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An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability

Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA
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Author to whom correspondence should be addressed.
Micromachines 2019, 10(5), 323; https://doi.org/10.3390/mi10050323
Received: 23 April 2019 / Revised: 5 May 2019 / Accepted: 9 May 2019 / Published: 14 May 2019
(This article belongs to the Special Issue Optical MEMS)
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Abstract

This paper presents the design, fabrication, and characterization of an electrothermal MEMS mirror with large tip, tilt and piston scan. This MEMS mirror is based on electrothermal bimorph actuation with Cu and W thin-film layers forming the bimorphs. The MEMS mirror is fabricated via a combination of surface and bulk micromachining. The piston displacement and tip-tilt optical angle of the mirror plate of the fabricated MEMS mirror are around 114 μm and ±8°, respectively at only 2.35 V. The measured response time is 7.3 ms. The piston and tip-tilt resonant frequencies are measured to be 1.5 kHz and 2.7 kHz, respectively. The MEMS mirror survived 220 billion scanning cycles with little change of its scanning characteristics, indicating that the MEMS mirror is stable and reliable. View Full-Text
Keywords: MEMS mirror; electrothermal bimorph; Cu/W bimorph; electrothermal actuation; reliability MEMS mirror; electrothermal bimorph; Cu/W bimorph; electrothermal actuation; reliability
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Zhou, L.; Zhang, X.; Xie, H. An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability. Micromachines 2019, 10, 323.

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