Advances in MEMS Based Gas Sensors

Dear Colleagues,

Micro-Electro-Mechanical Systems (MEMS) gas sensors have become essential sensing components in environmental monitoring, medical diagnostics, industrial safety, and new energy applications, owing to their distinct advantages in miniaturization, low power consumption, and compatibility with batch fabrication. In recent years, significant advances have been made in sensitivity, selectivity, stability, and intelligence, driven by the emergence of novel sensing materials, progress in micro/nanofabrication technologies, and the deep integration of artificial intelligence and wireless communications. This Special Issue aims to present a comprehensive overview of the latest developments in the field, with a focus on the full research chain—from novel sensing materials and heterogeneous integration to microstructure design, packaging reliability, system integration, and application validation. We cordially invite researchers to contribute original research articles and review papers that explore cutting-edge theoretical, technological, and application-oriented advancements in MEMS gas sensors, thereby facilitating their large-scale deployment and industrial adoption across diverse scenarios.

Topics of include, but are not limited to, the following:

1. Novel sensing materials and sensing mechanisms;
2. MEMS heterogeneous integration technologies;
3. Resonant MEMS gas sensors;
4. MEMS sensor arrays and intelligent electronic noses;
5. Self-powered and wireless passive gas sensing microsystems;
6. Wafer-level packaging and reliability enhancement;
7. CMOS-MEMS monolithic integration and smart sensing;
8. Application validation for emerging scenarios;
9. AI-assisted design and intelligent compensation algorithms;
10. Flexible/wearable MEMS gas sensors.

Dr. Ying Chen
Dr. Ming Li
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the Special Issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 250 words) can be sent to the Editorial Office for assessment.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-anonymized peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Sensors is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.