Editor’s Choice Articles

Editor’s Choice articles are based on recommendations by the scientific editors of MDPI journals from around the world. Editors select a small number of articles recently published in the journal that they believe will be particularly interesting to readers, or important in the respective research area. The aim is to provide a snapshot of some of the most exciting work published in the various research areas of the journal.

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Review

21 pages, 6650 KiB  
Review
Recent Progress of Terahertz Spatial Light Modulators: Materials, Principles and Applications
by Shengnan Guan, Jierong Cheng and Shengjiang Chang
Micromachines 2022, 13(10), 1637; https://doi.org/10.3390/mi13101637 - 29 Sep 2022
Cited by 14 | Viewed by 2923
Abstract
Terahertz (THz) technology offers unparalleled opportunities in a wide variety of applications, ranging from imaging and spectroscopy to communications and quality control, where lack of efficient modulation devices poses a major bottleneck. Spatial modulation allows for dynamically encoding various spatial information into the [...] Read more.
Terahertz (THz) technology offers unparalleled opportunities in a wide variety of applications, ranging from imaging and spectroscopy to communications and quality control, where lack of efficient modulation devices poses a major bottleneck. Spatial modulation allows for dynamically encoding various spatial information into the THz wavefront by electrical or optical control. It plays a key role in single-pixel imaging, beam scanning and wavefront shaping. Although mature techniques from the microwave and optical band are not readily applicable when scaled to the THz band, the rise of metasurfaces and the advance of new materials do inspire new possibilities. In this review, we summarize the recent progress of THz spatial light modulators from the perspective of functional materials and analyze their modulation principles, specifications, applications and possible challenges. We envision new advances of this technique in the near future to promote THz applications in different fields. Full article
(This article belongs to the Special Issue Passive and Active THz Components)
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54 pages, 2876 KiB  
Review
Sustained Drug Release from Smart Nanoparticles in Cancer Therapy: A Comprehensive Review
by Xue Bai, Zara L. Smith, Yuheng Wang, Sam Butterworth and Annalisa Tirella
Micromachines 2022, 13(10), 1623; https://doi.org/10.3390/mi13101623 - 28 Sep 2022
Cited by 27 | Viewed by 3912
Abstract
Although nanomedicine has been highly investigated for cancer treatment over the past decades, only a few nanomedicines are currently approved and in the market; making this field poorly represented in clinical applications. Key research gaps that require optimization to successfully translate the use [...] Read more.
Although nanomedicine has been highly investigated for cancer treatment over the past decades, only a few nanomedicines are currently approved and in the market; making this field poorly represented in clinical applications. Key research gaps that require optimization to successfully translate the use of nanomedicines have been identified, but not addressed; among these, the lack of control of the release pattern of therapeutics is the most important. To solve these issues with currently used nanomedicines (e.g., burst release, systemic release), different strategies for the design and manufacturing of nanomedicines allowing for better control over the therapeutic release, are currently being investigated. The inclusion of stimuli-responsive properties and prolonged drug release have been identified as effective approaches to include in nanomedicine, and are discussed in this paper. Recently, smart sustained release nanoparticles have been successfully designed to safely and efficiently deliver therapeutics with different kinetic profiles, making them promising for many drug delivery applications and in specific for cancer treatment. In this review, the state-of-the-art of smart sustained release nanoparticles is discussed, focusing on the design strategies and performances of polymeric nanotechnologies. A complete list of nanomedicines currently tested in clinical trials and approved nanomedicines for cancer treatment is presented, critically discussing advantages and limitations with respect to the newly developed nanotechnologies and manufacturing methods. By the presented discussion and the highlight of nanomedicine design criteria and current limitations, this review paper could be of high interest to identify key features for the design of release-controlled nanomedicine for cancer treatment. Full article
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36 pages, 4899 KiB  
Review
A Critical Review on the Junction Temperature Measurement of Light Emitting Diodes
by Ceren Cengiz, Mohammad Azarifar and Mehmet Arik
Micromachines 2022, 13(10), 1615; https://doi.org/10.3390/mi13101615 - 27 Sep 2022
Cited by 11 | Viewed by 3151
Abstract
In the new age of illumination, light emitting diodes (LEDs) have been proven to be the most efficient alternative to conventional light sources. Yet, in comparison to other lighting systems, LEDs operate at low temperatures while junction temperature (Tj) is [...] Read more.
In the new age of illumination, light emitting diodes (LEDs) have been proven to be the most efficient alternative to conventional light sources. Yet, in comparison to other lighting systems, LEDs operate at low temperatures while junction temperature (Tj) is is among the main factors dictating their lifespan, reliability, and performance. This indicates that accurate measurement of LED temperature is of great importance to better understand the thermal effects over a system and improve performance. Over the years, various Tj measurement techniques have been developed, and existing methods have been improved in many ways with technological and scientific advancements. Correspondingly, in order to address the governing phenomena, benefits, drawbacks, possibilities, and applications, a wide range of measurement techniques and systems are covered. This paper comprises a large number of published studies on junction temperature measurement approaches for LEDs, and a summary of the experimental parameters employed in the literature are given as a reference. In addition, some of the corrections noted in non-ideal thermal calibration processes are discussed and presented. Finally, a comparison between methods will provide the readers a better insight into the topic and direction for future research. Full article
(This article belongs to the Special Issue Advanced Technologies in Electronic Packaging)
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22 pages, 6973 KiB  
Review
Smart Manufacturing Processes of Low-Tortuous Structures for High-Rate Electrochemical Energy Storage Devices
by Chun-Yang Kang and Yu-Sheng Su
Micromachines 2022, 13(9), 1534; https://doi.org/10.3390/mi13091534 - 16 Sep 2022
Cited by 3 | Viewed by 2765
Abstract
To maximize the performance of energy storage systems more effectively, modern batteries/supercapacitors not only require high energy density but also need to be fully recharged within a short time or capable of high-power discharge for electric vehicles and power applications. Thus, how to [...] Read more.
To maximize the performance of energy storage systems more effectively, modern batteries/supercapacitors not only require high energy density but also need to be fully recharged within a short time or capable of high-power discharge for electric vehicles and power applications. Thus, how to improve the rate capability of batteries or supercapacitors is a very important direction of research and engineering. Making low-tortuous structures is an efficient means to boost power density without replacing materials or sacrificing energy density. In recent years, numerous manufacturing methods have been developed to prepare low-tortuous configurations for fast ion transportation, leading to impressive high-rate electrochemical performance. This review paper summarizes several smart manufacturing processes for making well-aligned 3D microstructures for batteries and supercapacitors. These techniques can also be adopted in other advanced fields that require sophisticated structural control to achieve superior properties. Full article
(This article belongs to the Special Issue Micro and Smart Devices and Systems, 2nd Edition)
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25 pages, 5618 KiB  
Review
Ultrasound-Responsive Nanocarriers for Breast Cancer Chemotherapy
by Gelan Ayana, Jaemyung Ryu and Se-woon Choe
Micromachines 2022, 13(9), 1508; https://doi.org/10.3390/mi13091508 - 11 Sep 2022
Cited by 12 | Viewed by 4856
Abstract
Breast cancer is the most common type of cancer and it is treated with surgical intervention, radiotherapy, chemotherapy, or a combination of these regimens. Despite chemotherapy’s ample use, it has limitations such as bioavailability, adverse side effects, high-dose requirements, low therapeutic indices, multiple [...] Read more.
Breast cancer is the most common type of cancer and it is treated with surgical intervention, radiotherapy, chemotherapy, or a combination of these regimens. Despite chemotherapy’s ample use, it has limitations such as bioavailability, adverse side effects, high-dose requirements, low therapeutic indices, multiple drug resistance development, and non-specific targeting. Drug delivery vehicles or carriers, of which nanocarriers are prominent, have been introduced to overcome chemotherapy limitations. Nanocarriers have been preferentially used in breast cancer chemotherapy because of their role in protecting therapeutic agents from degradation, enabling efficient drug concentration in target cells or tissues, overcoming drug resistance, and their relatively small size. However, nanocarriers are affected by physiological barriers, bioavailability of transported drugs, and other factors. To resolve these issues, the use of external stimuli has been introduced, such as ultrasound, infrared light, thermal stimulation, microwaves, and X-rays. Recently, ultrasound-responsive nanocarriers have become popular because they are cost-effective, non-invasive, specific, tissue-penetrating, and deliver high drug concentrations to their target. In this paper, we review recent developments in ultrasound-guided nanocarriers for breast cancer chemotherapy, discuss the relevant challenges, and provide insights into future directions. Full article
(This article belongs to the Special Issue Micro- and Nano-Systems for Manipulation, Actuation and Sensing)
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15 pages, 2366 KiB  
Review
Supercritical Fluids and Nanoparticles in Cancer Therapy
by Iolanda De Marco
Micromachines 2022, 13(9), 1449; https://doi.org/10.3390/mi13091449 - 1 Sep 2022
Cited by 6 | Viewed by 1390
Abstract
Nanoparticles are widely used in the pharmaceutical industry due to their high surface-to-volume ratio. Among the many techniques used to obtain nanoparticles, those based on supercritical fluids ensure reduced dimensions, narrow particle size distributions, and a very low or zero solvent residue in [...] Read more.
Nanoparticles are widely used in the pharmaceutical industry due to their high surface-to-volume ratio. Among the many techniques used to obtain nanoparticles, those based on supercritical fluids ensure reduced dimensions, narrow particle size distributions, and a very low or zero solvent residue in the powders. This review focuses on using supercritical carbon dioxide-based processes to obtain the nanoparticles of compounds used for the treatment or prevention of cancer. The scientific literature papers have been classified into two groups: nanoparticles consisting of a single active principle ingredient (API) and carrier/API nanopowders. Various supercritical carbon dioxide (scCO2) based techniques for obtaining the nanoparticles were considered, along with the operating conditions and advantages and disadvantages of each process. Full article
(This article belongs to the Special Issue Nanoparticles in Biomedical Sciences)
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14 pages, 2378 KiB  
Review
Disease Modeling with Kidney Organoids
by Sophie Karp, Martin R Pollak and Balajikarthick Subramanian
Micromachines 2022, 13(9), 1384; https://doi.org/10.3390/mi13091384 - 25 Aug 2022
Cited by 4 | Viewed by 2591
Abstract
Kidney diseases often lack optimal treatments, causing millions of deaths each year. Thus, developing appropriate model systems to study human kidney disease is of utmost importance. Some of the most promising human kidney models are organoids or small organ-resembling tissue collectives, derived from [...] Read more.
