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Precision Mechatronics: Design, Control and Applications

This special issue belongs to the section "E: Engineering and Technology".

Special Issue Information

Keywords

  • precision mechanism
  • flexible mechanism
  • capacitive sensor
  • laser interferometer
  • piezoelectric actuator
  • voice coil motor
  • precision control
  • precision mechatronics applications
  • robotics
  • optical system
  • scanning probe microscopy (SFM)
  • semiconductor manufacturing
  • biomedical engineering
  • cell manipulation
  • other

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Published Papers

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Micromachines - ISSN 2072-666X