Micromachines, Volume 10, Issue 5

The storage device based on Nonvolatile Memory (NVM devices) has high read/write speed and embedded processor. It is a useful way to improve the efficiency of Key-Value (KV) application. However it still has some limitations such as limited capacity,...

Bioelectronic devices have been researched widely because of their potential applications, such as information storage devices, biosensors, diagnosis systems, organism-mimicking processing system cell chips, and neural-mimicking systems. Introducing...

As there are significant variations of cell elasticity among individual cells, measuring the elasticity of batch cells is required for obtaining statistical results of cell elasticity. At present, the micropipette aspiration (MA) technique is the mos...

High efficiency blue fluorescent organic light-emitting diodes (OLEDs), based on 1,3-bis(carbazol-9-yl)benzene (mCP) doped with 4,4’-bis(9-ethyl-3-carbazovinylene)-1,1’-biphenyl (BCzVBi), were fabricated using four different hole transport layers (HT...

The use of AC electric fields for manipulating and/or characterizing liquids and small particles in suspension is well-known [...]

Displacement constraints such as stops are widely used in engineering to improve the shock resistance of microelectromechanical system (MEMS) tuning fork gyroscopes. However, in practical applications, it has been found that unexpected breakage can o...

Colorful electrowetting displays (EWD) present many challenges, such as scalability and electro-optical performance improvement (e.g., brightness, color gamut, and contrast ratio). The first full investigation of scalable fabrication and testing proc...

Fan-out wafer level packaging (FOWLP) is one of the latest packaging trends in microelectronics. Besides technology developments towards heterogeneous integration, including multiple die packaging, passive component integration in packages and redist...

Microinjection moulding has been developed to fulfil the needs of mass production of micro components in different fields. A challenge of this technology lies in the downscaling of micro components, which leads to faster solidification of the polymer...

A 4 × 25 Gb/s ultrawide misalignment tolerance wavelength-division-multiplex (WDM) transmitter based on novel bidirectional vertical grating coupler has been demonstrated on complementary metal-oxide-semiconductor (CMOS)-compatible silicon-on-i...

Fast tool servo (FTS) machining technology is a promising method for freeform surfaces and machining micro-nanostructure surfaces. However, limited degrees of freedom (DOF) is an inherent drawback of existing FTS technologies. In this paper, a piezo-...

In this study, UV irradiation was used to improve the response of indium oxide (In₂O₃) used as a CO sensing material for a resistive sensor operating in a low temperature range, from 25 °C to 150 °C. Different experimental conditions have bee...

High-precision aligned wafer bonding is essential to heterogeneous integration, with the device dimension reduced continuously. To get the alignment more accurately and conveniently, we propose a moiré-based alignment method using centrosymmet...

The continuous trend towards miniaturization and multi-functionality embedded in products and processes calls for an ever-increasing research and innovation effort in the development of micro components and related micro manufacturing technologies [...]

Thermal nanoimprint lithography is playing a vital role in fabricating micro/nanostructures on polymer materials by the advantages of low cost, high throughput, and high resolution. However, a typical thermal nanoimprint process usually takes tens of...

With the aim of designing an action detection method on artificial knee, a new time–frequency feature extraction method was proposed. The inertial data were extracted periodically using the microelectromechanical systems (MEMS) inertial measure...

The super-precise theory for machining single crystal SiC substrates with abrasives needs to be improved for its chemical stability, extremely hard and brittle. A Berkovich indenter was used to carry out a systematic static stiffness indentation expe...

In this paper, a double piezoelectric layer acceleration sensor based on Li-doped ZnO (LZO) thin film is presented. It is constituted by Pt/LZO/Pt/LZO/Pt/Ti functional layers and a Si cantilever beam with a proof mass. The LZO thin films were prepare...

In the published paper [...]

Electric field-based smart wetting manipulation is one of the extensively used techniques in modern surface science and engineering, especially in microfluidics and optofluidics applications. Liquid dielectrophoresis (LDEP) is a technique involving t...

Flexible transparent conductive electrodes (TCEs) are widely applied in flexible electronic devices. Among these electrodes, silver (Ag) nanowires (NWs) have gained considerable interests due to their excellent electrical and optical performances. Ag...

Capacitive sensing is a key technique to measure the test mass movement with a high resolution for space-borne gravitational wave detectors, such as Laser Interferometer Space Antenna (LISA) and TianQin. The capacitance resolution requirement of Tian...

Photocatalytic conversion of CO₂ to useful products is an alluring approach for acquiring the two-fold benefits of normalizing excess atmospheric CO₂ levels and the production of solar chemicals/fuels. Therefore, photocatalytic materials are continuo...

The electron spin degree of freedom can provide the functionality of “nonvolatility” in electronic devices. For example, magnetoresistive random access memory (MRAM) is expected as an ideal nonvolatile working memory, with high speed response, high w...

This paper presents the design, fabrication, and characterization of an electrothermal MEMS mirror with large tip, tilt and piston scan. This MEMS mirror is based on electrothermal bimorph actuation with Cu and W thin-film layers forming the bimorphs...

