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Micromachines
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Piezoelectric Devices and System in Micromachines
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Piezoelectric Devices and System in Micromachines

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".

Deadline for manuscript submissions: 30 June 2025 | Viewed by 7252

Special Issue Editor

Prof. Dr. Kenji Uchino

E-Mail Website
Guest Editor
Emeritus Academy Institute, The Pennsylvania State University, University Park, PA 16802, USA
Interests: piezoelectric actuator; ultrasonic motor; piezo-transformer; high power piezoelectrics; loss mechanism; Pb-free piezoelectrics; piezoelectric composite; multilayer actuator; relaxor piezoelectric single crystal; piezoelectric energy harvesting; piezoelectric driver
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

Application fields of piezoelectric actuators are classified into three categories: positioners, motors, and vibration suppressors. The manufacturing of optical instruments (such as lasers and cameras) must be precise and the positioning accuracy for fabricating semiconductor chips must be adjusted using solid-state actuators (at an order of 0.1 m). With regards to conventional electromagnetic motors, tiny motors smaller than 1 cm are often required in office or factory automation equipment and are rather difficult to produce with sufficient energy efficiency. Ultrasonic motors (whose efficiency is insensitive to size) are superior in the mini-motor area. Vibration suppression in space structures and military vehicles using piezoelectric actuators is also a promising technology.

The so-called “Micromachine Competition” was organized worldwide in the late 1980s by collecting self-propelling machines with the size less than 1cm3; however, this competition was terminated due to the economic recession in the 1990s. This Special Issue, “Piezoelectric Devices and Systems in Micromachines”, will collect articles on the recent developments of piezoelectric and related actuators in terms of new actuator materials, device designs, and drive/control techniques, aiming at self-propelling micromachines with a size of less than 1 cm3. Part of the developments of self-propelling micromachines can be accepted, as long as the content is related to our target.

Prof. Dr. Kenji Uchino
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2100 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • self-propelling micromachine
  • piezoelectric actuator
  • piezoelectric motor
  • MEMS
  • micro ultrasonic motor
  • drive/control technique

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Published Papers (5 papers)

