Micromachines, Volume 15, Issue 6 (June 2024) – 117 articles

To address the requirements of sonar imaging, such as high receiving sensitivity, a wide bandwidth, and a wide receiving angle, an AlN PMUT with an optimized ratio of 0.6 for the piezoelectric layer diameter to backside cavity diameter is proposed in this paper. A sample AlN PMUT is designed and fabricated with the SOI substrate-based bulk MEMS process. The characterization test result of the sample demonstrates a −6 dB bandwidth of approximately 500 kHz and a measured receiving sensitivity per unit area of 1.37 V/μPa/mm², which significantly surpasses the performance of previously reported PMUTs. The −6 dB horizontal angles of the AlN PMUT at 300 kHz and 500 kHz are measured as 68.30° and 54.24°, respectively. To achieve an accurate prediction of its characteristics when being packaged and assembled in a receive array, numerical simulations with the consideration of film stress are conducted. The numerical result shows a maximum deviation of ±7% in the underwater receiving sensitivity across the frequency range of 200 kHz to 1000 kHz and a deviation of about 0.33% in the peak of underwater receiving sensitivity compared to the experimental data. By such good agreement, the simulation method reveals its capability of providing theoretical foundation for enhancing the uniformity of AlN PMUTs in future studies. Full article

Background: Inherited primary open-angle glaucoma (POAG) in Beagle dogs is a well-established large animal model of glaucoma and is caused by a G661R missense mutation in the ADAMTS10 gene. Using this model, the study describes early clinical disease markers for canine glaucoma. Methods: Spectral-domain optical coherence tomography (SD-OCT) was used to assess nine adult, ADAMTS10-mutant (median age 45.6 months, range 28.8–52.8 months; mean diurnal intraocular pressure (IOP): 29.9 +/− SEM 0.44 mmHg) and three related age-matched control Beagles (mean diurnal IOP: 18.0 +/− SEM 0.53 mmHg). Results: Of all the optic nerve head (ONH) parameters evaluated, the loss of myelin peak height in the horizontal plane was most significant (from 154 +/− SEM 38.4 μm to 9.3 +/− SEM 22.1 μm; p < 0.01). There was a strong significant negative correlation between myelin peak height and IOP (Spearman correlation: −0.78; p < 0.003). There were no significant differences in the thickness of any retinal layers evaluated. Conclusions: SD-OCT is a useful tool to detect early glaucomatous damage to the ONH in dogs before vision loss. Loss in myelin peak height without inner retinal thinning was identified as an early clinical disease marker. This suggests that initial degenerative changes are mostly due to the loss of myelin. Full article

The detection of the amount of aflatoxin M1 (AFM1) in milk is crucial for food safety. Here, we utilize a fiber optic (FO) localized surface plasmon resonance (LSPR) biosensor by constructing gold nanoparticle (AuNP) multimers, in which the nanogaps amplified the LSPR signal by the hot spot effect, and achieved a highly sensitive detection of f AFM1. Through the optimization of parameter conditions for the fabrication of the sensor and detection system, a high performance result from the FO LSPR biosensor was obtained, and the method for AFM1 detection was established, with a wide detection range of 0.05–100 ng/mL and a low limit of detection (LOD) of 0.04 ng/mL, and it has been successfully validated with the actual sample milk. Therefore, it is a good strategy to fabricate highly sensitive FO LSPR sensors for detecting AFM1 by constructing AuNP multimers, and this approach is suitable for developing other biosensors. Full article

