May 2019 - 71 articles
Fast tool servo (FTS) machining technology is a promising method for freeform surfaces and machining micro-nanostructure surfaces. However, limited degrees of freedom (DOF) is an inherent drawback of existing FTS technologies. In this paper, a piezo-...
In this study, UV irradiation was used to improve the response of indium oxide (In2O3) used as a CO sensing material for a resistive sensor operating in a low temperature range, from 25 °C to 150 °C. Different experimental conditions have bee...
High-precision aligned wafer bonding is essential to heterogeneous integration, with the device dimension reduced continuously. To get the alignment more accurately and conveniently, we propose a moiré-based alignment method using centrosymmet...
The continuous trend towards miniaturization and multi-functionality embedded in products and processes calls for an ever-increasing research and innovation effort in the development of micro components and related micro manufacturing technologies [...]
Thermal nanoimprint lithography is playing a vital role in fabricating micro/nanostructures on polymer materials by the advantages of low cost, high throughput, and high resolution. However, a typical thermal nanoimprint process usually takes tens of...
With the aim of designing an action detection method on artificial knee, a new time–frequency feature extraction method was proposed. The inertial data were extracted periodically using the microelectromechanical systems (MEMS) inertial measure...
The super-precise theory for machining single crystal SiC substrates with abrasives needs to be improved for its chemical stability, extremely hard and brittle. A Berkovich indenter was used to carry out a systematic static stiffness indentation expe...
In this paper, a double piezoelectric layer acceleration sensor based on Li-doped ZnO (LZO) thin film is presented. It is constituted by Pt/LZO/Pt/LZO/Pt/Ti functional layers and a Si cantilever beam with a proof mass. The LZO thin films were prepare...
In the published paper [...]
Electric field-based smart wetting manipulation is one of the extensively used techniques in modern surface science and engineering, especially in microfluidics and optofluidics applications. Liquid dielectrophoresis (LDEP) is a technique involving t...
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