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Research

13 pages, 6068 KiB  
Article
Fabrication and Characterization of a Flexible Polyurethane-Based Triboelectric Nanogenerator for a Harvesting Energy System
by Saba Ejaz, Imran Shah, Shahid Aziz, Gul Hassan, Ahmed Shuja, Muhammad Asif Khan and Dong-Won Jung
Micromachines 2025, 16(2), 230; https://doi.org/10.3390/mi16020230 - 17 Feb 2025
Viewed by 849
Abstract
Powering wearable and portable devices, triboelectric nanogenerators (TENGs) are a considerably promising technology. Low-cost production, ease of fabrication, optimal efficiency, and high output performance are always key concerns in developing energy harvesting technologies. Optimum efficiency and high output are always key concerns. This [...] Read more.
Powering wearable and portable devices, triboelectric nanogenerators (TENGs) are a considerably promising technology. Low-cost production, ease of fabrication, optimal efficiency, and high output performance are always key concerns in developing energy harvesting technologies. Optimum efficiency and high output are always key concerns. This research addresses the ongoing challenge of raising efficient, flexible, and lightweight energy harvesting systems for recent wearable technologies. In this research, a triboelectric nanogenerator is proposed for harvesting the triboelectric effect. Using polyurethane (PU), a bendable TENG that is in the vertical contact separation mode was developed. UV-curable PU forms the basis of TENGs. A sponge, repurposed from landfill waste, acts by means of a spacer to maintain a consistent air gap between the tribo-layers for enhanced triboelectrification. The triboelectric nanogenerators formed a Voc approaching 500 V and a current of ~2 µA and also showed high performance with a power density of 8.53 W/m2. In addition, the triboelectric nanogenerator can light LEDs and charge capacitors, making it a self-powered energy source for portable devices, Wi-Fi, and monitoring systems. The proposed TENG provides a capable solution for sustainable, self-powered wearable electronics and has the potential for further development in energy-efficient and eco-friendly applications. Full article
(This article belongs to the Special Issue Piezoelectric Devices and System in Micromachines)
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19 pages, 2058 KiB  
Article
A Compact Device Model for a Piezoelectric Nano-Transistor
by L. Neil McCartney, Louise E. Crocker, Louise Wright and Ivan Rungger
Micromachines 2025, 16(2), 114; https://doi.org/10.3390/mi16020114 - 21 Jan 2025
Viewed by 641
Abstract
An approximate compact model was developed to provide a convenient method of exploring the initial design space when investigating the performance of micro-electronic devices such as nano-scaled piezoelectronic transistors, where fast ball-park estimates can be very helpful. First of all, the compact model [...] Read more.
An approximate compact model was developed to provide a convenient method of exploring the initial design space when investigating the performance of micro-electronic devices such as nano-scaled piezoelectronic transistors, where fast ball-park estimates can be very helpful. First of all, the compact model was verified by comparing its predictions with those of accurate axi-symmetric finite element analysis (FEA) using special boundary and interface conditions that enable the replication of the analytical model behaviour. Verification is achieved for a radio frequency (RF) switch and a smaller very-large-scale integrated (VLSI) device, where percentage differences between the compact and FEA model predictions are of the order 10−4 for the RF switch and 10−5 for the VLSI device. This confirms the consistency of complex property data (especially electro-thermo-elastic constants) and geometrical parameter input to both types of models and convincingly demonstrates that the analytical models and FEA for the two devices have been implemented correctly. A second type of boundary and interface condition is also used that is designed to replicate the actual behaviour of the devices in practice. The boundary and interface constraints applied for the verification procedure are relaxed so that there is perfect interface bonding between layers. For this unconstrained case, the resulting deformation is very complex, involving both bending effects and edge effects arising from property mismatches between neighbouring layers. The results for the RF switch show surprisingly good agreement between the predictions of the analytical and FEA results, provided the thickness of the piezoelectric layer is not too thick, implying that the analytical model should help to reduce the parameter design space for such devices. However, for the VLSI device, our results indicate that the compact model leads to much larger errors. For such systems, the compact model is unlikely to be able to reliably reduce the parameter design space, implying that accurate FEA will then need to be used. Full article
(This article belongs to the Special Issue Piezoelectric Devices and System in Micromachines)
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9 pages, 4045 KiB  
Article
A Laterally Excited Bulk Acoustic Wave Resonator Based on LiNbO3 with Arc-Shaped Electrodes
by Jieyu Liu, Wenjuan Liu, Zhiwei Wen, Min Zeng and Chengliang Sun
Micromachines 2024, 15(11), 1367; https://doi.org/10.3390/mi15111367 - 12 Nov 2024
Viewed by 2057
Abstract
High frequency and large bandwidth are growing trends in communication radio-frequency devices. The LiNbO3 thin film material is expected to become the preferred piezoelectric material for high coupling resonators in the 5G frequency band due to its ultra-high piezoelectric coefficient and low [...] Read more.