Kidney diseases often lack optimal treatments, causing millions of deaths each year. Thus, developing appropriate model systems to study human kidney disease is of utmost importance. Some of the most promising human kidney models are organoids or small organ-resembling tissue collectives, derived from human-induced pluripotent stem cells (hiPSCs). However, they are more akin to a first-trimester fetal kidney than an adult kidney. Therefore, new strategies are needed to advance their maturity. They have great potential for disease modeling and eventually auxiliary therapy if they can reach the maturity of an adult kidney. In this review, we will discuss the current state of kidney organoids in terms of their similarity to the human kidney and use as a disease modeling system thus far. We will then discuss potential pathways to advance the maturity of kidney organoids to match an adult kidney for more accurate human disease modeling. Full article
(This article belongs to the Section B2: Biofabrication and Tissue Engineering)
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41 pages, 14677 KiB  
Review
A Review of Spatter in Laser Powder Bed Fusion Additive Manufacturing: In Situ Detection, Generation, Effects, and Countermeasures
by Zheng Li, Hao Li, Jie Yin, Yan Li, Zhenguo Nie, Xiangyou Li, Deyong You, Kai Guan, Wei Duan, Longchao Cao, Dengzhi Wang, Linda Ke, Yang Liu, Ping Zhao, Lin Wang, Kunpeng Zhu, Zhengwen Zhang, Liang Gao and Liang Hao
Micromachines 2022, 13(8), 1366; https://doi.org/10.3390/mi13081366 - 22 Aug 2022
Cited by 60 | Viewed by 7910
Abstract
Spatter is an inherent, unpreventable, and undesired phenomenon in laser powder bed fusion (L-PBF) additive manufacturing. Spatter behavior has an intrinsic correlation with the forming quality in L-PBF because it leads to metallurgical defects and the degradation of mechanical properties. This impact becomes [...] Read more.
Spatter is an inherent, unpreventable, and undesired phenomenon in laser powder bed fusion (L-PBF) additive manufacturing. Spatter behavior has an intrinsic correlation with the forming quality in L-PBF because it leads to metallurgical defects and the degradation of mechanical properties. This impact becomes more severe in the fabrication of large-sized parts during the multi-laser L-PBF process. Therefore, investigations of spatter generation and countermeasures have become more urgent. Although much research has provided insights into the melt pool, microstructure, and mechanical property, reviews of spatter in L-PBF are still limited. This work reviews the literature on the in situ detection, generation, effects, and countermeasures of spatter in L-PBF. It is expected to pave the way towards a novel generation of highly efficient and intelligent L-PBF systems. Full article
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25 pages, 5499 KiB  
Review
Recent Progress in Development and Applications of Ionic Polymer–Metal Composite
by Si Won Park, Sang Jun Kim, Seong Hyun Park, Juyeon Lee, Hyungjun Kim and Min Ku Kim
Micromachines 2022, 13(8), 1290; https://doi.org/10.3390/mi13081290 - 11 Aug 2022
Cited by 9 | Viewed by 3856
Abstract
Electroactive polymer (EAP) is a polymer that reacts to electrical stimuli, such as voltage, and can be divided into electronic and ionic EAP by an electrical energy transfer mechanism within the polymer. The mechanism of ionic EAP is the movement of the positive [...] Read more.
Electroactive polymer (EAP) is a polymer that reacts to electrical stimuli, such as voltage, and can be divided into electronic and ionic EAP by an electrical energy transfer mechanism within the polymer. The mechanism of ionic EAP is the movement of the positive ions inducing voltage change in the polymer membrane. Among the ionic EAPs, an ionic polymer–metal composite (IPMC) is composed of a metal electrode on the surface of the polymer membrane. A common material for the polymer membrane of IPMC is Nafion containing hydrogen ions, and platinum, gold, and silver are commonly used for the electrode. As a result, IPMC has advantages, such as low voltage requirements, large bending displacement, and bidirectional actuation. Manufacturing of IPMC is composed of preparing the polymer membrane and plating electrode. Preparation methods for the membrane include solution casting, hot pressing, and 3D printing. Meanwhile, electrode formation methods include electroless plating, electroplating, direct assembly process, and sputtering deposition. The manufactured IPMC is widely demonstrated in applications such as grippers, micro-pumps, biomedical, biomimetics, bending sensors, flow sensors, energy harvesters, biosensors, and humidity sensors. This paper will review the overall field of IPMC by demonstrating the categorization, principle, materials, and manufacturing method of IPMC and its applications. Full article
(This article belongs to the Special Issue Hybrid Organic Electronics: Material, Structure and Application)
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25 pages, 4369 KiB  
Review
Engineering Organ-on-a-Chip to Accelerate Translational Research
by Jihoon Ko, Dohyun Park, Somin Lee, Burcu Gumuscu and Noo Li Jeon
Micromachines 2022, 13(8), 1200; https://doi.org/10.3390/mi13081200 - 28 Jul 2022
Cited by 18 | Viewed by 4868
Abstract
We guide the use of organ-on-chip technology in tissue engineering applications. Organ-on-chip technology is a form of microengineered cell culture platform that elaborates the in-vivo like organ or tissue microenvironments. The organ-on-chip platform consists of microfluidic channels, cell culture chambers, and stimulus sources [...] Read more.
We guide the use of organ-on-chip technology in tissue engineering applications. Organ-on-chip technology is a form of microengineered cell culture platform that elaborates the in-vivo like organ or tissue microenvironments. The organ-on-chip platform consists of microfluidic channels, cell culture chambers, and stimulus sources that emulate the in-vivo microenvironment. These platforms are typically engraved into an oxygen-permeable transparent material. Fabrication of these materials requires the use of microfabrication strategies, including soft lithography, 3D printing, and injection molding. Here we provide an overview of what is an organ-on-chip platform, where it can be used, what it is composed of, how it can be fabricated, and how it can be operated. In connection with this topic, we also introduce an overview of the recent applications, where different organs are modeled on the microscale using this technology. Full article
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21 pages, 4643 KiB  
Review
Circuit-Based Design of Microfluidic Drop Networks
by Nassim Rousset, Christian Lohasz, Julia Alicia Boos, Patrick M. Misun, Fernando Cardes and Andreas Hierlemann
Micromachines 2022, 13(7), 1124; https://doi.org/10.3390/mi13071124 - 16 Jul 2022
Cited by 5 | Viewed by 2707
Abstract
Microfluidic-drop networks consist of several stable drops—interconnected through microfluidic channels—in which organ models can be cultured long-term. Drop networks feature a versatile configuration and an air–liquid interface (ALI). This ALI provides ample oxygenation, rapid liquid turnover, passive degassing, and liquid-phase stability through capillary [...] Read more.
Microfluidic-drop networks consist of several stable drops—interconnected through microfluidic channels—in which organ models can be cultured long-term. Drop networks feature a versatile configuration and an air–liquid interface (ALI). This ALI provides ample oxygenation, rapid liquid turnover, passive degassing, and liquid-phase stability through capillary pressure. Mathematical modeling, e.g., by using computational fluid dynamics (CFD), is a powerful tool to design drop-based microfluidic devices and to optimize their operation. Although CFD is the most rigorous technique to model flow, it falls short in terms of computational efficiency. Alternatively, the hydraulic–electric analogy is an efficient “first-pass” method to explore the design and operation parameter space of microfluidic-drop networks. However, there are no direct electric analogs to a drop, due to the nonlinear nature of the capillary pressure of the ALI. Here, we present a circuit-based model of hanging- and standing-drop compartments. We show a phase diagram describing the nonlinearity of the capillary pressure of a hanging drop. This diagram explains how to experimentally ensure drop stability. We present a methodology to find flow rates and pressures within drop networks. Finally, we review several applications, where the method, outlined in this paper, was instrumental in optimizing design and operation. Full article
(This article belongs to the Special Issue Micro and Smart Devices and Systems)
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36 pages, 6211 KiB  
Review
Emerging Bioanalytical Devices and Platforms for Rapid Detection of Pathogens in Environmental Samples
by Lightson Ngashangva, Bahaa A. Hemdan, Mohamed Azab El-Liethy, Vinay Bachu, Shelley D. Minteer and Pranab Goswami
Micromachines 2022, 13(7), 1083; https://doi.org/10.3390/mi13071083 - 8 Jul 2022
Cited by 9 | Viewed by 3775
Abstract
The development of robust bioanalytical devices and biosensors for infectious pathogens is progressing well with the advent of new materials, concepts, and technology. The progress is also stepping towards developing high throughput screening technologies that can quickly identify, differentiate, and determine the concentration [...] Read more.
The development of robust bioanalytical devices and biosensors for infectious pathogens is progressing well with the advent of new materials, concepts, and technology. The progress is also stepping towards developing high throughput screening technologies that can quickly identify, differentiate, and determine the concentration of harmful pathogens, facilitating the decision-making process for their elimination and therapeutic interventions in large-scale operations. Recently, much effort has been focused on upgrading these analytical devices to an intelligent technological platform by integrating them with modern communication systems, such as the internet of things (IoT) and machine learning (ML), to expand their application horizon. This review outlines the recent development and applications of bioanalytical devices and biosensors to detect pathogenic microbes in environmental samples. First, the nature of the recent outbreaks of pathogenic microbes such as foodborne, waterborne, and airborne pathogens and microbial toxins are discussed to understand the severity of the problems. Next, the discussion focuses on the detection systems chronologically, starting with the conventional methods, advanced techniques, and emerging technologies, such as biosensors and other portable devices and detection platforms for pathogens. Finally, the progress on multiplex assays, wearable devices, and integration of smartphone technologies to facilitate pathogen detection systems for wider applications are highlighted. Full article
(This article belongs to the Special Issue Microfluidics and Biosensors for Point-of-Care Applications)
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19 pages, 4367 KiB  
Review
Femtosecond Laser Processing Technology for Anti-Reflection Surfaces of Hard Materials
by Xiaofan Xie, Yunfei Li, Gong Wang, Zhenxu Bai, Yu Yu, Yulei Wang, Yu Ding and Zhiwei Lu
Micromachines 2022, 13(7), 1084; https://doi.org/10.3390/mi13071084 - 8 Jul 2022
Cited by 7 | Viewed by 3330
Abstract
The anti-reflection properties of hard material surfaces are of great significance in the fields of infrared imaging, optoelectronic devices, and aerospace. Femtosecond laser processing has drawn a lot of attentions in the field of optics as an innovative, efficient, and green micro-nano processing [...] Read more.
