- Article
Shallow Trench Isolation Patterning to Improve Photon Detection Probability of Single-Photon Avalanche Diodes Integrated in FD-SOI CMOS Technology
- Shaochen Gao,
- Duc-Tung Vu,
- Thibauld Cazimajou,
- Patrick Pittet,
- Martine Le Berre,
- Mohammadreza Dolatpoor Lakeh,
- Fabien Mandorlo,
- Régis Orobtchouk,
- Jean-Baptiste Schell and
- Jean-Baptiste Kammerer
- + 4 authors
The integration of Single-Photon Avalanche Diodes (SPADs) in CMOS Fully Depleted Silicon-On-Insulator (FD-SOI) technology under a buried oxide (BOX) layer and a silicon film containing transistors makes it possible to realize a 3D SPAD at the chip le...