High frequency and large bandwidth are growing trends in communication radio-frequency devices. The LiNbO3 thin film material is expected to become the preferred piezoelectric material for high coupling resonators in the 5G frequency band due to its ultra-high piezoelectric coefficient and low loss characteristics. The main mode of laterally excited bulk acoustic wave resonators (XBAR) have an ultra-high sound velocity, which enables high-frequency applications. However, the interference of spurious modes is one of the main reasons hindering the widespread application of XBAR. In this paper, a Z-cut LiNbO3 thin film-based XBAR with arc-shaped electrodes is presented. We investigate the electric field distribution of the XBAR, while the irregular boundary of the arc-shaped electrodes affects the electric field between the existing interdigital transducers (IDTs). The mode shapes and impedance response of the XBAR with arc-shaped electrodes and the XBARs with traditional IDTs are compared in this work. The fabricated XBAR on a 350 nm Z-cut LiNbO3 thin film with arc-shaped electrodes operating at over 5 GHz achieves a high effective electromechanical coupling coefficient of 29.8% and the spurious modes are well suppressed. This work promotes an XBAR with an optimized electrode design to further achieve the desired performance. Full article
(This article belongs to the Special Issue Piezoelectric Devices and System in Micromachines)
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12 pages, 1966 KiB  
Article
Application of a Modified First-Order Plate Theory to Structural Analysis of Sensitive Elements in a Pyroelectric Detector
by Mengmeng Lian, Cuiying Fan, Xiaohan Zhan, Minghao Zhao, Guoshuai Qin and Chunsheng Lu
Micromachines 2024, 15(8), 1012; https://doi.org/10.3390/mi15081012 - 6 Aug 2024
Viewed by 1004
Abstract
Pyroelectric materials, with piezoelectricity and pyroelectricity, have been widely used in infrared thermal detectors. In this paper, a modified first-order plate theory is extended to analyze a pyroelectric sensitive element structure. The displacement, temperature, and electric potential expand along the thickness direction. The [...] Read more.
Pyroelectric materials, with piezoelectricity and pyroelectricity, have been widely used in infrared thermal detectors. In this paper, a modified first-order plate theory is extended to analyze a pyroelectric sensitive element structure. The displacement, temperature, and electric potential expand along the thickness direction. The governing equation of the pyroelectric plate is built up. The potential distributions with upper and lower electrodes are obtained under different supported boundary conditions. The corresponding numerical results of electric potential are consistent with those obtained by the three-dimensional finite element method. Meanwhile, the theoretical results of electric potential are close to that of experiments. The influence of supported boundary conditions, piezoelectric effect, and plate thickness are analyzed. Numerical results show that the piezoelectric effect reduces the electric potential. The thickness of the pyroelectric plate enhances the electric potential but reduces the response speed of the detector. It is anticipated that the pyroelectric plate theory can provide a theoretical approach for the structural design of pyroelectric sensitive elements. Full article
(This article belongs to the Special Issue Piezoelectric Devices and System in Micromachines)
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26 pages, 2503 KiB  
Article
Combined Control for a Piezoelectric Actuator Using a Feed-Forward Neural Network and Feedback Integral Fast Terminal Sliding Mode Control
by Eneko Artetxe, Oscar Barambones, Isidro Calvo, Asier del Rio and Jokin Uralde
Micromachines 2024, 15(6), 757; https://doi.org/10.3390/mi15060757 - 5 Jun 2024
Cited by 4 | Viewed by 1511
Abstract
In recent years, there has been significant interest in incorporating micro-actuators into industrial environments; this interest is driven by advancements in fabrication methods. Piezoelectric actuators (PEAs) have emerged as vital components in various applications that require precise control and manipulation of mechanical systems. [...] Read more.
In recent years, there has been significant interest in incorporating micro-actuators into industrial environments; this interest is driven by advancements in fabrication methods. Piezoelectric actuators (PEAs) have emerged as vital components in various applications that require precise control and manipulation of mechanical systems. These actuators play a crucial role in the micro-positioning systems utilized in nanotechnology, microscopy, and semiconductor manufacturing; they enable extremely fine movements and adjustments and contribute to vibration control systems. More specifically, they are frequently used in precision positioning systems for optical components, mirrors, and lenses, and they enhance the accuracy of laser systems, telescopes, and image stabilization devices. Despite their numerous advantages, PEAs exhibit complex dynamics characterized by phenomena such as hysteresis, which can significantly impact accuracy and performance. The characterization of these non-linearities remains a challenge for PEA modeling. Recurrent artificial neural networks (ANNs) may simplify the modeling of the hysteresis dynamics for feed-forward compensation. To address these challenges, robust control strategies such as integral fast terminal sliding mode control (IFTSMC) have been proposed. Unlike traditional fast terminal sliding mode control methods, IFTSMC includes integral action to minimize steady-state errors, improving the tracking accuracy and disturbance rejection capabilities. However, accurate modeling of the non-linear dynamics of PEAs remains a challenge. In this study, we propose an ANN-based IFTSMC controller to address this issue and to enhance the precision and reliability of PEA positioning systems. We implement and validate the proposed controller in a real-time setup and compare its performance with that of a PID controller. The results obtained from real PEA experiments demonstrate the stability of the novel control structure, as corroborated by the theoretical analysis. Furthermore, experimental validation reveals a notable reduction in error compared to the PID controller. Full article
(This article belongs to the Special Issue Piezoelectric Devices and System in Micromachines)
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