The anti-reflection properties of hard material surfaces are of great significance in the fields of infrared imaging, optoelectronic devices, and aerospace. Femtosecond laser processing has drawn a lot of attentions in the field of optics as an innovative, efficient, and green micro-nano processing method. The anti-reflection surface prepared on hard materials by femtosecond laser processing technology has good anti-reflection properties under a broad spectrum with all angles, effectively suppresses reflection, and improves light transmittance/absorption. In this review, the recent advances on femtosecond laser processing of anti-reflection surfaces on hard materials are summarized. The principle of anti-reflection structure and the selection of anti-reflection materials in different applications are elaborated upon. Finally, the limitations and challenges of the current anti-reflection surface are discussed, and the future development trend of the anti-reflection surface are prospected. Full article
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31 pages, 5935 KiB  
Review
Review of Bubble Applications in Microrobotics: Propulsion, Manipulation, and Assembly
by Yuting Zhou, Liguo Dai and Niandong Jiao
Micromachines 2022, 13(7), 1068; https://doi.org/10.3390/mi13071068 - 4 Jul 2022
Cited by 17 | Viewed by 4650
Abstract
In recent years, microbubbles have been widely used in the field of microrobots due to their unique properties. Microbubbles can be easily produced and used as power sources or tools of microrobots, and the bubbles can even serve as microrobots themselves. As a [...] Read more.
In recent years, microbubbles have been widely used in the field of microrobots due to their unique properties. Microbubbles can be easily produced and used as power sources or tools of microrobots, and the bubbles can even serve as microrobots themselves. As a power source, bubbles can propel microrobots to swim in liquid under low-Reynolds-number conditions. As a manipulation tool, microbubbles can act as the micromanipulators of microrobots, allowing them to operate upon particles, cells, and organisms. As a microrobot, microbubbles can operate and assemble complex microparts in two- or three-dimensional spaces. This review provides a comprehensive overview of bubble applications in microrobotics including propulsion, micromanipulation, and microassembly. First, we introduce the diverse bubble generation and control methods. Then, we review and discuss how bubbles can play a role in microrobotics via three functions: propulsion, manipulation, and assembly. Finally, by highlighting the advantages and current challenges of this progress, we discuss the prospects of microbubbles in microrobotics. Full article
(This article belongs to the Special Issue Micro- and Nano-Systems for Manipulation, Actuation and Sensing)
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20 pages, 7242 KiB  
Review
Free-Space Applications of Silicon Photonics: A Review
by Chung-Yu Hsu, Gow-Zin Yiu and You-Chia Chang
Micromachines 2022, 13(7), 990; https://doi.org/10.3390/mi13070990 - 24 Jun 2022
Cited by 16 | Viewed by 6159
Abstract
Silicon photonics has recently expanded its applications to delivering free-space emissions for detecting or manipulating external objects. The most notable example is the silicon optical phased array, which can steer a free-space beam to achieve a chip-scale solid-state LiDAR. Other examples include free-space [...] Read more.
Silicon photonics has recently expanded its applications to delivering free-space emissions for detecting or manipulating external objects. The most notable example is the silicon optical phased array, which can steer a free-space beam to achieve a chip-scale solid-state LiDAR. Other examples include free-space optical communication, quantum photonics, imaging systems, and optogenetic probes. In contrast to the conventional optical system consisting of bulk optics, silicon photonics miniaturizes an optical system into a photonic chip with many functional waveguiding components. By leveraging the mature and monolithic CMOS process, silicon photonics enables high-volume production, scalability, reconfigurability, and parallelism. In this paper, we review the recent advances in beam steering technologies based on silicon photonics, including optical phased arrays, focal plane arrays, and dispersive grating diffraction. Various beam-shaping technologies for generating collimated, focused, Bessel, and vortex beams are also discussed. We conclude with an outlook of the promises and challenges for the free-space applications of silicon photonics. Full article
(This article belongs to the Special Issue Silicon Photonics and Other Integrated Photonic Platforms)
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21 pages, 5679 KiB  
Review
Overview of the MEMS Pirani Sensors
by Shaohang Xu, Na Zhou, Meng Shi, Chenchen Zhang, Dapeng Chen and Haiyang Mao
Micromachines 2022, 13(6), 945; https://doi.org/10.3390/mi13060945 - 14 Jun 2022
Cited by 8 | Viewed by 2874
Abstract
Vacuum equipment has a wide range of applications, and vacuum monitoring in such equipment is necessary in order to meet practical applications. Pirani sensors work by using the effect of air density on the heat conduction of the gas to cause temperature changes [...] Read more.
Vacuum equipment has a wide range of applications, and vacuum monitoring in such equipment is necessary in order to meet practical applications. Pirani sensors work by using the effect of air density on the heat conduction of the gas to cause temperature changes in sensitive structures, thus detecting the pressure in the surrounding environment and thus vacuum monitoring. In past decades, MEMS Pirani sensors have received considerable attention and practical applications because of their advances in simple structures, long service life, wide measurement range and high sensitivity. This review systematically summarizes and compares different types of MEMS Pirani sensors. The configuration, material, mechanism, and performance of different types of MEMS Pirani sensors are discussed, including the ones based on thermistors, thermocouples, diodes and surface acoustic wave. Further, the development status of novel Pirani sensors based on functional materials such as nanoporous materials, carbon nanotubes and graphene are investigated, and the possible future development directions for MEMS Pirani sensors are discussed. This review is with the purpose to focus on a generalized knowledge of MEMS Pirani sensors, thus inspiring the investigations on their practical applications. Full article
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31 pages, 5679 KiB  
Review
Recent Progress in Physics-Based Modeling of Electromigration in Integrated Circuit Interconnects
by Wen-Sheng Zhao, Rui Zhang and Da-Wei Wang
Micromachines 2022, 13(6), 883; https://doi.org/10.3390/mi13060883 - 31 May 2022
Cited by 6 | Viewed by 3727
Abstract
The advance of semiconductor technology not only enables integrated circuits with higher density and better performance but also increases their vulnerability to various aging mechanisms which occur from front-end to back-end. Analysis on the impact of aging mechanisms on circuits’ reliability is crucial [...] Read more.
The advance of semiconductor technology not only enables integrated circuits with higher density and better performance but also increases their vulnerability to various aging mechanisms which occur from front-end to back-end. Analysis on the impact of aging mechanisms on circuits’ reliability is crucial for the design of reliable and sustainable electronic systems at advanced technology nodes. As one of the most crucial back-end aging mechanisms, electromigration deserves research efforts. This paper introduces recent studies on physics-based modeling of electromigration aging of on-chip interconnects. At first, the background of electromigration is introduced. The conventional method and physics-based modeling for electromigration are described. Then studies on how electromigration affects powers grids and signal interconnects are discussed in detail. Some of them focus on the comprehensiveness of modeling methodology, while others aim at the strategies for improving computation accuracy and speed and the strategies for accelerating/decelerating aging. Considering the importance of electromigration for circuit reliability, this paper is dedicated to providing a review on physics-based modeling methodologies on electromigration and their applications for integrated circuits interconnects. Full article
(This article belongs to the Special Issue Advanced Interconnect and Packaging)
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24 pages, 4537 KiB  
Review
Atomic Layer Assembly Based on Sacrificial Templates for 3D Nanofabrication
by Guangzhou Geng, Zhongshan Zhang, Chensheng Li, Ruhao Pan, Yunlong Li, Haifang Yang and Junjie Li
Micromachines 2022, 13(6), 856; https://doi.org/10.3390/mi13060856 - 30 May 2022
Cited by 4 | Viewed by 2282
Abstract
Three-dimensional (3D) nanostructures have attracted widespread attention in physics, chemistry, engineering sciences, and biology devices due to excellent functionalities which planar nanostructures cannot achieve. However, the fabrication of 3D nanostructures is still challenging at present. Reliable fabrication, improved controllability, and multifunction integration are [...] Read more.
Three-dimensional (3D) nanostructures have attracted widespread attention in physics, chemistry, engineering sciences, and biology devices due to excellent functionalities which planar nanostructures cannot achieve. However, the fabrication of 3D nanostructures is still challenging at present. Reliable fabrication, improved controllability, and multifunction integration are desired for further applications in commercial devices. In this review, a powerful fabrication method to realize 3D nanostructures is introduced and reviewed thoroughly, which is based on atomic layer deposition assisted 3D assembly through various sacrificial templates. The aim of this review is to provide a comprehensive overview of 3D nanofabrication based on atomic layer assembly (ALA) in multifarious sacrificial templates for 3D nanostructures and to present recent advancements, with the ultimate aim to further unlock more potential of this method for nanodevice applications. Full article
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22 pages, 7568 KiB  
Review
Wearable Near-Field Communication Sensors for Healthcare: Materials, Fabrication and Application
by Xidi Sun, Chengyan Zhao, Hao Li, Huiwen Yu, Jing Zhang, Hao Qiu, Junge Liang, Jing Wu, Mengrui Su, Yi Shi and Lijia Pan
Micromachines 2022, 13(5), 784; https://doi.org/10.3390/mi13050784 - 17 May 2022
Cited by 8 | Viewed by 3264
Abstract
The wearable device industry is on the rise, with technology applications ranging from wireless communication technologies to the Internet of Things. However, most of the wearable sensors currently on the market are expensive, rigid and bulky, leading to poor data accuracy and uncomfortable [...] Read more.
