2017 October - 28 articles
A maskless lithography method to realize the rapid and cost-effective fabrication of micro-optics elements with arbitrary surface profiles is reported. A digital micro-mirror device (DMD) is applied to flexibly modulate that the exposure dose accordi...
This paper reports the design and fabrication of capacitive silicon nanomechanical resonators with the selective vibration of a high-order mode. Fixed-fixed beam capacitive silicon resonators have been successfully produced by the use of electron bea...
We deposited transparent ferroelectric lead zirconate titanate thin films on fused silica and contacted them via Al-doped zinc oxide (AZO) transparent electrodes with an interdigitated electrode (IDE) design. These layers, together with a TiO2 buffer...
Fully implantable, self-powered hearing aids with no external unit could significantly increase the life quality of patients suffering severe hearing loss. This highly demanding concept, however, requires a strongly miniaturized device which is fully...
We present a study of the application of a single-step and solvent-free laser-based strategy to control the formation of polymer-derived fluorescent carbon nanodomains embedded in poly-dimethylsiloxane (PDMS) microchannels. A low-power, laser-induced...
In this work, a novel method is put forward to quantitatively simulate the subsurface damages microstructural alteration of titanium alloy components subjected to microscale cutting. A trans-scale numerical framework is conducted with the purpose of...
A novel fully decoupled micro inertial measurement unit (MIMU) is presented in this paper. The proposed MIMU structure, mostly focusing on the gyroscope unit, is highly symmetrical and can be limited to an area of 10,000 μm × 10,000 μm. Both the tri-...
Resonant biosensors are known for their high accuracy and high level of miniaturization. However, their fabrication costs prevent them from being used as disposable sensors and their effective commercial success will depend on their ability to be reu...
The poor machinability of Ti-6Al-4V alloy makes it hard to process by conventional processing methods even though it has been widely used in military and civilian enterprise fields. Non-resonant three-dimensional elliptical vibration cutting (3D-EVC)...
In the published paper [1], there is an error in Figure 8. The labels in Figure 8 was incorrect, it should be corrected as follows [...]
A novel three-dimensional (3D) elliptical vibration turning device which is on the basis of the leaf-spring-flexure-hinges-based (LSFH-based) double parallel four-bar linkages (DPFLMs) has been proposed. In order to evaluate the performance of the de...
In this paper, a beam-membrane (BM) sensor for measuring friction torque in micro-electro-mechanical system (MEMS) gas bearings is presented. The proposed sensor measures the force-arm-transformed force using a detecting probe and the piezoresistive...
Recently, many studies have investigated the friction, wear, and temperature characteristics of the interface between two relative movements. Such analyses often set the coefficient of friction as a fixed value and are analyzed in cases of two-body c...
An aluminum nitride (AlN) based patch antenna-type high-temperature wireless passive sensor is reported to operate as both a sensor and an antenna, which integrates in situ measurement/sensing with remote wireless communication at the same time. The...
Blood vessels may be found throughout the entire body and their importance to human life is undeniable. This is evident in the fact that a malfunctioning blood vessel can result in mild symptoms such as shortness of breath or chest pain to more sever...
Laser-induced-plasma-assisted ablation (LIPAA) is a promising micro-machining method that can fabricate microstructure on hard and transparent double-polished single crystal sapphire (SCS). While ablating, a nanosecond pulse 1064 nm wavelength laser...
Micro- and nano-scale manufacturing has been the subject of an increasing amount of interest and research effort worldwide in both academia and industry over the past 10 years.[...]
The spurring growth and clinical adoption of nanomaterials and nanotechnology in medicine, i.e. “nanomedicine”, to shape global health care system is a collective effort that comprises academia research, industrial drive, and political and financial...
We propose a microrobotic platform for single motile microorganism observation and investigation. The platform utilizes a high-speed online vision sensor to realize real-time observation of a microorganism under a microscopic environment with a relat...
We have used spectral two-layer interferometry (STLI) imaging for estimation of the stress distribution profiles (SDPs) in thin film substrates, enabling fast and reliable all-optical methodology for the evaluation of pre-stress topography profiles i...
In this paper, we present two design methods to improve the performance of disk resonator gyroscope (DRG), including decreasing the frequency split and increasing the quality factor (Q). The structure parameters, which can affect the frequency split...
There are a growing number of small children—as well as adults—with mental disabilities (including elderly citizens with Alzheimer’s disease or other forms of age-related dementia) that are getting lost in rural and urban areas for various reasons. E...
We have developed a micro-electro-mechanical systems (MEMS) electrostatic vibratory power generator with over 100
Manipulation of micro and nano particles in microfluidic devices with high resolution is a challenge especially in bioengineering applications where bio-particles (BPs) are separated or patterned. While acoustic forces have been used to control the p...
Calcium phosphate nanoparticles (CPNPs) encapsulating small organic molecules, such as imaging agents and drugs, are considered to be ideal devices for cancer diagnosis or therapy. However, it is generally difficult to encapsulate small organic molec...
Micro-electro-mechanical system (MEMS) mirrors are widely used for optical modulation, attenuation, steering, switching and tracking. In most cases, MEMS mirrors are packaged in air, resulting in overshoot and ringing upon actuation. In this paper, a...
We present an electromagnetic linear vibration energy harvester with an array of rectangular permanent magnets as a springless proof mass. Instead of supporting the magnet assembly with spring element, ferrofluid has been used as a lubricating materi...
We provide a facile and low-cost method (F-L) to fabricate a two-dimensional positive master using a milling technique for polydimethylsiloxane (PDMS)-based microchannel molding. This method comprises the following steps: (1) a positive microscale ma...
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