A new kind of fringing electrostatic actuation mode is developed. In this new actuation mode, the expression of fringing electrostatic force is found. The nonlinear dynamic analysis of this new actuation mode is presented by using the Method of Multi...

β-Ga₂O₃, characterized with high n-type conductivity, little lattice mismatch with III-Nitrides, high transparency (>80%) in blue, and UVA (400–320 nm) as well as UVB (320–280 nm) regions, has great potential as the substrate for...

Microfluidic devices that allow biological particle separation and concentration have found wide applications in medical diagnosis. Here we present a viral separation polydimethylsiloxane (PDMS) device that combines tangential flow microfiltration an...

Particle flow separation is a useful technique in lab-on-a-chip applications to selectively transport dispersed phases to a desired branch in microfluidic devices. The present study aims to demonstrate both nano- and microparticle flow separation usi...

This paper presents high-sensitivity, micromachined all-fiber Fabry–Pérot interferometric (FFPI) strain gauges and their integration in a force balance for hypersonic aerodynamic measurements. The FFPI strain gauge has a short Fabry&ndas...

Flow characteristics within entrance regions in microchannels are important due to their effect on heat and mass transfer. However, relevant research is limited and some conclusions are controversial. In order to reveal flow characteristics within en...

Here we report a quantum dot light emitting diode (QLED), in which a layer of colloidal silicon quantum dots (SiQDs) works as the optically active component, exhibiting a strong electroluminescence (EL) spectrum peaking at 620 nm. We could not see an...

This article presents a new wafer-bonding fabrication technique for Capacitive Micromachined Ultrasonic Transducers (CMUTs) using polymethyl methacrylate (PMMA). The PMMA-based single-mask and single-dry-etch step-bonding device is much simpler, and...

Silicon carbide (SiC) metal-oxide-semiconductor field-effect transistors (MOSFETs) have the advantages of high-frequency switching capability and the capability to withstand high temperatures, which are suitable for switching devices in a direct curr...

Microelectromechanical switch has become an essential component in a wide variety of applications, ranging from biomechanics and aerospace engineering to consumer electronics. Electrostatically actuated microbeams and microplates are chief parts of m...

Single-cell analysis commonly requires the confinement of cell suspensions in an analysis chamber or the precise positioning of single cells in small channels. Hydrodynamic flow focusing has been broadly utilized to achieve stream confinement in micr...

Metallic implants were the only option for both medical and dental applications for decades. However, it has been reported that patients with metal implants can show allergic reactions. Consequently, technical ceramics have become an accessible mater...

This paper proposes a modular gripping mechanism for the manipulation of multiple objects. The proposed micro gripper combines traditional machining techniques with MEMS technologies to produce a modular mechanism consisting of a sturdy, compliant al...

First-principles calculations were used to investigate the electronic properties of the SiC/GeC nanosheet (the thickness was about 8 Å). With no electric field (E-field), the SiC/GeC nanosheet was shown to have a direct bandgap of 1.90 eV. In t...

Metasurfaces have been studied and widely applied to optical systems. A metasurface-based flat lens (metalens) holds promise in wave-front engineering for multiple applications. The metalens has become a breakthrough technology for miniaturized optic...

Recent advances in nanoscale resistive memory devices offer promising opportunities for in-memory computing with their capability of simultaneous information storage and processing. The relationship between current and memory conductance can be utili...

In this research, the enhancement in electrochemical performance of pyrolyzed carbon microelectrodes by surface modification is investigated. For the proposed microfabrication process, pyrolyzed carbon microelectrodes with multi-walled carbon nanotub...

This paper presents a new planar feeding structure for wideband resonant-cavity antennas (RCAs). The feeding structure consists of two stacked dielectric slabs with an air-gap in between. A U-shaped slot, etched in the top metal-cladding over the upp...

Quantifying the density and locating the position of antigens on cell surface has been a challenge in molecular biology research. The challenge lies in the need for a chemically and photophysically stable fluorophore to achieve the required sensitivi...

This paper presents a study to determine the effect of sensor dimensions (length, width, and thickness) on the performance of flexible hot film shear stress sensors. The sensing component of a hot film sensor is nickel thermistor, and the flexible su...

Aligned P(VDF-TrFE) nanofibers are successfully fabricated by advanced electrospinning. The aligned feature of the nanofibers is achieved by using parallel electrodes, which is fabricated by lithography and wet etching, and a rotating drum collector....

A fabrication method is developed to produce a microfluidic device to test cell adhesion to polymeric materials. The process is able to produce channels with walls of any spin coatable polymer. The method is a modification of the existing poly-dimeth...

Tactile displays have been widely studied for many decades. Although multiple tactile stimuli are more effective to improve the quality of the presented tactile sensation, most tactile displays provide a single tactile stimulus. An integrated tactile...

Complementary Metal Oxide Semiconductor (CMOS) devices and fabrication techniques have enabled tremendous technological advancements in a short period of time [...]

This paper first presents an adaptive expectation-maximization (AEM) control algorithm based on a measurement-data-driven model to reduce the variance of microelectromechanical system (MEMS) accelerometer sensor under multi disturbances. Significantl...