This research explores the architecture and efficacy of GaN/Al_xGa_1−xN-based heterojunction phototransistors (HPTs) engineered with both a compositionally graded and a doping-graded base. Employing theoretical analysis along with empirical fabrication techniques, HPTs configured with an aluminum compositionally graded base were observed to exhibit a substantial enhancement in current gain. Specifically, theoretical models predicted a 12-fold increase, while experimental evaluations revealed an even more pronounced improvement of approximately 27.9 times compared to conventional GaN base structures. Similarly, HPTs incorporating a doping-graded base demonstrated significant gains, with theoretical predictions indicating a doubling of current gain and experimental assessments showing a 6.1-fold increase. The doping-graded base implements a strategic modulation of hole concentration, ranging from 3.8 × 10¹⁶ cm⁻³ at the base–emitter interface to 3.8 × 10¹⁷ cm⁻³ at the base–collector junction. This controlled gradation markedly contributes to the observed enhancements in current gain. The principal mechanism driving these improvements is identified as the increased electron drift within the base, propelled by the intrinsic electric field inherent to both the compositionally and doping-graded structures. These results highlight the potential of such graded base designs in enhancing the performance of GaN/Al_xGa_1−xN HPTs and provide crucial insights for the advancement of future phototransistor technologies. Full article

A bidirectional quasi-endfire patch antenna with a low elevation angle has promising applications for wireless communication systems that are vehicle-based, airborne, and shipborne. In this paper, the shortened patch resonators and open patch resonator are integrated to form a bidirectional quasi-endfire patch antenna with low elevation angle. The open patch resonator operates with a TM₂₀ mode to realize bidirectional radiation. The two shortened patch resonators operate with a TM₀₁ mode coupled with a TM₂₀ mode to control the phase difference between them at a suitable angle, so that the shortened patch resonators act as directors to tilt the dual beams toward the endfire direction and achieve low elevation angle. Compared with reported patch antennas with dual beams, the proposed antenna has the lowest elevation angle and a compact structure. For demonstration purposes, an antenna prototype operating at 3.5 GHz is fabricated and measured, exhibiting a low elevation angle of ±28°, a −10 dB impedance matching bandwidth from 3.44 GHz to 3.61 GHz, and a size of 1.36 λ₀ × 0.57 λ₀ with a profile of 0.036 λ₀. A prototype with two pair of shortened patch directors further reduces the elevation angle to ±19° with the size of 2.3 λ₀ × 0.57 λ₀. Full article

Polylactic acid (PLA) is a biobased, biodegradable, non-toxic polymer widely considered for replacing traditional petroleum-based polymer materials. Being a semi-crystalline material, PLA has great potential in many fields, such as medical implants, drug delivery systems, etc. However, the slow crystallization rate of PLA limited the application and efficient fabrication of highly crystallized PLA products. This review paper investigated and summarized the influence of formulation, compounding, and processing on PLA’s crystallization behaviors and mechanical performances. The paper reviewed the literature from different studies regarding the impact of these factors on critical crystallization parameters, such as the degree of crystallinity, crystallization rate, crystalline morphology, and mechanical properties, such as tensile strength, modulus, elongation, and impact resistance. Understanding the impact of the factors on crystallization and mechanical properties is critical for PLA processing technology innovations to meet the requirements of various applications of PLA. Full article

The electromagnetic eddy current non-destructive testing system enables the non-destructive analysis of surface defect information on tested materials. Based on the principles of eddy current detection, this paper presents a digital eddy current detection method using high-speed sampling based on STM32. A differential eddy current coil is used as the detection probe, and the combination of a differential bridge and a differential amplifier circuit helps to reduce common-mode noise interference. The detection signal is collected via an STM32-based acquisition circuit and transmitted to the host computer through Ethernet for digital demodulation processing. The host computer performs operations such as smoothing averaging, sinusoidal fitting, and outlier removal to extract the amplitude and phase of the detection signal. The system also visually displays the condition of the tested object’s surface in real time through graphical visualization. Testing showed that this system can operate at frequencies up to 8.84 MHz and clearly identify defects as narrow as 1 mm on the surface of the tested steel plate. Full article

