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Micromachines, Volume 16, Issue 2

2025 February - 129 articles

Cover Story: Intracortical microelectrode arrays (MEAs) are essential for recording neural signals, with them offering insights into both healthy and diseased states. However, their reliability for long-term recording is limited by the foreign body response (FBR), including gliosis and neuronal loss near implant sites. Using amorphous silicon carbide (a-SiC) MEAs with reduced cross-sectional areas, which enhances flexibility while maintaining implantation stiffness, we compared the performance of a-SiC MEAs to conventional silicon-based probes over a period of 16 weeks in the rat motor cortex. Our results demonstrate that a-SiC MEAs exhibit superior chronic recording performance, mitigate the FBR, and achieve higher active electrode yields. Our findings highlight the potential of a-SiC technology for stable, long-term neural interfaces, advancing applications in neuroprosthetics and neuromodulation. View this paper
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Articles (129)

  • Article
  • Open Access
4 Citations
1,858 Views
21 Pages

Study on Spatiotemporal Variation in Internal Temperature Field in Quartz Flexible Accelerometer

  • Zhigang Zhang,
  • Fangxiang Tang,
  • Ziwei Zhao,
  • Zhao Zhang and
  • Lijun Tang

19 February 2025

Quartz flexible accelerometers (QFAs) are a type of temperature-sensitive sensor, whereby a change in temperature will cause the key parameters of the accelerometer to drift and cause stability errors. Due to the absence of effective methods for sens...

  • Article
  • Open Access
2 Citations
1,675 Views
20 Pages

Coded Ultrasonic Ranging for the Distance Measurement of Coaxial Rotor Blades

  • Yaohuan Lu,
  • Zhen Qiu,
  • Shan Zhang,
  • Wenchuan Hu and ,
  • Yongqiang Qiu and
  • Zurong Qiu
  • + 1 author+ 0 author

19 February 2025

Coaxial rotor helicopters have a wide range of civilian and military applications; however, the collision risk of the upper and lower blades that comes with the coaxial rotor system remains. This paper introduces a blade-tip distance measurement meth...

  • Article
  • Open Access
3 Citations
3,045 Views
14 Pages

19 February 2025

High-quality traveling waves in stators are critical for traveling-wave ultrasonic motors (TUSMs) to achieve good stability and efficiency. However, the modal splitting and shape distortion that is induced by the anisotropic elasticity induce severe...

  • Article
  • Open Access
8 Citations
4,260 Views
24 Pages

19 February 2025

All-optical computing is an emerging information processing technology. As a cutting-edge technology in the field of photonics, it effectively leverages the unique advantages of photons to achieve rapid computation. However, the lack of a fully funct...

  • Article
  • Open Access
6 Citations
3,508 Views
19 Pages

19 February 2025

A versatile and modular microfluidic system for cell co-culture has been developed. Microfluidic chips, each featuring dual compartments separated by a porous membrane, have been fabricated and assembled within the system to facilitate fluidic interc...

(This article belongs to the Special Issue Current Trends in Microfabrication Techniques for Lab-on-a-Chip and Biomedical Microdevices)
  • Article
  • Open Access
6 Citations
3,285 Views
17 Pages

Dielectrophoretic Microfluidic Designs for Precision Cell Enrichments and Highly Viable Label-Free Bacteria Recovery from Blood

  • Dean E. Thomas,
  • Kyle S. Kinskie,
  • Kyle M. Brown,
  • Lisa A. Flanagan and ,
  • Rafael V. Davalos and
  • Alexandra R. Hyler
  • + 1 author+ 0 author

19 February 2025

Conducting detailed cellular analysis of complex biological samples poses challenges in cell sorting and recovery for downstream analysis. Label-free microfluidics provide a promising solution for these complex applications. In this work, we investig...

(This article belongs to the Section B: Biology and Biomedicine)
  • Article
  • Open Access
8 Citations
2,594 Views
13 Pages

An Optimized PZT-FBG Voltage/Temperature Sensor

  • Shangpeng Sun,
  • Feiyue Ma,
  • Yanxiao He,
  • Bo Niu and ,
  • Cheng Wang,
  • Longcheng Dai and
  • Zhongyang Zhao
  • + 2 authors+ 0 author

19 February 2025

The piezoelectric grating voltage sensor has garnered significant attention in the realm of intelligent sensing, attributed to its compact size, cost-effectiveness, robust electromagnetic interference (EMI) immunity, and high network integration capa...