The wearable device industry is on the rise, with technology applications ranging from wireless communication technologies to the Internet of Things. However, most of the wearable sensors currently on the market are expensive, rigid and bulky, leading to poor data accuracy and uncomfortable wearing experiences. Near-field communication sensors are low-cost, easy-to-manufacture wireless communication technologies that are widely used in many fields, especially in the field of wearable electronic devices. The integration of wireless communication devices and sensors exhibits tremendous potential for these wearable applications by endowing sensors with new features of wireless signal transferring and conferring radio frequency identification or near-field communication devices with a sensing function. Likewise, the development of new materials and intensive research promotes the next generation of ultra-light and soft wearable devices for healthcare. This review begins with an introduction to the different components of near-field communication, with particular emphasis on the antenna design part of near-field communication. We summarize recent advances in different wearable areas of near-field communication sensors, including structural design, material selection, and the state of the art of scenario-based development. The challenges and opportunities relating to wearable near-field communication sensors for healthcare are also discussed. Full article
(This article belongs to the Special Issue Wearable Devices for Healthcare)
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32 pages, 15916 KiB  
Review
Microfluidic Applications of Artificial Cilia: Recent Progress, Demonstration, and Future Perspectives
by Vignesh Sahadevan, Bivas Panigrahi and Chia-Yuan Chen
Micromachines 2022, 13(5), 735; https://doi.org/10.3390/mi13050735 - 3 May 2022
Cited by 15 | Viewed by 4834
Abstract
Artificial cilia-based microfluidics is a promising alternative in lab-on-a-chip applications which provides an efficient way to manipulate fluid flow in a microfluidic environment with high precision. Additionally, it can induce favorable local flows toward practical biomedical applications. The endowment of artificial cilia with [...] Read more.
Artificial cilia-based microfluidics is a promising alternative in lab-on-a-chip applications which provides an efficient way to manipulate fluid flow in a microfluidic environment with high precision. Additionally, it can induce favorable local flows toward practical biomedical applications. The endowment of artificial cilia with their anatomy and capabilities such as mixing, pumping, transporting, and sensing lead to advance next-generation applications including precision medicine, digital nanofluidics, and lab-on-chip systems. This review summarizes the importance and significance of the artificial cilia, delineates the recent progress in artificial cilia-based microfluidics toward microfluidic application, and provides future perspectives. The presented knowledge and insights are envisaged to pave the way for innovative advances for the research communities in miniaturization. Full article
(This article belongs to the Special Issue Analysis, Design and Fabrication of Micromixers, Volume II)
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28 pages, 7790 KiB  
Review
Conductive Bridge Random Access Memory (CBRAM): Challenges and Opportunities for Memory and Neuromorphic Computing Applications
by Haider Abbas, Jiayi Li and Diing Shenp Ang
Micromachines 2022, 13(5), 725; https://doi.org/10.3390/mi13050725 - 30 Apr 2022
Cited by 25 | Viewed by 7476
Abstract
Due to a rapid increase in the amount of data, there is a huge demand for the development of new memory technologies as well as emerging computing systems for high-density memory storage and efficient computing. As the conventional transistor-based storage devices and computing [...] Read more.
Due to a rapid increase in the amount of data, there is a huge demand for the development of new memory technologies as well as emerging computing systems for high-density memory storage and efficient computing. As the conventional transistor-based storage devices and computing systems are approaching their scaling and technical limits, extensive research on emerging technologies is becoming more and more important. Among other emerging technologies, CBRAM offers excellent opportunities for future memory and neuromorphic computing applications. The principles of the CBRAM are explored in depth in this review, including the materials and issues associated with various materials, as well as the basic switching mechanisms. Furthermore, the opportunities that CBRAMs provide for memory and brain-inspired neuromorphic computing applications, as well as the challenges that CBRAMs confront in those applications, are thoroughly discussed. The emulation of biological synapses and neurons using CBRAM devices fabricated with various switching materials and device engineering and material innovation approaches are examined in depth. Full article
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34 pages, 7572 KiB  
Review
Advances in Soft and Dry Electrodes for Wearable Health Monitoring Devices
by Hyeonseok Kim, Eugene Kim, Chanyeong Choi and Woon-Hong Yeo
Micromachines 2022, 13(4), 629; https://doi.org/10.3390/mi13040629 - 16 Apr 2022
Cited by 39 | Viewed by 6426
Abstract
Electrophysiology signals are crucial health status indicators as they are related to all human activities. Current demands for mobile healthcare have driven considerable interest in developing skin-mounted electrodes for health monitoring. Silver-Silver chloride-based (Ag-/AgCl) wet electrodes, commonly used in conventional clinical practice, provide [...] Read more.
Electrophysiology signals are crucial health status indicators as they are related to all human activities. Current demands for mobile healthcare have driven considerable interest in developing skin-mounted electrodes for health monitoring. Silver-Silver chloride-based (Ag-/AgCl) wet electrodes, commonly used in conventional clinical practice, provide excellent signal quality, but cannot monitor long-term signals due to gel evaporation and skin irritation. Therefore, the focus has shifted to developing dry electrodes that can operate without gels and extra adhesives. Compared to conventional wet electrodes, dry ones offer various advantages in terms of ease of use, long-term stability, and biocompatibility. This review outlines a systematic summary of the latest research on high-performance soft and dry electrodes. In addition, we summarize recent developments in soft materials, biocompatible materials, manufacturing methods, strategies to promote physical adhesion, methods for higher breathability, and their applications in wearable biomedical devices. Finally, we discuss the developmental challenges and advantages of various dry electrodes, while suggesting research directions for future studies. Full article
(This article belongs to the Special Issue Feature Papers of Micromachines in Engineering and Technology 2021)
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23 pages, 8193 KiB  
Review
Optical Whispering-Gallery-Mode Microbubble Sensors
by Xuyang Zhao, Zhihe Guo, Yi Zhou, Junhong Guo, Zhiran Liu, Yuxiang Li, Man Luo and Xiang Wu
Micromachines 2022, 13(4), 592; https://doi.org/10.3390/mi13040592 - 9 Apr 2022
Cited by 21 | Viewed by 4217
Abstract
Whispering-gallery-mode (WGM) microbubble resonators are ideal optical sensors due to their high quality factor, small mode volume, high optical energy density, and geometry/design/structure (i.e., hollow microfluidic channels). When used in combination with microfluidic technologies, WGM microbubble resonators can be applied in chemical and [...] Read more.
Whispering-gallery-mode (WGM) microbubble resonators are ideal optical sensors due to their high quality factor, small mode volume, high optical energy density, and geometry/design/structure (i.e., hollow microfluidic channels). When used in combination with microfluidic technologies, WGM microbubble resonators can be applied in chemical and biological sensing due to strong light–matter interactions. The detection of ultra-low concentrations over a large dynamic range is possible due to their high sensitivity, which has significance for environmental monitoring and applications in life-science. Furthermore, WGM microbubble resonators have also been widely used for physical sensing, such as to detect changes in temperature, stress, pressure, flow rate, magnetic field and ultrasound. In this article, we systematically review and summarize the sensing mechanisms, fabrication and packing methods, and various applications of optofluidic WGM microbubble resonators. The challenges of rapid production and practical applications of WGM microbubble resonators are also discussed. Full article
(This article belongs to the Special Issue Microfluidics and Lab-on-a-Chip Applications for Biosensing)
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29 pages, 4214 KiB  
Review
Review-Hysteresis in Carbon Nano-Structure Field Effect Transistor
by Yu-Xuan Lu, Chih-Ting Lin, Ming-Hsui Tsai and Kuan-Chou Lin
Micromachines 2022, 13(4), 509; https://doi.org/10.3390/mi13040509 - 25 Mar 2022
Cited by 5 | Viewed by 3403
Abstract
In recent decades, the research of nano-structure devices (e.g., carbon nanotube and graphene) has experienced rapid growth. These materials have supreme electronic, thermal, optical and mechanical properties and have received widespread concern in different fields. It is worth noting that gate hysteresis behavior [...] Read more.
In recent decades, the research of nano-structure devices (e.g., carbon nanotube and graphene) has experienced rapid growth. These materials have supreme electronic, thermal, optical and mechanical properties and have received widespread concern in different fields. It is worth noting that gate hysteresis behavior of field effect transistors can always be found in ambient conditions, which may influence the transmission appearance. Many researchers have put forward various views on this question. Here, we summarize and discuss the mechanisms behind hysteresis, different influencing factors and improvement methods which help decrease or eliminate unevenness and asymmetry. Full article
(This article belongs to the Special Issue Smart Sensor 2021)
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30 pages, 5873 KiB  
Review
Recent Advances in Thermoplastic Microfluidic Bonding
by Kiran Giri and Chia-Wen Tsao
Micromachines 2022, 13(3), 486; https://doi.org/10.3390/mi13030486 - 20 Mar 2022
Cited by 23 | Viewed by 8074
Abstract
Microfluidics is a multidisciplinary technology with applications in various fields, such as biomedical, energy, chemicals and environment. Thermoplastic is one of the most prominent materials for polymer microfluidics. Properties such as good mechanical rigidity, organic solvent resistivity, acid/base resistivity, and low water absorbance [...] Read more.
Microfluidics is a multidisciplinary technology with applications in various fields, such as biomedical, energy, chemicals and environment. Thermoplastic is one of the most prominent materials for polymer microfluidics. Properties such as good mechanical rigidity, organic solvent resistivity, acid/base resistivity, and low water absorbance make thermoplastics suitable for various microfluidic applications. However, bonding of thermoplastics has always been challenging because of a wide range of bonding methods and requirements. This review paper summarizes the current bonding processes being practiced for the fabrication of thermoplastic microfluidic devices, and provides a comparison between the different bonding strategies to assist researchers in finding appropriate bonding methods for microfluidic device assembly. Full article
(This article belongs to the Special Issue Feature Papers of Micromachines in Biology and Biomedicine 2022)
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33 pages, 22884 KiB  
Review
Printed Circuit Boards: The Layers’ Functions for Electronic and Biomedical Engineering
by Francisco Perdigones and José Manuel Quero
Micromachines 2022, 13(3), 460; https://doi.org/10.3390/mi13030460 - 17 Mar 2022
Cited by 7 | Viewed by 11311
Abstract
This paper describes the fabrication opportunities that Printed Circuit Boards (PCBs) offer for electronic and biomedical engineering. Historically, PCB substrates have been used to support the components of the electronic devices, linking them using copper lines, and providing input and output pads to [...] Read more.
