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Micromachines, Volume 12, Issue 6

2021 June - 142 articles

Cover Story: Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components and exquisite gravimetric sensitivities have significantly advanced bio/chemical sensor technologies in the past two decades. Great effort has been made to tackle the challenges of operating resonant mass sensors in viscous media, and, as such, rapid detection of various trace analytes in gas and liquid phases, such as hazardous chemical vapors, pollutant gases, and biological species, has been achieved, which impacts public security, food safety, environmental monitoring, and human healthcare. View this paper
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Micromachines - ISSN 2072-666X