  • Article
  • Open Access
2 Citations
2,438 Views
11 Pages

19 February 2025

Alzheimer’s disease (AD) is a progressive neurodegenerative disorder, and its early detection can be critical for a prompt intervention that can potentially slow down the disease progression and improve the patient’s quality of life. Howe...

(This article belongs to the Special Issue Biosensors for Biomedical and Environmental Applications, Third Edition)
  • Article
  • Open Access
9 Citations
2,023 Views
23 Pages

18 February 2025

The development of electrochemical DNA biosensors occurred by applying different organically coated Mn-NPs such as MnCO3@OAm, MnCO3@TEG and MnO2/Mn2O3@TEG, as well as naked MnCO3 NPs (where OAm = oleylamine and TEG = tetraethylene glycol). The detect...

(This article belongs to the Section B1: Biosensors)
  • Article
  • Open Access
5 Citations
3,927 Views
13 Pages

18 February 2025

The advancement of microfluidic technology has introduced new requirements for the sensitivity of microflow sensors. To address this, this paper presents a novel high-sensitivity thermal microflow sensor incorporating a heat-insulating cavity structu...

(This article belongs to the Special Issue Selected Papers From the 25th Annual Conference and 14th International Conference of Chinese Society of Micro-Nano Technology (CSMNT 2023))
  • Article
  • Open Access
16 Citations
4,028 Views
13 Pages

Fabrication and Characterization of a Flexible Polyurethane-Based Triboelectric Nanogenerator for a Harvesting Energy System

  • Saba Ejaz,
  • Imran Shah,
  • Shahid Aziz,
  • Gul Hassan and ,
  • Ahmed Shuja,
  • Muhammad Asif Khan and
  • Dong-Won Jung
  • + 2 authors+ 0 author

17 February 2025

Powering wearable and portable devices, triboelectric nanogenerators (TENGs) are a considerably promising technology. Low-cost production, ease of fabrication, optimal efficiency, and high output performance are always key concerns in developing ener...

(This article belongs to the Special Issue Piezoelectric Devices and System in Micromachines)
  • Article
  • Open Access
7 Citations
2,819 Views
14 Pages

17 February 2025

High-purity germanium (HPGe) detectors occupy a prominent position in fields such as radiation detection and aerospace because of their excellent energy resolution and wide detection range. To achieve a broader detection range, conventional HPGe dete...

(This article belongs to the Special Issue Photonic and Optoelectronic Devices and Systems, Third Edition)
  • Article
  • Open Access
5 Citations
2,414 Views
15 Pages

17 February 2025

Neurons in the brain are interconnected through synapses. Local active memristors can both simulate the synaptic behavior of neurons and the action potentials of neurons. Currently, the hyperbolic tangent function-type memristors used for coupling ne...

(This article belongs to the Special Issue Novel Computing Architectures and Digital Circuit Designs Using Memristors and Memristive Systems, 2nd Edition)
  • Article
  • Open Access
2 Citations
1,639 Views
30 Pages

17 February 2025

Since one of the effective methods for producing the form-cutting tools used in the form-turning process involves utilizing a wire cut machine, the effect of the geometric characteristics of the form contour on reducing the negative effects of the re...

(This article belongs to the Special Issue Recent Advances in Micro/Nanofabrication, 2nd Edition)
  • Review
  • Open Access
14 Citations
4,051 Views
21 Pages

16 February 2025

Fused Deposition Modeling (FDM) is a prominent additive manufacturing technique known for its ability to provide cost-effective and fast printing solutions. FDM enables the production of computer-aided 3D designs as solid objects at macro scales with...

(This article belongs to the Section D3: 3D Printing and Additive Manufacturing)
  • Article
  • Open Access
3 Citations
3,207 Views
22 Pages

16 February 2025

This study investigates the development of a rapid wax injection tooling with enhanced heat dissipation performance using aluminum-filled epoxy resin molds and cooling channel roughening technology. Experimental evaluations were conducted on cooling...