This paper describes the fabrication opportunities that Printed Circuit Boards (PCBs) offer for electronic and biomedical engineering. Historically, PCB substrates have been used to support the components of the electronic devices, linking them using copper lines, and providing input and output pads to connect the rest of the system. In addition, this kind of substrate is an emerging material for biomedical engineering thanks to its many interesting characteristics, such as its commercial availability at a low cost with very good tolerance and versatility, due to its multilayer characteristics; that is, the possibility of using several metals and substrate layers. The alternative uses of copper, gold, Flame Retardant 4 (FR4) and silver layers, together with the use of vias, solder masks and a rigid and flexible substrate, are noted. Among other uses, these characteristics have been using to develop many sensors, biosensors and actuators, and PCB-based lab-on chips; for example, deoxyribonucleic acid (DNA) amplification devices for Polymerase Chain Reaction (PCR). In addition, several applications of these devices are going to be noted in this paper, and two tables summarizing the layers’ functions are included in the discussion: the first one for metallic layers, and the second one for the vias, solder mask, flexible and rigid substrate functions. Full article
(This article belongs to the Special Issue Lab-on-PCB Devices)
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27 pages, 16459 KiB  
Review
Review of Electrothermal Micromirrors
by Yue Tang, Jianhua Li, Lixin Xu, Jeong-Bong Lee and Huikai Xie
Micromachines 2022, 13(3), 429; https://doi.org/10.3390/mi13030429 - 10 Mar 2022
Cited by 14 | Viewed by 3582
Abstract
Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based on [...] Read more.
Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based on different thermal actuators are reviewed, and also the mechanisms of those actuators are analyzed, including U-shape, chevron, thermo-pneumatic, thermo-capillary and thermal bimorph-based actuation. Special attention is given to bimorph based-electrothermal micromirrors due to their versatility in tip-tilt-piston motion. The exemplified applications of each type of electrothermal micromirrors are also presented. Moreover, electrothermal micromirrors integrated with electromagnetic or electrostatic actuators are introduced. Full article
(This article belongs to the Special Issue Optical MEMS, Volume III)
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25 pages, 120720 KiB  
Review
Recent Progress in Silicon-Based Slow-Light Electro-Optic Modulators
by Changhao Han, Ming Jin, Yuansheng Tao, Bitao Shen and Xingjun Wang
Micromachines 2022, 13(3), 400; https://doi.org/10.3390/mi13030400 - 28 Feb 2022
Cited by 10 | Viewed by 4976
Abstract
As an important optoelectronic integration platform, silicon photonics has achieved significant progress in recent years, demonstrating the advantages on low power consumption, low cost, and complementary metal–oxide–semiconductor (CMOS) compatibility. Among the different silicon photonics devices, the silicon electro-optic modulator is a key active [...] Read more.
As an important optoelectronic integration platform, silicon photonics has achieved significant progress in recent years, demonstrating the advantages on low power consumption, low cost, and complementary metal–oxide–semiconductor (CMOS) compatibility. Among the different silicon photonics devices, the silicon electro-optic modulator is a key active component to implement the conversion of electric signal to optical signal. However, conventional silicon Mach–Zehnder modulators and silicon micro-ring modulators both have their own limitations, which will limit their use in future systems. For example, the conventional silicon Mach–Zehnder modulators are hindered by large footprint, while the silicon micro-ring modulators have narrow optical bandwidth and high temperature sensitivity. Therefore, developing a new structure for silicon modulators to improve the performance is a crucial research direction in silicon photonics. Meanwhile, slow-light effect is an important physical phenomenon that can reduce the group velocity of light. Applying slow-light effect on silicon modulators through photonics crystal and waveguide grating structures is an attractive research point, especially in the aspect of reducing the device footprint. In this paper, we review the recent progress of silicon-based slow-light electro-optic modulators towards future communication requirements. Beginning from the principle of slow-light effect, we summarize the research of silicon photonic crystal modulators and silicon waveguide grating modulators in detail. Simultaneously, the experimental results of representative silicon slow-light modulators are compared and analyzed. Finally, we discuss the existing challenges and development directions of silicon-based slow-light electro-optic modulators for the practical applications. Full article
(This article belongs to the Special Issue Photonic Chips for Optical Communications)
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21 pages, 3557 KiB  
Review
Progress on Optical Fiber Biochemical Sensors Based on Graphene
by Yani Zhang, Lei Zhou, Dun Qiao, Mengyin Liu, Hongyan Yang, Cheng Meng, Ting Miao, Jia Xue and Yiming Yao
Micromachines 2022, 13(3), 348; https://doi.org/10.3390/mi13030348 - 23 Feb 2022
Cited by 17 | Viewed by 4021
Abstract
Graphene, a novel form of the hexagonal honeycomb two-dimensional carbon-based structural material with a zero-band gap and ultra-high specific surface area, has unique optoelectronic capabilities, promising a suitable basis for its application in the field of optical fiber sensing. Graphene optical fiber sensing [...] Read more.
Graphene, a novel form of the hexagonal honeycomb two-dimensional carbon-based structural material with a zero-band gap and ultra-high specific surface area, has unique optoelectronic capabilities, promising a suitable basis for its application in the field of optical fiber sensing. Graphene optical fiber sensing has also been a hotspot in cross-research in biology, materials, medicine, and micro-nano devices in recent years, owing to prospective benefits, such as high sensitivity, small size, and strong anti-electromagnetic interference capability and so on. Here, the progress of optical fiber biochemical sensors based on graphene is reviewed. The fabrication of graphene materials and the sensing mechanism of the graphene-based optical fiber sensor are described. The typical research works of graphene-based optical fiber biochemical sensor, such as long-period fiber grating, Bragg fiber grating, no-core fiber and photonic crystal fiber are introduced, respectively. Finally, prospects for graphene-based optical fiber biochemical sensing technology will also be covered, which will provide an important reference for the development of graphene-based optical fiber biochemical sensors. Full article
(This article belongs to the Special Issue Women’s Special Issue Series: Micromachines)
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21 pages, 7337 KiB  
Review
Silicon Carbide Technology for Advanced Human Healthcare Applications
by Stephen E. Saddow
Micromachines 2022, 13(3), 346; https://doi.org/10.3390/mi13030346 - 22 Feb 2022
Cited by 27 | Viewed by 4102
Abstract
Silicon carbide (SiC) is a highly robust semiconductor material that has the potential to revolutionize implantable medical devices for human healthcare, such as biosensors and neuro-implants, to enable advanced biomedical therapeutic applications for humans. SiC is both bio and hemocompatible, and is already [...] Read more.
Silicon carbide (SiC) is a highly robust semiconductor material that has the potential to revolutionize implantable medical devices for human healthcare, such as biosensors and neuro-implants, to enable advanced biomedical therapeutic applications for humans. SiC is both bio and hemocompatible, and is already commercially used for long-term human in vivo applications ranging from heart stent coatings and dental implants to short-term diagnostic applications involving neural implants and sensors. One challenge facing the medical community today is the lack of biocompatible materials which are inherently smart or, in other words, capable of electronic functionality. Such devices are currently implemented using silicon technology, which either has to be hermetically sealed so it does not directly interact with biological tissue or has a short lifetime due to instabilities in vivo. Long-term, permanently implanted devices such as glucose sensors, neural interfaces, smart bone and organ implants, etc., require a more robust material that does not degrade over time and is not recognized and rejected as a foreign object by the inflammatory response. SiC has displayed these exceptional material properties, which opens up a whole new host of applications and allows for the development of many advanced biomedical devices never before possible for long-term use in vivo. This paper is a review of the state-of-the art and discusses cutting-edge device applications where SiC medical devices are poised to translate to the commercial marketplace. Full article
(This article belongs to the Special Issue Feature Papers of Micromachines in Engineering and Technology 2021)
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31 pages, 6121 KiB  
Review
Therapeutic Applications of Programmable DNA Nanostructures
by Seaim Lwin Aye and Yusuke Sato
Micromachines 2022, 13(2), 315; https://doi.org/10.3390/mi13020315 - 17 Feb 2022
Cited by 5 | Viewed by 4098
Abstract
Deoxyribonucleic acid (DNA) nanotechnology, a frontier in biomedical engineering, is an emerging field that has enabled the engineering of molecular-scale DNA materials with applications in biomedicine such as bioimaging, biodetection, and drug delivery over the past decades. The programmability of DNA nanostructures allows [...] Read more.
Deoxyribonucleic acid (DNA) nanotechnology, a frontier in biomedical engineering, is an emerging field that has enabled the engineering of molecular-scale DNA materials with applications in biomedicine such as bioimaging, biodetection, and drug delivery over the past decades. The programmability of DNA nanostructures allows the precise engineering of DNA nanocarriers with controllable shapes, sizes, surface chemistries, and functions to deliver therapeutic and functional payloads to target cells with higher efficiency and enhanced specificity. Programmability and control over design also allow the creation of dynamic devices, such as DNA nanorobots, that can react to external stimuli and execute programmed tasks. This review focuses on the current findings and progress in the field, mainly on the employment of DNA nanostructures such as DNA origami nanorobots, DNA nanotubes, DNA tetrahedra, DNA boxes, and DNA nanoflowers in the biomedical field for therapeutic purposes. We will also discuss the fate of DNA nanostructures in living cells, the major obstacles to overcome, that is, the stability of DNA nanostructures in biomedical applications, and the opportunities for DNA nanostructure-based drug delivery in the future. Full article
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18 pages, 3652 KiB  
Review
Nano/Micromotors in Active Matter
by Chenglin Lv, Yuguang Yang and Bo Li
Micromachines 2022, 13(2), 307; https://doi.org/10.3390/mi13020307 - 17 Feb 2022
Cited by 5 | Viewed by 2505
Abstract
Nano/micromotors (NMMs) are tiny objects capable of converting energy into mechanical motion. Recently, a wealth of active matter including synthetic colloids, cytoskeletons, bacteria, and cells have been used to construct NMMs. The self-sustained motion of active matter drives NMMs out of equilibrium, giving [...] Read more.
Nano/micromotors (NMMs) are tiny objects capable of converting energy into mechanical motion. Recently, a wealth of active matter including synthetic colloids, cytoskeletons, bacteria, and cells have been used to construct NMMs. The self-sustained motion of active matter drives NMMs out of equilibrium, giving rise to rich dynamics and patterns. Alongside the spontaneous dynamics, external stimuli such as geometric confinements, light, magnetic field, and chemical potential are also harnessed to control the movements of NMMs, yielding new application paradigms of active matter. Here, we review the recent advances, both experimental and theoretical, in exploring biological NMMs. The unique dynamical features of collective NMMs are focused on, along with some possible applications of these intriguing systems. Full article
(This article belongs to the Special Issue Dream Nanomachines: Recent Advances in Nano/Micromotors)
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21 pages, 4863 KiB  
Review
Microscopic Swarms: From Active Matter Physics to Biomedical and Environmental Applications
by Yulei Fu, Hengao Yu, Xinli Zhang, Paolo Malgaretti, Vimal Kishore and Wendong Wang
Micromachines 2022, 13(2), 295; https://doi.org/10.3390/mi13020295 - 13 Feb 2022
Cited by 16 | Viewed by 4421
Abstract
Microscopic swarms consisting of, e.g., active colloidal particles or microorganisms, display emergent behaviors not seen in equilibrium systems. They represent an emerging field of research that generates both fundamental scientific interest and practical technological value. This review seeks to unite the perspective of [...] Read more.
