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Cantilever Sensors for Industrial Applications

This special issue belongs to the section "Chemical Sensors".

Special Issue Information

Keywords

  • MEMS/NEMS
  • Micro-/nanomachining
  • Semiconductor cantilevers
  • Polymer cantilevers
  • Piezoelectric cantilevers
  • Self-exciting cantilevers
  • Self-sensing cantilevers
  • 3D vertical cantilevers
  • Cantilever arrays
  • Contact resonance spectroscopy
  • Environmental sensors
  • Biochemical/medical sensors
  • Scanning probe microscopy
  • Tactile surface metrology

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Published Papers

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Sensors - ISSN 1424-8220