March 2025 - 115 articles
Alignment systems are core subsystems of lithography, which directly affect the overlay accuracy of the lithography process. The Moiré fringe-based alignment method has the advantages of high precision and low complexity. However, the precisio...
This manuscript presents a new approach to describe aircraft landing gear systems equipped with magnetorheological (MR) dampers, integrating a reinforcement learning-based neural network control strategy. The main target of the proposed system is to...
Thrombospondin-2 (THBS2) is a prevailing prognostic biomarker implicated in different cancer types, such as deadly colorectal, pancreas, and triple-negative breast cancers. While the current methods for cancer-relevant protein detection, such as enzy...
In this study, we present two configurations of piezo-actuated microspeakers, which were fabricated by combining a self-developed aerosol deposition method with the metal MEMS microfabrication process. The stainless steel used was structurally design...
The bandwidth and output power of underwater acoustic transmitters are important for high-performance sonar detection systems. A mismatch between the impedance of the transducer and the transmitting circuit results in a low power factor, significantl...
Continuous perfusion is necessary to sustain microphysiological systems and other microfluidic cell cultures. However, most of the established microfluidic perfusion systems, such as syringe pumps, peristaltic pumps, and rocker plates, have several o...
Thermal analysis is an indispensable aspect of semiconductor packaging. Excessive operating temperatures in integrated circuit (IC) packages can degrade component performance and even cause failure. Therefore, thermal resistance and thermal character...
A MEMS scanning mirror is a beam scanning device based on MEMS technology, which plays an important role in the fields of Lidar, medical imaging, laser projection display, and so on. The accurate measurement of the scanning mirror index can verify it...
Accurate separation in microfluidic devices is crucial for biomedical applications; however, enhancing their performance remains challenging due to computational and experimental constraints. This study aims to optimize microfluidic devices by system...
This paper introduces a method for improving the measurement performance of single wavelength overlay errors by incorporating higher diffraction orders. In this method, to enhance the accuracy and robustness of overlay error detection between layers,...
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