Microscopic swarms consisting of, e.g., active colloidal particles or microorganisms, display emergent behaviors not seen in equilibrium systems. They represent an emerging field of research that generates both fundamental scientific interest and practical technological value. This review seeks to unite the perspective of fundamental active matter physics and the perspective of practical applications of microscopic swarms. We first summarize experimental and theoretical results related to a few key aspects unique to active matter systems: the existence of long-range order, the prediction and observation of giant number fluctuations and motility-induced phase separation, and the exploration of the relations between information and order in the self-organizing patterns. Then we discuss microscopic swarms, particularly microrobotic swarms, from the perspective of applications. We introduce common methods to control and manipulate microrobotic swarms and summarize their potential applications in fields such as targeted delivery, in vivo imaging, biofilm removal, and wastewater treatment. We aim at bridging the gap between the community of active matter physics and the community of micromachines or microrobotics, and in doing so, we seek to inspire fruitful collaborations between the two communities. Full article
(This article belongs to the Special Issue Medical Micro/Nanorobots)
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23 pages, 7183 KiB  
Review
Terahertz Reconfigurable Intelligent Surfaces (RISs) for 6G Communication Links
by Fengyuan Yang, Prakash Pitchappa and Nan Wang
Micromachines 2022, 13(2), 285; https://doi.org/10.3390/mi13020285 - 10 Feb 2022
Cited by 43 | Viewed by 8836
Abstract
The forthcoming sixth generation (6G) communication network is envisioned to provide ultra-fast data transmission and ubiquitous wireless connectivity. The terahertz (THz) spectrum, with higher frequency and wider bandwidth, offers great potential for 6G wireless technologies. However, the THz links suffers from high loss [...] Read more.
The forthcoming sixth generation (6G) communication network is envisioned to provide ultra-fast data transmission and ubiquitous wireless connectivity. The terahertz (THz) spectrum, with higher frequency and wider bandwidth, offers great potential for 6G wireless technologies. However, the THz links suffers from high loss and line-of-sight connectivity. To overcome these challenges, a cost-effective method to dynamically optimize the transmission path using reconfigurable intelligent surfaces (RISs) is widely proposed. RIS is constructed by embedding active elements into passive metasurfaces, which is an artificially designed periodic structure. However, the active elements (e.g., PIN diodes) used for 5G RIS are impractical for 6G RIS due to the cutoff frequency limitation and higher loss at THz frequencies. As such, various tuning elements have been explored to fill this THz gap between radio waves and infrared light. The focus of this review is on THz RISs with the potential to assist 6G communication functionalities including pixel-level amplitude modulation and dynamic beam manipulation. By reviewing a wide range of tuning mechanisms, including electronic approaches (complementary metal-oxide-semiconductor (CMOS) transistors, Schottky diodes, high electron mobility transistors (HEMTs), and graphene), optical approaches (photoactive semiconductor materials), phase-change materials (vanadium dioxide, chalcogenides, and liquid crystals), as well as microelectromechanical systems (MEMS), this review summarizes recent developments in THz RISs in support of 6G communication links and discusses future research directions in this field. Full article
(This article belongs to the Special Issue Broadband Terahertz Devices and Communication Technologies)
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21 pages, 4984 KiB  
Review
Overview of 3D-Printed Silica Glass
by Han Zhang, Long Huang, Mingyue Tan, Shaoqing Zhao, Hua Liu, Zifeng Lu, Jinhuan Li and Zhongzhu Liang
Micromachines 2022, 13(1), 81; https://doi.org/10.3390/mi13010081 - 3 Jan 2022
Cited by 24 | Viewed by 7238
Abstract
Not satisfied with the current stage of the extensive research on 3D printing technology for polymers and metals, researchers are searching for more innovative 3D printing technologies for glass fabrication in what has become the latest trend of interest. The traditional glass manufacturing [...] Read more.
Not satisfied with the current stage of the extensive research on 3D printing technology for polymers and metals, researchers are searching for more innovative 3D printing technologies for glass fabrication in what has become the latest trend of interest. The traditional glass manufacturing process requires complex high-temperature melting and casting processes, which presents a great challenge to the fabrication of arbitrarily complex glass devices. The emergence of 3D printing technology provides a good solution. This paper reviews the recent advances in glass 3D printing, describes the history and development of related technologies, and lists popular applications of 3D printing for glass preparation. This review compares the advantages and disadvantages of various processing methods, summarizes the problems encountered in the process of technology application, and proposes the corresponding solutions to select the most appropriate preparation method in practical applications. The application of additive manufacturing in glass fabrication is in its infancy but has great potential. Based on this view, the methods for glass preparation with 3D printing technology are expected to achieve both high-speed and high-precision fabrication. Full article
(This article belongs to the Special Issue Microscale and Rheology in 3D Printing Processes)
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40 pages, 9254 KiB  
Review
Engineering Biological Tissues from the Bottom-Up: Recent Advances and Future Prospects
by Xiaowen Wang, Zhen Wang, Wenya Zhai, Fengyun Wang, Zhixing Ge, Haibo Yu and Wenguang Yang
Micromachines 2022, 13(1), 75; https://doi.org/10.3390/mi13010075 - 31 Dec 2021
Cited by 8 | Viewed by 3661
Abstract
Tissue engineering provides a powerful solution for current organ shortages, and researchers have cultured blood vessels, heart tissues, and bone tissues in vitro. However, traditional top-down tissue engineering has suffered two challenges: vascularization and reconfigurability of functional units. With the continuous development of [...] Read more.
Tissue engineering provides a powerful solution for current organ shortages, and researchers have cultured blood vessels, heart tissues, and bone tissues in vitro. However, traditional top-down tissue engineering has suffered two challenges: vascularization and reconfigurability of functional units. With the continuous development of micro-nano technology and biomaterial technology, bottom-up tissue engineering as a promising approach for organ and tissue modular reconstruction has gradually developed. In this article, relevant advances in living blocks fabrication and assembly techniques for creation of higher-order bioarchitectures are described. After a critical overview of this technology, a discussion of practical challenges is provided, and future development prospects are proposed. Full article
(This article belongs to the Special Issue Feature Papers of Micromachines in "Materials and Processing" 2022)
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20 pages, 876 KiB  
Review
Systems for Muscle Cell Differentiation: From Bioengineering to Future Food
by Kah-Yin Lee, Hui-Xin Loh and Andrew C. A. Wan
Micromachines 2022, 13(1), 71; https://doi.org/10.3390/mi13010071 - 31 Dec 2021
Cited by 15 | Viewed by 6607
Abstract
In light of pressing issues, such as sustainability and climate change, future protein sources will increasingly turn from livestock to cell-based production and manufacturing activities. In the case of cell-based or cultured meat a relevant aspect would be the differentiation of muscle cells [...] Read more.
In light of pressing issues, such as sustainability and climate change, future protein sources will increasingly turn from livestock to cell-based production and manufacturing activities. In the case of cell-based or cultured meat a relevant aspect would be the differentiation of muscle cells into mature muscle tissue, as well as how the microsystems that have been developed to date can be developed for larger-scale cultures. To delve into this aspect we review previous research that has been carried out on skeletal muscle tissue engineering and how various biological and physicochemical factors, mechanical and electrical stimuli, affect muscle cell differentiation on an experimental scale. Material aspects such as the different biomaterials used and 3D vs. 2D configurations in the context of muscle cell differentiation will also be discussed. Finally, the ability to translate these systems to more scalable bioreactor configurations and eventually bring them to a commercial scale will be touched upon. Full article
(This article belongs to the Special Issue Sensors, Devices and Systems for Future Food Production and Packaging)
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32 pages, 8787 KiB  
Review
Current Development in Interdigital Transducer (IDT) Surface Acoustic Wave Devices for Live Cell In Vitro Studies: A Review
by Mazlee Bin Mazalan, Anas Mohd Noor, Yufridin Wahab, Shuhaida Yahud and Wan Safwani Wan Kamarul Zaman
Micromachines 2022, 13(1), 30; https://doi.org/10.3390/mi13010030 - 27 Dec 2021
Cited by 27 | Viewed by 7283
Abstract
Acoustics have a wide range of uses, from noise-cancelling to ultrasonic imaging. There has been a surge in interest in developing acoustic-based approaches for biological and biomedical applications in the last decade. This review focused on the application of surface acoustic waves (SAW) [...] Read more.
Acoustics have a wide range of uses, from noise-cancelling to ultrasonic imaging. There has been a surge in interest in developing acoustic-based approaches for biological and biomedical applications in the last decade. This review focused on the application of surface acoustic waves (SAW) based on interdigital transducers (IDT) for live-cell investigations, such as cell manipulation, cell separation, cell seeding, cell migration, cell characteristics, and cell behaviours. The approach is also known as acoustofluidic, because the SAW device is coupled with a microfluidic system that contains live cells. This article provides an overview of several forms of IDT of SAW devices on recently used cells. Conclusively, a brief viewpoint and overview of the future application of SAW techniques in live-cell investigations were presented. Full article
(This article belongs to the Special Issue Acoustic Resonators and Filters)
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23 pages, 976 KiB  
Review
Drug-Induced Nephrotoxicity Assessment in 3D Cellular Models
by Pengfei Yu, Zhongping Duan, Shuang Liu, Ivan Pachon, Jianxing Ma, George P. Hemstreet and Yuanyuan Zhang
Micromachines 2022, 13(1), 3; https://doi.org/10.3390/mi13010003 - 21 Dec 2021
Cited by 17 | Viewed by 4714
Abstract
The kidneys are often involved in adverse effects and toxicity caused by exposure to foreign compounds, chemicals, and drugs. Early predictions of these influences are essential to facilitate new, safe drugs to enter the market. However, in current drug treatments, drug-induced nephrotoxicity accounts [...] Read more.