As a novel technology for fabricating large-screen OLED devices, OLED inkjet printing places extreme demands on the positioning accuracy of inkjet printing platforms. However, thermal deformation of the connection mechanism often reduces the printing precision of OLED printing equipment, significantly impacting overall print quality. This study introduces a compliant connection mechanism that achieves precise positioning of the inkjet printing platform and can self-eliminate thermal distortion. The design of the mechanism’s core component is based on the Freedom and Constraint Topology (FACT) principle. This component is constructed from three distinct compliant sections arranged in series, collectively providing three degrees of freedom. Furthermore, the resistance to deformation caused by gravity and other external forces was evaluated by analyzing both vertical and horizontal stiffness. To validate the mechanism’s thermal distortion elimination and gravity resistance capabilities, finite element analysis (FEA) was carried out. The results demonstrate that the mechanism effectively reduces the maximum deformation of the platform by approximately 46% and the average deformation across the entire platform by approximately 59%. These findings confirm that the mechanism has potential in high-precision positioning tasks that need to mitigate thermal distortion. Full article

We propose a novel passive micromixer leveraging STC (split-to-circulate) flow characteristics and analyze its mixing performance comprehensively. Three distinct designs incorporating submerged circular walls were explored to achieve STC flow characteristics, facilitating flow along a convex surface and flow impingement on a concave surface. Across a broad Reynolds number range (0.1 to 80), the present micromixer substantially enhances mixing, with a degree of mixing (DOM) consistently exceeding 0.84. Particularly, the mixing enhancement is prominent within the low and intermediate range of Reynolds numbers ($0.1<\mathrm{R}\mathrm{e}<20)$. This enhancement stems from key flow characteristics of STC: the formation of saddle points around convex walls and flow impingement on concave walls. Compared to other passive micromixers, the DOM of the present micromixer stands out as notably high over a broad range of Reynolds numbers ($0.1\le \mathrm{R}\mathrm{e}\le 80$). Full article

This paper presents a comprehensive study on single- and repetitive-frequency UIS characteristics of 1200 V asymmetric (AT) and double trench silicon carbide (DT-SiC) metal-oxide-semiconductor field-effect transistors (MOSFETs) and their electrical degradation under electrical–thermal working conditions, investigated through experiment and simulation verification. Because their structure is different, the failure mechanisms are different. Comparatively, the gate oxide of a DT-MOSFET is more easily damaged than an AT-MOSFET because the hot carriers are injected into the oxide. The parameters’ degradation under repetitive UIS stress also requires analysis. The variations in the measured parameters are recorded to evaluate typical electrical features of device failure. Furthermore, TCAD simulation is used to reveal the electrothermal stress inside the device during avalanche. Additionally, failed devices are decapsulated to verify the location of the failure point. Finally, a new type of stepped-oxide vertical power DT MOSFET with P-type shielding and current spread layers, along with its feasible process flow, is proposed for the improvement of gate dielectric reliability. Full article

Processing in Memory based on memristors is considered the most effective solution to overcome the Von Neumann bottleneck issue and has become a hot research topic. The execution efficiency of logical computation and in-memory data transmission is crucial for Processing in Memory. This paper presents a design scheme for data transmission and multi-bit multipliers within MAT (a data storage set in MPU) based on the memristive alternating crossbar array structure. Firstly, to improve the data transfer efficiency, we reserve the edge row and column of the array as assistant cells for OR AND (OA) and AND data transmission logic operations to reduce the data transfer steps. Furthermore, we convert the multipliers into multi-bit addition operations via Multiple Input Multiple Output (MIMO) logical operations, which effectively improves the execution efficiency of multipliers. PSpice simulation shows that the proposed data transmission and multi-bit multiplier solution has lower latency and power consumption and higher efficiency and flexibility. Full article

