Process Understanding of Plasma Electrolytic Polishing through Multiphysics Simulation and Inline Metrology
Danilov, I.; Hackert-Oschätzchen, M.; Zinecker, M.; Meichsner, G.; Edelmann, J.; Schubert, A. Process Understanding of Plasma Electrolytic Polishing through Multiphysics Simulation and Inline Metrology. Micromachines 2019, 10, 214. https://doi.org/10.3390/mi10030214
Danilov I, Hackert-Oschätzchen M, Zinecker M, Meichsner G, Edelmann J, Schubert A. Process Understanding of Plasma Electrolytic Polishing through Multiphysics Simulation and Inline Metrology. Micromachines. 2019; 10(3):214. https://doi.org/10.3390/mi10030214
Chicago/Turabian StyleDanilov, Igor, Matthias Hackert-Oschätzchen, Mike Zinecker, Gunnar Meichsner, Jan Edelmann, and Andreas Schubert. 2019. "Process Understanding of Plasma Electrolytic Polishing through Multiphysics Simulation and Inline Metrology" Micromachines 10, no. 3: 214. https://doi.org/10.3390/mi10030214