(This article belongs to the Special Issue Laser Micro/Nano-Fabrication)
  • Article
  • Open Access
8 Citations
4,647 Views
21 Pages

Dynamic Performance Evaluation of Bidirectional Bridgeless Interleaved Totem-Pole Power Factor Correction Boost Converter

  • Hsien-Chie Cheng,
  • Wen-You Jhu,
  • Yu-Cheng Liu,
  • Da-Wei Zheng and ,
  • Yan-Cheng Liu and
  • Tao-Chih Chang
  • + 1 author+ 0 author

16 February 2025

This study aims to conduct an assessment of the dynamic characteristics of a proposed 6.6 kW bidirectional bridgeless three-leg interleaved totem-pole power factor correction (PFC) boost converter developed for the front-end stage of electric vehicle...

(This article belongs to the Section D1: Semiconductor Devices)
  • Article
  • Open Access
10 Citations
3,669 Views
12 Pages

Analysis and Prediction of Melt Pool Geometry in Rectangular Spot Laser Cladding Based on Ant Colony Optimization–Support Vector Regression

  • Junhua Wang,
  • Jiameng Wang,
  • Xiaoqin Zha,
  • Yan Lu and ,
  • Kun Li,
  • Junfei Xu and
  • Tancheng Xie
  • + 2 authors+ 0 author

16 February 2025

The rectangular spot laser cladding system, due to its large spot size and high efficiency, has been widely applied in laser cladding equipment, significantly improving cladding’s efficiency. However, while enhancing cladding efficiency, the re...

(This article belongs to the Special Issue Integrated Photonics and Optoelectronics, 2nd Edition)
  • Article
  • Open Access
1 Citations
1,920 Views
12 Pages

High-Pulse-Repetition-Rate Eye-Safe Raman Laser with Acousto-Optic Q-Switched Device

  • Yu-Hsin Hsu,
  • Song-Qing Lin,
  • Dai-Jun Liu,
  • Hsing-Chih Liang and
  • Yung-Fu Chen

16 February 2025

The acousto-optic Q-switch is exploited to develop a high-repetition-rate eye-safe Raman laser at 1526 nm. The Nd:YVO4 and KGW crystals are employed as the fundamental laser and Stokes Raman gain materials, respectively. The influence of the gate-ope...

(This article belongs to the Special Issue Surface and Bulk Acoustic Wave Devices)
  • Article
  • Open Access
5 Citations
2,900 Views
14 Pages

15 February 2025

The thermal through-silicon-via (TTSV) has a serious thermal stress problem due to the mismatch of the coefficient of thermal expansion between the Si substrate and filler metal. At present, the thermal stress characteristics and strain mechanism of...

(This article belongs to the Section D1: Semiconductor Devices)
  • Article
  • Open Access
2 Citations
3,690 Views
9 Pages

A 3.2–3.6 GHz GaN Doherty Power Amplifier Module Based on a Compact Low-Loss Combiner

  • Xiyu Wang,
  • Dehan Wang,
  • Wenming Li,
  • Xiaolin Lv and ,
  • Kai Cui,
  • Haijun Liu and
  • Kai Kang
  • + 2 authors+ 0 author

15 February 2025

In this paper, a 3.2–3.6 GHz two-stage Doherty power amplifier (PA) module is proposed for fifth-generation (5G) massive multiple-input multiple-output (MIMO) base stations. A detailed design method and procedure for a compact and low-loss comb...

(This article belongs to the Special Issue Advanced Wide Bandgap Semiconductor Materials and Devices)
  • Article
  • Open Access
3 Citations
4,188 Views
11 Pages

15 February 2025

This paper demonstrates that potential oscillations in various frequency bands of monolithic microwave integrated circuits (MMICs) can be effectively suppressed using well-designed dual RC traps in the bias networks. The proposed approach is applied...

(This article belongs to the Special Issue RF Devices: Technology and Progress)
  • Article
  • Open Access
6 Citations
2,154 Views
11 Pages

Vapor-Assisted Method to Deposit Compact (CH3NH3)3Bi2I9 Thin Films for Bismuth-Based Planar Perovskite Solar Cells

  • Zihao Gao,
  • Xinjie Wang,
  • Zhen Sun,
  • Ping Song and ,
  • Xiyuan Feng and
  • Zhixin Jin
  • + 1 author+ 0 author

14 February 2025

Bismuth-based perovskite derivatives, (CH3NH3)3Bi2I9 (MBI), are promising non-toxic light-absorbing materials widely used in various photoelectric devices because of their excellent stability. However, MBI-based perovskite solar cells (PSCs) are limi...