The kidneys are often involved in adverse effects and toxicity caused by exposure to foreign compounds, chemicals, and drugs. Early predictions of these influences are essential to facilitate new, safe drugs to enter the market. However, in current drug treatments, drug-induced nephrotoxicity accounts for 1/4 of reported serious adverse reactions, and 1/3 of them are attributable to antibiotics. Drug-induced nephrotoxicity is driven by multiple mechanisms, including altered glomerular hemodynamics, renal tubular cytotoxicity, inflammation, crystal nephropathy, and thrombotic microangiopathy. Although the functional proteins expressed by renal tubules that mediate drug sensitivity are well known, current in vitro 2D cell models do not faithfully replicate the morphology and intact renal tubule function, and therefore, they do not replicate in vivo nephrotoxicity. The kidney is delicate and complex, consisting of a filter unit and a tubular part, which together contain more than 20 different cell types. The tubular epithelium is highly polarized, and maintaining cellular polarity is essential for the optimal function and response to environmental signals. Cell polarity depends on the communication between cells, including paracrine and autocrine signals, as well as biomechanical and chemotaxis processes. These processes affect kidney cell proliferation, migration, and differentiation. For drug disposal research, the microenvironment is essential for predicting toxic reactions. This article reviews the mechanism of drug-induced kidney injury, the types of nephrotoxicity models (in vivo and in vitro models), and the research progress related to drug-induced nephrotoxicity in three-dimensional (3D) cellular culture models. Full article
(This article belongs to the Special Issue 3D In Vitro Tissue and Organ Models)
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30 pages, 3790 KiB  
Review
Fabricating Silicon Resonators for Analysing Biological Samples
by Momoko Kumemura, Deniz Pekin, Vivek Anand Menon, Isabelle Van Seuningen, Dominique Collard and Mehmet Cagatay Tarhan
Micromachines 2021, 12(12), 1546; https://doi.org/10.3390/mi12121546 - 12 Dec 2021
Cited by 2 | Viewed by 2548
Abstract
The adaptability of microscale devices allows microtechnologies to be used for a wide range of applications. Biology and medicine are among those fields that, in recent decades, have applied microtechnologies to achieve new and improved functionality. However, despite their ability to achieve assay [...] Read more.
The adaptability of microscale devices allows microtechnologies to be used for a wide range of applications. Biology and medicine are among those fields that, in recent decades, have applied microtechnologies to achieve new and improved functionality. However, despite their ability to achieve assay sensitivities that rival or exceed conventional standards, silicon-based microelectromechanical systems remain underutilised for biological and biomedical applications. Although microelectromechanical resonators and actuators do not always exhibit optimal performance in liquid due to electrical double layer formation and high damping, these issues have been solved with some innovative fabrication processes or alternative experimental approaches. This paper focuses on several examples of silicon-based resonating devices with a brief look at their fundamental sensing elements and key fabrication steps, as well as current and potential biological/biomedical applications. Full article
(This article belongs to the Special Issue Micro/Nano Fabrication for Life Sciences)
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30 pages, 15488 KiB  
Review
A Review of Sharp-Switching Band-Modulation Devices
by Sorin Cristoloveanu, Joris Lacord, Sébastien Martinie, Carlos Navarro, Francisco Gamiz, Jing Wan, Hassan El Dirani, Kyunghwa Lee and Alexander Zaslavsky
Micromachines 2021, 12(12), 1540; https://doi.org/10.3390/mi12121540 - 11 Dec 2021
Cited by 3 | Viewed by 2687
Abstract
This paper reviews the recently-developed class of band-modulation devices, born from the recent progress in fully-depleted silicon-on-insulator (FD-SOI) and other ultrathin-body technologies, which have enabled the concept of gate-controlled electrostatic doping. In a lateral PIN diode, two additional gates can construct a reconfigurable [...] Read more.
This paper reviews the recently-developed class of band-modulation devices, born from the recent progress in fully-depleted silicon-on-insulator (FD-SOI) and other ultrathin-body technologies, which have enabled the concept of gate-controlled electrostatic doping. In a lateral PIN diode, two additional gates can construct a reconfigurable PNPN structure with unrivalled sharp-switching capability. We describe the implementation, operation, and various applications of these band-modulation devices. Physical and compact models are presented to explain the output and transfer characteristics in both steady-state and transient modes. Not only can band-modulation devices be used for quasi-vertical current switching, but they also show promise for compact capacitorless memories, electrostatic discharge (ESD) protection, sensing, and reconfigurable circuits, while retaining full compatibility with modern silicon processing and standard room-temperature low-voltage operation. Full article
(This article belongs to the Special Issue Steep Switching Field Effect Transistor)
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24 pages, 30512 KiB  
Review
State of the Art of Non-Invasive Electrode Materials for Brain–Computer Interface
by Haowen Yuan, Yao Li, Junjun Yang, Hongjie Li, Qinya Yang, Cuiping Guo, Shenmin Zhu and Xiaokang Shu
Micromachines 2021, 12(12), 1521; https://doi.org/10.3390/mi12121521 - 8 Dec 2021
Cited by 15 | Viewed by 5736
Abstract
The brain–computer interface (BCI) has emerged in recent years and has attracted great attention. As an indispensable part of the BCI signal acquisition system, brain electrodes have a great influence on the quality of the signal, which determines the final effect. Due to [...] Read more.
The brain–computer interface (BCI) has emerged in recent years and has attracted great attention. As an indispensable part of the BCI signal acquisition system, brain electrodes have a great influence on the quality of the signal, which determines the final effect. Due to the special usage scenario of brain electrodes, some specific properties are required for them. In this study, we review the development of three major types of EEG electrodes from the perspective of material selection and structural design, including dry electrodes, wet electrodes, and semi-dry electrodes. Additionally, we provide a reference for the current chaotic performance evaluation of EEG electrodes in some aspects such as electrochemical performance, stability, and so on. Moreover, the challenges and future expectations for EEG electrodes are analyzed. Full article
(This article belongs to the Section B1: Biosensors)
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19 pages, 2746 KiB  
Review
Recent Insights and Multifactorial Applications of Carbon Nanotubes
by Muthu Thiruvengadam, Govindasamy Rajakumar, Venkata Swetha, Mohammad Azam Ansari, Saad Alghamdi, Mazen Almehmadi, Mustafa Halawi, Lakshmanan Kungumadevi, Vaishnavi Raja, Sulthana Sabura Sarbudeen, Saranya Madhavan, Maksim Rebezov, Mohammad Ali Shariati, Alexandr Sviderskiy and Konstantin Bogonosov
Micromachines 2021, 12(12), 1502; https://doi.org/10.3390/mi12121502 - 30 Nov 2021
Cited by 13 | Viewed by 3384
Abstract
Nanotechnology has undergone significant development in recent years, particularly in the fabrication of sensors with a wide range of applications. The backbone of nanotechnology is nanostructures, which are determined on a nanoscale. Nanoparticles are abundant throughout the universe and are thought to be [...] Read more.
Nanotechnology has undergone significant development in recent years, particularly in the fabrication of sensors with a wide range of applications. The backbone of nanotechnology is nanostructures, which are determined on a nanoscale. Nanoparticles are abundant throughout the universe and are thought to be essential building components in the process of planet creation. Nanotechnology is generally concerned with structures that are between 1 and 100 nm in at least one dimension and involves the production of materials or electronics that are that small. Carbon nanotubes (CNTs) are carbon-based nanomaterials that have the structure of tubes. Carbon nanotubes are often referred to as the kings of nanomaterials. The diameter of carbon is determined in nanometers. They are formed from graphite sheets and are available in a variety of colors. Carbon nanotubes have a number of characteristics, including high flexibility, good thermal conductivity, low density, and chemical stability. Carbon nanotubes have played an important part in nanotechnology, semiconductors, optical and other branches of materials engineering owing to their remarkable features. Several of the applications addressed in this review have already been developed and used to benefit people worldwide. CNTs have been discussed in several domains, including industry, construction, adsorption, sensors, silicon chips, water purifiers, and biomedical uses, to show many treatments such as injecting CNTs into kidney cancers in rats, drug delivery, and directing a near-infrared laser at the cancers. With the orderly development of research in this field, additional therapeutic modalities will be identified, mainly for dispersion and densification techniques and targeted drug delivery systems for managing and curing posterior cortical atrophy. This review discusses the characteristics of carbon nanotubes as well as therapeutic applications such as medical diagnostics and drug delivery. Full article
(This article belongs to the Special Issue Advances in Biomedical Nanotechnology)
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25 pages, 1001 KiB  
Review
Low Intensity Pulsed Ultrasound for Bone Tissue Engineering
by Colleen McCarthy and Gulden Camci-Unal
Micromachines 2021, 12(12), 1488; https://doi.org/10.3390/mi12121488 - 30 Nov 2021
Cited by 15 | Viewed by 4597
Abstract
As explained by Wolff’s law and the mechanostat hypothesis, mechanical stimulation can be used to promote bone formation. Low intensity pulsed ultrasound (LIPUS) is a source of mechanical stimulation that can activate the integrin/phosphatidylinositol 3-OH kinase/Akt pathway and upregulate osteogenic proteins through the [...] Read more.
As explained by Wolff’s law and the mechanostat hypothesis, mechanical stimulation can be used to promote bone formation. Low intensity pulsed ultrasound (LIPUS) is a source of mechanical stimulation that can activate the integrin/phosphatidylinositol 3-OH kinase/Akt pathway and upregulate osteogenic proteins through the production of cyclooxygenase-2 (COX-2) and prostaglandin E2 (PGE2). This paper analyzes the results of in vitro and in vivo studies that have evaluated the effects of LIPUS on cell behavior within three-dimensional (3D) titanium, ceramic, and hydrogel scaffolds. We focus specifically on cell morphology and attachment, cell proliferation and viability, osteogenic differentiation, mineralization, bone volume, and osseointegration. As shown by upregulated levels of alkaline phosphatase and osteocalcin, increased mineral deposition, improved cell ingrowth, greater scaffold pore occupancy by bone tissue, and superior vascularization, LIPUS generally has a positive effect and promotes bone formation within engineered scaffolds. Additionally, LIPUS can have synergistic effects by producing the piezoelectric effect and enhancing the benefits of 3D hydrogel encapsulation, growth factor delivery, and scaffold modification. Additional research should be conducted to optimize the ultrasound parameters and evaluate the effects of LIPUS with other types of scaffold materials and cell types. Full article
(This article belongs to the Special Issue Women’s Special Issue Series: Micromachines)
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37 pages, 11417 KiB  
Review
Electroreforming of Biomass for Value-Added Products
by Zi Iun Lai, Li Quan Lee and Hong Li
Micromachines 2021, 12(11), 1405; https://doi.org/10.3390/mi12111405 - 16 Nov 2021
Cited by 10 | Viewed by 4023
Abstract
Humanity’s overreliance on fossil fuels for chemical and energy production has resulted in uncontrollable carbon emissions that have warranted widespread concern regarding global warming. To address this issue, there is a growing body of research on renewable resources such as biomass, of which [...] Read more.
