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Micromachines, Volume 14, Issue 11
November 2023 - 158 articles
Cover Story: As sensing technology has numerous applications, various materials and patterning methods are used for sensor fabrication. This affects the characteristics and performance of sensors, and research centered specifically on these patterns is necessary for the high integration and high performance of these devices. In this paper, the authors review the patterning techniques used in recently reported sensors, specifically the most widely used capacitive sensors, and their impact on sensor performance. Methods for increasing sensor performance through three-dimensional (3D) structures are also introduced. View this paper
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Micromachines - ISSN 2072-666X