(This article belongs to the Special Issue Energy Conversion Materials/Devices and Their Applications)
  • Article
  • Open Access
2 Citations
3,073 Views
16 Pages

A Design of a Small-Aperture Low-Profile Omnidirectional Conformal Antenna

  • Jieying Bai,
  • Xi Li,
  • Ziyu Zhang,
  • Junjun Wu and
  • Lin Yang

14 February 2025

In this article, a small-aperture, low-profile, and omnidirectional conformal antenna is proposed which can be utilized on space-limited equipment platforms such as airplanes, ships, and vehicles. The antenna consists of an open metal cavity, a disco...

(This article belongs to the Section E: Engineering and Technology)
  • Article
  • Open Access
1,927 Views
15 Pages

pH Measurements Using Leaky Waveguides with Synthetic Hydrogel Films

  • Victoria Wensley,
  • Nicholas J. Goddard and
  • Ruchi Gupta

14 February 2025

Leaky waveguides (LWs) are low-refractive-index films deposited on glass substrates. In these, light can travel in the film while leaking out at the film–substrate interface. The angle at which light can travel in the film is dependent on its r...

(This article belongs to the Special Issue Manufacturing and Application of Advanced Thin-Film-Based Device)
  • Communication
  • Open Access
2,132 Views
11 Pages

13 February 2025

This paper introduces an analog differential optoelectronic receiver (ADOR) integrated with digital slicers for short-range LiDAR systems, consisting of a spatially modulated P+/N-well on-chip avalanche photodiode (APD), a cross-coupled differential...

(This article belongs to the Section E: Engineering and Technology)
  • Article
  • Open Access
2 Citations
3,178 Views
15 Pages

A Wafer-Level Fabricated Heating–Vacuum Micro-Platform with Resonant MEMS Monolithically Integrated

  • Kaixuan He,
  • Rui Feng,
  • Yu Zheng,
  • Lijian Guo and ,
  • Qichao Liao,
  • Dongfang Song,
  • Yuan Xiang and
  • Xinxin Li
  • + 3 authors+ 0 author

13 February 2025

This paper presents a silicon-based wafer-level vacuum packaging platform with a monolithically integrated micro-oven. This system provides vacuum and constant temperature operating conditions to improve the performance of resonant micro-electro-mech...

  • Article
  • Open Access
10 Citations
5,074 Views
20 Pages

13 February 2025

This paper examined the reliability of complex PCB assemblies under random vibration and temperature cycling, which are two primary causes of assembly failure. A combination of finite element simulation and environmental testing was employed to inves...

  • Communication
  • Open Access
2 Citations
2,092 Views
23 Pages

12 February 2025

Electro-Fenton chemical mechanical polishing primarily regulates the generation of hydroxyl radicals (·OH) via the Fenton reaction through an applied electric field, which subsequently influences the formation and removal of the oxide layer on...

(This article belongs to the Special Issue MEMS Nano/Micro Fabrication, 2nd Edition)
  • Article
  • Open Access
2 Citations
1,645 Views
10 Pages

All-Optical Single-Longitudinal-Mode Forward Brillouin Microwave Oscillator with an Unbalanced Fiber Mach–Zehnder Interferometer

  • Xinyue Fang,
  • Wenjun He,
  • Wen Wang,
  • Yi Liu and ,
  • Yajun You,
  • Qing Yan,
  • Yafei Hou,
  • Zepeng Wu,
  • Lei Yu and
  • Xiujian Chou
  • + 8 authors+ 3 authors

12 February 2025

An all-optical single-longitudinal-mode (SLM) forward Brillouin microwave oscillator (FB-MO) with an unbalanced Fiber Mach–Zehnder interferometer (UF-MZI) for microwave photonics (MWP) generation is proposed and experimentally investigated. UF-...