The reliability and durability of integrated circuits (ICs), present in almost every electronic system, from consumer electronics to the automotive or aerospace industries, have been and will continue to be critical concerns for IC chip makers, especially in scaled nanometer technologies. In this context, ICs are expected to deliver optimal performance and reliability throughout their projected lifetime. However, real-time reliability assessment and remaining lifetime projections during in-field IC operation remain unknown due to the absence of trustworthy on-chip reliability monitors. The integration of such on-chip monitors has recently gained significant importance because they can provide real-time IC reliability extraction by exploiting the fundamental physics of two of the major reliability degradation phenomena: bias temperature instability (BTI) and hot carrier degradation (HCD). In this work, we present an extensive study of ring oscillator (RO)-based degradation and annealing monitors designed on our latest 28 nm versatile array chip. This test vehicle, along with a dedicated test setup, enabled the reliable statistical characterization of BTI- and HCD-stressed as well as annealed RO monitor circuits. The versatility of the test vehicle presented in this work permits the execution of accelerated degradation tests together with annealing experiments conducted on RO-based reliability monitor circuits. From these experiments, we have constructed precise annealing maps that provide detailed insights into the annealing behavior of our monitors as a function of temperature and time, ultimately revealing the usage history of the IC. Full article

This paper proposes a method for classifying crystal planes based on the bond angle characteristics of quartz unit cells and constructs an etch rate model for quartz crystal planes at both macro and micro scales. By omitting oxygen atoms from the quartz cell structure, a method based on bond angle characteristics was established to partition the atomic arrangement of the crystal surface. This approach was used to analyze the etching processes of typical quartz crystal planes (R, r, m, and (0001)), approximating the etching process of crystals as a cyclic removal of certain bond angle characteristics on the crystal planes. This led to the development of an etch rate model based on micro-geometric parameters of crystal planes. Additionally, using the proposed bond angle classification method, the common characteristics of atomic configurations on the crystal plane surfaces within the X_cut type were extracted and classified into seven regions, further expanding and applying the etch rate model. The computational results of this model showed good agreement with experimental data, indicating the rationality and feasibility of the proposed method. These also provide a theoretical basis for understanding the microstructural changes during quartz-based MEMS etching processes. Full article

Abstract: The grain size effect is an important factor in determining the material removal behavior of polycrystalline silicon (p-Si). In the present study, to improve the understanding of nanoscale machining of p-Si, we performed molecular dynamics simulation of nanometric cutting on a p-Si workpiece and discussed the grain size effect on material removal behavior and subsurface damage formation. The simulation results indicate that when cutting on the polycrystal workpiece, the material removal process becomes unstable compared with single crystals. Higher removal efficiency, less elastic recovery and higher frictional coefficient are observed as the average grain size decreases. In the subsurface workpiece, when the grain size decreases, slip along grain boundaries merges as a nonnegligible process of the plastic deformation and suppresses the elastic deformation ahead of the cutting tool. It is also revealed that when cutting on a polycrystal workpiece with smaller grains, the average stress decreases while the workpiece temperature increases due to the impediment of heat transfer by grain boundaries. These results could provide a fundamental understanding in the material deformation mechanism of p-Si during nanoscale machining. Full article

This paper presents a high-performance, multilevel inverter with symmetry and simplification. This inverter is a single-phase, seven-level symmetric switched-capacitor inverter based on the concept of the double voltage clamping circuit connected to the half-bridge circuit. Above all, only a single DC power supply is used to achieve a single-phase inverter with seven levels and a voltage gain of three. In addition to analyzing the operating principle of the proposed switched-capacitor multilevel inverter in detail, the stability analysis and controller design are carried out by the state-space averaging method. The feasibility and effectiveness of the proposed structure are validated by some simulated results based on the PSIM simulation tool and by some experiments using FPGA as a control kernel, respectively. However, in this study, the switches were implemented by MOSFETs to meet a high switching frequency. These MOSFETs can be replaced by IGBTs in the motor drive applications so that the used switching frequency can be reduced. Full article

