Sensors, Volume 25, Issue 17
2025 September-1 - 392 articles
Cover Story: Suspended Microchannel Resonators are versatile tools for measuring mass, density, and viscosity. The piezoelectric transduction of the devices is favoured as it offers on-chip integration, low energy dissipation, and linear response. PZT and AlN are the two most commonly used materials for piezoelectric transduction. While PZT offers higher efficiency, it has the disadvantage of containing lead. Alternatives are hence sought through doping of the AlN. This work investigates the use of Al0.6Sc0.4N thin films for SMR transduction, with selected thicknesses tailored to our sensing application. By integrating the piezoelectric stack into low-stress silicon nitride beam resonators, we investigate the impact of different fabrication and deposition parameters and benchmark the AlScN thin films against their well-established AlN predecessor. View this paper - Issues are regarded as officially published after their release is announced to the table of contents alert mailing list .
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