Humanity’s overreliance on fossil fuels for chemical and energy production has resulted in uncontrollable carbon emissions that have warranted widespread concern regarding global warming. To address this issue, there is a growing body of research on renewable resources such as biomass, of which cellulose is the most abundant type. In particular, the electrochemical reforming of biomass is especially promising, as it allows greater control over valorization processes and requires milder conditions. Driven by renewable electricity, electroreforming of biomass can be green and sustainable. Moreover, green hydrogen generation can be coupled to anodic biomass electroforming, which has attracted ever-increasing attention. The following review is a summary of recent developments related to electroreforming cellulose and its derivatives (glucose, hydroxymethylfurfural, levulinic acid). The electroreforming of biomass can be achieved on the anode of an electrochemical cell through electrooxidation, as well as on the cathode through electroreduction. Recent advances in the anodic electroreforming of cellulose and cellulose-derived glucose and 5-hydrooxylmethoylfurural (5-HMF) are first summarized. Then, the key achievements in the cathodic electroreforming of cellulose and cellulose-derived 5-HMF and levulinic acid are discussed. Afterward, the emerging research focusing on coupling hydrogen evolution with anodic biomass reforming for the cogeneration of green hydrogen fuel and value-added chemicals is reviewed. The final chapter of this paper provides our perspective on the challenges and future research directions of biomass electroreforming. Full article
(This article belongs to the Special Issue Recent Advances in Nanotechnology and Nanomaterials)
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27 pages, 8154 KiB  
Review
Research Progress of Microtransfer Printing Technology for Flexible Electronic Integrated Manufacturing
by Li Zhang, Chong Zhang, Zheng Tan, Jingrong Tang, Chi Yao and Bo Hao
Micromachines 2021, 12(11), 1358; https://doi.org/10.3390/mi12111358 - 3 Nov 2021
Cited by 9 | Viewed by 2778
Abstract
In recent years, with the rapid development of the flexible electronics industry, there is an urgent need for a large-area, multilayer, and high-production integrated manufacturing technology for scalable and flexible electronic products. To solve this technical demand, researchers have proposed and developed microtransfer [...] Read more.
In recent years, with the rapid development of the flexible electronics industry, there is an urgent need for a large-area, multilayer, and high-production integrated manufacturing technology for scalable and flexible electronic products. To solve this technical demand, researchers have proposed and developed microtransfer printing technology, which picks up and prints inks in various material forms from the donor substrate to the target substrate, successfully realizing the integrated manufacturing of flexible electronic products. This review retrospects the representative research progress of microtransfer printing technology for the production of flexible electronic products and emphasizes the summary of seal materials, the basic principles of various transfer technology and fracture mechanics models, and the influence of different factors on the transfer effect. In the end, the unique functions, technical features, and related printing examples of each technology are concluded and compared, and the prospects of further research work on microtransfer printing technology is finally presented. Full article
(This article belongs to the Special Issue Micro/Nano Manipulation Technologies for Flexible Electronics)
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25 pages, 5882 KiB  
Review
Reliability of MEMS in Shock Environments: 2000–2020
by Tianfang Peng and Zheng You
Micromachines 2021, 12(11), 1275; https://doi.org/10.3390/mi12111275 - 20 Oct 2021
Cited by 17 | Viewed by 3899
Abstract
The reliability of MEMS in shock environments is a complex area which involves structural dynamics, fracture mechanics, and system reliability theory etc. With growth in the use of MEMS in automotive, IoT, aerospace and other harsh environments, there is a need for an [...] Read more.
The reliability of MEMS in shock environments is a complex area which involves structural dynamics, fracture mechanics, and system reliability theory etc. With growth in the use of MEMS in automotive, IoT, aerospace and other harsh environments, there is a need for an in-depth understanding of the reliability of MEMS in shock environments. Despite the contributions of many articles that have overviewed the reliability of MEMS panoramically, a review paper that specifically focuses on the reliability research of MEMS in shock environments is, to date, absent. This paper reviews studies which examine the reliability of MEMS in shock environments from 2000 to 2020 in six sub-areas, which are: (i) response model of microstructure, (ii) shock experimental progresses, (iii) shock resistant microstructures, (iv) reliability quantification models of microstructure, (v) electronics-system-level reliability, and (vi) the coupling phenomenon of shock with other factors. This paper fills the gap around overviews of MEMS reliability in shock environments. Through the framework of these six sub-areas, we propose some directions potentially worthy of attention for future research. Full article
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20 pages, 2219 KiB  
Review
Autonomously Propelled Colloids for Penetration and Payload Delivery in Complex Extracellular Matrices
by Shrishti Singh and Jeffrey L. Moran
Micromachines 2021, 12(10), 1216; https://doi.org/10.3390/mi12101216 - 6 Oct 2021
Cited by 1 | Viewed by 2354
Abstract
For effective treatment of diseases such as cancer or fibrosis, it is essential to deliver therapeutic agents such as drugs to the diseased tissue, but these diseased sites are surrounded by a dense network of fibers, cells, and proteins known as the extracellular [...] Read more.
For effective treatment of diseases such as cancer or fibrosis, it is essential to deliver therapeutic agents such as drugs to the diseased tissue, but these diseased sites are surrounded by a dense network of fibers, cells, and proteins known as the extracellular matrix (ECM). The ECM forms a barrier between the diseased cells and blood circulation, the main route of administration of most drug delivery nanoparticles. Hence, a stiff ECM impedes drug delivery by limiting the transport of drugs to the diseased tissue. The use of self-propelled particles (SPPs) that can move in a directional manner with the application of physical or chemical forces can help in increasing the drug delivery efficiency. Here, we provide a comprehensive look at the current ECM models in use to mimic the in vivo diseased states, the different types of SPPs that have been experimentally tested in these models, and suggest directions for future research toward clinical translation of SPPs in diverse biomedical settings. Full article
(This article belongs to the Special Issue X-fluidics at the Micro/Nanoscale)
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20 pages, 2725 KiB  
Review
The Fusion of Microfluidics and Optics for On-Chip Detection and Characterization of Microalgae
by Xinqi Zheng, Xiudong Duan, Xin Tu, Shulan Jiang and Chaolong Song
Micromachines 2021, 12(10), 1137; https://doi.org/10.3390/mi12101137 - 22 Sep 2021
Cited by 13 | Viewed by 2989
Abstract
It has been demonstrated that microalgae play an important role in the food, agriculture and medicine industries. Additionally, the identification and counting of the microalgae are also a critical step in evaluating water quality, and some lipid-rich microalgae species even have the potential [...] Read more.
It has been demonstrated that microalgae play an important role in the food, agriculture and medicine industries. Additionally, the identification and counting of the microalgae are also a critical step in evaluating water quality, and some lipid-rich microalgae species even have the potential to be an alternative to fossil fuels. However, current technologies for the detection and analysis of microalgae are costly, labor-intensive, time-consuming and throughput limited. In the past few years, microfluidic chips integrating optical components have emerged as powerful tools that can be used for the analysis of microalgae with high specificity, sensitivity and throughput. In this paper, we review recent optofluidic lab-on-chip systems and techniques used for microalgal detection and characterization. We introduce three optofluidic technologies that are based on fluorescence, Raman spectroscopy and imaging-based flow cytometry, each of which can achieve the determination of cell viability, lipid content, metabolic heterogeneity and counting. We analyze and summarize the merits and drawbacks of these micro-systems and conclude the direction of the future development of the optofluidic platforms applied in microalgal research. Full article
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28 pages, 12057 KiB  
Review
Progress in Non-Traditional Processing for Fabricating Superhydrophobic Surfaces
by Dili Shen, Wuyi Ming, Xinggui Ren, Zhuobin Xie and Xuewen Liu
Micromachines 2021, 12(9), 1003; https://doi.org/10.3390/mi12091003 - 24 Aug 2021
Cited by 12 | Viewed by 3368
Abstract
When the water droplets are on some superhydrophobic surfaces, the surface only needs to be inclined at a very small angle to make the water droplets roll off. Hence, building a superhydrophobic surface on the material substrate, especially the metal substrate, can effectively [...] Read more.
When the water droplets are on some superhydrophobic surfaces, the surface only needs to be inclined at a very small angle to make the water droplets roll off. Hence, building a superhydrophobic surface on the material substrate, especially the metal substrate, can effectively alleviate the problems of its inability to resist corrosion and easy icing during use, and it can also give it special functions such as self-cleaning, lubrication, and drag reduction. Therefore, this study reviews and summarizes the development trends in the fabrication of superhydrophobic surface materials by non-traditional processing techniques. First, the principle of the superhydrophobic surfaces fabricated by laser beam machining (LBM) is introduced, and the machining performances of the LBM process, such as femtosecond laser, picosecond laser, and nanosecond laser, for fabricating the surfaces are compared and summarized. Second, the principle and the machining performances of the electrical discharge machining (EDM), for fabricating the superhydrophobic surfaces, are reviewed and compared, respectively. Third, the machining performances to fabricate the superhydrophobic surfaces by the electrochemical machining (ECM), including electrochemical oxidation process and electrochemical reduction process, are reviewed and grouped by materials fabricated. Lastly, other non-traditional machining processes for fabricating superhydrophobic surfaces, such as ultrasonic machining (USM), water jet machining (WJM), and plasma spraying machining (PSM), are compared and summarized. Moreover, the advantage and disadvantage of the above mentioned non-traditional machining processes are discussed. Thereafter, the prospect of non-traditional machining for fabricating the desired superhydrophobic surfaces is proposed. Full article
(This article belongs to the Special Issue Micromachining Method for Surface Morphology)
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