In this study, CoCrMo cuboid samples were deposited on a CuZrCr substrate using laser powder bed fusion (L-PBF) technology to investigate the influence of process parameters and laser remelting strategies on the mechanical properties and interface characteristics of multi-metals. This study found that process parameters and laser scanning strategies had a significant influence on the mechanical properties and interface characteristics. Samples fabricated with an $E_{\mathrm{V}}$ ≤ 20 J/mm³ showed little tensile ductility. As the volumetric energy density ($E_{\mathrm{V}}$) increased to a range between 40 J/mm³ and 100 J/mm³, the samples achieved the desired mechanical properties, with a strong interface combining the alloys. However, an excessive energy density could result in cracks due to thermal stress. Laser remelting significantly improved the interface properties, especially when the $E_{\mathrm{V}}$ was below 40 J/mm³. Variances in the $E_{\mathrm{V}}$ showed little influence on the hardness at the CuZrCr end, while the hardness at the interface and the CoCrMo end showed an increasing and decreasing trend with an increase in the $E_{\mathrm{V}}$, respectively. Interface characterization showed that when the $E_{\mathrm{V}}$ was greater than 43 J/mm³, the main defects in the L-PBF CoCrMo samples were thermal cracks, which gradually changed to pores with a lack of fusion when the $E_{\mathrm{V}}$ decreased. This study provides theoretical and technical support for the manufacturing of multi-metal parts using L-PBF technology. Full article

As the thickness of an ultra-thin flattened heat pipe (UTHP) decreases, the fabrication difficulty increases exponentially, and the thermal performance deteriorates rapidly. In this study, three types of composite wicks were developed for UTHPs with a 0.6 mm thickness: copper foam and mesh wick (CFMW), two layers of different mesh wick (TDMW), and three layers of the same mesh wick (TSMW). The startup and steady-state performances of the UTHPs with liquid filling ratios of 60% to 120% were investigated. The findings indicated that the CFMW UTHP with a filling ratio of 100% exhibited the best startup performance, with the highest equilibrium temperature of 58.37 °C. The maximum heat transport capacities of the CFMW, TDMW, and TSMW UTHP samples were 9, 8, and 8.5 W, respectively, at their corresponding optimum filling ratios of 110%, 90%, and 100%. The CFMW UTHP exhibited the lowest evaporation and condensation thermal resistances of 0.151 and 0.189 K/W, respectively, which were 24.67% and 41.85% lower than those of the TSMW UTHP. CFMW can be used to improve the thermal performance of UTHPs. This study provides important guidelines for the structural design, fabrication technology, and performance improvement of high-performance UTHPs used in portable electronic devices. Full article

This paper demonstrates the potential of anisotropic 3D printing for alignable carbon nanomaterials. The ferrite-decorated nanocarbon material was synthesized via a sodium solvation process using epichlorohydrin as the coupling agent. Employing a one-pot synthesis approach, the novel material was incorporated into a 3D photopolymer, manipulated, and printed using a low-cost microscale 3D printer, equipped with digital micromirror lithography, monitoring optics, and magnetic actuators. This technique highlights the ability to control the microstructure of 3D-printed objects with sub-micron precision for applications such as microelectrode sensors and microrobot fabrication. Full article

In this study, we propose a polarized electron blocking layer (EBL) structure using Al_xGa_1−xN/Al_xGa_1−xN to enhance the internal quantum efficiency (IQE) of AlGaN-based ultraviolet light-emitting diodes (UV LEDs). Our findings indicate that this polarized EBL structure significantly improves IQE compared to conventional EBLs. Additionally, we introduce an electric-field reservoir (EFR) optimization method to maximize IQE. Specifically, optimizing the polarized EBL structure of Al_xGa_1−xN/Al_xGa_1−xN enhances the hole drift rate, resulting in an IQE improvement of 19% and an optical output power increase of 186 mW at a current of 210 mA. Full article