(This article belongs to the Special Issue Fiber-Optic Technologies for Communication and Sensing)
  • Article
  • Open Access
7 Citations
4,186 Views
13 Pages

A 64 × 64 GaN Micro LED Monolithic Display Array: Fabrication and Light Crosstalk Analysis

  • Yang Xiao,
  • Yuan Meng,
  • Xiaoyu Feng,
  • Longzhen He and ,
  • Philip Shields,
  • Sean Lee,
  • Yanqin Wang,
  • Zhifang Wang,
  • Pingfan Ning and
  • Hongwei Liu
  • + 5 authors+ 0 author

11 February 2025

Monolithic micro LED display arrays show potential for application in small-area display modules, such as augmented reality (AR) displays. Due to the short distance between micro LEDs and the monolithic transparent substrate, a light crosstalk phenom...

  • Article
  • Open Access
5 Citations
1,660 Views
12 Pages

Vibration Analysis of Al–Al2O3 Micro-Cantilever Sandwich Beams with Porosity in Fluids

  • Feixiang Tang,
  • Xiong Yuan,
  • Siyu He,
  • Jize Jiang and ,
  • Shaonan Shi,
  • Yuhan Li,
  • Wenjin Liu,
  • Yang Zhou,
  • Fang Dong and
  • Sheng Liu
  • + 5 authors+ 0 author

11 February 2025

The vibration of porous Al–Al2O3 micro-cantilever sandwich beams in fluids was studied utilizing the modified couple stress theory and the scale distribution theory (MCST and SDT). Four types of porosity distributions were defined; the uniform...

  • Review
  • Open Access
33 Citations
8,588 Views
22 Pages

Recent Advances in AlN-Based Acoustic Wave Resonators

  • Hao Lu,
  • Xiaorun Hao,
  • Ling Yang,
  • Bin Hou and ,
  • Meng Zhang,
  • Mei Wu,
  • Jie Dong and
  • Xiaohua Ma
  • + 3 authors+ 0 author

11 February 2025

AlN-based bulk acoustic wave (BAW) filters have emerged as crucial components in 5G communication due to their high frequency, wide bandwidth, high power capacity, and compact size. This paper mainly reviews the basic principles and recent research a...

(This article belongs to the Special Issue RF and Power Electronic Devices and Applications)
  • Article
  • Open Access
12 Citations
4,286 Views
15 Pages

High-Performance Ag-NWs Doped Graphene/ITO Hybrid Transparent Conductive Electrode

  • Hana Bourahla,
  • Susana Fernández,
  • Yu Kyoung Ryu,
  • Andres Velasco and ,
  • Chahinez Malkia,
  • Alberto Boscá,
  • M. Belén Gómez-Mancebo,
  • Fernando Calle and
  • Javier Martinez
  • + 4 authors+ 0 author

11 February 2025

Indium tin oxide (ITO) is a commonly used material for transparent conductive electrodes (TCE) in optoelectronic applications. On the other hand, graphene has superior electrical conductivity and exceptional mechanical flexibility, which makes it a p...

(This article belongs to the Special Issue 2D-Materials Based Fabrication and Devices)
  • Article
  • Open Access
3 Citations
2,892 Views
12 Pages

10 February 2025

This paper presents a novel multi-layer, dual-band antenna array designed for WLAN and X-band applications, incorporating several innovative features. The design employs a pentagon-shaped radiating element with parasitic strips to enable dual-band op...

(This article belongs to the Special Issue RF Devices: Technology and Progress)
  • Review
  • Open Access
62 Citations
18,465 Views
34 Pages

10 February 2025

Microfluidic technology plays a crucial role in organ-on-a-chip (OoC) systems by replicating human physiological processes and disease states, significantly advancing biomedical research and drug discovery. This article reviews the design and fabrica...

(This article belongs to the Special Issue Microfluidics for Single Cell Detection and Cell Sorting)
  • Article
  • Open Access
3 Citations
2,099 Views
11 Pages

10 February 2025

The integrated imaging of LWIR cameras and SAR is one of the important directions of multi-sensor integration. In order to reduce the structural complexity of LWIR cameras and SAR-integrated imaging antenna, a dual-polarized metasurface-integrated an...

