October 2017 - 28 articles
A maskless lithography method to realize the rapid and cost-effective fabrication of micro-optics elements with arbitrary surface profiles is reported. A digital micro-mirror device (DMD) is applied to flexibly modulate that the exposure dose accordi...
This paper reports the design and fabrication of capacitive silicon nanomechanical resonators with the selective vibration of a high-order mode. Fixed-fixed beam capacitive silicon resonators have been successfully produced by the use of electron bea...
We deposited transparent ferroelectric lead zirconate titanate thin films on fused silica and contacted them via Al-doped zinc oxide (AZO) transparent electrodes with an interdigitated electrode (IDE) design. These layers, together with a TiO2 buffer...
Fully implantable, self-powered hearing aids with no external unit could significantly increase the life quality of patients suffering severe hearing loss. This highly demanding concept, however, requires a strongly miniaturized device which is fully...
We present a study of the application of a single-step and solvent-free laser-based strategy to control the formation of polymer-derived fluorescent carbon nanodomains embedded in poly-dimethylsiloxane (PDMS) microchannels. A low-power, laser-induced...
In this work, a novel method is put forward to quantitatively simulate the subsurface damages microstructural alteration of titanium alloy components subjected to microscale cutting. A trans-scale numerical framework is conducted with the purpose of...
A novel fully decoupled micro inertial measurement unit (MIMU) is presented in this paper. The proposed MIMU structure, mostly focusing on the gyroscope unit, is highly symmetrical and can be limited to an area of 10,000 μm × 10,000 μm. Both the tri-...
Resonant biosensors are known for their high accuracy and high level of miniaturization. However, their fabrication costs prevent them from being used as disposable sensors and their effective commercial success will depend on their ability to be reu...
The poor machinability of Ti-6Al-4V alloy makes it hard to process by conventional processing methods even though it has been widely used in military and civilian enterprise fields. Non-resonant three-dimensional elliptical vibration cutting (3D-EVC)...
In the published paper [1], there is an error in Figure 8. The labels in Figure 8 was incorrect, it should be corrected as follows [...]
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