Recent Advances in MEMS Mirrors

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A1: Optical MEMS and Photonic Microsystems".

Deadline for manuscript submissions: 31 October 2025 | Viewed by 632

Special Issue Editors


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Guest Editor
1. Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi’an 710072, China
2. Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi’an 710072, China
3. Ningbo Institute, Northwestern Polytechnical University, Ningbo 315103, China
Interests: optical mems; micro/nano fabrication; power mems; magnetic polymers; magnetic particles; polymer matrix; manufacture process; 3D printing
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Guest Editor
Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi’an 710072, China
Interests: optical mems; optical sensing; photonics; micro/nano fabrication

Special Issue Information

Dear Colleagues,

MEMS mirror can manipulate light in chips and is a typical kind of optical MEMS actuators. MEMS mirror has been widely used in modulating the phase, amplitude and direction of light, and has gained tremendous commercial applications in the fields of autonomous driving, laser projection, optical communication and intelligent manufacturing. While achieving mass production applications, MEMS mirrors also face significant challenges. For example, in the application of autonomous driving LiDAR, the evaluation criteria, model  and improvement methods for the reliability of MEMS mirrors are not yet comprehensive; In the field of space optical communication, the ability to achieve micro arc level angle measurement and closed-loop control is not yet perfect; In the field of consumer electronics, the complex fabrication process and expensive interface circuits of MEMS mirrors make their cost unable to reach the level of mass use. Therefore, this special issue seeks to showcase research papers, short communications, and review articles that focus on: (1) novel designs, fabrication, control, and modeling of MEMS mirrors Intended to enhance reliability, reduce costs, and improve closed-loop control accuracy; and (2) new applications of MEMS mirrors can be utilized in the fields of aerospace, aviation, industry, agriculture, and consumer electronics.

Dr. Dayong Qiao
Dr. Binbin Wang
Guest Editors

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Keywords

  • MEMS mirrors: modelling, control, fabrication and other
  • MEMS mirror arrays: deformable mirror, digital mirror device, phase light modulator, optical cross connect (OXC) and other
  • MEMS mirror applications: optical communications, optical imaging, spectrometers, optical display, laser printing and other

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Published Papers (2 papers)

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Research

17 pages, 8907 KiB  
Article
Biaxial Non-Resonant Electromagnetically Driven Scanning Micromirror with Large Aperture
by Tong Wang, Yu Jian, Chen Liu, Manpeng Chang, Xin Wang and Weimin Wang
Micromachines 2025, 16(6), 610; https://doi.org/10.3390/mi16060610 - 23 May 2025
Abstract
To address the challenges of small aperture size, limited scanning angles, and high fabrication costs in existing scanning micromirrors, this paper proposes a large-aperture biaxial electromagnetically driven scanning micromirror. The scanning micromirror utilizes a stainless-steel mirror structure and an actuation structure composed of [...] Read more.
To address the challenges of small aperture size, limited scanning angles, and high fabrication costs in existing scanning micromirrors, this paper proposes a large-aperture biaxial electromagnetically driven scanning micromirror. The scanning micromirror utilizes a stainless-steel mirror structure and an actuation structure composed of arc-shaped permanent magnets (NdFeB 52), iron cores, and copper coils. By optimizing the magnet layout and coil design, it achieves large optical scanning angles in biaxial non-resonant scanning mode. Experimental results demonstrate that the optical scanning angles reach 61.4° (x-axis) under a DC driving current of ±18.1 mA and 61.1° (y-axis) under a DC driving current of ±25.2 mA with an effective mirror aperture of 9.54 mm × 10 mm. The resonant frequencies are 89 Hz (x-axis) and 63 Hz (y-axis). Experimental results verify the feasibility of biaxial independent control in non-resonant scanning mode. The design is fabricated using a low-cost computer numerical control (CNC) milling process and exhibits application potential in fields such as LiDAR, projection display, and optical communication, providing a novel approach for performance optimization of large-aperture scanning micromirrors. Full article
(This article belongs to the Special Issue Recent Advances in MEMS Mirrors)
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13 pages, 5299 KiB  
Article
Modeling and Implementation of Synchronization for Large-Aperture Electromagnetic MEMS Mirrors
by Fahu Xu and Lingxiao Zhao
Micromachines 2025, 16(3), 268; https://doi.org/10.3390/mi16030268 - 26 Feb 2025
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Abstract
MEMS-based LiDAR has showcased extensive application potential in the autonomous driving sector, attributed to its cost-effectiveness, compactness, and seamless integration capabilities. However, MEMS LiDAR suffers from a short detection range, due to the small receiving aperture of the MEMS mirror. Our early study [...] Read more.
MEMS-based LiDAR has showcased extensive application potential in the autonomous driving sector, attributed to its cost-effectiveness, compactness, and seamless integration capabilities. However, MEMS LiDAR suffers from a short detection range, due to the small receiving aperture of the MEMS mirror. Our early study attempted to increase the detection range of MEMS LiDAR with a semi-coaxial design. In this paper, we further investigate the synchronization method for large-aperture electromagnetic MEMS mirrors, in which a synchronous motion transfer model of electromagnetic MEMS mirrors is constructed. The results of the simulations and experiments demonstrate that two electromagnetic MEMS mirrors are synchronous with an aperture of 60 π mm2, FoV of 60°, and scanning frequency of 220 Hz. The entire synchronization process of the electromagnetic MEMS mirrors is completed within 10 s, which verifies the feasibility of synchronizing large-aperture electromagnetic MEMS mirrors to increase the detection range of MEMS LiDAR. Full article
(This article belongs to the Special Issue Recent Advances in MEMS Mirrors)
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