Qiao Chen,
  • Dezheng Dai,
  • Qian Zhang and
  • Chao Yu

27 February 2019

Optical filters have been adopted in many applications such as reconfigurable telecommunication switches, tunable lasers and spectral imaging. However, most of commercialized filters based on a micro-electrical-mechanical system (MEMS) only provide a...

  • Article
  • Open Access
52 Citations
5,958 Views
13 Pages

27 February 2019

ZnO nanorods have been grown on the surface of foamed nickel by a two-step method. Firstly, a layer of ZnO seed is sputtered on the surface of the foamed nickel by magnetron sputtering, and then the hydrothermal method is used to grow ZnO nanorods at...

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Micromachines - ISSN 2072-666X