Micromachines, Volume 14, Issue 4
2023 April - 190 articles
Cover Story: Micromachined deformable mirrors are often assembled using adhesives to bond actuators to a compliant face sheet. A new approach to minimizing stresses induced by adhesive assembly involves moving the adhesive joints to the ends of slender posts that extend integrally from the face sheet. These graphics depict a mirror face sheet made using silicon-on-insulator wafers and deep reactive ion etching. The “Overview” graphic shows the 12 mm diameter, 10 µm thick face sheet as fabricated with 37 integral slender posts. Three graphics are scanning electron micrographs of a portion of the posts, face sheet, and rigid silicon frame. Two graphics are scanning electron micrographs of a single post integrally fabricated with the face sheet membrane and our design versions. View this paper
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Micromachines - ISSN 2072-666X