Low-dimension materials such as transition metal dichalcogenides (TMDCs) have received extensive research interest and investigation for electronic and optoelectronic applications. Due to their unique widely tunable band structures, they are good candidates for next-generation optoelectronic devices. Particularly, their photoluminescence properties, which are fundamental for optoelectronic applications, are highly sensitive to the nature of the band gap. Monolayer TMDCs in the room temperature range have presented a direct band gap behavior and bright photoluminescence. In this work, we investigate a popular TMDC material WSe₂’s photoluminescence performance using a Raman spectroscopy laser with temperature dependence. With temperature variation, the lattice constant and the band gap change dramatically, and thus the photoluminescence spectra are changed. By checking the photoluminescence spectra at different temperatures, we are able to reveal the nature of direct-to-indirect band gap in monolayer WSe₂. We also implemented density function theory (DFT) simulations to computationally investigate the band gap of WSe₂ to provide comprehensive evidence and confirm the experimental results. Our study suggests that monolayer WSe₂ is at the transition boundary between the indirect and direct band gap at room temperature. This result provides insights into temperature-dependent optical transition in monolayer WSe₂ for quantum control, and is important for cultivating the potential of monolayer WSe₂ in thermally tunable optoelectronic devices operating at room temperature. Full article

The branch prediction units (BPUs) generally have security vulnerabilities, which can be used by attackers to tamper with the branches, and the existing protection methods cannot defend against these attacks. Therefore, this article proposes a hardware security protection method for conditional branches of embedded systems. This method calculates the number of branch target buffer (BTB) updates every 80 clock cycles. If the number exceeds the set threshold, the BTB will be locked and prevent any process from tampering with the BTB entries, thereby resisting branch prediction analysis (BPA) attacks. Moreover, to prevent attackers from stealing the critical information of branches, the method designs the hybrid arbiter physical unclonable function (APUF) circuit to encrypt and decrypt the directions, addresses, and indexes of branches. This circuit combines the advantages of double APUF and Feed-Forward APUF, which can enhance the randomness of output response and resist machine learning attacks. If attackers still successfully tamper with the branches and disrupt the control flow integrity (CFI), this method detects tampering with the instruction codes, jump addresses, and jump directions in a timely manner through dynamic and static label comparison. The proposed method is implemented and tested on FPGA. The experimental results show that this method can achieve fine-grained security protection for conditional branches, with about 5.4% resource overhead and less than 5.5% performance overhead. Full article

A novel insulated gate bipolar transistor with Semi-Insulated POly Silicon (SIPOS) is presented in this paper and analyzed through TCAD simulation. In the off state, the SIPOS-IGBT can obtain a uniform electric field distribution, which enables a thinner drift region under the same breakdown voltage. In the on state, an electron accumulation layer is formed along the SIPOS, which can increase the injection level of the “PiN region” in the device, and the carrier concentration in the drift region is also increased due to the charge balance effect. Moreover, the SIPOS-IGBT can achieve a quick and thorough depletion in the drift region during the turn-off transient, which can greatly reduce the turn-off loss of the SIPOS-IGBT. These advantages improve the tradeoff between the conduction and switching losses. According to the simulation results, the SIPOS-IGBT obtained a 58% lower turn loss than that of a field-stop (FS) IGBT and 30% lower than an HK-IGBT with the same on-state voltage. Full article

In this paper, a sensor using a complementary split ring resonator (CSRR) is proposed for non-destructive testing of blood glucose. By depicting the complementary split ring structure on the ground, the electromagnetic field strength between the split rings can be enhanced effectively. The structure size of the sensor by CSRR is determined by simulation, so that the insertion loss curve of the device has a resonance point at the frequency of 3.419 GHz. With a special holder created by three-dimensional (3D) printing technology, the test platform was established when the concentration of the solution varied from 0 mg/mL to 20 mg/mL. The experimental results indicate that there is an obvious linear relationship between the insertion loss S₂₁ and the glucose concentration at the resonant frequency. Similarly, the measured real part and imaginary part of the S₂₁ both vary with glucose concentration linearly. Based on the above experimental results, the feasibility of the sensor using a CSRR proposed in this paper for non-destructive detection of blood glucose is preliminarily verified. Full article

