Recent Advances in MEMS Mirrors
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A1: Optical MEMS and Photonic Microsystems".
Deadline for manuscript submissions: 31 October 2025 | Viewed by 553
Special Issue Editors
2. Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi’an 710072, China
3. Ningbo Institute, Northwestern Polytechnical University, Ningbo 315103, China
Interests: optical mems; micro/nano fabrication; power mems; magnetic polymers; magnetic particles; polymer matrix; manufacture process; 3D printing
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Special Issue Information
Dear Colleagues,
MEMS mirror can manipulate light in chips and is a typical kind of optical MEMS actuators. MEMS mirror has been widely used in modulating the phase, amplitude and direction of light, and has gained tremendous commercial applications in the fields of autonomous driving, laser projection, optical communication and intelligent manufacturing. While achieving mass production applications, MEMS mirrors also face significant challenges. For example, in the application of autonomous driving LiDAR, the evaluation criteria, model and improvement methods for the reliability of MEMS mirrors are not yet comprehensive; In the field of space optical communication, the ability to achieve micro arc level angle measurement and closed-loop control is not yet perfect; In the field of consumer electronics, the complex fabrication process and expensive interface circuits of MEMS mirrors make their cost unable to reach the level of mass use. Therefore, this special issue seeks to showcase research papers, short communications, and review articles that focus on: (1) novel designs, fabrication, control, and modeling of MEMS mirrors Intended to enhance reliability, reduce costs, and improve closed-loop control accuracy; and (2) new applications of MEMS mirrors can be utilized in the fields of aerospace, aviation, industry, agriculture, and consumer electronics.
Dr. Dayong Qiao
Dr. Binbin Wang
Guest Editors
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
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Keywords
- MEMS mirrors: modelling, control, fabrication and other
- MEMS mirror arrays: deformable mirror, digital mirror device, phase light modulator, optical cross connect (OXC) and other
- MEMS mirror applications: optical communications, optical imaging, spectrometers, optical display, laser printing and other
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