  • Article
  • Open Access
2 Citations
1,920 Views
14 Pages

High-Precision Small-Signal Model for Double-Channel–High-Electron-Mobility Transistors Based on the Double-Channel Coupling Effect

  • Ziyue Zhao,
  • Qian Yu,
  • Yang Lu,
  • Chupeng Yi and ,
  • Xin Liu,
  • Ting Feng,
  • Wei Zhao,
  • Yilin Chen,
  • Ling Yang and
  • Yue Hao
  • + 6 authors+ 1 author

10 February 2025

This paper presents a new small-signal model for double-channel (DC)–high-electron-mobility transistors, developed through an analysis of the unique coupling effects between channels in devices. Unlike conventional single-channel HEMTs, where e...

(This article belongs to the Special Issue Wide-Bandgap Semiconductor Devices: Materials, Fabrication, and Applications)
  • Article
  • Open Access
3 Citations
1,898 Views
11 Pages

9 February 2025

Colored 3D printing, as one of the crucial directions in 3D printing technology, has been widely applied in various fields in recent years. Compared to traditional 3D printing, colored 3D printing introduces color information to achieve multi-materia...

  • Article
  • Open Access
2 Citations
4,771 Views
18 Pages

8 February 2025

The chemical–mechanical polishing (CMP) of silicon wafers involves high-precision surface machining after double-sided lapping. Silicon wafers are subjected to chemical corrosion and mechanical removal under pressurized conditions. The multichi...

(This article belongs to the Special Issue Functional Materials and Microdevices, 2nd Edition)
  • Editorial
  • Open Access
5 Citations
3,012 Views
3 Pages

8 February 2025

With the rapid advancement of social productivity and technological innovation, the insulated gate bipolar transistor (IGBT) has emerged as a cornerstone in modern power electronic devices [...]

(This article belongs to the Special Issue Insulated Gate Bipolar Transistor (IGBT) Modules)
  • Article
  • Open Access
4 Citations
2,227 Views
14 Pages

Optimized Phase-Generated Carrier Demodulation Algorithm for Membrane-Free Fabry-Pérot Acoustic Sensor with High Sensitivity

  • Yang Yang,
  • Xinyu Zhao,
  • Yongqiu Zheng,
  • Juan Cui and ,
  • Dongqing Zhao,
  • Zhixuan Zheng,
  • Yan Cao and
  • Chenyang Xue
  • + 3 authors+ 0 author

8 February 2025

Demodulation of fiber optic Fabry–Pérot (F-P) acoustic sensors with high sensitivity and a large dynamic range continues to pose significant challenges. In this paper, we propose an advanced phase-generated carrier (PGC) demodulation alg...

  • Article
  • Open Access
6 Citations
6,546 Views
18 Pages

8 February 2025

This paper describes a novel micro-electro-mechanical system (MEMS) tuning fork gyroscope (TFG) design that employs a chevron-shaped displacement mechanism to amplify the displacement generated by the Coriolis force, thereby increasing the TFG’...

  • Review
  • Open Access
98 Citations
28,135 Views
76 Pages

From Present Innovations to Future Potential: The Promising Journey of Lithium-Ion Batteries

  • Pooya Parvizi,
  • Milad Jalilian,
  • Alireza Mohammadi Amidi,
  • Mohammad Reza Zangeneh and
  • Jordi-Roger Riba

7 February 2025

Lithium-ion batteries (LIBs) have become integral to modern technology, powering portable electronics, electric vehicles, and renewable energy storage systems. This document explores the complexities and advancements in LIB technology, highlighting t...

(This article belongs to the Section C: Chemistry)
  • Article
  • Open Access
2 Citations
2,824 Views
13 Pages

7 February 2025

The deep learning object detection algorithm has been widely applied in the field of synthetic aperture radar (SAR). By utilizing deep convolutional neural networks (CNNs) and other techniques, these algorithms can effectively identify and locate tar...

(This article belongs to the Section E: Engineering and Technology)
  • Article
  • Open Access
2 Citations
1,978 Views
13 Pages

Integrated Device for Cancer Nucleic Acid Biomarker Detection at Body Temperature

  • Chang Chen,
  • Bin Wu,
  • Xuesong Li,
  • Yuhang Jin and ,
  • Hangyu Zhang,
  • Bo Liu,
  • Zhengyao Zhang and
  • Na Li
  • + 3 authors+ 0 author

7 February 2025

The quantitative analysis of nucleic acid markers is extensively utilized in cancer detection. However, it faces significant challenges, such as the need for specialized detection devices and the inherent complexity of testing procedures. To address...

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Micromachines - ISSN 2072-666X