In recent years, there has been significant interest in incorporating micro-actuators into industrial environments; this interest is driven by advancements in fabrication methods. Piezoelectric actuators (PEAs) have emerged as vital components in various applications that require precise control and manipulation of mechanical systems. These actuators play a crucial role in the micro-positioning systems utilized in nanotechnology, microscopy, and semiconductor manufacturing; they enable extremely fine movements and adjustments and contribute to vibration control systems. More specifically, they are frequently used in precision positioning systems for optical components, mirrors, and lenses, and they enhance the accuracy of laser systems, telescopes, and image stabilization devices. Despite their numerous advantages, PEAs exhibit complex dynamics characterized by phenomena such as hysteresis, which can significantly impact accuracy and performance. The characterization of these non-linearities remains a challenge for PEA modeling. Recurrent artificial neural networks (ANNs) may simplify the modeling of the hysteresis dynamics for feed-forward compensation. To address these challenges, robust control strategies such as integral fast terminal sliding mode control (IFTSMC) have been proposed. Unlike traditional fast terminal sliding mode control methods, IFTSMC includes integral action to minimize steady-state errors, improving the tracking accuracy and disturbance rejection capabilities. However, accurate modeling of the non-linear dynamics of PEAs remains a challenge. In this study, we propose an ANN-based IFTSMC controller to address this issue and to enhance the precision and reliability of PEA positioning systems. We implement and validate the proposed controller in a real-time setup and compare its performance with that of a PID controller. The results obtained from real PEA experiments demonstrate the stability of the novel control structure, as corroborated by the theoretical analysis. Furthermore, experimental validation reveals a notable reduction in error compared to the PID controller. Full article

As one of the most significant research topics in robotics, microrobots hold great promise in biomedicine for applications such as targeted diagnosis, targeted drug delivery, and minimally invasive treatment. This paper proposes an enhanced YOLOv5 (You Only Look Once version 5) microrobot detection and tracking system (MDTS), incorporating a visual tracking algorithm to elevate the precision of small-target detection and tracking. The improved YOLOv5 network structure is used to take magnetic bodies with sizes of 3 mm and 1 mm and a magnetic microrobot with a length of 2 mm as the pretraining targets, and the training weight model is used to obtain the position information and motion information of the microrobot in real time. The experimental results show that the accuracy of the improved network model for magnetic bodies with a size of 3 mm is 95.81%, representing an increase of 2.1%; for magnetic bodies with a size of 1 mm, the accuracy is 91.03%, representing an increase of 1.33%; and for microrobots with a length of 2 mm, the accuracy is 91.7%, representing an increase of 1.5%. The combination of the improved YOLOv5 network model and the vision algorithm can effectively realize the real-time detection and tracking of magnetically controlled microrobots. Finally, 2D and 3D detection and tracking experiments relating to microrobots are designed to verify the robustness and effectiveness of the system, which provides strong support for the operation and control of microrobots in an in vivo environment. Full article

In this work, we present a compact, bifunctional chip-based sensor setup that measures the temperature and electrical conductivity of water samples, including specimens from rivers and channels, aquaculture, and the Atlantic Ocean. For conductivity measurements, we utilize the impedance amplitude recorded via interdigitated electrode structures at a single triggering frequency. The results are well in line with data obtained using a calibrated reference instrument. The new setup holds for conductivity values spanning almost two orders of magnitude (river versus ocean water) without the need for equivalent circuit modelling. Temperature measurements were performed in four-point geometry with an on-chip platinum RTD (resistance temperature detector) in the temperature range between 2 °C and 40 °C, showing no hysteresis effects between warming and cooling cycles. Although the meander was not shielded against the liquid, the temperature calibration provided equivalent results to low conductive Milli-Q and highly conductive ocean water. The sensor is therefore suitable for inline and online monitoring purposes in recirculating aquaculture systems. Full article

To elucidate the atomic mechanisms of the chemical mechanical polishing (CMP) of silicon carbide (SiC), molecular dynamics simulations based on a reactive force field were used to study the sliding process of silica (SiO₂) abrasive particles on SiC substrates in an aqueous H₂O₂ solution. During the CMP process, the formation of Si-O-Si interfacial bridge bonds and the insertion of O atoms at the surface can lead to the breakage of Si-C bonds and even the complete removal of SiC atoms. Furthermore, the removal of C atoms is more difficult than the removal of Si atoms. It is found that the removal of Si atoms largely influences the removal of C atoms. The removal of Si atoms can destroy the lattice structure of the substrate surface, leading the neighboring C atoms to be bumped or even completely removed. Our research shows that the material removal during SiC CMP is a comprehensive result of different atomic-level removal mechanisms, where the formation of Si-O-Si interfacial bridge bonds is widespread throughout the SiC polishing process. The Si-O-Si interfacial bridge bonds are the main removal mechanisms for SiC atoms. This study provides a new idea for improving the SiC removal process and studying the mechanism during CMP. Full article

High-aspect-ratio micro- and mesoscale metallic components (HAR-MMMCs) can play some unique roles in quite a few application fields, but their cost-efficient fabrication is significantly difficult to accomplish. To address this issue, this study proposes a necked-entrance through-mask (NTM) periodically lifting electroforming technology with an impinging jet electrolyte supply. The effects of the size of the necked entrance of the through-mask and the jet speed of the electrolyte on electrodeposition behaviors, including the thickness distribution of the growing top surface, deposition defect formation, geometrical accuracy, and electrodeposition rate, are investigated numerically and experimentally. Ensuring an appropriate size of the necked entrance can effectively improve the uniformity of deposition thickness, while higher electrolyte flow velocities help enhance the density of the components under higher current densities, reducing the formation of deposition defects. It was shown that several precision HAR-MMMCs with an AR of 3.65 and a surface roughness (Ra) of down to 36 nm can be achieved simultaneously with a relatively high deposition rate of 3.6 μm/min and thickness variation as low as 1.4%. Due to the high current density and excellent mass transfer effects in the electroforming conditions, the successful electroforming of components with a Vickers microhardness of up to 520.5 HV was achieved. Mesoscale precision columns with circular and Y-shaped cross-sections were fabricated by using this modified through-mask movable electroforming process. The proposed NTM periodic lifting electroforming method is promisingly advantageous in fabricating precision HAR-MMMCs cost-efficiently. Full article

This work reports a simple bubble generator for the high-speed generation of microbubbles with constant cumulative production. To achieve this, a gas–liquid co-flowing microfluidic device with a tiny capillary orifice as small as 5 μm is fabricated to produce monodisperse microbubbles. The diameter of the microbubbles can be adjusted precisely by tuning the input gas pressure and flow rate of the continuous liquid phase. The co-flowing structure ensures the uniformity of the generated microbubbles, and the surfactant in the liquid phase prevents coalescence of the collected microbubbles. The diameter coefficient of variation (CV) of the generated microbubbles can reach a minimum of 1.3%. Additionally, the relationship between microbubble diameter and the gas channel orifice is studied using the low Capillary number (Ca) and Weber number (We) of the liquid phase. Moreover, by maintaining a consistent gas input pressure, the CV of the cumulative microbubble volume can reach 3.6% regardless of the flow rate of the liquid phase. This method not only facilitates the generation of microbubbles with morphologic stability under variable flow conditions, but also ensures that the cumulative microbubble production over a certain period of time remains constant, which is important for the volume-dominated application of chromatographic analysis and the component analysis of natural gas. Full article